11/28/2011	8:21:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	8:21:34 AM	Recipe started at 8:21 AM
11/28/2011	8:21:34 AM	Helium valve closed
11/28/2011	8:21:34 AM	H2 valve closed
11/28/2011	8:21:34 AM	BCl3 valve closed
11/28/2011	8:21:34 AM	PH3 valve closed
11/28/2011	8:21:34 AM	SiCl4 pre valve closed
11/28/2011	8:21:34 AM	SiCl4 post valve closed
11/28/2011	8:21:34 AM	Main Vac valve closed
11/28/2011	8:21:34 AM	Bypass valve closed
11/28/2011	8:21:34 AM	Bubbler valve closed
11/28/2011	8:21:34 AM	Helium MFC set to  0.000000
11/28/2011	8:21:34 AM	H2 MFC set to  0.000000
11/28/2011	8:21:34 AM	BCl3 MFC set to  0.000000
11/28/2011	8:21:34 AM	PHl3 MFC set to  0.000000
11/28/2011	8:21:34 AM	SiCl4 MFC set to  0.000000
11/28/2011	8:21:34 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:21:34 AM	Tube furnace set to 0
11/28/2011	8:21:37 AM	H2 valve closed
11/28/2011	8:21:37 AM	BCl3 valve closed
11/28/2011	8:21:37 AM	PH3 valve closed
11/28/2011	8:21:37 AM	SiCl4 pre valve closed
11/28/2011	8:21:37 AM	SiCl4 post valve closed
11/28/2011	8:21:37 AM	Main Vac valve closed
11/28/2011	8:21:37 AM	Bypass valve closed
11/28/2011	8:21:37 AM	Bubbler valve closed
11/28/2011	8:21:37 AM	Helium valve opened
11/28/2011	8:21:37 AM	Helium MFC set to  500.000000
11/28/2011	8:21:37 AM	H2 MFC set to  0.000000
11/28/2011	8:21:37 AM	BCl3 MFC set to  0.000000
11/28/2011	8:21:37 AM	PHl3 MFC set to  0.000000
11/28/2011	8:21:37 AM	SiCl4 MFC set to  0.000000
11/28/2011	8:21:37 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:21:37 AM	Tube furnace set to 0
11/28/2011	8:22:42 AM	Helium valve closed
11/28/2011	8:22:42 AM	H2 valve closed
11/28/2011	8:22:42 AM	BCl3 valve closed
11/28/2011	8:22:42 AM	PH3 valve closed
11/28/2011	8:22:42 AM	SiCl4 pre valve closed
11/28/2011	8:22:42 AM	SiCl4 post valve closed
11/28/2011	8:22:42 AM	Main Vac valve closed
11/28/2011	8:22:42 AM	Bypass valve closed
11/28/2011	8:22:42 AM	Bubbler valve closed
11/28/2011	8:22:42 AM	Helium MFC set to  0.000000
11/28/2011	8:22:42 AM	H2 MFC set to  0.000000
11/28/2011	8:22:42 AM	BCl3 MFC set to  0.000000
11/28/2011	8:22:42 AM	PHl3 MFC set to  0.000000
11/28/2011	8:22:42 AM	SiCl4 MFC set to  0.000000
11/28/2011	8:22:42 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:22:43 AM	Tube furnace set to 0
11/28/2011	8:22:44 AM	Run finished at 8:22 AM
11/28/2011	8:22:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	8:33:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	8:33:04 AM	Recipe started at 8:33 AM
11/28/2011	8:33:04 AM	Helium valve closed
11/28/2011	8:33:04 AM	H2 valve closed
11/28/2011	8:33:04 AM	BCl3 valve closed
11/28/2011	8:33:04 AM	PH3 valve closed
11/28/2011	8:33:04 AM	SiCl4 pre valve closed
11/28/2011	8:33:04 AM	SiCl4 post valve closed
11/28/2011	8:33:04 AM	Main Vac valve closed
11/28/2011	8:33:04 AM	Bubbler valve closed
11/28/2011	8:33:04 AM	Bypass valve opened
11/28/2011	8:33:04 AM	Helium MFC set to  0.000000
11/28/2011	8:33:04 AM	H2 MFC set to  0.000000
11/28/2011	8:33:04 AM	BCl3 MFC set to  0.000000
11/28/2011	8:33:04 AM	PHl3 MFC set to  0.000000
11/28/2011	8:33:04 AM	SiCl4 MFC set to  0.000000
11/28/2011	8:33:04 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:33:04 AM	Tube furnace set to 0
11/28/2011	8:34:25 AM	Helium valve closed
11/28/2011	8:34:25 AM	H2 valve closed
11/28/2011	8:34:25 AM	BCl3 valve closed
11/28/2011	8:34:25 AM	PH3 valve closed
11/28/2011	8:34:25 AM	SiCl4 pre valve closed
11/28/2011	8:34:25 AM	SiCl4 post valve closed
11/28/2011	8:34:25 AM	Main Vac valve closed
11/28/2011	8:34:25 AM	Bubbler valve closed
11/28/2011	8:34:25 AM	Bypass valve opened
11/28/2011	8:34:25 AM	Helium MFC set to  0.000000
11/28/2011	8:34:25 AM	H2 MFC set to  0.000000
11/28/2011	8:34:25 AM	BCl3 MFC set to  0.000000
11/28/2011	8:34:25 AM	PHl3 MFC set to  0.000000
11/28/2011	8:34:25 AM	SiCl4 MFC set to  0.000000
11/28/2011	8:34:25 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:34:25 AM	Tube furnace set to 0
11/28/2011	8:35:25 AM	Helium valve closed
11/28/2011	8:35:25 AM	H2 valve closed
11/28/2011	8:35:25 AM	BCl3 valve closed
11/28/2011	8:35:25 AM	PH3 valve closed
11/28/2011	8:35:25 AM	SiCl4 pre valve closed
11/28/2011	8:35:25 AM	SiCl4 post valve closed
11/28/2011	8:35:25 AM	Bypass valve closed
11/28/2011	8:35:25 AM	Bubbler valve closed
11/28/2011	8:35:25 AM	Main Vac valve opened
11/28/2011	8:35:25 AM	Helium MFC set to  0.000000
11/28/2011	8:35:25 AM	H2 MFC set to  0.000000
11/28/2011	8:35:25 AM	BCl3 MFC set to  0.000000
11/28/2011	8:35:25 AM	PHl3 MFC set to  0.000000
11/28/2011	8:35:25 AM	SiCl4 MFC set to  0.000000
11/28/2011	8:35:25 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:35:25 AM	Tube furnace set to 0
11/28/2011	8:35:26 AM	Run finished at 8:35 AM
11/28/2011	8:35:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	8:37:19 AM	Tube furnace set to 150
11/28/2011	10:00:11 AM	Recipe started at 10:00 AM
11/28/2011	10:00:11 AM	Helium valve closed
11/28/2011	10:00:11 AM	H2 valve closed
11/28/2011	10:00:11 AM	BCl3 valve closed
11/28/2011	10:00:11 AM	PH3 valve closed
11/28/2011	10:00:11 AM	SiCl4 pre valve closed
11/28/2011	10:00:11 AM	SiCl4 post valve closed
11/28/2011	10:00:11 AM	Bypass valve closed
11/28/2011	10:00:11 AM	Bubbler valve closed
11/28/2011	10:00:11 AM	Main Vac valve opened
11/28/2011	10:00:11 AM	Helium MFC set to  0.000000
11/28/2011	10:00:11 AM	H2 MFC set to  0.000000
11/28/2011	10:00:11 AM	BCl3 MFC set to  0.000000
11/28/2011	10:00:11 AM	PHl3 MFC set to  0.000000
11/28/2011	10:00:11 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:00:11 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:00:11 AM	Tube furnace set to 150
11/28/2011	10:00:41 AM	H2 valve closed
11/28/2011	10:00:41 AM	BCl3 valve closed
11/28/2011	10:00:41 AM	PH3 valve closed
11/28/2011	10:00:41 AM	SiCl4 pre valve closed
11/28/2011	10:00:41 AM	SiCl4 post valve closed
11/28/2011	10:00:41 AM	Bypass valve closed
11/28/2011	10:00:41 AM	Bubbler valve closed
11/28/2011	10:00:41 AM	Helium valve opened
11/28/2011	10:00:41 AM	Main Vac valve opened
11/28/2011	10:00:41 AM	Helium MFC set to  20.000000
11/28/2011	10:00:41 AM	H2 MFC set to  0.000000
11/28/2011	10:00:41 AM	BCl3 MFC set to  0.000000
11/28/2011	10:00:41 AM	PHl3 MFC set to  0.000000
11/28/2011	10:00:41 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:00:41 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:00:41 AM	Tube furnace set to 150
11/28/2011	10:01:11 AM	Helium valve closed
11/28/2011	10:01:11 AM	H2 valve closed
11/28/2011	10:01:11 AM	BCl3 valve closed
11/28/2011	10:01:11 AM	PH3 valve closed
11/28/2011	10:01:11 AM	SiCl4 pre valve closed
11/28/2011	10:01:11 AM	SiCl4 post valve closed
11/28/2011	10:01:11 AM	Bypass valve closed
11/28/2011	10:01:11 AM	Bubbler valve closed
11/28/2011	10:01:11 AM	Main Vac valve opened
11/28/2011	10:01:11 AM	Helium MFC set to  0.000000
11/28/2011	10:01:11 AM	H2 MFC set to  0.000000
11/28/2011	10:01:11 AM	BCl3 MFC set to  0.000000
11/28/2011	10:01:12 AM	PHl3 MFC set to  0.000000
11/28/2011	10:01:12 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:01:12 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:01:12 AM	Tube furnace set to 150
11/28/2011	10:01:42 AM	H2 valve closed
11/28/2011	10:01:42 AM	BCl3 valve closed
11/28/2011	10:01:42 AM	PH3 valve closed
11/28/2011	10:01:42 AM	SiCl4 pre valve closed
11/28/2011	10:01:42 AM	SiCl4 post valve closed
11/28/2011	10:01:42 AM	Bypass valve closed
11/28/2011	10:01:42 AM	Bubbler valve closed
11/28/2011	10:01:42 AM	Helium valve opened
11/28/2011	10:01:42 AM	Main Vac valve opened
11/28/2011	10:01:42 AM	Helium MFC set to  20.000000
11/28/2011	10:01:42 AM	H2 MFC set to  0.000000
11/28/2011	10:01:42 AM	BCl3 MFC set to  0.000000
11/28/2011	10:01:42 AM	PHl3 MFC set to  0.000000
11/28/2011	10:01:42 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:01:42 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:01:42 AM	Tube furnace set to 150
11/28/2011	10:02:12 AM	Helium valve closed
11/28/2011	10:02:12 AM	H2 valve closed
11/28/2011	10:02:12 AM	BCl3 valve closed
11/28/2011	10:02:12 AM	PH3 valve closed
11/28/2011	10:02:12 AM	SiCl4 pre valve closed
11/28/2011	10:02:12 AM	SiCl4 post valve closed
11/28/2011	10:02:12 AM	Bypass valve closed
11/28/2011	10:02:12 AM	Bubbler valve closed
11/28/2011	10:02:12 AM	Main Vac valve opened
11/28/2011	10:02:12 AM	Helium MFC set to  0.000000
11/28/2011	10:02:12 AM	H2 MFC set to  0.000000
11/28/2011	10:02:12 AM	BCl3 MFC set to  0.000000
11/28/2011	10:02:12 AM	PHl3 MFC set to  0.000000
11/28/2011	10:02:12 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:02:12 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:02:12 AM	Tube furnace set to 150
11/28/2011	10:02:42 AM	H2 valve closed
11/28/2011	10:02:42 AM	BCl3 valve closed
11/28/2011	10:02:42 AM	PH3 valve closed
11/28/2011	10:02:42 AM	SiCl4 pre valve closed
11/28/2011	10:02:42 AM	SiCl4 post valve closed
11/28/2011	10:02:42 AM	Bypass valve closed
11/28/2011	10:02:42 AM	Bubbler valve closed
11/28/2011	10:02:42 AM	Helium valve opened
11/28/2011	10:02:42 AM	Main Vac valve opened
11/28/2011	10:02:42 AM	Helium MFC set to  20.000000
11/28/2011	10:02:42 AM	H2 MFC set to  0.000000
11/28/2011	10:02:42 AM	BCl3 MFC set to  0.000000
11/28/2011	10:02:42 AM	PHl3 MFC set to  0.000000
11/28/2011	10:02:42 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:02:42 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:02:42 AM	Tube furnace set to 150
11/28/2011	10:03:12 AM	Helium valve closed
11/28/2011	10:03:12 AM	H2 valve closed
11/28/2011	10:03:12 AM	BCl3 valve closed
11/28/2011	10:03:12 AM	PH3 valve closed
11/28/2011	10:03:12 AM	SiCl4 pre valve closed
11/28/2011	10:03:12 AM	SiCl4 post valve closed
11/28/2011	10:03:12 AM	Bypass valve closed
11/28/2011	10:03:12 AM	Bubbler valve closed
11/28/2011	10:03:12 AM	Main Vac valve opened
11/28/2011	10:03:12 AM	Helium MFC set to  0.000000
11/28/2011	10:03:12 AM	H2 MFC set to  0.000000
11/28/2011	10:03:12 AM	BCl3 MFC set to  0.000000
11/28/2011	10:03:12 AM	PHl3 MFC set to  0.000000
11/28/2011	10:03:12 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:03:12 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:03:12 AM	Tube furnace set to 150
11/28/2011	10:03:42 AM	H2 valve closed
11/28/2011	10:03:42 AM	BCl3 valve closed
11/28/2011	10:03:43 AM	PH3 valve closed
11/28/2011	10:03:43 AM	SiCl4 pre valve closed
11/28/2011	10:03:43 AM	SiCl4 post valve closed
11/28/2011	10:03:43 AM	Bypass valve closed
11/28/2011	10:03:43 AM	Bubbler valve closed
11/28/2011	10:03:43 AM	Helium valve opened
11/28/2011	10:03:43 AM	Main Vac valve opened
11/28/2011	10:03:43 AM	Helium MFC set to  20.000000
11/28/2011	10:03:43 AM	H2 MFC set to  0.000000
11/28/2011	10:03:43 AM	BCl3 MFC set to  0.000000
11/28/2011	10:03:43 AM	PHl3 MFC set to  0.000000
11/28/2011	10:03:43 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:03:43 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:03:43 AM	Tube furnace set to 150
11/28/2011	10:04:13 AM	Helium valve closed
11/28/2011	10:04:13 AM	H2 valve closed
11/28/2011	10:04:13 AM	BCl3 valve closed
11/28/2011	10:04:13 AM	PH3 valve closed
11/28/2011	10:04:13 AM	SiCl4 pre valve closed
11/28/2011	10:04:13 AM	SiCl4 post valve closed
11/28/2011	10:04:13 AM	Bypass valve closed
11/28/2011	10:04:13 AM	Bubbler valve closed
11/28/2011	10:04:13 AM	Main Vac valve opened
11/28/2011	10:04:13 AM	Helium MFC set to  0.000000
11/28/2011	10:04:13 AM	H2 MFC set to  0.000000
11/28/2011	10:04:13 AM	BCl3 MFC set to  0.000000
11/28/2011	10:04:13 AM	PHl3 MFC set to  0.000000
11/28/2011	10:04:13 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:04:13 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:04:13 AM	Tube furnace set to 150
11/28/2011	10:04:43 AM	H2 valve closed
11/28/2011	10:04:43 AM	BCl3 valve closed
11/28/2011	10:04:43 AM	PH3 valve closed
11/28/2011	10:04:43 AM	SiCl4 pre valve closed
11/28/2011	10:04:43 AM	SiCl4 post valve closed
11/28/2011	10:04:43 AM	Bypass valve closed
11/28/2011	10:04:43 AM	Bubbler valve closed
11/28/2011	10:04:43 AM	Helium valve opened
11/28/2011	10:04:43 AM	Main Vac valve opened
11/28/2011	10:04:43 AM	Helium MFC set to  20.000000
11/28/2011	10:04:43 AM	H2 MFC set to  0.000000
11/28/2011	10:04:43 AM	BCl3 MFC set to  0.000000
11/28/2011	10:04:43 AM	PHl3 MFC set to  0.000000
11/28/2011	10:04:43 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:04:43 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:04:43 AM	Tube furnace set to 150
11/28/2011	10:05:13 AM	Helium valve closed
11/28/2011	10:05:13 AM	H2 valve closed
11/28/2011	10:05:13 AM	BCl3 valve closed
11/28/2011	10:05:13 AM	PH3 valve closed
11/28/2011	10:05:13 AM	SiCl4 pre valve closed
11/28/2011	10:05:13 AM	SiCl4 post valve closed
11/28/2011	10:05:13 AM	Bypass valve closed
11/28/2011	10:05:13 AM	Bubbler valve closed
11/28/2011	10:05:13 AM	Main Vac valve opened
11/28/2011	10:05:13 AM	Helium MFC set to  0.000000
11/28/2011	10:05:13 AM	H2 MFC set to  0.000000
11/28/2011	10:05:13 AM	BCl3 MFC set to  0.000000
11/28/2011	10:05:13 AM	PHl3 MFC set to  0.000000
11/28/2011	10:05:13 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:05:13 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:05:13 AM	Tube furnace set to 150
11/28/2011	10:05:43 AM	H2 valve closed
11/28/2011	10:05:43 AM	BCl3 valve closed
11/28/2011	10:05:43 AM	PH3 valve closed
11/28/2011	10:05:43 AM	SiCl4 pre valve closed
11/28/2011	10:05:43 AM	SiCl4 post valve closed
11/28/2011	10:05:43 AM	Bypass valve closed
11/28/2011	10:05:43 AM	Bubbler valve closed
11/28/2011	10:05:43 AM	Helium valve opened
11/28/2011	10:05:43 AM	Main Vac valve opened
11/28/2011	10:05:43 AM	Helium MFC set to  20.000000
11/28/2011	10:05:43 AM	H2 MFC set to  0.000000
11/28/2011	10:05:43 AM	BCl3 MFC set to  0.000000
11/28/2011	10:05:43 AM	PHl3 MFC set to  0.000000
11/28/2011	10:05:43 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:05:43 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:05:43 AM	Tube furnace set to 150
11/28/2011	10:06:14 AM	Helium valve closed
11/28/2011	10:06:14 AM	H2 valve closed
11/28/2011	10:06:14 AM	BCl3 valve closed
11/28/2011	10:06:14 AM	PH3 valve closed
11/28/2011	10:06:14 AM	SiCl4 pre valve closed
11/28/2011	10:06:14 AM	SiCl4 post valve closed
11/28/2011	10:06:14 AM	Bypass valve closed
11/28/2011	10:06:14 AM	Bubbler valve closed
11/28/2011	10:06:14 AM	Main Vac valve opened
11/28/2011	10:06:14 AM	Helium MFC set to  0.000000
11/28/2011	10:06:14 AM	H2 MFC set to  0.000000
11/28/2011	10:06:14 AM	BCl3 MFC set to  0.000000
11/28/2011	10:06:14 AM	PHl3 MFC set to  0.000000
11/28/2011	10:06:14 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:06:14 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:06:14 AM	Tube furnace set to 150
11/28/2011	10:06:44 AM	H2 valve closed
11/28/2011	10:06:44 AM	BCl3 valve closed
11/28/2011	10:06:44 AM	PH3 valve closed
11/28/2011	10:06:44 AM	SiCl4 pre valve closed
11/28/2011	10:06:44 AM	SiCl4 post valve closed
11/28/2011	10:06:44 AM	Bypass valve closed
11/28/2011	10:06:44 AM	Bubbler valve closed
11/28/2011	10:06:44 AM	Helium valve opened
11/28/2011	10:06:44 AM	Main Vac valve opened
11/28/2011	10:06:44 AM	Helium MFC set to  20.000000
11/28/2011	10:06:44 AM	H2 MFC set to  0.000000
11/28/2011	10:06:44 AM	BCl3 MFC set to  0.000000
11/28/2011	10:06:44 AM	PHl3 MFC set to  0.000000
11/28/2011	10:06:44 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:06:44 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:06:44 AM	Tube furnace set to 150
11/28/2011	10:07:14 AM	Helium valve closed
11/28/2011	10:07:14 AM	H2 valve closed
11/28/2011	10:07:14 AM	BCl3 valve closed
11/28/2011	10:07:14 AM	PH3 valve closed
11/28/2011	10:07:14 AM	SiCl4 pre valve closed
11/28/2011	10:07:14 AM	SiCl4 post valve closed
11/28/2011	10:07:14 AM	Bypass valve closed
11/28/2011	10:07:14 AM	Bubbler valve closed
11/28/2011	10:07:14 AM	Main Vac valve opened
11/28/2011	10:07:14 AM	Helium MFC set to  0.000000
11/28/2011	10:07:14 AM	H2 MFC set to  0.000000
11/28/2011	10:07:14 AM	BCl3 MFC set to  0.000000
11/28/2011	10:07:14 AM	PHl3 MFC set to  0.000000
11/28/2011	10:07:14 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:07:14 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:07:14 AM	Tube furnace set to 150
11/28/2011	10:07:44 AM	H2 valve closed
11/28/2011	10:07:44 AM	BCl3 valve closed
11/28/2011	10:07:44 AM	PH3 valve closed
11/28/2011	10:07:44 AM	SiCl4 pre valve closed
11/28/2011	10:07:44 AM	SiCl4 post valve closed
11/28/2011	10:07:44 AM	Bypass valve closed
11/28/2011	10:07:44 AM	Bubbler valve closed
11/28/2011	10:07:44 AM	Helium valve opened
11/28/2011	10:07:44 AM	Main Vac valve opened
11/28/2011	10:07:44 AM	Helium MFC set to  20.000000
11/28/2011	10:07:44 AM	H2 MFC set to  0.000000
11/28/2011	10:07:44 AM	BCl3 MFC set to  0.000000
11/28/2011	10:07:44 AM	PHl3 MFC set to  0.000000
11/28/2011	10:07:44 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:07:44 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:07:44 AM	Tube furnace set to 150
11/28/2011	10:08:14 AM	Helium valve closed
11/28/2011	10:08:14 AM	H2 valve closed
11/28/2011	10:08:14 AM	BCl3 valve closed
11/28/2011	10:08:14 AM	PH3 valve closed
11/28/2011	10:08:14 AM	SiCl4 pre valve closed
11/28/2011	10:08:14 AM	SiCl4 post valve closed
11/28/2011	10:08:14 AM	Bypass valve closed
11/28/2011	10:08:14 AM	Bubbler valve closed
11/28/2011	10:08:14 AM	Main Vac valve opened
11/28/2011	10:08:14 AM	Helium MFC set to  0.000000
11/28/2011	10:08:14 AM	H2 MFC set to  0.000000
11/28/2011	10:08:14 AM	BCl3 MFC set to  0.000000
11/28/2011	10:08:14 AM	PHl3 MFC set to  0.000000
11/28/2011	10:08:14 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:08:14 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:08:15 AM	Tube furnace set to 150
11/28/2011	10:08:45 AM	H2 valve closed
11/28/2011	10:08:45 AM	BCl3 valve closed
11/28/2011	10:08:45 AM	PH3 valve closed
11/28/2011	10:08:45 AM	SiCl4 pre valve closed
11/28/2011	10:08:45 AM	SiCl4 post valve closed
11/28/2011	10:08:45 AM	Bypass valve closed
11/28/2011	10:08:45 AM	Bubbler valve closed
11/28/2011	10:08:45 AM	Helium valve opened
11/28/2011	10:08:45 AM	Main Vac valve opened
11/28/2011	10:08:45 AM	Helium MFC set to  20.000000
11/28/2011	10:08:45 AM	H2 MFC set to  0.000000
11/28/2011	10:08:45 AM	BCl3 MFC set to  0.000000
11/28/2011	10:08:45 AM	PHl3 MFC set to  0.000000
11/28/2011	10:08:45 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:08:45 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:08:45 AM	Tube furnace set to 150
11/28/2011	10:09:15 AM	Helium valve closed
11/28/2011	10:09:15 AM	H2 valve closed
11/28/2011	10:09:15 AM	BCl3 valve closed
11/28/2011	10:09:15 AM	PH3 valve closed
11/28/2011	10:09:15 AM	SiCl4 pre valve closed
11/28/2011	10:09:15 AM	SiCl4 post valve closed
11/28/2011	10:09:15 AM	Bypass valve closed
11/28/2011	10:09:15 AM	Bubbler valve closed
11/28/2011	10:09:15 AM	Main Vac valve opened
11/28/2011	10:09:15 AM	Helium MFC set to  0.000000
11/28/2011	10:09:15 AM	H2 MFC set to  0.000000
11/28/2011	10:09:15 AM	BCl3 MFC set to  0.000000
11/28/2011	10:09:15 AM	PHl3 MFC set to  0.000000
11/28/2011	10:09:15 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:09:15 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:09:15 AM	Tube furnace set to 150
11/28/2011	10:09:45 AM	H2 valve closed
11/28/2011	10:09:45 AM	BCl3 valve closed
11/28/2011	10:09:45 AM	PH3 valve closed
11/28/2011	10:09:45 AM	SiCl4 pre valve closed
11/28/2011	10:09:45 AM	SiCl4 post valve closed
11/28/2011	10:09:45 AM	Bypass valve closed
11/28/2011	10:09:45 AM	Bubbler valve closed
11/28/2011	10:09:45 AM	Helium valve opened
11/28/2011	10:09:45 AM	Main Vac valve opened
11/28/2011	10:09:45 AM	Helium MFC set to  20.000000
11/28/2011	10:09:45 AM	H2 MFC set to  0.000000
11/28/2011	10:09:45 AM	BCl3 MFC set to  0.000000
11/28/2011	10:09:45 AM	PHl3 MFC set to  0.000000
11/28/2011	10:09:45 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:09:45 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:09:45 AM	Tube furnace set to 150
11/28/2011	10:10:15 AM	Helium valve closed
11/28/2011	10:10:15 AM	H2 valve closed
11/28/2011	10:10:15 AM	BCl3 valve closed
11/28/2011	10:10:15 AM	PH3 valve closed
11/28/2011	10:10:15 AM	SiCl4 pre valve closed
11/28/2011	10:10:15 AM	SiCl4 post valve closed
11/28/2011	10:10:15 AM	Bypass valve closed
11/28/2011	10:10:15 AM	Bubbler valve closed
11/28/2011	10:10:15 AM	Main Vac valve opened
11/28/2011	10:10:15 AM	Helium MFC set to  0.000000
11/28/2011	10:10:15 AM	H2 MFC set to  0.000000
11/28/2011	10:10:15 AM	BCl3 MFC set to  0.000000
11/28/2011	10:10:15 AM	PHl3 MFC set to  0.000000
11/28/2011	10:10:15 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:10:15 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:10:15 AM	Tube furnace set to 150
11/28/2011	10:10:16 AM	Run finished at 10:10 AM
11/28/2011	10:12:38 AM	Recipe started at 10:12 AM
11/28/2011	10:12:38 AM	Helium valve closed
11/28/2011	10:12:38 AM	H2 valve closed
11/28/2011	10:12:38 AM	BCl3 valve closed
11/28/2011	10:12:38 AM	PH3 valve closed
11/28/2011	10:12:38 AM	SiCl4 pre valve closed
11/28/2011	10:12:38 AM	SiCl4 post valve closed
11/28/2011	10:12:38 AM	Bypass valve closed
11/28/2011	10:12:38 AM	Bubbler valve closed
11/28/2011	10:12:38 AM	Main Vac valve opened
11/28/2011	10:12:38 AM	Helium MFC set to  0.000000
11/28/2011	10:12:38 AM	H2 MFC set to  0.000000
11/28/2011	10:12:38 AM	BCl3 MFC set to  0.000000
11/28/2011	10:12:38 AM	PHl3 MFC set to  0.000000
11/28/2011	10:12:38 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:12:38 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:12:38 AM	Tube furnace set to 150
11/28/2011	10:13:08 AM	H2 valve closed
11/28/2011	10:13:08 AM	BCl3 valve closed
11/28/2011	10:13:08 AM	PH3 valve closed
11/28/2011	10:13:08 AM	SiCl4 pre valve closed
11/28/2011	10:13:08 AM	SiCl4 post valve closed
11/28/2011	10:13:08 AM	Bypass valve closed
11/28/2011	10:13:08 AM	Bubbler valve closed
11/28/2011	10:13:08 AM	Helium valve opened
11/28/2011	10:13:08 AM	Main Vac valve opened
11/28/2011	10:13:08 AM	Helium MFC set to  20.000000
11/28/2011	10:13:08 AM	H2 MFC set to  0.000000
11/28/2011	10:13:08 AM	BCl3 MFC set to  0.000000
11/28/2011	10:13:08 AM	PHl3 MFC set to  0.000000
11/28/2011	10:13:08 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:13:08 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:13:08 AM	Tube furnace set to 150
11/28/2011	10:13:38 AM	Helium valve closed
11/28/2011	10:13:38 AM	H2 valve closed
11/28/2011	10:13:38 AM	BCl3 valve closed
11/28/2011	10:13:38 AM	PH3 valve closed
11/28/2011	10:13:38 AM	SiCl4 pre valve closed
11/28/2011	10:13:38 AM	SiCl4 post valve closed
11/28/2011	10:13:38 AM	Bypass valve closed
11/28/2011	10:13:38 AM	Bubbler valve closed
11/28/2011	10:13:38 AM	Main Vac valve opened
11/28/2011	10:13:38 AM	Helium MFC set to  0.000000
11/28/2011	10:13:38 AM	H2 MFC set to  0.000000
11/28/2011	10:13:38 AM	BCl3 MFC set to  0.000000
11/28/2011	10:13:38 AM	PHl3 MFC set to  0.000000
11/28/2011	10:13:38 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:13:38 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:13:38 AM	Tube furnace set to 150
11/28/2011	10:14:08 AM	H2 valve closed
11/28/2011	10:14:08 AM	BCl3 valve closed
11/28/2011	10:14:08 AM	PH3 valve closed
11/28/2011	10:14:08 AM	SiCl4 pre valve closed
11/28/2011	10:14:08 AM	SiCl4 post valve closed
11/28/2011	10:14:08 AM	Bypass valve closed
11/28/2011	10:14:08 AM	Bubbler valve closed
11/28/2011	10:14:08 AM	Helium valve opened
11/28/2011	10:14:08 AM	Main Vac valve opened
11/28/2011	10:14:08 AM	Helium MFC set to  20.000000
11/28/2011	10:14:08 AM	H2 MFC set to  0.000000
11/28/2011	10:14:08 AM	BCl3 MFC set to  0.000000
11/28/2011	10:14:08 AM	PHl3 MFC set to  0.000000
11/28/2011	10:14:08 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:14:08 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:14:08 AM	Tube furnace set to 150
11/28/2011	10:14:38 AM	Helium valve closed
11/28/2011	10:14:38 AM	H2 valve closed
11/28/2011	10:14:38 AM	BCl3 valve closed
11/28/2011	10:14:38 AM	PH3 valve closed
11/28/2011	10:14:38 AM	SiCl4 pre valve closed
11/28/2011	10:14:38 AM	SiCl4 post valve closed
11/28/2011	10:14:38 AM	Bypass valve closed
11/28/2011	10:14:38 AM	Bubbler valve closed
11/28/2011	10:14:38 AM	Main Vac valve opened
11/28/2011	10:14:38 AM	Helium MFC set to  0.000000
11/28/2011	10:14:38 AM	H2 MFC set to  0.000000
11/28/2011	10:14:38 AM	BCl3 MFC set to  0.000000
11/28/2011	10:14:38 AM	PHl3 MFC set to  0.000000
11/28/2011	10:14:38 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:14:38 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:14:39 AM	Tube furnace set to 150
11/28/2011	10:15:09 AM	H2 valve closed
11/28/2011	10:15:09 AM	BCl3 valve closed
11/28/2011	10:15:09 AM	PH3 valve closed
11/28/2011	10:15:09 AM	SiCl4 pre valve closed
11/28/2011	10:15:09 AM	SiCl4 post valve closed
11/28/2011	10:15:09 AM	Bypass valve closed
11/28/2011	10:15:09 AM	Bubbler valve closed
11/28/2011	10:15:09 AM	Helium valve opened
11/28/2011	10:15:09 AM	Main Vac valve opened
11/28/2011	10:15:09 AM	Helium MFC set to  20.000000
11/28/2011	10:15:09 AM	H2 MFC set to  0.000000
11/28/2011	10:15:09 AM	BCl3 MFC set to  0.000000
11/28/2011	10:15:09 AM	PHl3 MFC set to  0.000000
11/28/2011	10:15:09 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:15:09 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:15:09 AM	Tube furnace set to 150
11/28/2011	10:15:39 AM	Helium valve closed
11/28/2011	10:15:39 AM	H2 valve closed
11/28/2011	10:15:39 AM	BCl3 valve closed
11/28/2011	10:15:39 AM	PH3 valve closed
11/28/2011	10:15:39 AM	SiCl4 pre valve closed
11/28/2011	10:15:39 AM	SiCl4 post valve closed
11/28/2011	10:15:39 AM	Bypass valve closed
11/28/2011	10:15:39 AM	Bubbler valve closed
11/28/2011	10:15:39 AM	Main Vac valve opened
11/28/2011	10:15:39 AM	Helium MFC set to  0.000000
11/28/2011	10:15:39 AM	H2 MFC set to  0.000000
11/28/2011	10:15:39 AM	BCl3 MFC set to  0.000000
11/28/2011	10:15:39 AM	PHl3 MFC set to  0.000000
11/28/2011	10:15:39 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:15:39 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:15:39 AM	Tube furnace set to 150
11/28/2011	10:16:09 AM	H2 valve closed
11/28/2011	10:16:09 AM	BCl3 valve closed
11/28/2011	10:16:09 AM	PH3 valve closed
11/28/2011	10:16:09 AM	SiCl4 pre valve closed
11/28/2011	10:16:09 AM	SiCl4 post valve closed
11/28/2011	10:16:09 AM	Bypass valve closed
11/28/2011	10:16:09 AM	Bubbler valve closed
11/28/2011	10:16:09 AM	Helium valve opened
11/28/2011	10:16:09 AM	Main Vac valve opened
11/28/2011	10:16:09 AM	Helium MFC set to  20.000000
11/28/2011	10:16:09 AM	H2 MFC set to  0.000000
11/28/2011	10:16:09 AM	BCl3 MFC set to  0.000000
11/28/2011	10:16:09 AM	PHl3 MFC set to  0.000000
11/28/2011	10:16:09 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:16:09 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:16:09 AM	Tube furnace set to 150
11/28/2011	10:16:39 AM	Helium valve closed
11/28/2011	10:16:39 AM	H2 valve closed
11/28/2011	10:16:39 AM	BCl3 valve closed
11/28/2011	10:16:39 AM	PH3 valve closed
11/28/2011	10:16:39 AM	SiCl4 pre valve closed
11/28/2011	10:16:39 AM	SiCl4 post valve closed
11/28/2011	10:16:39 AM	Bypass valve closed
11/28/2011	10:16:39 AM	Bubbler valve closed
11/28/2011	10:16:39 AM	Main Vac valve opened
11/28/2011	10:16:39 AM	Helium MFC set to  0.000000
11/28/2011	10:16:39 AM	H2 MFC set to  0.000000
11/28/2011	10:16:39 AM	BCl3 MFC set to  0.000000
11/28/2011	10:16:39 AM	PHl3 MFC set to  0.000000
11/28/2011	10:16:39 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:16:39 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:16:40 AM	Tube furnace set to 150
11/28/2011	10:17:10 AM	H2 valve closed
11/28/2011	10:17:10 AM	BCl3 valve closed
11/28/2011	10:17:10 AM	PH3 valve closed
11/28/2011	10:17:10 AM	SiCl4 pre valve closed
11/28/2011	10:17:10 AM	SiCl4 post valve closed
11/28/2011	10:17:10 AM	Bypass valve closed
11/28/2011	10:17:10 AM	Bubbler valve closed
11/28/2011	10:17:10 AM	Helium valve opened
11/28/2011	10:17:10 AM	Main Vac valve opened
11/28/2011	10:17:10 AM	Helium MFC set to  20.000000
11/28/2011	10:17:10 AM	H2 MFC set to  0.000000
11/28/2011	10:17:10 AM	BCl3 MFC set to  0.000000
11/28/2011	10:17:10 AM	PHl3 MFC set to  0.000000
11/28/2011	10:17:10 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:17:10 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:17:10 AM	Tube furnace set to 150
11/28/2011	10:17:40 AM	Helium valve closed
11/28/2011	10:17:40 AM	H2 valve closed
11/28/2011	10:17:40 AM	BCl3 valve closed
11/28/2011	10:17:40 AM	PH3 valve closed
11/28/2011	10:17:40 AM	SiCl4 pre valve closed
11/28/2011	10:17:40 AM	SiCl4 post valve closed
11/28/2011	10:17:40 AM	Bypass valve closed
11/28/2011	10:17:40 AM	Bubbler valve closed
11/28/2011	10:17:40 AM	Main Vac valve opened
11/28/2011	10:17:40 AM	Helium MFC set to  0.000000
11/28/2011	10:17:40 AM	H2 MFC set to  0.000000
11/28/2011	10:17:40 AM	BCl3 MFC set to  0.000000
11/28/2011	10:17:40 AM	PHl3 MFC set to  0.000000
11/28/2011	10:17:40 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:17:40 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:17:40 AM	Tube furnace set to 150
11/28/2011	10:18:10 AM	H2 valve closed
11/28/2011	10:18:10 AM	BCl3 valve closed
11/28/2011	10:18:10 AM	PH3 valve closed
11/28/2011	10:18:10 AM	SiCl4 pre valve closed
11/28/2011	10:18:10 AM	SiCl4 post valve closed
11/28/2011	10:18:10 AM	Bypass valve closed
11/28/2011	10:18:10 AM	Bubbler valve closed
11/28/2011	10:18:10 AM	Helium valve opened
11/28/2011	10:18:10 AM	Main Vac valve opened
11/28/2011	10:18:10 AM	Helium MFC set to  20.000000
11/28/2011	10:18:10 AM	H2 MFC set to  0.000000
11/28/2011	10:18:10 AM	BCl3 MFC set to  0.000000
11/28/2011	10:18:10 AM	PHl3 MFC set to  0.000000
11/28/2011	10:18:10 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:18:10 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:18:10 AM	Tube furnace set to 150
11/28/2011	10:18:40 AM	Helium valve closed
11/28/2011	10:18:40 AM	H2 valve closed
11/28/2011	10:18:40 AM	BCl3 valve closed
11/28/2011	10:18:40 AM	PH3 valve closed
11/28/2011	10:18:40 AM	SiCl4 pre valve closed
11/28/2011	10:18:40 AM	SiCl4 post valve closed
11/28/2011	10:18:40 AM	Bypass valve closed
11/28/2011	10:18:40 AM	Bubbler valve closed
11/28/2011	10:18:40 AM	Main Vac valve opened
11/28/2011	10:18:40 AM	Helium MFC set to  0.000000
11/28/2011	10:18:40 AM	H2 MFC set to  0.000000
11/28/2011	10:18:40 AM	BCl3 MFC set to  0.000000
11/28/2011	10:18:40 AM	PHl3 MFC set to  0.000000
11/28/2011	10:18:40 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:18:40 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:18:40 AM	Tube furnace set to 150
11/28/2011	10:19:10 AM	H2 valve closed
11/28/2011	10:19:10 AM	BCl3 valve closed
11/28/2011	10:19:10 AM	PH3 valve closed
11/28/2011	10:19:10 AM	SiCl4 pre valve closed
11/28/2011	10:19:10 AM	SiCl4 post valve closed
11/28/2011	10:19:10 AM	Bypass valve closed
11/28/2011	10:19:10 AM	Bubbler valve closed
11/28/2011	10:19:10 AM	Helium valve opened
11/28/2011	10:19:10 AM	Main Vac valve opened
11/28/2011	10:19:10 AM	Helium MFC set to  20.000000
11/28/2011	10:19:10 AM	H2 MFC set to  0.000000
11/28/2011	10:19:10 AM	BCl3 MFC set to  0.000000
11/28/2011	10:19:10 AM	PHl3 MFC set to  0.000000
11/28/2011	10:19:10 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:19:10 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:19:11 AM	Tube furnace set to 150
11/28/2011	10:19:41 AM	Helium valve closed
11/28/2011	10:19:41 AM	H2 valve closed
11/28/2011	10:19:41 AM	BCl3 valve closed
11/28/2011	10:19:41 AM	PH3 valve closed
11/28/2011	10:19:41 AM	SiCl4 pre valve closed
11/28/2011	10:19:41 AM	SiCl4 post valve closed
11/28/2011	10:19:41 AM	Bypass valve closed
11/28/2011	10:19:41 AM	Bubbler valve closed
11/28/2011	10:19:41 AM	Main Vac valve opened
11/28/2011	10:19:41 AM	Helium MFC set to  0.000000
11/28/2011	10:19:41 AM	H2 MFC set to  0.000000
11/28/2011	10:19:41 AM	BCl3 MFC set to  0.000000
11/28/2011	10:19:41 AM	PHl3 MFC set to  0.000000
11/28/2011	10:19:41 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:19:41 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:19:41 AM	Tube furnace set to 150
11/28/2011	10:20:11 AM	H2 valve closed
11/28/2011	10:20:11 AM	BCl3 valve closed
11/28/2011	10:20:11 AM	PH3 valve closed
11/28/2011	10:20:11 AM	SiCl4 pre valve closed
11/28/2011	10:20:11 AM	SiCl4 post valve closed
11/28/2011	10:20:11 AM	Bypass valve closed
11/28/2011	10:20:11 AM	Bubbler valve closed
11/28/2011	10:20:11 AM	Helium valve opened
11/28/2011	10:20:11 AM	Main Vac valve opened
11/28/2011	10:20:11 AM	Helium MFC set to  20.000000
11/28/2011	10:20:11 AM	H2 MFC set to  0.000000
11/28/2011	10:20:11 AM	BCl3 MFC set to  0.000000
11/28/2011	10:20:11 AM	PHl3 MFC set to  0.000000
11/28/2011	10:20:11 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:20:11 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:20:11 AM	Tube furnace set to 150
11/28/2011	10:20:41 AM	Helium valve closed
11/28/2011	10:20:41 AM	H2 valve closed
11/28/2011	10:20:41 AM	BCl3 valve closed
11/28/2011	10:20:41 AM	PH3 valve closed
11/28/2011	10:20:41 AM	SiCl4 pre valve closed
11/28/2011	10:20:41 AM	SiCl4 post valve closed
11/28/2011	10:20:41 AM	Bypass valve closed
11/28/2011	10:20:41 AM	Bubbler valve closed
11/28/2011	10:20:41 AM	Main Vac valve opened
11/28/2011	10:20:41 AM	Helium MFC set to  0.000000
11/28/2011	10:20:41 AM	H2 MFC set to  0.000000
11/28/2011	10:20:41 AM	BCl3 MFC set to  0.000000
11/28/2011	10:20:41 AM	PHl3 MFC set to  0.000000
11/28/2011	10:20:41 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:20:41 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:20:41 AM	Tube furnace set to 150
11/28/2011	10:21:11 AM	H2 valve closed
11/28/2011	10:21:11 AM	BCl3 valve closed
11/28/2011	10:21:11 AM	PH3 valve closed
11/28/2011	10:21:11 AM	SiCl4 pre valve closed
11/28/2011	10:21:11 AM	SiCl4 post valve closed
11/28/2011	10:21:11 AM	Bypass valve closed
11/28/2011	10:21:11 AM	Bubbler valve closed
11/28/2011	10:21:11 AM	Helium valve opened
11/28/2011	10:21:11 AM	Main Vac valve opened
11/28/2011	10:21:11 AM	Helium MFC set to  20.000000
11/28/2011	10:21:11 AM	H2 MFC set to  0.000000
11/28/2011	10:21:11 AM	BCl3 MFC set to  0.000000
11/28/2011	10:21:11 AM	PHl3 MFC set to  0.000000
11/28/2011	10:21:11 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:21:11 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:21:11 AM	Tube furnace set to 150
11/28/2011	10:21:41 AM	Helium valve closed
11/28/2011	10:21:41 AM	H2 valve closed
11/28/2011	10:21:41 AM	BCl3 valve closed
11/28/2011	10:21:41 AM	PH3 valve closed
11/28/2011	10:21:41 AM	SiCl4 pre valve closed
11/28/2011	10:21:41 AM	SiCl4 post valve closed
11/28/2011	10:21:41 AM	Bypass valve closed
11/28/2011	10:21:41 AM	Bubbler valve closed
11/28/2011	10:21:41 AM	Main Vac valve opened
11/28/2011	10:21:41 AM	Helium MFC set to  0.000000
11/28/2011	10:21:41 AM	H2 MFC set to  0.000000
11/28/2011	10:21:41 AM	BCl3 MFC set to  0.000000
11/28/2011	10:21:41 AM	PHl3 MFC set to  0.000000
11/28/2011	10:21:42 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:21:42 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:21:42 AM	Tube furnace set to 150
11/28/2011	10:22:12 AM	H2 valve closed
11/28/2011	10:22:12 AM	BCl3 valve closed
11/28/2011	10:22:12 AM	PH3 valve closed
11/28/2011	10:22:12 AM	SiCl4 pre valve closed
11/28/2011	10:22:12 AM	SiCl4 post valve closed
11/28/2011	10:22:12 AM	Bypass valve closed
11/28/2011	10:22:12 AM	Bubbler valve closed
11/28/2011	10:22:12 AM	Helium valve opened
11/28/2011	10:22:12 AM	Main Vac valve opened
11/28/2011	10:22:12 AM	Helium MFC set to  20.000000
11/28/2011	10:22:12 AM	H2 MFC set to  0.000000
11/28/2011	10:22:12 AM	BCl3 MFC set to  0.000000
11/28/2011	10:22:12 AM	PHl3 MFC set to  0.000000
11/28/2011	10:22:12 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:22:12 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:22:12 AM	Tube furnace set to 150
11/28/2011	10:22:42 AM	Helium valve closed
11/28/2011	10:22:42 AM	H2 valve closed
11/28/2011	10:22:42 AM	BCl3 valve closed
11/28/2011	10:22:42 AM	PH3 valve closed
11/28/2011	10:22:42 AM	SiCl4 pre valve closed
11/28/2011	10:22:42 AM	SiCl4 post valve closed
11/28/2011	10:22:42 AM	Bypass valve closed
11/28/2011	10:22:42 AM	Bubbler valve closed
11/28/2011	10:22:42 AM	Main Vac valve opened
11/28/2011	10:22:42 AM	Helium MFC set to  0.000000
11/28/2011	10:22:42 AM	H2 MFC set to  0.000000
11/28/2011	10:22:42 AM	BCl3 MFC set to  0.000000
11/28/2011	10:22:42 AM	PHl3 MFC set to  0.000000
11/28/2011	10:22:42 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:22:42 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:22:42 AM	Tube furnace set to 150
11/28/2011	10:22:43 AM	Run finished at 10:22 AM
11/28/2011	10:24:19 AM	Recipe started at 10:24 AM
11/28/2011	10:24:19 AM	Helium valve closed
11/28/2011	10:24:19 AM	H2 valve closed
11/28/2011	10:24:19 AM	BCl3 valve closed
11/28/2011	10:24:19 AM	PH3 valve closed
11/28/2011	10:24:19 AM	SiCl4 pre valve closed
11/28/2011	10:24:19 AM	SiCl4 post valve closed
11/28/2011	10:24:19 AM	Bypass valve closed
11/28/2011	10:24:19 AM	Bubbler valve closed
11/28/2011	10:24:19 AM	Main Vac valve opened
11/28/2011	10:24:19 AM	Helium MFC set to  0.000000
11/28/2011	10:24:19 AM	H2 MFC set to  0.000000
11/28/2011	10:24:19 AM	BCl3 MFC set to  0.000000
11/28/2011	10:24:19 AM	PHl3 MFC set to  0.000000
11/28/2011	10:24:19 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:24:19 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:24:19 AM	Tube furnace set to 150
11/28/2011	10:24:49 AM	H2 valve closed
11/28/2011	10:24:49 AM	BCl3 valve closed
11/28/2011	10:24:49 AM	PH3 valve closed
11/28/2011	10:24:49 AM	SiCl4 pre valve closed
11/28/2011	10:24:49 AM	SiCl4 post valve closed
11/28/2011	10:24:49 AM	Bypass valve closed
11/28/2011	10:24:49 AM	Bubbler valve closed
11/28/2011	10:24:49 AM	Helium valve opened
11/28/2011	10:24:49 AM	Main Vac valve opened
11/28/2011	10:24:49 AM	Helium MFC set to  20.000000
11/28/2011	10:24:49 AM	H2 MFC set to  0.000000
11/28/2011	10:24:49 AM	BCl3 MFC set to  0.000000
11/28/2011	10:24:49 AM	PHl3 MFC set to  0.000000
11/28/2011	10:24:49 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:24:49 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:24:49 AM	Tube furnace set to 150
11/28/2011	10:25:19 AM	Helium valve closed
11/28/2011	10:25:19 AM	H2 valve closed
11/28/2011	10:25:19 AM	BCl3 valve closed
11/28/2011	10:25:19 AM	PH3 valve closed
11/28/2011	10:25:19 AM	SiCl4 pre valve closed
11/28/2011	10:25:19 AM	SiCl4 post valve closed
11/28/2011	10:25:19 AM	Bypass valve closed
11/28/2011	10:25:19 AM	Bubbler valve closed
11/28/2011	10:25:19 AM	Main Vac valve opened
11/28/2011	10:25:19 AM	Helium MFC set to  0.000000
11/28/2011	10:25:19 AM	H2 MFC set to  0.000000
11/28/2011	10:25:19 AM	BCl3 MFC set to  0.000000
11/28/2011	10:25:19 AM	PHl3 MFC set to  0.000000
11/28/2011	10:25:19 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:25:19 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:25:19 AM	Tube furnace set to 150
11/28/2011	10:25:49 AM	H2 valve closed
11/28/2011	10:25:49 AM	BCl3 valve closed
11/28/2011	10:25:49 AM	PH3 valve closed
11/28/2011	10:25:49 AM	SiCl4 pre valve closed
11/28/2011	10:25:49 AM	SiCl4 post valve closed
11/28/2011	10:25:49 AM	Bypass valve closed
11/28/2011	10:25:49 AM	Bubbler valve closed
11/28/2011	10:25:49 AM	Helium valve opened
11/28/2011	10:25:49 AM	Main Vac valve opened
11/28/2011	10:25:49 AM	Helium MFC set to  20.000000
11/28/2011	10:25:49 AM	H2 MFC set to  0.000000
11/28/2011	10:25:49 AM	BCl3 MFC set to  0.000000
11/28/2011	10:25:49 AM	PHl3 MFC set to  0.000000
11/28/2011	10:25:49 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:25:49 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:25:49 AM	Tube furnace set to 150
11/28/2011	10:26:19 AM	Helium valve closed
11/28/2011	10:26:19 AM	H2 valve closed
11/28/2011	10:26:19 AM	BCl3 valve closed
11/28/2011	10:26:19 AM	PH3 valve closed
11/28/2011	10:26:19 AM	SiCl4 pre valve closed
11/28/2011	10:26:19 AM	SiCl4 post valve closed
11/28/2011	10:26:19 AM	Bypass valve closed
11/28/2011	10:26:19 AM	Bubbler valve closed
11/28/2011	10:26:19 AM	Main Vac valve opened
11/28/2011	10:26:19 AM	Helium MFC set to  0.000000
11/28/2011	10:26:19 AM	H2 MFC set to  0.000000
11/28/2011	10:26:19 AM	BCl3 MFC set to  0.000000
11/28/2011	10:26:19 AM	PHl3 MFC set to  0.000000
11/28/2011	10:26:19 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:26:19 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:26:20 AM	Tube furnace set to 150
11/28/2011	10:26:50 AM	H2 valve closed
11/28/2011	10:26:50 AM	BCl3 valve closed
11/28/2011	10:26:50 AM	PH3 valve closed
11/28/2011	10:26:50 AM	SiCl4 pre valve closed
11/28/2011	10:26:50 AM	SiCl4 post valve closed
11/28/2011	10:26:50 AM	Bypass valve closed
11/28/2011	10:26:50 AM	Bubbler valve closed
11/28/2011	10:26:50 AM	Helium valve opened
11/28/2011	10:26:50 AM	Main Vac valve opened
11/28/2011	10:26:50 AM	Helium MFC set to  20.000000
11/28/2011	10:26:50 AM	H2 MFC set to  0.000000
11/28/2011	10:26:50 AM	BCl3 MFC set to  0.000000
11/28/2011	10:26:50 AM	PHl3 MFC set to  0.000000
11/28/2011	10:26:50 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:26:50 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:26:50 AM	Tube furnace set to 150
11/28/2011	10:27:20 AM	Helium valve closed
11/28/2011	10:27:20 AM	H2 valve closed
11/28/2011	10:27:20 AM	BCl3 valve closed
11/28/2011	10:27:20 AM	PH3 valve closed
11/28/2011	10:27:20 AM	SiCl4 pre valve closed
11/28/2011	10:27:20 AM	SiCl4 post valve closed
11/28/2011	10:27:20 AM	Bypass valve closed
11/28/2011	10:27:20 AM	Bubbler valve closed
11/28/2011	10:27:20 AM	Main Vac valve opened
11/28/2011	10:27:20 AM	Helium MFC set to  0.000000
11/28/2011	10:27:20 AM	H2 MFC set to  0.000000
11/28/2011	10:27:20 AM	BCl3 MFC set to  0.000000
11/28/2011	10:27:20 AM	PHl3 MFC set to  0.000000
11/28/2011	10:27:20 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:27:20 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:27:20 AM	Tube furnace set to 150
11/28/2011	10:27:50 AM	H2 valve closed
11/28/2011	10:27:50 AM	BCl3 valve closed
11/28/2011	10:27:50 AM	PH3 valve closed
11/28/2011	10:27:50 AM	SiCl4 pre valve closed
11/28/2011	10:27:50 AM	SiCl4 post valve closed
11/28/2011	10:27:50 AM	Bypass valve closed
11/28/2011	10:27:50 AM	Bubbler valve closed
11/28/2011	10:27:50 AM	Helium valve opened
11/28/2011	10:27:50 AM	Main Vac valve opened
11/28/2011	10:27:50 AM	Helium MFC set to  20.000000
11/28/2011	10:27:50 AM	H2 MFC set to  0.000000
11/28/2011	10:27:50 AM	BCl3 MFC set to  0.000000
11/28/2011	10:27:50 AM	PHl3 MFC set to  0.000000
11/28/2011	10:27:50 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:27:50 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:27:50 AM	Tube furnace set to 150
11/28/2011	10:28:20 AM	Helium valve closed
11/28/2011	10:28:20 AM	H2 valve closed
11/28/2011	10:28:20 AM	BCl3 valve closed
11/28/2011	10:28:20 AM	PH3 valve closed
11/28/2011	10:28:20 AM	SiCl4 pre valve closed
11/28/2011	10:28:20 AM	SiCl4 post valve closed
11/28/2011	10:28:20 AM	Bypass valve closed
11/28/2011	10:28:20 AM	Bubbler valve closed
11/28/2011	10:28:20 AM	Main Vac valve opened
11/28/2011	10:28:20 AM	Helium MFC set to  0.000000
11/28/2011	10:28:20 AM	H2 MFC set to  0.000000
11/28/2011	10:28:20 AM	BCl3 MFC set to  0.000000
11/28/2011	10:28:20 AM	PHl3 MFC set to  0.000000
11/28/2011	10:28:20 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:28:20 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:28:20 AM	Tube furnace set to 150
11/28/2011	10:28:50 AM	H2 valve closed
11/28/2011	10:28:50 AM	BCl3 valve closed
11/28/2011	10:28:50 AM	PH3 valve closed
11/28/2011	10:28:50 AM	SiCl4 pre valve closed
11/28/2011	10:28:50 AM	SiCl4 post valve closed
11/28/2011	10:28:50 AM	Bypass valve closed
11/28/2011	10:28:50 AM	Bubbler valve closed
11/28/2011	10:28:50 AM	Helium valve opened
11/28/2011	10:28:51 AM	Main Vac valve opened
11/28/2011	10:28:51 AM	Helium MFC set to  20.000000
11/28/2011	10:28:51 AM	H2 MFC set to  0.000000
11/28/2011	10:28:51 AM	BCl3 MFC set to  0.000000
11/28/2011	10:28:51 AM	PHl3 MFC set to  0.000000
11/28/2011	10:28:51 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:28:51 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:28:51 AM	Tube furnace set to 150
11/28/2011	10:29:21 AM	Helium valve closed
11/28/2011	10:29:21 AM	H2 valve closed
11/28/2011	10:29:21 AM	BCl3 valve closed
11/28/2011	10:29:21 AM	PH3 valve closed
11/28/2011	10:29:21 AM	SiCl4 pre valve closed
11/28/2011	10:29:21 AM	SiCl4 post valve closed
11/28/2011	10:29:21 AM	Bypass valve closed
11/28/2011	10:29:21 AM	Bubbler valve closed
11/28/2011	10:29:21 AM	Main Vac valve opened
11/28/2011	10:29:21 AM	Helium MFC set to  0.000000
11/28/2011	10:29:21 AM	H2 MFC set to  0.000000
11/28/2011	10:29:21 AM	BCl3 MFC set to  0.000000
11/28/2011	10:29:21 AM	PHl3 MFC set to  0.000000
11/28/2011	10:29:21 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:29:21 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:29:21 AM	Tube furnace set to 150
11/28/2011	10:29:51 AM	H2 valve closed
11/28/2011	10:29:51 AM	BCl3 valve closed
11/28/2011	10:29:51 AM	PH3 valve closed
11/28/2011	10:29:51 AM	SiCl4 pre valve closed
11/28/2011	10:29:51 AM	SiCl4 post valve closed
11/28/2011	10:29:51 AM	Bypass valve closed
11/28/2011	10:29:51 AM	Bubbler valve closed
11/28/2011	10:29:51 AM	Helium valve opened
11/28/2011	10:29:51 AM	Main Vac valve opened
11/28/2011	10:29:51 AM	Helium MFC set to  20.000000
11/28/2011	10:29:51 AM	H2 MFC set to  0.000000
11/28/2011	10:29:51 AM	BCl3 MFC set to  0.000000
11/28/2011	10:29:51 AM	PHl3 MFC set to  0.000000
11/28/2011	10:29:51 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:29:51 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:29:51 AM	Tube furnace set to 150
11/28/2011	10:30:21 AM	Helium valve closed
11/28/2011	10:30:21 AM	H2 valve closed
11/28/2011	10:30:21 AM	BCl3 valve closed
11/28/2011	10:30:21 AM	PH3 valve closed
11/28/2011	10:30:21 AM	SiCl4 pre valve closed
11/28/2011	10:30:21 AM	SiCl4 post valve closed
11/28/2011	10:30:21 AM	Bypass valve closed
11/28/2011	10:30:21 AM	Bubbler valve closed
11/28/2011	10:30:21 AM	Main Vac valve opened
11/28/2011	10:30:21 AM	Helium MFC set to  0.000000
11/28/2011	10:30:21 AM	H2 MFC set to  0.000000
11/28/2011	10:30:21 AM	BCl3 MFC set to  0.000000
11/28/2011	10:30:21 AM	PHl3 MFC set to  0.000000
11/28/2011	10:30:21 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:30:21 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:30:21 AM	Tube furnace set to 150
11/28/2011	10:30:51 AM	H2 valve closed
11/28/2011	10:30:51 AM	BCl3 valve closed
11/28/2011	10:30:51 AM	PH3 valve closed
11/28/2011	10:30:51 AM	SiCl4 pre valve closed
11/28/2011	10:30:51 AM	SiCl4 post valve closed
11/28/2011	10:30:51 AM	Bypass valve closed
11/28/2011	10:30:51 AM	Bubbler valve closed
11/28/2011	10:30:51 AM	Helium valve opened
11/28/2011	10:30:51 AM	Main Vac valve opened
11/28/2011	10:30:51 AM	Helium MFC set to  20.000000
11/28/2011	10:30:51 AM	H2 MFC set to  0.000000
11/28/2011	10:30:51 AM	BCl3 MFC set to  0.000000
11/28/2011	10:30:51 AM	PHl3 MFC set to  0.000000
11/28/2011	10:30:51 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:30:51 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:30:51 AM	Tube furnace set to 150
11/28/2011	10:31:22 AM	Helium valve closed
11/28/2011	10:31:22 AM	H2 valve closed
11/28/2011	10:31:22 AM	BCl3 valve closed
11/28/2011	10:31:22 AM	PH3 valve closed
11/28/2011	10:31:22 AM	SiCl4 pre valve closed
11/28/2011	10:31:22 AM	SiCl4 post valve closed
11/28/2011	10:31:22 AM	Bypass valve closed
11/28/2011	10:31:22 AM	Bubbler valve closed
11/28/2011	10:31:22 AM	Main Vac valve opened
11/28/2011	10:31:22 AM	Helium MFC set to  0.000000
11/28/2011	10:31:22 AM	H2 MFC set to  0.000000
11/28/2011	10:31:22 AM	BCl3 MFC set to  0.000000
11/28/2011	10:31:22 AM	PHl3 MFC set to  0.000000
11/28/2011	10:31:22 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:31:22 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:31:22 AM	Tube furnace set to 150
11/28/2011	10:31:52 AM	H2 valve closed
11/28/2011	10:31:52 AM	BCl3 valve closed
11/28/2011	10:31:52 AM	PH3 valve closed
11/28/2011	10:31:52 AM	SiCl4 pre valve closed
11/28/2011	10:31:52 AM	SiCl4 post valve closed
11/28/2011	10:31:52 AM	Bypass valve closed
11/28/2011	10:31:52 AM	Bubbler valve closed
11/28/2011	10:31:52 AM	Helium valve opened
11/28/2011	10:31:52 AM	Main Vac valve opened
11/28/2011	10:31:52 AM	Helium MFC set to  20.000000
11/28/2011	10:31:52 AM	H2 MFC set to  0.000000
11/28/2011	10:31:52 AM	BCl3 MFC set to  0.000000
11/28/2011	10:31:52 AM	PHl3 MFC set to  0.000000
11/28/2011	10:31:52 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:31:52 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:31:52 AM	Tube furnace set to 150
11/28/2011	10:32:22 AM	Helium valve closed
11/28/2011	10:32:22 AM	H2 valve closed
11/28/2011	10:32:22 AM	BCl3 valve closed
11/28/2011	10:32:22 AM	PH3 valve closed
11/28/2011	10:32:22 AM	SiCl4 pre valve closed
11/28/2011	10:32:22 AM	SiCl4 post valve closed
11/28/2011	10:32:22 AM	Bypass valve closed
11/28/2011	10:32:22 AM	Bubbler valve closed
11/28/2011	10:32:22 AM	Main Vac valve opened
11/28/2011	10:32:22 AM	Helium MFC set to  0.000000
11/28/2011	10:32:22 AM	H2 MFC set to  0.000000
11/28/2011	10:32:22 AM	BCl3 MFC set to  0.000000
11/28/2011	10:32:22 AM	PHl3 MFC set to  0.000000
11/28/2011	10:32:22 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:32:22 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:32:22 AM	Tube furnace set to 150
11/28/2011	10:32:52 AM	H2 valve closed
11/28/2011	10:32:52 AM	BCl3 valve closed
11/28/2011	10:32:52 AM	PH3 valve closed
11/28/2011	10:32:52 AM	SiCl4 pre valve closed
11/28/2011	10:32:52 AM	SiCl4 post valve closed
11/28/2011	10:32:52 AM	Bypass valve closed
11/28/2011	10:32:52 AM	Bubbler valve closed
11/28/2011	10:32:52 AM	Helium valve opened
11/28/2011	10:32:52 AM	Main Vac valve opened
11/28/2011	10:32:52 AM	Helium MFC set to  20.000000
11/28/2011	10:32:52 AM	H2 MFC set to  0.000000
11/28/2011	10:32:52 AM	BCl3 MFC set to  0.000000
11/28/2011	10:32:52 AM	PHl3 MFC set to  0.000000
11/28/2011	10:32:52 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:32:52 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:32:52 AM	Tube furnace set to 150
11/28/2011	10:33:22 AM	Helium valve closed
11/28/2011	10:33:22 AM	H2 valve closed
11/28/2011	10:33:22 AM	BCl3 valve closed
11/28/2011	10:33:22 AM	PH3 valve closed
11/28/2011	10:33:22 AM	SiCl4 pre valve closed
11/28/2011	10:33:22 AM	SiCl4 post valve closed
11/28/2011	10:33:22 AM	Bypass valve closed
11/28/2011	10:33:22 AM	Bubbler valve closed
11/28/2011	10:33:22 AM	Main Vac valve opened
11/28/2011	10:33:22 AM	Helium MFC set to  0.000000
11/28/2011	10:33:22 AM	H2 MFC set to  0.000000
11/28/2011	10:33:22 AM	BCl3 MFC set to  0.000000
11/28/2011	10:33:22 AM	PHl3 MFC set to  0.000000
11/28/2011	10:33:22 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:33:22 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:33:23 AM	Tube furnace set to 150
11/28/2011	10:33:53 AM	H2 valve closed
11/28/2011	10:33:53 AM	BCl3 valve closed
11/28/2011	10:33:53 AM	PH3 valve closed
11/28/2011	10:33:53 AM	SiCl4 pre valve closed
11/28/2011	10:33:53 AM	SiCl4 post valve closed
11/28/2011	10:33:53 AM	Bypass valve closed
11/28/2011	10:33:53 AM	Bubbler valve closed
11/28/2011	10:33:53 AM	Helium valve opened
11/28/2011	10:33:53 AM	Main Vac valve opened
11/28/2011	10:33:53 AM	Helium MFC set to  20.000000
11/28/2011	10:33:53 AM	H2 MFC set to  0.000000
11/28/2011	10:33:53 AM	BCl3 MFC set to  0.000000
11/28/2011	10:33:53 AM	PHl3 MFC set to  0.000000
11/28/2011	10:33:53 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:33:53 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:33:53 AM	Tube furnace set to 150
11/28/2011	10:34:23 AM	Helium valve closed
11/28/2011	10:34:23 AM	H2 valve closed
11/28/2011	10:34:23 AM	BCl3 valve closed
11/28/2011	10:34:23 AM	PH3 valve closed
11/28/2011	10:34:23 AM	SiCl4 pre valve closed
11/28/2011	10:34:23 AM	SiCl4 post valve closed
11/28/2011	10:34:23 AM	Bypass valve closed
11/28/2011	10:34:23 AM	Bubbler valve closed
11/28/2011	10:34:23 AM	Main Vac valve opened
11/28/2011	10:34:23 AM	Helium MFC set to  0.000000
11/28/2011	10:34:23 AM	H2 MFC set to  0.000000
11/28/2011	10:34:23 AM	BCl3 MFC set to  0.000000
11/28/2011	10:34:23 AM	PHl3 MFC set to  0.000000
11/28/2011	10:34:23 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:34:23 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:34:23 AM	Tube furnace set to 150
11/28/2011	10:34:24 AM	Run finished at 10:34 AM
11/28/2011	10:39:26 AM	Recipe started at 10:39 AM
11/28/2011	10:39:26 AM	Helium valve closed
11/28/2011	10:39:26 AM	H2 valve closed
11/28/2011	10:39:26 AM	BCl3 valve closed
11/28/2011	10:39:26 AM	PH3 valve closed
11/28/2011	10:39:26 AM	SiCl4 pre valve closed
11/28/2011	10:39:26 AM	SiCl4 post valve closed
11/28/2011	10:39:26 AM	Bypass valve closed
11/28/2011	10:39:26 AM	Bubbler valve closed
11/28/2011	10:39:26 AM	Main Vac valve opened
11/28/2011	10:39:26 AM	Helium MFC set to  0.000000
11/28/2011	10:39:26 AM	H2 MFC set to  0.000000
11/28/2011	10:39:26 AM	BCl3 MFC set to  0.000000
11/28/2011	10:39:26 AM	PHl3 MFC set to  0.000000
11/28/2011	10:39:26 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:39:26 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:39:26 AM	Tube furnace set to 150
11/28/2011	10:39:57 AM	H2 valve closed
11/28/2011	10:39:57 AM	BCl3 valve closed
11/28/2011	10:39:57 AM	PH3 valve closed
11/28/2011	10:39:57 AM	SiCl4 pre valve closed
11/28/2011	10:39:57 AM	SiCl4 post valve closed
11/28/2011	10:39:57 AM	Bypass valve closed
11/28/2011	10:39:57 AM	Bubbler valve closed
11/28/2011	10:39:57 AM	Helium valve opened
11/28/2011	10:39:57 AM	Main Vac valve opened
11/28/2011	10:39:57 AM	Helium MFC set to  20.000000
11/28/2011	10:39:57 AM	H2 MFC set to  0.000000
11/28/2011	10:39:57 AM	BCl3 MFC set to  0.000000
11/28/2011	10:39:57 AM	PHl3 MFC set to  0.000000
11/28/2011	10:39:57 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:39:57 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:39:57 AM	Tube furnace set to 150
11/28/2011	10:40:27 AM	Helium valve closed
11/28/2011	10:40:27 AM	H2 valve closed
11/28/2011	10:40:27 AM	BCl3 valve closed
11/28/2011	10:40:27 AM	PH3 valve closed
11/28/2011	10:40:27 AM	SiCl4 pre valve closed
11/28/2011	10:40:27 AM	SiCl4 post valve closed
11/28/2011	10:40:27 AM	Bypass valve closed
11/28/2011	10:40:27 AM	Bubbler valve closed
11/28/2011	10:40:27 AM	Main Vac valve opened
11/28/2011	10:40:27 AM	Helium MFC set to  0.000000
11/28/2011	10:40:27 AM	H2 MFC set to  0.000000
11/28/2011	10:40:27 AM	BCl3 MFC set to  0.000000
11/28/2011	10:40:27 AM	PHl3 MFC set to  0.000000
11/28/2011	10:40:27 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:40:27 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:40:27 AM	Tube furnace set to 150
11/28/2011	10:40:57 AM	H2 valve closed
11/28/2011	10:40:57 AM	BCl3 valve closed
11/28/2011	10:40:57 AM	PH3 valve closed
11/28/2011	10:40:57 AM	SiCl4 pre valve closed
11/28/2011	10:40:57 AM	SiCl4 post valve closed
11/28/2011	10:40:57 AM	Bypass valve closed
11/28/2011	10:40:57 AM	Bubbler valve closed
11/28/2011	10:40:57 AM	Helium valve opened
11/28/2011	10:40:57 AM	Main Vac valve opened
11/28/2011	10:40:57 AM	Helium MFC set to  20.000000
11/28/2011	10:40:57 AM	H2 MFC set to  0.000000
11/28/2011	10:40:57 AM	BCl3 MFC set to  0.000000
11/28/2011	10:40:57 AM	PHl3 MFC set to  0.000000
11/28/2011	10:40:57 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:40:57 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:40:57 AM	Tube furnace set to 150
11/28/2011	10:41:27 AM	Helium valve closed
11/28/2011	10:41:27 AM	H2 valve closed
11/28/2011	10:41:27 AM	BCl3 valve closed
11/28/2011	10:41:27 AM	PH3 valve closed
11/28/2011	10:41:27 AM	SiCl4 pre valve closed
11/28/2011	10:41:27 AM	SiCl4 post valve closed
11/28/2011	10:41:27 AM	Bypass valve closed
11/28/2011	10:41:27 AM	Bubbler valve closed
11/28/2011	10:41:27 AM	Main Vac valve opened
11/28/2011	10:41:27 AM	Helium MFC set to  0.000000
11/28/2011	10:41:27 AM	H2 MFC set to  0.000000
11/28/2011	10:41:27 AM	BCl3 MFC set to  0.000000
11/28/2011	10:41:27 AM	PHl3 MFC set to  0.000000
11/28/2011	10:41:27 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:41:27 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:41:27 AM	Tube furnace set to 150
11/28/2011	10:41:57 AM	H2 valve closed
11/28/2011	10:41:57 AM	BCl3 valve closed
11/28/2011	10:41:57 AM	PH3 valve closed
11/28/2011	10:41:57 AM	SiCl4 pre valve closed
11/28/2011	10:41:57 AM	SiCl4 post valve closed
11/28/2011	10:41:57 AM	Bypass valve closed
11/28/2011	10:41:57 AM	Bubbler valve closed
11/28/2011	10:41:57 AM	Helium valve opened
11/28/2011	10:41:57 AM	Main Vac valve opened
11/28/2011	10:41:57 AM	Helium MFC set to  20.000000
11/28/2011	10:41:57 AM	H2 MFC set to  0.000000
11/28/2011	10:41:57 AM	BCl3 MFC set to  0.000000
11/28/2011	10:41:57 AM	PHl3 MFC set to  0.000000
11/28/2011	10:41:57 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:41:57 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:41:58 AM	Tube furnace set to 150
11/28/2011	10:42:28 AM	Helium valve closed
11/28/2011	10:42:28 AM	H2 valve closed
11/28/2011	10:42:28 AM	BCl3 valve closed
11/28/2011	10:42:28 AM	PH3 valve closed
11/28/2011	10:42:28 AM	SiCl4 pre valve closed
11/28/2011	10:42:28 AM	SiCl4 post valve closed
11/28/2011	10:42:28 AM	Bypass valve closed
11/28/2011	10:42:28 AM	Bubbler valve closed
11/28/2011	10:42:28 AM	Main Vac valve opened
11/28/2011	10:42:28 AM	Helium MFC set to  0.000000
11/28/2011	10:42:28 AM	H2 MFC set to  0.000000
11/28/2011	10:42:28 AM	BCl3 MFC set to  0.000000
11/28/2011	10:42:28 AM	PHl3 MFC set to  0.000000
11/28/2011	10:42:28 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:42:28 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:42:28 AM	Tube furnace set to 150
11/28/2011	10:42:58 AM	H2 valve closed
11/28/2011	10:42:58 AM	BCl3 valve closed
11/28/2011	10:42:58 AM	PH3 valve closed
11/28/2011	10:42:58 AM	SiCl4 pre valve closed
11/28/2011	10:42:58 AM	SiCl4 post valve closed
11/28/2011	10:42:58 AM	Bypass valve closed
11/28/2011	10:42:58 AM	Bubbler valve closed
11/28/2011	10:42:58 AM	Helium valve opened
11/28/2011	10:42:58 AM	Main Vac valve opened
11/28/2011	10:42:58 AM	Helium MFC set to  20.000000
11/28/2011	10:42:58 AM	H2 MFC set to  0.000000
11/28/2011	10:42:58 AM	BCl3 MFC set to  0.000000
11/28/2011	10:42:58 AM	PHl3 MFC set to  0.000000
11/28/2011	10:42:58 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:42:58 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:42:58 AM	Tube furnace set to 150
11/28/2011	10:43:28 AM	Helium valve closed
11/28/2011	10:43:28 AM	H2 valve closed
11/28/2011	10:43:28 AM	BCl3 valve closed
11/28/2011	10:43:28 AM	PH3 valve closed
11/28/2011	10:43:28 AM	SiCl4 pre valve closed
11/28/2011	10:43:28 AM	SiCl4 post valve closed
11/28/2011	10:43:28 AM	Bypass valve closed
11/28/2011	10:43:28 AM	Bubbler valve closed
11/28/2011	10:43:28 AM	Main Vac valve opened
11/28/2011	10:43:28 AM	Helium MFC set to  0.000000
11/28/2011	10:43:28 AM	H2 MFC set to  0.000000
11/28/2011	10:43:28 AM	BCl3 MFC set to  0.000000
11/28/2011	10:43:28 AM	PHl3 MFC set to  0.000000
11/28/2011	10:43:28 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:43:28 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:43:28 AM	Tube furnace set to 150
11/28/2011	10:43:58 AM	H2 valve closed
11/28/2011	10:43:58 AM	BCl3 valve closed
11/28/2011	10:43:58 AM	PH3 valve closed
11/28/2011	10:43:58 AM	SiCl4 pre valve closed
11/28/2011	10:43:58 AM	SiCl4 post valve closed
11/28/2011	10:43:58 AM	Bypass valve closed
11/28/2011	10:43:58 AM	Bubbler valve closed
11/28/2011	10:43:58 AM	Helium valve opened
11/28/2011	10:43:58 AM	Main Vac valve opened
11/28/2011	10:43:58 AM	Helium MFC set to  20.000000
11/28/2011	10:43:58 AM	H2 MFC set to  0.000000
11/28/2011	10:43:58 AM	BCl3 MFC set to  0.000000
11/28/2011	10:43:58 AM	PHl3 MFC set to  0.000000
11/28/2011	10:43:58 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:43:58 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:43:58 AM	Tube furnace set to 150
11/28/2011	10:44:28 AM	Helium valve closed
11/28/2011	10:44:28 AM	H2 valve closed
11/28/2011	10:44:28 AM	BCl3 valve closed
11/28/2011	10:44:28 AM	PH3 valve closed
11/28/2011	10:44:28 AM	SiCl4 pre valve closed
11/28/2011	10:44:28 AM	SiCl4 post valve closed
11/28/2011	10:44:28 AM	Bypass valve closed
11/28/2011	10:44:28 AM	Bubbler valve closed
11/28/2011	10:44:28 AM	Main Vac valve opened
11/28/2011	10:44:28 AM	Helium MFC set to  0.000000
11/28/2011	10:44:28 AM	H2 MFC set to  0.000000
11/28/2011	10:44:28 AM	BCl3 MFC set to  0.000000
11/28/2011	10:44:28 AM	PHl3 MFC set to  0.000000
11/28/2011	10:44:28 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:44:28 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:44:29 AM	Tube furnace set to 150
11/28/2011	10:44:59 AM	H2 valve closed
11/28/2011	10:44:59 AM	BCl3 valve closed
11/28/2011	10:44:59 AM	PH3 valve closed
11/28/2011	10:44:59 AM	SiCl4 pre valve closed
11/28/2011	10:44:59 AM	SiCl4 post valve closed
11/28/2011	10:44:59 AM	Bypass valve closed
11/28/2011	10:44:59 AM	Bubbler valve closed
11/28/2011	10:44:59 AM	Helium valve opened
11/28/2011	10:44:59 AM	Main Vac valve opened
11/28/2011	10:44:59 AM	Helium MFC set to  20.000000
11/28/2011	10:44:59 AM	H2 MFC set to  0.000000
11/28/2011	10:44:59 AM	BCl3 MFC set to  0.000000
11/28/2011	10:44:59 AM	PHl3 MFC set to  0.000000
11/28/2011	10:44:59 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:44:59 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:44:59 AM	Tube furnace set to 150
11/28/2011	10:45:29 AM	Helium valve closed
11/28/2011	10:45:29 AM	H2 valve closed
11/28/2011	10:45:29 AM	BCl3 valve closed
11/28/2011	10:45:29 AM	PH3 valve closed
11/28/2011	10:45:29 AM	SiCl4 pre valve closed
11/28/2011	10:45:29 AM	SiCl4 post valve closed
11/28/2011	10:45:29 AM	Bypass valve closed
11/28/2011	10:45:29 AM	Bubbler valve closed
11/28/2011	10:45:29 AM	Main Vac valve opened
11/28/2011	10:45:29 AM	Helium MFC set to  0.000000
11/28/2011	10:45:29 AM	H2 MFC set to  0.000000
11/28/2011	10:45:29 AM	BCl3 MFC set to  0.000000
11/28/2011	10:45:29 AM	PHl3 MFC set to  0.000000
11/28/2011	10:45:29 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:45:29 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:45:29 AM	Tube furnace set to 150
11/28/2011	10:45:59 AM	H2 valve closed
11/28/2011	10:45:59 AM	BCl3 valve closed
11/28/2011	10:45:59 AM	PH3 valve closed
11/28/2011	10:45:59 AM	SiCl4 pre valve closed
11/28/2011	10:45:59 AM	SiCl4 post valve closed
11/28/2011	10:45:59 AM	Bypass valve closed
11/28/2011	10:45:59 AM	Bubbler valve closed
11/28/2011	10:45:59 AM	Helium valve opened
11/28/2011	10:45:59 AM	Main Vac valve opened
11/28/2011	10:45:59 AM	Helium MFC set to  20.000000
11/28/2011	10:45:59 AM	H2 MFC set to  0.000000
11/28/2011	10:45:59 AM	BCl3 MFC set to  0.000000
11/28/2011	10:45:59 AM	PHl3 MFC set to  0.000000
11/28/2011	10:45:59 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:45:59 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:45:59 AM	Tube furnace set to 150
11/28/2011	10:46:29 AM	Helium valve closed
11/28/2011	10:46:29 AM	H2 valve closed
11/28/2011	10:46:29 AM	BCl3 valve closed
11/28/2011	10:46:29 AM	PH3 valve closed
11/28/2011	10:46:29 AM	SiCl4 pre valve closed
11/28/2011	10:46:29 AM	SiCl4 post valve closed
11/28/2011	10:46:29 AM	Bypass valve closed
11/28/2011	10:46:29 AM	Bubbler valve closed
11/28/2011	10:46:29 AM	Main Vac valve opened
11/28/2011	10:46:29 AM	Helium MFC set to  0.000000
11/28/2011	10:46:29 AM	H2 MFC set to  0.000000
11/28/2011	10:46:29 AM	BCl3 MFC set to  0.000000
11/28/2011	10:46:29 AM	PHl3 MFC set to  0.000000
11/28/2011	10:46:29 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:46:29 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:46:29 AM	Tube furnace set to 150
11/28/2011	10:46:59 AM	H2 valve closed
11/28/2011	10:46:59 AM	BCl3 valve closed
11/28/2011	10:46:59 AM	PH3 valve closed
11/28/2011	10:46:59 AM	SiCl4 pre valve closed
11/28/2011	10:46:59 AM	SiCl4 post valve closed
11/28/2011	10:46:59 AM	Bypass valve closed
11/28/2011	10:46:59 AM	Bubbler valve closed
11/28/2011	10:46:59 AM	Helium valve opened
11/28/2011	10:46:59 AM	Main Vac valve opened
11/28/2011	10:46:59 AM	Helium MFC set to  20.000000
11/28/2011	10:46:59 AM	H2 MFC set to  0.000000
11/28/2011	10:46:59 AM	BCl3 MFC set to  0.000000
11/28/2011	10:46:59 AM	PHl3 MFC set to  0.000000
11/28/2011	10:46:59 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:46:59 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:47:00 AM	Tube furnace set to 150
11/28/2011	10:47:30 AM	Helium valve closed
11/28/2011	10:47:30 AM	H2 valve closed
11/28/2011	10:47:30 AM	BCl3 valve closed
11/28/2011	10:47:30 AM	PH3 valve closed
11/28/2011	10:47:30 AM	SiCl4 pre valve closed
11/28/2011	10:47:30 AM	SiCl4 post valve closed
11/28/2011	10:47:30 AM	Bypass valve closed
11/28/2011	10:47:30 AM	Bubbler valve closed
11/28/2011	10:47:30 AM	Main Vac valve opened
11/28/2011	10:47:30 AM	Helium MFC set to  0.000000
11/28/2011	10:47:30 AM	H2 MFC set to  0.000000
11/28/2011	10:47:30 AM	BCl3 MFC set to  0.000000
11/28/2011	10:47:30 AM	PHl3 MFC set to  0.000000
11/28/2011	10:47:30 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:47:30 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:47:30 AM	Tube furnace set to 150
11/28/2011	10:48:00 AM	H2 valve closed
11/28/2011	10:48:00 AM	BCl3 valve closed
11/28/2011	10:48:00 AM	PH3 valve closed
11/28/2011	10:48:00 AM	SiCl4 pre valve closed
11/28/2011	10:48:00 AM	SiCl4 post valve closed
11/28/2011	10:48:00 AM	Bypass valve closed
11/28/2011	10:48:00 AM	Bubbler valve closed
11/28/2011	10:48:00 AM	Helium valve opened
11/28/2011	10:48:00 AM	Main Vac valve opened
11/28/2011	10:48:00 AM	Helium MFC set to  20.000000
11/28/2011	10:48:00 AM	H2 MFC set to  0.000000
11/28/2011	10:48:00 AM	BCl3 MFC set to  0.000000
11/28/2011	10:48:00 AM	PHl3 MFC set to  0.000000
11/28/2011	10:48:00 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:48:00 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:48:00 AM	Tube furnace set to 150
11/28/2011	10:48:30 AM	Helium valve closed
11/28/2011	10:48:30 AM	H2 valve closed
11/28/2011	10:48:30 AM	BCl3 valve closed
11/28/2011	10:48:30 AM	PH3 valve closed
11/28/2011	10:48:30 AM	SiCl4 pre valve closed
11/28/2011	10:48:30 AM	SiCl4 post valve closed
11/28/2011	10:48:30 AM	Bypass valve closed
11/28/2011	10:48:30 AM	Bubbler valve closed
11/28/2011	10:48:30 AM	Main Vac valve opened
11/28/2011	10:48:30 AM	Helium MFC set to  0.000000
11/28/2011	10:48:30 AM	H2 MFC set to  0.000000
11/28/2011	10:48:30 AM	BCl3 MFC set to  0.000000
11/28/2011	10:48:30 AM	PHl3 MFC set to  0.000000
11/28/2011	10:48:30 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:48:30 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:48:30 AM	Tube furnace set to 150
11/28/2011	10:49:00 AM	H2 valve closed
11/28/2011	10:49:00 AM	BCl3 valve closed
11/28/2011	10:49:00 AM	PH3 valve closed
11/28/2011	10:49:00 AM	SiCl4 pre valve closed
11/28/2011	10:49:00 AM	SiCl4 post valve closed
11/28/2011	10:49:00 AM	Bypass valve closed
11/28/2011	10:49:00 AM	Bubbler valve closed
11/28/2011	10:49:00 AM	Helium valve opened
11/28/2011	10:49:00 AM	Main Vac valve opened
11/28/2011	10:49:00 AM	Helium MFC set to  20.000000
11/28/2011	10:49:00 AM	H2 MFC set to  0.000000
11/28/2011	10:49:00 AM	BCl3 MFC set to  0.000000
11/28/2011	10:49:00 AM	PHl3 MFC set to  0.000000
11/28/2011	10:49:00 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:49:00 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:49:00 AM	Tube furnace set to 150
11/28/2011	10:49:30 AM	Helium valve closed
11/28/2011	10:49:30 AM	H2 valve closed
11/28/2011	10:49:30 AM	BCl3 valve closed
11/28/2011	10:49:30 AM	PH3 valve closed
11/28/2011	10:49:30 AM	SiCl4 pre valve closed
11/28/2011	10:49:30 AM	SiCl4 post valve closed
11/28/2011	10:49:30 AM	Bypass valve closed
11/28/2011	10:49:30 AM	Bubbler valve closed
11/28/2011	10:49:30 AM	Main Vac valve opened
11/28/2011	10:49:30 AM	Helium MFC set to  0.000000
11/28/2011	10:49:30 AM	H2 MFC set to  0.000000
11/28/2011	10:49:30 AM	BCl3 MFC set to  0.000000
11/28/2011	10:49:30 AM	PHl3 MFC set to  0.000000
11/28/2011	10:49:30 AM	SiCl4 MFC set to  0.000000
11/28/2011	10:49:30 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:49:31 AM	Tube furnace set to 150
11/28/2011	10:49:32 AM	Run finished at 10:49 AM
11/28/2011	10:52:16 AM	Main Vac valve closed
11/28/2011	10:52:37 AM	Main Vac valve opened
11/28/2011	11:01:28 AM	Recipe started at 11:01 AM
11/28/2011	11:01:28 AM	Helium valve closed
11/28/2011	11:01:28 AM	H2 valve closed
11/28/2011	11:01:28 AM	BCl3 valve closed
11/28/2011	11:01:28 AM	PH3 valve closed
11/28/2011	11:01:28 AM	SiCl4 pre valve closed
11/28/2011	11:01:28 AM	SiCl4 post valve closed
11/28/2011	11:01:28 AM	Main Vac valve closed
11/28/2011	11:01:28 AM	Bypass valve closed
11/28/2011	11:01:28 AM	Bubbler valve closed
11/28/2011	11:01:28 AM	Helium MFC set to  0.000000
11/28/2011	11:01:28 AM	H2 MFC set to  0.000000
11/28/2011	11:01:28 AM	BCl3 MFC set to  0.000000
11/28/2011	11:01:28 AM	PHl3 MFC set to  0.000000
11/28/2011	11:01:28 AM	SiCl4 MFC set to  0.000000
11/28/2011	11:01:28 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:01:28 AM	Tube furnace set to 0
11/28/2011	11:01:31 AM	Helium valve closed
11/28/2011	11:01:31 AM	BCl3 valve closed
11/28/2011	11:01:31 AM	PH3 valve closed
11/28/2011	11:01:31 AM	SiCl4 pre valve closed
11/28/2011	11:01:31 AM	SiCl4 post valve closed
11/28/2011	11:01:31 AM	Main Vac valve closed
11/28/2011	11:01:31 AM	Bypass valve closed
11/28/2011	11:01:31 AM	Bubbler valve closed
11/28/2011	11:01:31 AM	H2 valve opened
11/28/2011	11:01:31 AM	Helium MFC set to  0.000000
11/28/2011	11:01:31 AM	H2 MFC set to  500.000000
11/28/2011	11:01:31 AM	BCl3 MFC set to  0.000000
11/28/2011	11:01:31 AM	PHl3 MFC set to  0.000000
11/28/2011	11:01:31 AM	SiCl4 MFC set to  0.000000
11/28/2011	11:01:31 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:01:32 AM	Tube furnace set to 0
11/28/2011	11:02:35 AM	Helium valve closed
11/28/2011	11:02:35 AM	BCl3 valve closed
11/28/2011	11:02:35 AM	PH3 valve closed
11/28/2011	11:02:35 AM	SiCl4 pre valve closed
11/28/2011	11:02:35 AM	SiCl4 post valve closed
11/28/2011	11:02:35 AM	Main Vac valve closed
11/28/2011	11:02:35 AM	Bypass valve closed
11/28/2011	11:02:35 AM	H2 valve opened
11/28/2011	11:02:35 AM	Bubbler valve opened
11/28/2011	11:02:35 AM	Helium MFC set to  0.000000
11/28/2011	11:02:35 AM	H2 MFC set to  500.000000
11/28/2011	11:02:35 AM	BCl3 MFC set to  0.000000
11/28/2011	11:02:35 AM	PHl3 MFC set to  0.000000
11/28/2011	11:02:35 AM	SiCl4 MFC set to  0.000000
11/28/2011	11:02:35 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:02:36 AM	Tube furnace set to 0
11/28/2011	11:02:37 AM	Helium valve closed
11/28/2011	11:02:37 AM	BCl3 valve closed
11/28/2011	11:02:37 AM	PH3 valve closed
11/28/2011	11:02:37 AM	SiCl4 pre valve closed
11/28/2011	11:02:37 AM	SiCl4 post valve closed
11/28/2011	11:02:37 AM	Main Vac valve closed
11/28/2011	11:02:37 AM	Bypass valve closed
11/28/2011	11:02:37 AM	H2 valve opened
11/28/2011	11:02:37 AM	Bubbler valve opened
11/28/2011	11:02:37 AM	Helium MFC set to  0.000000
11/28/2011	11:02:37 AM	H2 MFC set to  500.000000
11/28/2011	11:02:37 AM	BCl3 MFC set to  0.000000
11/28/2011	11:02:37 AM	PHl3 MFC set to  0.000000
11/28/2011	11:02:37 AM	SiCl4 MFC set to  0.000000
11/28/2011	11:02:37 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:02:37 AM	Tube furnace set to 950
11/28/2011	11:27:37 AM	Helium valve closed
11/28/2011	11:27:37 AM	PH3 valve closed
11/28/2011	11:27:37 AM	SiCl4 pre valve closed
11/28/2011	11:27:37 AM	SiCl4 post valve closed
11/28/2011	11:27:37 AM	Main Vac valve closed
11/28/2011	11:27:37 AM	Bypass valve closed
11/28/2011	11:27:37 AM	H2 valve opened
11/28/2011	11:27:37 AM	BCl3 valve opened
11/28/2011	11:27:37 AM	Bubbler valve opened
11/28/2011	11:27:37 AM	Helium MFC set to  0.000000
11/28/2011	11:27:37 AM	H2 MFC set to  500.000000
11/28/2011	11:27:37 AM	BCl3 MFC set to  2.000000
11/28/2011	11:27:37 AM	PHl3 MFC set to  0.000000
11/28/2011	11:27:37 AM	SiCl4 MFC set to  0.000000
11/28/2011	11:27:37 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:27:37 AM	Tube furnace set to 950
11/28/2011	11:57:37 AM	Helium valve closed
11/28/2011	11:57:37 AM	BCl3 valve closed
11/28/2011	11:57:37 AM	PH3 valve closed
11/28/2011	11:57:37 AM	SiCl4 pre valve closed
11/28/2011	11:57:37 AM	SiCl4 post valve closed
11/28/2011	11:57:37 AM	Main Vac valve closed
11/28/2011	11:57:37 AM	Bypass valve closed
11/28/2011	11:57:37 AM	H2 valve opened
11/28/2011	11:57:37 AM	Bubbler valve opened
11/28/2011	11:57:37 AM	Helium MFC set to  0.000000
11/28/2011	11:57:37 AM	H2 MFC set to  500.000000
11/28/2011	11:57:37 AM	BCl3 MFC set to  0.000000
11/28/2011	11:57:37 AM	PHl3 MFC set to  0.000000
11/28/2011	11:57:37 AM	SiCl4 MFC set to  0.000000
11/28/2011	11:57:37 AM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:57:37 AM	Tube furnace set to 750
11/28/2011	12:07:37 PM	H2 valve closed
11/28/2011	12:07:37 PM	BCl3 valve closed
11/28/2011	12:07:37 PM	PH3 valve closed
11/28/2011	12:07:37 PM	SiCl4 pre valve closed
11/28/2011	12:07:37 PM	SiCl4 post valve closed
11/28/2011	12:07:37 PM	Main Vac valve closed
11/28/2011	12:07:37 PM	Bypass valve closed
11/28/2011	12:07:37 PM	Helium valve opened
11/28/2011	12:07:37 PM	Bubbler valve opened
11/28/2011	12:07:37 PM	Helium MFC set to  500.000000
11/28/2011	12:07:37 PM	H2 MFC set to  0.000000
11/28/2011	12:07:37 PM	BCl3 MFC set to  0.000000
11/28/2011	12:07:37 PM	PHl3 MFC set to  0.000000
11/28/2011	12:07:37 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:07:37 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:07:37 PM	Tube furnace set to 0
11/28/2011	12:20:16 PM	Helium valve closed
11/28/2011	12:20:16 PM	H2 valve closed
11/28/2011	12:20:16 PM	BCl3 valve closed
11/28/2011	12:20:16 PM	PH3 valve closed
11/28/2011	12:20:16 PM	SiCl4 pre valve closed
11/28/2011	12:20:16 PM	SiCl4 post valve closed
11/28/2011	12:20:16 PM	Main Vac valve closed
11/28/2011	12:20:16 PM	Bypass valve closed
11/28/2011	12:20:16 PM	Bubbler valve closed
11/28/2011	12:20:16 PM	Helium MFC set to  0.000000
11/28/2011	12:20:16 PM	H2 MFC set to  0.000000
11/28/2011	12:20:16 PM	BCl3 MFC set to  0.000000
11/28/2011	12:20:16 PM	PHl3 MFC set to  0.000000
11/28/2011	12:20:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:20:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:20:16 PM	Tube furnace set to 0
11/28/2011	12:20:17 PM	Run finished at 12:20 PM
11/28/2011	12:20:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	12:20:21 PM	Recipe started at 12:20 PM
11/28/2011	12:20:22 PM	Helium valve closed
11/28/2011	12:20:22 PM	H2 valve closed
11/28/2011	12:20:22 PM	BCl3 valve closed
11/28/2011	12:20:22 PM	PH3 valve closed
11/28/2011	12:20:22 PM	SiCl4 pre valve closed
11/28/2011	12:20:22 PM	SiCl4 post valve closed
11/28/2011	12:20:22 PM	Main Vac valve closed
11/28/2011	12:20:22 PM	Bypass valve closed
11/28/2011	12:20:22 PM	Bubbler valve closed
11/28/2011	12:20:22 PM	Helium MFC set to  0.000000
11/28/2011	12:20:22 PM	H2 MFC set to  0.000000
11/28/2011	12:20:22 PM	BCl3 MFC set to  0.000000
11/28/2011	12:20:22 PM	PHl3 MFC set to  0.000000
11/28/2011	12:20:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:20:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:20:22 PM	Tube furnace set to 0
11/28/2011	12:20:25 PM	H2 valve closed
11/28/2011	12:20:25 PM	BCl3 valve closed
11/28/2011	12:20:25 PM	PH3 valve closed
11/28/2011	12:20:25 PM	SiCl4 pre valve closed
11/28/2011	12:20:25 PM	SiCl4 post valve closed
11/28/2011	12:20:25 PM	Main Vac valve closed
11/28/2011	12:20:25 PM	Bypass valve closed
11/28/2011	12:20:25 PM	Bubbler valve closed
11/28/2011	12:20:25 PM	Helium valve opened
11/28/2011	12:20:25 PM	Helium MFC set to  500.000000
11/28/2011	12:20:25 PM	H2 MFC set to  0.000000
11/28/2011	12:20:25 PM	BCl3 MFC set to  0.000000
11/28/2011	12:20:25 PM	PHl3 MFC set to  0.000000
11/28/2011	12:20:25 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:20:25 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:20:25 PM	Tube furnace set to 0
11/28/2011	12:20:25 PM	Helium valve closed
11/28/2011	12:20:25 PM	H2 valve closed
11/28/2011	12:20:25 PM	BCl3 valve closed
11/28/2011	12:20:25 PM	PH3 valve closed
11/28/2011	12:20:25 PM	SiCl4 pre valve closed
11/28/2011	12:20:25 PM	SiCl4 post valve closed
11/28/2011	12:20:25 PM	Main Vac valve closed
11/28/2011	12:20:25 PM	Bypass valve closed
11/28/2011	12:20:25 PM	Bubbler valve closed
11/28/2011	12:20:25 PM	Helium MFC set to  0.000000
11/28/2011	12:20:25 PM	H2 MFC set to  0.000000
11/28/2011	12:20:25 PM	BCl3 MFC set to  0.000000
11/28/2011	12:20:25 PM	PHl3 MFC set to  0.000000
11/28/2011	12:20:25 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:20:25 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:20:25 PM	Tube furnace set to 0
11/28/2011	12:20:26 PM	Run finished at 12:20 PM
11/28/2011	12:20:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	12:20:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	12:20:51 PM	Recipe started at 12:20 PM
11/28/2011	12:20:51 PM	Helium valve closed
11/28/2011	12:20:51 PM	H2 valve closed
11/28/2011	12:20:51 PM	BCl3 valve closed
11/28/2011	12:20:51 PM	PH3 valve closed
11/28/2011	12:20:51 PM	SiCl4 pre valve closed
11/28/2011	12:20:51 PM	SiCl4 post valve closed
11/28/2011	12:20:51 PM	Main Vac valve closed
11/28/2011	12:20:51 PM	Bubbler valve closed
11/28/2011	12:20:51 PM	Bypass valve opened
11/28/2011	12:20:51 PM	Helium MFC set to  0.000000
11/28/2011	12:20:51 PM	H2 MFC set to  0.000000
11/28/2011	12:20:51 PM	BCl3 MFC set to  0.000000
11/28/2011	12:20:51 PM	PHl3 MFC set to  0.000000
11/28/2011	12:20:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:20:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:20:51 PM	Tube furnace set to 0
11/28/2011	12:21:55 PM	Helium valve closed
11/28/2011	12:21:55 PM	H2 valve closed
11/28/2011	12:21:55 PM	BCl3 valve closed
11/28/2011	12:21:55 PM	PH3 valve closed
11/28/2011	12:21:55 PM	SiCl4 pre valve closed
11/28/2011	12:21:55 PM	SiCl4 post valve closed
11/28/2011	12:21:55 PM	Main Vac valve closed
11/28/2011	12:21:55 PM	Bubbler valve closed
11/28/2011	12:21:55 PM	Bypass valve opened
11/28/2011	12:21:55 PM	Helium MFC set to  0.000000
11/28/2011	12:21:55 PM	H2 MFC set to  0.000000
11/28/2011	12:21:55 PM	BCl3 MFC set to  0.000000
11/28/2011	12:21:55 PM	PHl3 MFC set to  0.000000
11/28/2011	12:21:55 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:21:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:21:55 PM	Tube furnace set to 0
11/28/2011	12:22:55 PM	Helium valve closed
11/28/2011	12:22:55 PM	H2 valve closed
11/28/2011	12:22:55 PM	BCl3 valve closed
11/28/2011	12:22:55 PM	PH3 valve closed
11/28/2011	12:22:55 PM	SiCl4 pre valve closed
11/28/2011	12:22:55 PM	SiCl4 post valve closed
11/28/2011	12:22:55 PM	Bypass valve closed
11/28/2011	12:22:55 PM	Bubbler valve closed
11/28/2011	12:22:55 PM	Main Vac valve opened
11/28/2011	12:22:55 PM	Helium MFC set to  0.000000
11/28/2011	12:22:55 PM	H2 MFC set to  0.000000
11/28/2011	12:22:55 PM	BCl3 MFC set to  0.000000
11/28/2011	12:22:55 PM	PHl3 MFC set to  0.000000
11/28/2011	12:22:55 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:22:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:22:55 PM	Tube furnace set to 0
11/28/2011	12:22:56 PM	Run finished at 12:22 PM
11/28/2011	12:22:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	12:24:01 PM	Recipe started at 12:23 PM
11/28/2011	12:24:01 PM	Helium valve closed
11/28/2011	12:24:01 PM	H2 valve closed
11/28/2011	12:24:01 PM	BCl3 valve closed
11/28/2011	12:24:01 PM	PH3 valve closed
11/28/2011	12:24:01 PM	SiCl4 pre valve closed
11/28/2011	12:24:01 PM	SiCl4 post valve closed
11/28/2011	12:24:01 PM	Bypass valve closed
11/28/2011	12:24:01 PM	Bubbler valve closed
11/28/2011	12:24:01 PM	Main Vac valve opened
11/28/2011	12:24:01 PM	Helium MFC set to  0.000000
11/28/2011	12:24:01 PM	H2 MFC set to  0.000000
11/28/2011	12:24:01 PM	BCl3 MFC set to  0.000000
11/28/2011	12:24:01 PM	PHl3 MFC set to  0.000000
11/28/2011	12:24:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:24:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:24:01 PM	Tube furnace set to 150
11/28/2011	12:24:31 PM	H2 valve closed
11/28/2011	12:24:31 PM	BCl3 valve closed
11/28/2011	12:24:31 PM	PH3 valve closed
11/28/2011	12:24:31 PM	SiCl4 pre valve closed
11/28/2011	12:24:31 PM	SiCl4 post valve closed
11/28/2011	12:24:31 PM	Bypass valve closed
11/28/2011	12:24:31 PM	Bubbler valve closed
11/28/2011	12:24:31 PM	Helium valve opened
11/28/2011	12:24:31 PM	Main Vac valve opened
11/28/2011	12:24:31 PM	Helium MFC set to  20.000000
11/28/2011	12:24:31 PM	H2 MFC set to  0.000000
11/28/2011	12:24:31 PM	BCl3 MFC set to  0.000000
11/28/2011	12:24:31 PM	PHl3 MFC set to  0.000000
11/28/2011	12:24:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:24:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:24:31 PM	Tube furnace set to 150
11/28/2011	12:25:01 PM	Helium valve closed
11/28/2011	12:25:01 PM	H2 valve closed
11/28/2011	12:25:01 PM	BCl3 valve closed
11/28/2011	12:25:01 PM	PH3 valve closed
11/28/2011	12:25:01 PM	SiCl4 pre valve closed
11/28/2011	12:25:01 PM	SiCl4 post valve closed
11/28/2011	12:25:01 PM	Bypass valve closed
11/28/2011	12:25:01 PM	Bubbler valve closed
11/28/2011	12:25:01 PM	Main Vac valve opened
11/28/2011	12:25:01 PM	Helium MFC set to  0.000000
11/28/2011	12:25:01 PM	H2 MFC set to  0.000000
11/28/2011	12:25:01 PM	BCl3 MFC set to  0.000000
11/28/2011	12:25:01 PM	PHl3 MFC set to  0.000000
11/28/2011	12:25:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:25:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:25:02 PM	Tube furnace set to 150
11/28/2011	12:25:32 PM	H2 valve closed
11/28/2011	12:25:32 PM	BCl3 valve closed
11/28/2011	12:25:32 PM	PH3 valve closed
11/28/2011	12:25:32 PM	SiCl4 pre valve closed
11/28/2011	12:25:32 PM	SiCl4 post valve closed
11/28/2011	12:25:32 PM	Bypass valve closed
11/28/2011	12:25:32 PM	Bubbler valve closed
11/28/2011	12:25:32 PM	Helium valve opened
11/28/2011	12:25:32 PM	Main Vac valve opened
11/28/2011	12:25:32 PM	Helium MFC set to  20.000000
11/28/2011	12:25:32 PM	H2 MFC set to  0.000000
11/28/2011	12:25:32 PM	BCl3 MFC set to  0.000000
11/28/2011	12:25:32 PM	PHl3 MFC set to  0.000000
11/28/2011	12:25:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:25:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:25:32 PM	Tube furnace set to 150
11/28/2011	12:26:02 PM	Helium valve closed
11/28/2011	12:26:02 PM	H2 valve closed
11/28/2011	12:26:02 PM	BCl3 valve closed
11/28/2011	12:26:02 PM	PH3 valve closed
11/28/2011	12:26:02 PM	SiCl4 pre valve closed
11/28/2011	12:26:02 PM	SiCl4 post valve closed
11/28/2011	12:26:02 PM	Bypass valve closed
11/28/2011	12:26:02 PM	Bubbler valve closed
11/28/2011	12:26:02 PM	Main Vac valve opened
11/28/2011	12:26:02 PM	Helium MFC set to  0.000000
11/28/2011	12:26:02 PM	H2 MFC set to  0.000000
11/28/2011	12:26:02 PM	BCl3 MFC set to  0.000000
11/28/2011	12:26:02 PM	PHl3 MFC set to  0.000000
11/28/2011	12:26:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:26:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:26:02 PM	Tube furnace set to 150
11/28/2011	12:26:32 PM	H2 valve closed
11/28/2011	12:26:32 PM	BCl3 valve closed
11/28/2011	12:26:32 PM	PH3 valve closed
11/28/2011	12:26:32 PM	SiCl4 pre valve closed
11/28/2011	12:26:32 PM	SiCl4 post valve closed
11/28/2011	12:26:32 PM	Bypass valve closed
11/28/2011	12:26:32 PM	Bubbler valve closed
11/28/2011	12:26:32 PM	Helium valve opened
11/28/2011	12:26:32 PM	Main Vac valve opened
11/28/2011	12:26:32 PM	Helium MFC set to  20.000000
11/28/2011	12:26:32 PM	H2 MFC set to  0.000000
11/28/2011	12:26:32 PM	BCl3 MFC set to  0.000000
11/28/2011	12:26:32 PM	PHl3 MFC set to  0.000000
11/28/2011	12:26:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:26:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:26:32 PM	Tube furnace set to 150
11/28/2011	12:27:02 PM	Helium valve closed
11/28/2011	12:27:02 PM	H2 valve closed
11/28/2011	12:27:02 PM	BCl3 valve closed
11/28/2011	12:27:02 PM	PH3 valve closed
11/28/2011	12:27:02 PM	SiCl4 pre valve closed
11/28/2011	12:27:02 PM	SiCl4 post valve closed
11/28/2011	12:27:02 PM	Bypass valve closed
11/28/2011	12:27:02 PM	Bubbler valve closed
11/28/2011	12:27:02 PM	Main Vac valve opened
11/28/2011	12:27:02 PM	Helium MFC set to  0.000000
11/28/2011	12:27:02 PM	H2 MFC set to  0.000000
11/28/2011	12:27:02 PM	BCl3 MFC set to  0.000000
11/28/2011	12:27:02 PM	PHl3 MFC set to  0.000000
11/28/2011	12:27:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:27:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:27:02 PM	Tube furnace set to 150
11/28/2011	12:27:32 PM	H2 valve closed
11/28/2011	12:27:32 PM	BCl3 valve closed
11/28/2011	12:27:32 PM	PH3 valve closed
11/28/2011	12:27:32 PM	SiCl4 pre valve closed
11/28/2011	12:27:32 PM	SiCl4 post valve closed
11/28/2011	12:27:32 PM	Bypass valve closed
11/28/2011	12:27:32 PM	Bubbler valve closed
11/28/2011	12:27:32 PM	Helium valve opened
11/28/2011	12:27:32 PM	Main Vac valve opened
11/28/2011	12:27:32 PM	Helium MFC set to  20.000000
11/28/2011	12:27:32 PM	H2 MFC set to  0.000000
11/28/2011	12:27:32 PM	BCl3 MFC set to  0.000000
11/28/2011	12:27:32 PM	PHl3 MFC set to  0.000000
11/28/2011	12:27:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:27:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:27:33 PM	Tube furnace set to 150
11/28/2011	12:28:03 PM	Helium valve closed
11/28/2011	12:28:03 PM	H2 valve closed
11/28/2011	12:28:03 PM	BCl3 valve closed
11/28/2011	12:28:03 PM	PH3 valve closed
11/28/2011	12:28:03 PM	SiCl4 pre valve closed
11/28/2011	12:28:03 PM	SiCl4 post valve closed
11/28/2011	12:28:03 PM	Bypass valve closed
11/28/2011	12:28:03 PM	Bubbler valve closed
11/28/2011	12:28:03 PM	Main Vac valve opened
11/28/2011	12:28:03 PM	Helium MFC set to  0.000000
11/28/2011	12:28:03 PM	H2 MFC set to  0.000000
11/28/2011	12:28:03 PM	BCl3 MFC set to  0.000000
11/28/2011	12:28:03 PM	PHl3 MFC set to  0.000000
11/28/2011	12:28:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:28:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:28:03 PM	Tube furnace set to 150
11/28/2011	12:28:33 PM	H2 valve closed
11/28/2011	12:28:33 PM	BCl3 valve closed
11/28/2011	12:28:33 PM	PH3 valve closed
11/28/2011	12:28:33 PM	SiCl4 pre valve closed
11/28/2011	12:28:33 PM	SiCl4 post valve closed
11/28/2011	12:28:33 PM	Bypass valve closed
11/28/2011	12:28:33 PM	Bubbler valve closed
11/28/2011	12:28:33 PM	Helium valve opened
11/28/2011	12:28:33 PM	Main Vac valve opened
11/28/2011	12:28:33 PM	Helium MFC set to  20.000000
11/28/2011	12:28:33 PM	H2 MFC set to  0.000000
11/28/2011	12:28:33 PM	BCl3 MFC set to  0.000000
11/28/2011	12:28:33 PM	PHl3 MFC set to  0.000000
11/28/2011	12:28:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:28:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:28:33 PM	Tube furnace set to 150
11/28/2011	12:29:03 PM	Helium valve closed
11/28/2011	12:29:03 PM	H2 valve closed
11/28/2011	12:29:03 PM	BCl3 valve closed
11/28/2011	12:29:03 PM	PH3 valve closed
11/28/2011	12:29:03 PM	SiCl4 pre valve closed
11/28/2011	12:29:03 PM	SiCl4 post valve closed
11/28/2011	12:29:03 PM	Bypass valve closed
11/28/2011	12:29:03 PM	Bubbler valve closed
11/28/2011	12:29:03 PM	Main Vac valve opened
11/28/2011	12:29:03 PM	Helium MFC set to  0.000000
11/28/2011	12:29:03 PM	H2 MFC set to  0.000000
11/28/2011	12:29:03 PM	BCl3 MFC set to  0.000000
11/28/2011	12:29:03 PM	PHl3 MFC set to  0.000000
11/28/2011	12:29:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:29:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:29:03 PM	Tube furnace set to 150
11/28/2011	12:29:33 PM	H2 valve closed
11/28/2011	12:29:33 PM	BCl3 valve closed
11/28/2011	12:29:33 PM	PH3 valve closed
11/28/2011	12:29:33 PM	SiCl4 pre valve closed
11/28/2011	12:29:33 PM	SiCl4 post valve closed
11/28/2011	12:29:33 PM	Bypass valve closed
11/28/2011	12:29:33 PM	Bubbler valve closed
11/28/2011	12:29:33 PM	Helium valve opened
11/28/2011	12:29:33 PM	Main Vac valve opened
11/28/2011	12:29:33 PM	Helium MFC set to  20.000000
11/28/2011	12:29:33 PM	H2 MFC set to  0.000000
11/28/2011	12:29:33 PM	BCl3 MFC set to  0.000000
11/28/2011	12:29:33 PM	PHl3 MFC set to  0.000000
11/28/2011	12:29:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:29:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:29:33 PM	Tube furnace set to 150
11/28/2011	12:30:03 PM	Helium valve closed
11/28/2011	12:30:03 PM	H2 valve closed
11/28/2011	12:30:03 PM	BCl3 valve closed
11/28/2011	12:30:03 PM	PH3 valve closed
11/28/2011	12:30:03 PM	SiCl4 pre valve closed
11/28/2011	12:30:03 PM	SiCl4 post valve closed
11/28/2011	12:30:03 PM	Bypass valve closed
11/28/2011	12:30:03 PM	Bubbler valve closed
11/28/2011	12:30:03 PM	Main Vac valve opened
11/28/2011	12:30:03 PM	Helium MFC set to  0.000000
11/28/2011	12:30:03 PM	H2 MFC set to  0.000000
11/28/2011	12:30:03 PM	BCl3 MFC set to  0.000000
11/28/2011	12:30:03 PM	PHl3 MFC set to  0.000000
11/28/2011	12:30:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:30:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:30:04 PM	Tube furnace set to 150
11/28/2011	12:30:34 PM	H2 valve closed
11/28/2011	12:30:34 PM	BCl3 valve closed
11/28/2011	12:30:34 PM	PH3 valve closed
11/28/2011	12:30:34 PM	SiCl4 pre valve closed
11/28/2011	12:30:34 PM	SiCl4 post valve closed
11/28/2011	12:30:34 PM	Bypass valve closed
11/28/2011	12:30:34 PM	Bubbler valve closed
11/28/2011	12:30:34 PM	Helium valve opened
11/28/2011	12:30:34 PM	Main Vac valve opened
11/28/2011	12:30:34 PM	Helium MFC set to  20.000000
11/28/2011	12:30:34 PM	H2 MFC set to  0.000000
11/28/2011	12:30:34 PM	BCl3 MFC set to  0.000000
11/28/2011	12:30:34 PM	PHl3 MFC set to  0.000000
11/28/2011	12:30:34 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:30:34 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:30:34 PM	Tube furnace set to 150
11/28/2011	12:31:04 PM	Helium valve closed
11/28/2011	12:31:04 PM	H2 valve closed
11/28/2011	12:31:04 PM	BCl3 valve closed
11/28/2011	12:31:04 PM	PH3 valve closed
11/28/2011	12:31:04 PM	SiCl4 pre valve closed
11/28/2011	12:31:04 PM	SiCl4 post valve closed
11/28/2011	12:31:04 PM	Bypass valve closed
11/28/2011	12:31:04 PM	Bubbler valve closed
11/28/2011	12:31:04 PM	Main Vac valve opened
11/28/2011	12:31:04 PM	Helium MFC set to  0.000000
11/28/2011	12:31:04 PM	H2 MFC set to  0.000000
11/28/2011	12:31:04 PM	BCl3 MFC set to  0.000000
11/28/2011	12:31:04 PM	PHl3 MFC set to  0.000000
11/28/2011	12:31:04 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:31:04 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:31:04 PM	Tube furnace set to 150
11/28/2011	12:31:34 PM	H2 valve closed
11/28/2011	12:31:34 PM	BCl3 valve closed
11/28/2011	12:31:34 PM	PH3 valve closed
11/28/2011	12:31:34 PM	SiCl4 pre valve closed
11/28/2011	12:31:34 PM	SiCl4 post valve closed
11/28/2011	12:31:34 PM	Bypass valve closed
11/28/2011	12:31:34 PM	Bubbler valve closed
11/28/2011	12:31:34 PM	Helium valve opened
11/28/2011	12:31:34 PM	Main Vac valve opened
11/28/2011	12:31:34 PM	Helium MFC set to  20.000000
11/28/2011	12:31:34 PM	H2 MFC set to  0.000000
11/28/2011	12:31:34 PM	BCl3 MFC set to  0.000000
11/28/2011	12:31:34 PM	PHl3 MFC set to  0.000000
11/28/2011	12:31:34 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:31:34 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:31:34 PM	Tube furnace set to 150
11/28/2011	12:32:04 PM	Helium valve closed
11/28/2011	12:32:04 PM	H2 valve closed
11/28/2011	12:32:04 PM	BCl3 valve closed
11/28/2011	12:32:04 PM	PH3 valve closed
11/28/2011	12:32:04 PM	SiCl4 pre valve closed
11/28/2011	12:32:04 PM	SiCl4 post valve closed
11/28/2011	12:32:04 PM	Bypass valve closed
11/28/2011	12:32:04 PM	Bubbler valve closed
11/28/2011	12:32:04 PM	Main Vac valve opened
11/28/2011	12:32:04 PM	Helium MFC set to  0.000000
11/28/2011	12:32:04 PM	H2 MFC set to  0.000000
11/28/2011	12:32:04 PM	BCl3 MFC set to  0.000000
11/28/2011	12:32:04 PM	PHl3 MFC set to  0.000000
11/28/2011	12:32:04 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:32:04 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:32:04 PM	Tube furnace set to 150
11/28/2011	12:32:34 PM	H2 valve closed
11/28/2011	12:32:34 PM	BCl3 valve closed
11/28/2011	12:32:34 PM	PH3 valve closed
11/28/2011	12:32:34 PM	SiCl4 pre valve closed
11/28/2011	12:32:34 PM	SiCl4 post valve closed
11/28/2011	12:32:34 PM	Bypass valve closed
11/28/2011	12:32:34 PM	Bubbler valve closed
11/28/2011	12:32:35 PM	Helium valve opened
11/28/2011	12:32:35 PM	Main Vac valve opened
11/28/2011	12:32:35 PM	Helium MFC set to  20.000000
11/28/2011	12:32:35 PM	H2 MFC set to  0.000000
11/28/2011	12:32:35 PM	BCl3 MFC set to  0.000000
11/28/2011	12:32:35 PM	PHl3 MFC set to  0.000000
11/28/2011	12:32:35 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:32:35 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:32:35 PM	Tube furnace set to 150
11/28/2011	12:33:05 PM	Helium valve closed
11/28/2011	12:33:05 PM	H2 valve closed
11/28/2011	12:33:05 PM	BCl3 valve closed
11/28/2011	12:33:05 PM	PH3 valve closed
11/28/2011	12:33:05 PM	SiCl4 pre valve closed
11/28/2011	12:33:05 PM	SiCl4 post valve closed
11/28/2011	12:33:05 PM	Bypass valve closed
11/28/2011	12:33:05 PM	Bubbler valve closed
11/28/2011	12:33:05 PM	Main Vac valve opened
11/28/2011	12:33:05 PM	Helium MFC set to  0.000000
11/28/2011	12:33:05 PM	H2 MFC set to  0.000000
11/28/2011	12:33:05 PM	BCl3 MFC set to  0.000000
11/28/2011	12:33:05 PM	PHl3 MFC set to  0.000000
11/28/2011	12:33:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:33:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:33:05 PM	Tube furnace set to 150
11/28/2011	12:33:35 PM	H2 valve closed
11/28/2011	12:33:35 PM	BCl3 valve closed
11/28/2011	12:33:35 PM	PH3 valve closed
11/28/2011	12:33:35 PM	SiCl4 pre valve closed
11/28/2011	12:33:35 PM	SiCl4 post valve closed
11/28/2011	12:33:35 PM	Bypass valve closed
11/28/2011	12:33:35 PM	Bubbler valve closed
11/28/2011	12:33:35 PM	Helium valve opened
11/28/2011	12:33:35 PM	Main Vac valve opened
11/28/2011	12:33:35 PM	Helium MFC set to  20.000000
11/28/2011	12:33:35 PM	H2 MFC set to  0.000000
11/28/2011	12:33:35 PM	BCl3 MFC set to  0.000000
11/28/2011	12:33:35 PM	PHl3 MFC set to  0.000000
11/28/2011	12:33:35 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:33:35 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:33:35 PM	Tube furnace set to 150
11/28/2011	12:34:05 PM	Helium valve closed
11/28/2011	12:34:05 PM	H2 valve closed
11/28/2011	12:34:05 PM	BCl3 valve closed
11/28/2011	12:34:05 PM	PH3 valve closed
11/28/2011	12:34:05 PM	SiCl4 pre valve closed
11/28/2011	12:34:05 PM	SiCl4 post valve closed
11/28/2011	12:34:05 PM	Bypass valve closed
11/28/2011	12:34:05 PM	Bubbler valve closed
11/28/2011	12:34:05 PM	Main Vac valve opened
11/28/2011	12:34:05 PM	Helium MFC set to  0.000000
11/28/2011	12:34:05 PM	H2 MFC set to  0.000000
11/28/2011	12:34:05 PM	BCl3 MFC set to  0.000000
11/28/2011	12:34:05 PM	PHl3 MFC set to  0.000000
11/28/2011	12:34:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:34:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:34:05 PM	Tube furnace set to 150
11/28/2011	12:34:06 PM	Run finished at 12:34 PM
11/28/2011	12:35:37 PM	Recipe started at 12:35 PM
11/28/2011	12:35:38 PM	Helium valve closed
11/28/2011	12:35:38 PM	H2 valve closed
11/28/2011	12:35:38 PM	BCl3 valve closed
11/28/2011	12:35:38 PM	PH3 valve closed
11/28/2011	12:35:38 PM	SiCl4 pre valve closed
11/28/2011	12:35:38 PM	SiCl4 post valve closed
11/28/2011	12:35:38 PM	Bypass valve closed
11/28/2011	12:35:38 PM	Bubbler valve closed
11/28/2011	12:35:38 PM	Main Vac valve opened
11/28/2011	12:35:38 PM	Helium MFC set to  0.000000
11/28/2011	12:35:38 PM	H2 MFC set to  0.000000
11/28/2011	12:35:38 PM	BCl3 MFC set to  0.000000
11/28/2011	12:35:38 PM	PHl3 MFC set to  0.000000
11/28/2011	12:35:38 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:35:38 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:35:38 PM	Tube furnace set to 150
11/28/2011	12:36:08 PM	H2 valve closed
11/28/2011	12:36:08 PM	BCl3 valve closed
11/28/2011	12:36:08 PM	PH3 valve closed
11/28/2011	12:36:08 PM	SiCl4 pre valve closed
11/28/2011	12:36:08 PM	SiCl4 post valve closed
11/28/2011	12:36:08 PM	Bypass valve closed
11/28/2011	12:36:08 PM	Bubbler valve closed
11/28/2011	12:36:08 PM	Helium valve opened
11/28/2011	12:36:08 PM	Main Vac valve opened
11/28/2011	12:36:08 PM	Helium MFC set to  20.000000
11/28/2011	12:36:08 PM	H2 MFC set to  0.000000
11/28/2011	12:36:08 PM	BCl3 MFC set to  0.000000
11/28/2011	12:36:08 PM	PHl3 MFC set to  0.000000
11/28/2011	12:36:08 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:36:08 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:36:08 PM	Tube furnace set to 150
11/28/2011	12:36:38 PM	Helium valve closed
11/28/2011	12:36:38 PM	H2 valve closed
11/28/2011	12:36:38 PM	BCl3 valve closed
11/28/2011	12:36:38 PM	PH3 valve closed
11/28/2011	12:36:38 PM	SiCl4 pre valve closed
11/28/2011	12:36:38 PM	SiCl4 post valve closed
11/28/2011	12:36:38 PM	Bypass valve closed
11/28/2011	12:36:38 PM	Bubbler valve closed
11/28/2011	12:36:38 PM	Main Vac valve opened
11/28/2011	12:36:38 PM	Helium MFC set to  0.000000
11/28/2011	12:36:38 PM	H2 MFC set to  0.000000
11/28/2011	12:36:38 PM	BCl3 MFC set to  0.000000
11/28/2011	12:36:38 PM	PHl3 MFC set to  0.000000
11/28/2011	12:36:38 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:36:38 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:36:38 PM	Tube furnace set to 150
11/28/2011	12:37:08 PM	H2 valve closed
11/28/2011	12:37:08 PM	BCl3 valve closed
11/28/2011	12:37:08 PM	PH3 valve closed
11/28/2011	12:37:08 PM	SiCl4 pre valve closed
11/28/2011	12:37:08 PM	SiCl4 post valve closed
11/28/2011	12:37:08 PM	Bypass valve closed
11/28/2011	12:37:08 PM	Bubbler valve closed
11/28/2011	12:37:08 PM	Helium valve opened
11/28/2011	12:37:08 PM	Main Vac valve opened
11/28/2011	12:37:08 PM	Helium MFC set to  20.000000
11/28/2011	12:37:08 PM	H2 MFC set to  0.000000
11/28/2011	12:37:08 PM	BCl3 MFC set to  0.000000
11/28/2011	12:37:08 PM	PHl3 MFC set to  0.000000
11/28/2011	12:37:08 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:37:08 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:37:08 PM	Tube furnace set to 150
11/28/2011	12:37:38 PM	Helium valve closed
11/28/2011	12:37:38 PM	H2 valve closed
11/28/2011	12:37:38 PM	BCl3 valve closed
11/28/2011	12:37:38 PM	PH3 valve closed
11/28/2011	12:37:38 PM	SiCl4 pre valve closed
11/28/2011	12:37:38 PM	SiCl4 post valve closed
11/28/2011	12:37:38 PM	Bypass valve closed
11/28/2011	12:37:38 PM	Bubbler valve closed
11/28/2011	12:37:38 PM	Main Vac valve opened
11/28/2011	12:37:38 PM	Helium MFC set to  0.000000
11/28/2011	12:37:38 PM	H2 MFC set to  0.000000
11/28/2011	12:37:38 PM	BCl3 MFC set to  0.000000
11/28/2011	12:37:38 PM	PHl3 MFC set to  0.000000
11/28/2011	12:37:38 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:37:38 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:37:39 PM	Tube furnace set to 150
11/28/2011	12:38:09 PM	H2 valve closed
11/28/2011	12:38:09 PM	BCl3 valve closed
11/28/2011	12:38:09 PM	PH3 valve closed
11/28/2011	12:38:09 PM	SiCl4 pre valve closed
11/28/2011	12:38:09 PM	SiCl4 post valve closed
11/28/2011	12:38:09 PM	Bypass valve closed
11/28/2011	12:38:09 PM	Bubbler valve closed
11/28/2011	12:38:09 PM	Helium valve opened
11/28/2011	12:38:09 PM	Main Vac valve opened
11/28/2011	12:38:09 PM	Helium MFC set to  20.000000
11/28/2011	12:38:09 PM	H2 MFC set to  0.000000
11/28/2011	12:38:09 PM	BCl3 MFC set to  0.000000
11/28/2011	12:38:09 PM	PHl3 MFC set to  0.000000
11/28/2011	12:38:09 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:38:09 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:38:09 PM	Tube furnace set to 150
11/28/2011	12:38:39 PM	Helium valve closed
11/28/2011	12:38:39 PM	H2 valve closed
11/28/2011	12:38:39 PM	BCl3 valve closed
11/28/2011	12:38:39 PM	PH3 valve closed
11/28/2011	12:38:39 PM	SiCl4 pre valve closed
11/28/2011	12:38:39 PM	SiCl4 post valve closed
11/28/2011	12:38:39 PM	Bypass valve closed
11/28/2011	12:38:39 PM	Bubbler valve closed
11/28/2011	12:38:39 PM	Main Vac valve opened
11/28/2011	12:38:39 PM	Helium MFC set to  0.000000
11/28/2011	12:38:39 PM	H2 MFC set to  0.000000
11/28/2011	12:38:39 PM	BCl3 MFC set to  0.000000
11/28/2011	12:38:39 PM	PHl3 MFC set to  0.000000
11/28/2011	12:38:39 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:38:39 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:38:39 PM	Tube furnace set to 150
11/28/2011	12:39:09 PM	H2 valve closed
11/28/2011	12:39:09 PM	BCl3 valve closed
11/28/2011	12:39:09 PM	PH3 valve closed
11/28/2011	12:39:09 PM	SiCl4 pre valve closed
11/28/2011	12:39:09 PM	SiCl4 post valve closed
11/28/2011	12:39:09 PM	Bypass valve closed
11/28/2011	12:39:09 PM	Bubbler valve closed
11/28/2011	12:39:09 PM	Helium valve opened
11/28/2011	12:39:09 PM	Main Vac valve opened
11/28/2011	12:39:09 PM	Helium MFC set to  20.000000
11/28/2011	12:39:09 PM	H2 MFC set to  0.000000
11/28/2011	12:39:09 PM	BCl3 MFC set to  0.000000
11/28/2011	12:39:09 PM	PHl3 MFC set to  0.000000
11/28/2011	12:39:09 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:39:09 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:39:09 PM	Tube furnace set to 150
11/28/2011	12:39:39 PM	Helium valve closed
11/28/2011	12:39:39 PM	H2 valve closed
11/28/2011	12:39:39 PM	BCl3 valve closed
11/28/2011	12:39:39 PM	PH3 valve closed
11/28/2011	12:39:39 PM	SiCl4 pre valve closed
11/28/2011	12:39:39 PM	SiCl4 post valve closed
11/28/2011	12:39:39 PM	Bypass valve closed
11/28/2011	12:39:39 PM	Bubbler valve closed
11/28/2011	12:39:39 PM	Main Vac valve opened
11/28/2011	12:39:39 PM	Helium MFC set to  0.000000
11/28/2011	12:39:39 PM	H2 MFC set to  0.000000
11/28/2011	12:39:39 PM	BCl3 MFC set to  0.000000
11/28/2011	12:39:39 PM	PHl3 MFC set to  0.000000
11/28/2011	12:39:39 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:39:39 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:39:39 PM	Tube furnace set to 150
11/28/2011	12:40:09 PM	H2 valve closed
11/28/2011	12:40:09 PM	BCl3 valve closed
11/28/2011	12:40:09 PM	PH3 valve closed
11/28/2011	12:40:09 PM	SiCl4 pre valve closed
11/28/2011	12:40:09 PM	SiCl4 post valve closed
11/28/2011	12:40:09 PM	Bypass valve closed
11/28/2011	12:40:09 PM	Bubbler valve closed
11/28/2011	12:40:09 PM	Helium valve opened
11/28/2011	12:40:09 PM	Main Vac valve opened
11/28/2011	12:40:09 PM	Helium MFC set to  20.000000
11/28/2011	12:40:09 PM	H2 MFC set to  0.000000
11/28/2011	12:40:09 PM	BCl3 MFC set to  0.000000
11/28/2011	12:40:09 PM	PHl3 MFC set to  0.000000
11/28/2011	12:40:09 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:40:09 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:40:10 PM	Tube furnace set to 150
11/28/2011	12:40:40 PM	Helium valve closed
11/28/2011	12:40:40 PM	H2 valve closed
11/28/2011	12:40:40 PM	BCl3 valve closed
11/28/2011	12:40:40 PM	PH3 valve closed
11/28/2011	12:40:40 PM	SiCl4 pre valve closed
11/28/2011	12:40:40 PM	SiCl4 post valve closed
11/28/2011	12:40:40 PM	Bypass valve closed
11/28/2011	12:40:40 PM	Bubbler valve closed
11/28/2011	12:40:40 PM	Main Vac valve opened
11/28/2011	12:40:40 PM	Helium MFC set to  0.000000
11/28/2011	12:40:40 PM	H2 MFC set to  0.000000
11/28/2011	12:40:40 PM	BCl3 MFC set to  0.000000
11/28/2011	12:40:40 PM	PHl3 MFC set to  0.000000
11/28/2011	12:40:40 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:40:40 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:40:40 PM	Tube furnace set to 150
11/28/2011	12:41:10 PM	H2 valve closed
11/28/2011	12:41:10 PM	BCl3 valve closed
11/28/2011	12:41:10 PM	PH3 valve closed
11/28/2011	12:41:10 PM	SiCl4 pre valve closed
11/28/2011	12:41:10 PM	SiCl4 post valve closed
11/28/2011	12:41:10 PM	Bypass valve closed
11/28/2011	12:41:10 PM	Bubbler valve closed
11/28/2011	12:41:10 PM	Helium valve opened
11/28/2011	12:41:10 PM	Main Vac valve opened
11/28/2011	12:41:10 PM	Helium MFC set to  20.000000
11/28/2011	12:41:10 PM	H2 MFC set to  0.000000
11/28/2011	12:41:10 PM	BCl3 MFC set to  0.000000
11/28/2011	12:41:10 PM	PHl3 MFC set to  0.000000
11/28/2011	12:41:10 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:41:10 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:41:10 PM	Tube furnace set to 150
11/28/2011	12:41:40 PM	Helium valve closed
11/28/2011	12:41:40 PM	H2 valve closed
11/28/2011	12:41:40 PM	BCl3 valve closed
11/28/2011	12:41:40 PM	PH3 valve closed
11/28/2011	12:41:40 PM	SiCl4 pre valve closed
11/28/2011	12:41:40 PM	SiCl4 post valve closed
11/28/2011	12:41:40 PM	Bypass valve closed
11/28/2011	12:41:40 PM	Bubbler valve closed
11/28/2011	12:41:40 PM	Main Vac valve opened
11/28/2011	12:41:40 PM	Helium MFC set to  0.000000
11/28/2011	12:41:40 PM	H2 MFC set to  0.000000
11/28/2011	12:41:40 PM	BCl3 MFC set to  0.000000
11/28/2011	12:41:40 PM	PHl3 MFC set to  0.000000
11/28/2011	12:41:40 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:41:40 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:41:40 PM	Tube furnace set to 150
11/28/2011	12:42:10 PM	H2 valve closed
11/28/2011	12:42:10 PM	BCl3 valve closed
11/28/2011	12:42:10 PM	PH3 valve closed
11/28/2011	12:42:10 PM	SiCl4 pre valve closed
11/28/2011	12:42:10 PM	SiCl4 post valve closed
11/28/2011	12:42:10 PM	Bypass valve closed
11/28/2011	12:42:10 PM	Bubbler valve closed
11/28/2011	12:42:10 PM	Helium valve opened
11/28/2011	12:42:10 PM	Main Vac valve opened
11/28/2011	12:42:10 PM	Helium MFC set to  20.000000
11/28/2011	12:42:10 PM	H2 MFC set to  0.000000
11/28/2011	12:42:10 PM	BCl3 MFC set to  0.000000
11/28/2011	12:42:10 PM	PHl3 MFC set to  0.000000
11/28/2011	12:42:10 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:42:10 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:42:10 PM	Tube furnace set to 150
11/28/2011	12:42:40 PM	Helium valve closed
11/28/2011	12:42:40 PM	H2 valve closed
11/28/2011	12:42:40 PM	BCl3 valve closed
11/28/2011	12:42:40 PM	PH3 valve closed
11/28/2011	12:42:40 PM	SiCl4 pre valve closed
11/28/2011	12:42:40 PM	SiCl4 post valve closed
11/28/2011	12:42:40 PM	Bypass valve closed
11/28/2011	12:42:40 PM	Bubbler valve closed
11/28/2011	12:42:40 PM	Main Vac valve opened
11/28/2011	12:42:40 PM	Helium MFC set to  0.000000
11/28/2011	12:42:40 PM	H2 MFC set to  0.000000
11/28/2011	12:42:40 PM	BCl3 MFC set to  0.000000
11/28/2011	12:42:40 PM	PHl3 MFC set to  0.000000
11/28/2011	12:42:40 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:42:40 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:42:41 PM	Tube furnace set to 150
11/28/2011	12:43:11 PM	H2 valve closed
11/28/2011	12:43:11 PM	BCl3 valve closed
11/28/2011	12:43:11 PM	PH3 valve closed
11/28/2011	12:43:11 PM	SiCl4 pre valve closed
11/28/2011	12:43:11 PM	SiCl4 post valve closed
11/28/2011	12:43:11 PM	Bypass valve closed
11/28/2011	12:43:11 PM	Bubbler valve closed
11/28/2011	12:43:11 PM	Helium valve opened
11/28/2011	12:43:11 PM	Main Vac valve opened
11/28/2011	12:43:11 PM	Helium MFC set to  20.000000
11/28/2011	12:43:11 PM	H2 MFC set to  0.000000
11/28/2011	12:43:11 PM	BCl3 MFC set to  0.000000
11/28/2011	12:43:11 PM	PHl3 MFC set to  0.000000
11/28/2011	12:43:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:43:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:43:11 PM	Tube furnace set to 150
11/28/2011	12:43:41 PM	Helium valve closed
11/28/2011	12:43:41 PM	H2 valve closed
11/28/2011	12:43:41 PM	BCl3 valve closed
11/28/2011	12:43:41 PM	PH3 valve closed
11/28/2011	12:43:41 PM	SiCl4 pre valve closed
11/28/2011	12:43:41 PM	SiCl4 post valve closed
11/28/2011	12:43:41 PM	Bypass valve closed
11/28/2011	12:43:41 PM	Bubbler valve closed
11/28/2011	12:43:41 PM	Main Vac valve opened
11/28/2011	12:43:41 PM	Helium MFC set to  0.000000
11/28/2011	12:43:41 PM	H2 MFC set to  0.000000
11/28/2011	12:43:41 PM	BCl3 MFC set to  0.000000
11/28/2011	12:43:41 PM	PHl3 MFC set to  0.000000
11/28/2011	12:43:41 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:43:41 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:43:41 PM	Tube furnace set to 150
11/28/2011	12:44:11 PM	H2 valve closed
11/28/2011	12:44:11 PM	BCl3 valve closed
11/28/2011	12:44:11 PM	PH3 valve closed
11/28/2011	12:44:11 PM	SiCl4 pre valve closed
11/28/2011	12:44:11 PM	SiCl4 post valve closed
11/28/2011	12:44:11 PM	Bypass valve closed
11/28/2011	12:44:11 PM	Bubbler valve closed
11/28/2011	12:44:11 PM	Helium valve opened
11/28/2011	12:44:11 PM	Main Vac valve opened
11/28/2011	12:44:11 PM	Helium MFC set to  20.000000
11/28/2011	12:44:11 PM	H2 MFC set to  0.000000
11/28/2011	12:44:11 PM	BCl3 MFC set to  0.000000
11/28/2011	12:44:11 PM	PHl3 MFC set to  0.000000
11/28/2011	12:44:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:44:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:44:11 PM	Tube furnace set to 150
11/28/2011	12:44:41 PM	Helium valve closed
11/28/2011	12:44:41 PM	H2 valve closed
11/28/2011	12:44:41 PM	BCl3 valve closed
11/28/2011	12:44:41 PM	PH3 valve closed
11/28/2011	12:44:41 PM	SiCl4 pre valve closed
11/28/2011	12:44:41 PM	SiCl4 post valve closed
11/28/2011	12:44:41 PM	Bypass valve closed
11/28/2011	12:44:41 PM	Bubbler valve closed
11/28/2011	12:44:41 PM	Main Vac valve opened
11/28/2011	12:44:41 PM	Helium MFC set to  0.000000
11/28/2011	12:44:41 PM	H2 MFC set to  0.000000
11/28/2011	12:44:41 PM	BCl3 MFC set to  0.000000
11/28/2011	12:44:41 PM	PHl3 MFC set to  0.000000
11/28/2011	12:44:41 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:44:41 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:44:41 PM	Tube furnace set to 150
11/28/2011	12:45:11 PM	H2 valve closed
11/28/2011	12:45:11 PM	BCl3 valve closed
11/28/2011	12:45:11 PM	PH3 valve closed
11/28/2011	12:45:11 PM	SiCl4 pre valve closed
11/28/2011	12:45:11 PM	SiCl4 post valve closed
11/28/2011	12:45:11 PM	Bypass valve closed
11/28/2011	12:45:11 PM	Bubbler valve closed
11/28/2011	12:45:11 PM	Helium valve opened
11/28/2011	12:45:11 PM	Main Vac valve opened
11/28/2011	12:45:11 PM	Helium MFC set to  20.000000
11/28/2011	12:45:11 PM	H2 MFC set to  0.000000
11/28/2011	12:45:11 PM	BCl3 MFC set to  0.000000
11/28/2011	12:45:11 PM	PHl3 MFC set to  0.000000
11/28/2011	12:45:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:45:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:45:12 PM	Tube furnace set to 150
11/28/2011	12:45:42 PM	Helium valve closed
11/28/2011	12:45:42 PM	H2 valve closed
11/28/2011	12:45:42 PM	BCl3 valve closed
11/28/2011	12:45:42 PM	PH3 valve closed
11/28/2011	12:45:42 PM	SiCl4 pre valve closed
11/28/2011	12:45:42 PM	SiCl4 post valve closed
11/28/2011	12:45:42 PM	Bypass valve closed
11/28/2011	12:45:42 PM	Bubbler valve closed
11/28/2011	12:45:42 PM	Main Vac valve opened
11/28/2011	12:45:42 PM	Helium MFC set to  0.000000
11/28/2011	12:45:42 PM	H2 MFC set to  0.000000
11/28/2011	12:45:42 PM	BCl3 MFC set to  0.000000
11/28/2011	12:45:42 PM	PHl3 MFC set to  0.000000
11/28/2011	12:45:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:45:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:45:42 PM	Tube furnace set to 150
11/28/2011	12:45:43 PM	Run finished at 12:45 PM
11/28/2011	12:46:30 PM	Main Vac valve closed
11/28/2011	12:46:37 PM	Main Vac valve opened
11/28/2011	12:46:46 PM	Recipe started at 12:46 PM
11/28/2011	12:46:46 PM	Helium valve closed
11/28/2011	12:46:46 PM	H2 valve closed
11/28/2011	12:46:46 PM	BCl3 valve closed
11/28/2011	12:46:46 PM	PH3 valve closed
11/28/2011	12:46:46 PM	SiCl4 pre valve closed
11/28/2011	12:46:46 PM	SiCl4 post valve closed
11/28/2011	12:46:46 PM	Bypass valve closed
11/28/2011	12:46:46 PM	Bubbler valve closed
11/28/2011	12:46:46 PM	Main Vac valve opened
11/28/2011	12:46:46 PM	Helium MFC set to  0.000000
11/28/2011	12:46:46 PM	H2 MFC set to  0.000000
11/28/2011	12:46:46 PM	BCl3 MFC set to  0.000000
11/28/2011	12:46:46 PM	PHl3 MFC set to  0.000000
11/28/2011	12:46:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:46:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:46:46 PM	Tube furnace set to 150
11/28/2011	12:47:16 PM	H2 valve closed
11/28/2011	12:47:16 PM	BCl3 valve closed
11/28/2011	12:47:16 PM	PH3 valve closed
11/28/2011	12:47:16 PM	SiCl4 pre valve closed
11/28/2011	12:47:16 PM	SiCl4 post valve closed
11/28/2011	12:47:16 PM	Bypass valve closed
11/28/2011	12:47:16 PM	Bubbler valve closed
11/28/2011	12:47:16 PM	Helium valve opened
11/28/2011	12:47:16 PM	Main Vac valve opened
11/28/2011	12:47:16 PM	Helium MFC set to  20.000000
11/28/2011	12:47:16 PM	H2 MFC set to  0.000000
11/28/2011	12:47:16 PM	BCl3 MFC set to  0.000000
11/28/2011	12:47:16 PM	PHl3 MFC set to  0.000000
11/28/2011	12:47:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:47:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:47:16 PM	Tube furnace set to 150
11/28/2011	12:47:46 PM	Helium valve closed
11/28/2011	12:47:46 PM	H2 valve closed
11/28/2011	12:47:46 PM	BCl3 valve closed
11/28/2011	12:47:46 PM	PH3 valve closed
11/28/2011	12:47:46 PM	SiCl4 pre valve closed
11/28/2011	12:47:46 PM	SiCl4 post valve closed
11/28/2011	12:47:46 PM	Bypass valve closed
11/28/2011	12:47:46 PM	Bubbler valve closed
11/28/2011	12:47:46 PM	Main Vac valve opened
11/28/2011	12:47:46 PM	Helium MFC set to  0.000000
11/28/2011	12:47:46 PM	H2 MFC set to  0.000000
11/28/2011	12:47:46 PM	BCl3 MFC set to  0.000000
11/28/2011	12:47:46 PM	PHl3 MFC set to  0.000000
11/28/2011	12:47:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:47:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:47:46 PM	Tube furnace set to 150
11/28/2011	12:48:16 PM	H2 valve closed
11/28/2011	12:48:16 PM	BCl3 valve closed
11/28/2011	12:48:16 PM	PH3 valve closed
11/28/2011	12:48:16 PM	SiCl4 pre valve closed
11/28/2011	12:48:16 PM	SiCl4 post valve closed
11/28/2011	12:48:16 PM	Bypass valve closed
11/28/2011	12:48:16 PM	Bubbler valve closed
11/28/2011	12:48:16 PM	Helium valve opened
11/28/2011	12:48:16 PM	Main Vac valve opened
11/28/2011	12:48:16 PM	Helium MFC set to  20.000000
11/28/2011	12:48:16 PM	H2 MFC set to  0.000000
11/28/2011	12:48:16 PM	BCl3 MFC set to  0.000000
11/28/2011	12:48:16 PM	PHl3 MFC set to  0.000000
11/28/2011	12:48:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:48:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:48:16 PM	Tube furnace set to 150
11/28/2011	12:48:46 PM	Helium valve closed
11/28/2011	12:48:46 PM	H2 valve closed
11/28/2011	12:48:46 PM	BCl3 valve closed
11/28/2011	12:48:46 PM	PH3 valve closed
11/28/2011	12:48:46 PM	SiCl4 pre valve closed
11/28/2011	12:48:46 PM	SiCl4 post valve closed
11/28/2011	12:48:46 PM	Bypass valve closed
11/28/2011	12:48:46 PM	Bubbler valve closed
11/28/2011	12:48:46 PM	Main Vac valve opened
11/28/2011	12:48:46 PM	Helium MFC set to  0.000000
11/28/2011	12:48:46 PM	H2 MFC set to  0.000000
11/28/2011	12:48:46 PM	BCl3 MFC set to  0.000000
11/28/2011	12:48:46 PM	PHl3 MFC set to  0.000000
11/28/2011	12:48:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:48:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:48:47 PM	Tube furnace set to 150
11/28/2011	12:49:17 PM	H2 valve closed
11/28/2011	12:49:17 PM	BCl3 valve closed
11/28/2011	12:49:17 PM	PH3 valve closed
11/28/2011	12:49:17 PM	SiCl4 pre valve closed
11/28/2011	12:49:17 PM	SiCl4 post valve closed
11/28/2011	12:49:17 PM	Bypass valve closed
11/28/2011	12:49:17 PM	Bubbler valve closed
11/28/2011	12:49:17 PM	Helium valve opened
11/28/2011	12:49:17 PM	Main Vac valve opened
11/28/2011	12:49:17 PM	Helium MFC set to  20.000000
11/28/2011	12:49:17 PM	H2 MFC set to  0.000000
11/28/2011	12:49:17 PM	BCl3 MFC set to  0.000000
11/28/2011	12:49:17 PM	PHl3 MFC set to  0.000000
11/28/2011	12:49:17 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:49:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:49:17 PM	Tube furnace set to 150
11/28/2011	12:49:47 PM	Helium valve closed
11/28/2011	12:49:47 PM	H2 valve closed
11/28/2011	12:49:47 PM	BCl3 valve closed
11/28/2011	12:49:47 PM	PH3 valve closed
11/28/2011	12:49:47 PM	SiCl4 pre valve closed
11/28/2011	12:49:47 PM	SiCl4 post valve closed
11/28/2011	12:49:47 PM	Bypass valve closed
11/28/2011	12:49:47 PM	Bubbler valve closed
11/28/2011	12:49:47 PM	Main Vac valve opened
11/28/2011	12:49:47 PM	Helium MFC set to  0.000000
11/28/2011	12:49:47 PM	H2 MFC set to  0.000000
11/28/2011	12:49:47 PM	BCl3 MFC set to  0.000000
11/28/2011	12:49:47 PM	PHl3 MFC set to  0.000000
11/28/2011	12:49:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:49:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:49:47 PM	Tube furnace set to 150
11/28/2011	12:50:17 PM	H2 valve closed
11/28/2011	12:50:17 PM	BCl3 valve closed
11/28/2011	12:50:17 PM	PH3 valve closed
11/28/2011	12:50:17 PM	SiCl4 pre valve closed
11/28/2011	12:50:17 PM	SiCl4 post valve closed
11/28/2011	12:50:17 PM	Bypass valve closed
11/28/2011	12:50:17 PM	Bubbler valve closed
11/28/2011	12:50:17 PM	Helium valve opened
11/28/2011	12:50:17 PM	Main Vac valve opened
11/28/2011	12:50:17 PM	Helium MFC set to  20.000000
11/28/2011	12:50:17 PM	H2 MFC set to  0.000000
11/28/2011	12:50:17 PM	BCl3 MFC set to  0.000000
11/28/2011	12:50:17 PM	PHl3 MFC set to  0.000000
11/28/2011	12:50:17 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:50:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:50:17 PM	Tube furnace set to 150
11/28/2011	12:50:47 PM	Helium valve closed
11/28/2011	12:50:47 PM	H2 valve closed
11/28/2011	12:50:47 PM	BCl3 valve closed
11/28/2011	12:50:47 PM	PH3 valve closed
11/28/2011	12:50:47 PM	SiCl4 pre valve closed
11/28/2011	12:50:47 PM	SiCl4 post valve closed
11/28/2011	12:50:47 PM	Bypass valve closed
11/28/2011	12:50:47 PM	Bubbler valve closed
11/28/2011	12:50:47 PM	Main Vac valve opened
11/28/2011	12:50:47 PM	Helium MFC set to  0.000000
11/28/2011	12:50:47 PM	H2 MFC set to  0.000000
11/28/2011	12:50:47 PM	BCl3 MFC set to  0.000000
11/28/2011	12:50:47 PM	PHl3 MFC set to  0.000000
11/28/2011	12:50:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:50:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:50:47 PM	Tube furnace set to 150
11/28/2011	12:51:17 PM	H2 valve closed
11/28/2011	12:51:17 PM	BCl3 valve closed
11/28/2011	12:51:17 PM	PH3 valve closed
11/28/2011	12:51:17 PM	SiCl4 pre valve closed
11/28/2011	12:51:17 PM	SiCl4 post valve closed
11/28/2011	12:51:17 PM	Bypass valve closed
11/28/2011	12:51:17 PM	Bubbler valve closed
11/28/2011	12:51:17 PM	Helium valve opened
11/28/2011	12:51:17 PM	Main Vac valve opened
11/28/2011	12:51:17 PM	Helium MFC set to  20.000000
11/28/2011	12:51:17 PM	H2 MFC set to  0.000000
11/28/2011	12:51:17 PM	BCl3 MFC set to  0.000000
11/28/2011	12:51:17 PM	PHl3 MFC set to  0.000000
11/28/2011	12:51:17 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:51:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:51:18 PM	Tube furnace set to 150
11/28/2011	12:51:48 PM	Helium valve closed
11/28/2011	12:51:48 PM	H2 valve closed
11/28/2011	12:51:48 PM	BCl3 valve closed
11/28/2011	12:51:48 PM	PH3 valve closed
11/28/2011	12:51:48 PM	SiCl4 pre valve closed
11/28/2011	12:51:48 PM	SiCl4 post valve closed
11/28/2011	12:51:48 PM	Bypass valve closed
11/28/2011	12:51:48 PM	Bubbler valve closed
11/28/2011	12:51:48 PM	Main Vac valve opened
11/28/2011	12:51:48 PM	Helium MFC set to  0.000000
11/28/2011	12:51:48 PM	H2 MFC set to  0.000000
11/28/2011	12:51:48 PM	BCl3 MFC set to  0.000000
11/28/2011	12:51:48 PM	PHl3 MFC set to  0.000000
11/28/2011	12:51:48 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:51:48 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:51:48 PM	Tube furnace set to 150
11/28/2011	12:52:18 PM	H2 valve closed
11/28/2011	12:52:18 PM	BCl3 valve closed
11/28/2011	12:52:18 PM	PH3 valve closed
11/28/2011	12:52:18 PM	SiCl4 pre valve closed
11/28/2011	12:52:18 PM	SiCl4 post valve closed
11/28/2011	12:52:18 PM	Bypass valve closed
11/28/2011	12:52:18 PM	Bubbler valve closed
11/28/2011	12:52:18 PM	Helium valve opened
11/28/2011	12:52:18 PM	Main Vac valve opened
11/28/2011	12:52:18 PM	Helium MFC set to  20.000000
11/28/2011	12:52:18 PM	H2 MFC set to  0.000000
11/28/2011	12:52:18 PM	BCl3 MFC set to  0.000000
11/28/2011	12:52:18 PM	PHl3 MFC set to  0.000000
11/28/2011	12:52:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:52:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:52:18 PM	Tube furnace set to 150
11/28/2011	12:52:48 PM	Helium valve closed
11/28/2011	12:52:48 PM	H2 valve closed
11/28/2011	12:52:48 PM	BCl3 valve closed
11/28/2011	12:52:48 PM	PH3 valve closed
11/28/2011	12:52:48 PM	SiCl4 pre valve closed
11/28/2011	12:52:48 PM	SiCl4 post valve closed
11/28/2011	12:52:48 PM	Bypass valve closed
11/28/2011	12:52:48 PM	Bubbler valve closed
11/28/2011	12:52:48 PM	Main Vac valve opened
11/28/2011	12:52:48 PM	Helium MFC set to  0.000000
11/28/2011	12:52:48 PM	H2 MFC set to  0.000000
11/28/2011	12:52:48 PM	BCl3 MFC set to  0.000000
11/28/2011	12:52:48 PM	PHl3 MFC set to  0.000000
11/28/2011	12:52:48 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:52:48 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:52:48 PM	Tube furnace set to 150
11/28/2011	12:53:18 PM	H2 valve closed
11/28/2011	12:53:18 PM	BCl3 valve closed
11/28/2011	12:53:18 PM	PH3 valve closed
11/28/2011	12:53:18 PM	SiCl4 pre valve closed
11/28/2011	12:53:18 PM	SiCl4 post valve closed
11/28/2011	12:53:18 PM	Bypass valve closed
11/28/2011	12:53:18 PM	Bubbler valve closed
11/28/2011	12:53:18 PM	Helium valve opened
11/28/2011	12:53:18 PM	Main Vac valve opened
11/28/2011	12:53:18 PM	Helium MFC set to  20.000000
11/28/2011	12:53:18 PM	H2 MFC set to  0.000000
11/28/2011	12:53:18 PM	BCl3 MFC set to  0.000000
11/28/2011	12:53:18 PM	PHl3 MFC set to  0.000000
11/28/2011	12:53:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:53:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:53:18 PM	Tube furnace set to 150
11/28/2011	12:53:48 PM	Helium valve closed
11/28/2011	12:53:48 PM	H2 valve closed
11/28/2011	12:53:48 PM	BCl3 valve closed
11/28/2011	12:53:48 PM	PH3 valve closed
11/28/2011	12:53:48 PM	SiCl4 pre valve closed
11/28/2011	12:53:48 PM	SiCl4 post valve closed
11/28/2011	12:53:48 PM	Bypass valve closed
11/28/2011	12:53:48 PM	Bubbler valve closed
11/28/2011	12:53:48 PM	Main Vac valve opened
11/28/2011	12:53:48 PM	Helium MFC set to  0.000000
11/28/2011	12:53:48 PM	H2 MFC set to  0.000000
11/28/2011	12:53:48 PM	BCl3 MFC set to  0.000000
11/28/2011	12:53:48 PM	PHl3 MFC set to  0.000000
11/28/2011	12:53:48 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:53:48 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:53:49 PM	Tube furnace set to 150
11/28/2011	12:54:19 PM	H2 valve closed
11/28/2011	12:54:19 PM	BCl3 valve closed
11/28/2011	12:54:19 PM	PH3 valve closed
11/28/2011	12:54:19 PM	SiCl4 pre valve closed
11/28/2011	12:54:19 PM	SiCl4 post valve closed
11/28/2011	12:54:19 PM	Bypass valve closed
11/28/2011	12:54:19 PM	Bubbler valve closed
11/28/2011	12:54:19 PM	Helium valve opened
11/28/2011	12:54:19 PM	Main Vac valve opened
11/28/2011	12:54:19 PM	Helium MFC set to  20.000000
11/28/2011	12:54:19 PM	H2 MFC set to  0.000000
11/28/2011	12:54:19 PM	BCl3 MFC set to  0.000000
11/28/2011	12:54:19 PM	PHl3 MFC set to  0.000000
11/28/2011	12:54:19 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:54:19 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:54:19 PM	Tube furnace set to 150
11/28/2011	12:54:49 PM	Helium valve closed
11/28/2011	12:54:49 PM	H2 valve closed
11/28/2011	12:54:49 PM	BCl3 valve closed
11/28/2011	12:54:49 PM	PH3 valve closed
11/28/2011	12:54:49 PM	SiCl4 pre valve closed
11/28/2011	12:54:49 PM	SiCl4 post valve closed
11/28/2011	12:54:49 PM	Bypass valve closed
11/28/2011	12:54:49 PM	Bubbler valve closed
11/28/2011	12:54:49 PM	Main Vac valve opened
11/28/2011	12:54:49 PM	Helium MFC set to  0.000000
11/28/2011	12:54:49 PM	H2 MFC set to  0.000000
11/28/2011	12:54:49 PM	BCl3 MFC set to  0.000000
11/28/2011	12:54:49 PM	PHl3 MFC set to  0.000000
11/28/2011	12:54:49 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:54:49 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:54:49 PM	Tube furnace set to 150
11/28/2011	12:55:19 PM	H2 valve closed
11/28/2011	12:55:19 PM	BCl3 valve closed
11/28/2011	12:55:19 PM	PH3 valve closed
11/28/2011	12:55:19 PM	SiCl4 pre valve closed
11/28/2011	12:55:19 PM	SiCl4 post valve closed
11/28/2011	12:55:19 PM	Bypass valve closed
11/28/2011	12:55:19 PM	Bubbler valve closed
11/28/2011	12:55:19 PM	Helium valve opened
11/28/2011	12:55:19 PM	Main Vac valve opened
11/28/2011	12:55:19 PM	Helium MFC set to  20.000000
11/28/2011	12:55:19 PM	H2 MFC set to  0.000000
11/28/2011	12:55:19 PM	BCl3 MFC set to  0.000000
11/28/2011	12:55:19 PM	PHl3 MFC set to  0.000000
11/28/2011	12:55:19 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:55:19 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:55:19 PM	Tube furnace set to 150
11/28/2011	12:55:49 PM	Helium valve closed
11/28/2011	12:55:49 PM	H2 valve closed
11/28/2011	12:55:49 PM	BCl3 valve closed
11/28/2011	12:55:49 PM	PH3 valve closed
11/28/2011	12:55:49 PM	SiCl4 pre valve closed
11/28/2011	12:55:49 PM	SiCl4 post valve closed
11/28/2011	12:55:49 PM	Bypass valve closed
11/28/2011	12:55:49 PM	Bubbler valve closed
11/28/2011	12:55:49 PM	Main Vac valve opened
11/28/2011	12:55:49 PM	Helium MFC set to  0.000000
11/28/2011	12:55:49 PM	H2 MFC set to  0.000000
11/28/2011	12:55:49 PM	BCl3 MFC set to  0.000000
11/28/2011	12:55:49 PM	PHl3 MFC set to  0.000000
11/28/2011	12:55:49 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:55:49 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:55:49 PM	Tube furnace set to 150
11/28/2011	12:56:19 PM	H2 valve closed
11/28/2011	12:56:19 PM	BCl3 valve closed
11/28/2011	12:56:19 PM	PH3 valve closed
11/28/2011	12:56:19 PM	SiCl4 pre valve closed
11/28/2011	12:56:19 PM	SiCl4 post valve closed
11/28/2011	12:56:19 PM	Bypass valve closed
11/28/2011	12:56:19 PM	Bubbler valve closed
11/28/2011	12:56:20 PM	Helium valve opened
11/28/2011	12:56:20 PM	Main Vac valve opened
11/28/2011	12:56:20 PM	Helium MFC set to  20.000000
11/28/2011	12:56:20 PM	H2 MFC set to  0.000000
11/28/2011	12:56:20 PM	BCl3 MFC set to  0.000000
11/28/2011	12:56:20 PM	PHl3 MFC set to  0.000000
11/28/2011	12:56:20 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:56:20 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:56:20 PM	Tube furnace set to 150
11/28/2011	12:56:50 PM	Helium valve closed
11/28/2011	12:56:50 PM	H2 valve closed
11/28/2011	12:56:50 PM	BCl3 valve closed
11/28/2011	12:56:50 PM	PH3 valve closed
11/28/2011	12:56:50 PM	SiCl4 pre valve closed
11/28/2011	12:56:50 PM	SiCl4 post valve closed
11/28/2011	12:56:50 PM	Bypass valve closed
11/28/2011	12:56:50 PM	Bubbler valve closed
11/28/2011	12:56:50 PM	Main Vac valve opened
11/28/2011	12:56:50 PM	Helium MFC set to  0.000000
11/28/2011	12:56:50 PM	H2 MFC set to  0.000000
11/28/2011	12:56:50 PM	BCl3 MFC set to  0.000000
11/28/2011	12:56:50 PM	PHl3 MFC set to  0.000000
11/28/2011	12:56:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:56:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:56:50 PM	Tube furnace set to 150
11/28/2011	12:56:51 PM	Run finished at 12:56 PM
11/28/2011	12:57:48 PM	Main Vac valve closed
11/28/2011	12:58:00 PM	Main Vac valve opened
11/28/2011	12:58:10 PM	Recipe started at 12:58 PM
11/28/2011	12:58:10 PM	Helium valve closed
11/28/2011	12:58:10 PM	H2 valve closed
11/28/2011	12:58:10 PM	BCl3 valve closed
11/28/2011	12:58:10 PM	PH3 valve closed
11/28/2011	12:58:10 PM	SiCl4 pre valve closed
11/28/2011	12:58:10 PM	SiCl4 post valve closed
11/28/2011	12:58:10 PM	Bypass valve closed
11/28/2011	12:58:10 PM	Bubbler valve closed
11/28/2011	12:58:10 PM	Main Vac valve opened
11/28/2011	12:58:10 PM	Helium MFC set to  0.000000
11/28/2011	12:58:10 PM	H2 MFC set to  0.000000
11/28/2011	12:58:10 PM	BCl3 MFC set to  0.000000
11/28/2011	12:58:10 PM	PHl3 MFC set to  0.000000
11/28/2011	12:58:10 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:58:10 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:58:10 PM	Tube furnace set to 150
11/28/2011	12:58:40 PM	H2 valve closed
11/28/2011	12:58:40 PM	BCl3 valve closed
11/28/2011	12:58:40 PM	PH3 valve closed
11/28/2011	12:58:40 PM	SiCl4 pre valve closed
11/28/2011	12:58:40 PM	SiCl4 post valve closed
11/28/2011	12:58:40 PM	Bypass valve closed
11/28/2011	12:58:40 PM	Bubbler valve closed
11/28/2011	12:58:40 PM	Helium valve opened
11/28/2011	12:58:40 PM	Main Vac valve opened
11/28/2011	12:58:40 PM	Helium MFC set to  20.000000
11/28/2011	12:58:40 PM	H2 MFC set to  0.000000
11/28/2011	12:58:40 PM	BCl3 MFC set to  0.000000
11/28/2011	12:58:40 PM	PHl3 MFC set to  0.000000
11/28/2011	12:58:40 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:58:40 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:58:40 PM	Tube furnace set to 150
11/28/2011	12:59:10 PM	Helium valve closed
11/28/2011	12:59:10 PM	H2 valve closed
11/28/2011	12:59:10 PM	BCl3 valve closed
11/28/2011	12:59:10 PM	PH3 valve closed
11/28/2011	12:59:10 PM	SiCl4 pre valve closed
11/28/2011	12:59:10 PM	SiCl4 post valve closed
11/28/2011	12:59:10 PM	Bypass valve closed
11/28/2011	12:59:10 PM	Bubbler valve closed
11/28/2011	12:59:10 PM	Main Vac valve opened
11/28/2011	12:59:10 PM	Helium MFC set to  0.000000
11/28/2011	12:59:10 PM	H2 MFC set to  0.000000
11/28/2011	12:59:10 PM	BCl3 MFC set to  0.000000
11/28/2011	12:59:10 PM	PHl3 MFC set to  0.000000
11/28/2011	12:59:10 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:59:10 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:59:10 PM	Tube furnace set to 150
11/28/2011	12:59:40 PM	H2 valve closed
11/28/2011	12:59:40 PM	BCl3 valve closed
11/28/2011	12:59:40 PM	PH3 valve closed
11/28/2011	12:59:40 PM	SiCl4 pre valve closed
11/28/2011	12:59:40 PM	SiCl4 post valve closed
11/28/2011	12:59:40 PM	Bypass valve closed
11/28/2011	12:59:40 PM	Bubbler valve closed
11/28/2011	12:59:40 PM	Helium valve opened
11/28/2011	12:59:40 PM	Main Vac valve opened
11/28/2011	12:59:40 PM	Helium MFC set to  20.000000
11/28/2011	12:59:40 PM	H2 MFC set to  0.000000
11/28/2011	12:59:40 PM	BCl3 MFC set to  0.000000
11/28/2011	12:59:40 PM	PHl3 MFC set to  0.000000
11/28/2011	12:59:40 PM	SiCl4 MFC set to  0.000000
11/28/2011	12:59:40 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	12:59:41 PM	Tube furnace set to 150
11/28/2011	1:00:11 PM	Helium valve closed
11/28/2011	1:00:11 PM	H2 valve closed
11/28/2011	1:00:11 PM	BCl3 valve closed
11/28/2011	1:00:11 PM	PH3 valve closed
11/28/2011	1:00:11 PM	SiCl4 pre valve closed
11/28/2011	1:00:11 PM	SiCl4 post valve closed
11/28/2011	1:00:11 PM	Bypass valve closed
11/28/2011	1:00:11 PM	Bubbler valve closed
11/28/2011	1:00:11 PM	Main Vac valve opened
11/28/2011	1:00:11 PM	Helium MFC set to  0.000000
11/28/2011	1:00:11 PM	H2 MFC set to  0.000000
11/28/2011	1:00:11 PM	BCl3 MFC set to  0.000000
11/28/2011	1:00:11 PM	PHl3 MFC set to  0.000000
11/28/2011	1:00:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:00:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:00:11 PM	Tube furnace set to 150
11/28/2011	1:00:41 PM	H2 valve closed
11/28/2011	1:00:41 PM	BCl3 valve closed
11/28/2011	1:00:41 PM	PH3 valve closed
11/28/2011	1:00:41 PM	SiCl4 pre valve closed
11/28/2011	1:00:41 PM	SiCl4 post valve closed
11/28/2011	1:00:41 PM	Bypass valve closed
11/28/2011	1:00:41 PM	Bubbler valve closed
11/28/2011	1:00:41 PM	Helium valve opened
11/28/2011	1:00:41 PM	Main Vac valve opened
11/28/2011	1:00:41 PM	Helium MFC set to  20.000000
11/28/2011	1:00:41 PM	H2 MFC set to  0.000000
11/28/2011	1:00:41 PM	BCl3 MFC set to  0.000000
11/28/2011	1:00:41 PM	PHl3 MFC set to  0.000000
11/28/2011	1:00:41 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:00:41 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:00:41 PM	Tube furnace set to 150
11/28/2011	1:01:11 PM	Helium valve closed
11/28/2011	1:01:11 PM	H2 valve closed
11/28/2011	1:01:11 PM	BCl3 valve closed
11/28/2011	1:01:11 PM	PH3 valve closed
11/28/2011	1:01:11 PM	SiCl4 pre valve closed
11/28/2011	1:01:11 PM	SiCl4 post valve closed
11/28/2011	1:01:11 PM	Bypass valve closed
11/28/2011	1:01:11 PM	Bubbler valve closed
11/28/2011	1:01:11 PM	Main Vac valve opened
11/28/2011	1:01:11 PM	Helium MFC set to  0.000000
11/28/2011	1:01:11 PM	H2 MFC set to  0.000000
11/28/2011	1:01:11 PM	BCl3 MFC set to  0.000000
11/28/2011	1:01:11 PM	PHl3 MFC set to  0.000000
11/28/2011	1:01:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:01:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:01:11 PM	Tube furnace set to 150
11/28/2011	1:01:41 PM	H2 valve closed
11/28/2011	1:01:41 PM	BCl3 valve closed
11/28/2011	1:01:41 PM	PH3 valve closed
11/28/2011	1:01:41 PM	SiCl4 pre valve closed
11/28/2011	1:01:41 PM	SiCl4 post valve closed
11/28/2011	1:01:41 PM	Bypass valve closed
11/28/2011	1:01:41 PM	Bubbler valve closed
11/28/2011	1:01:41 PM	Helium valve opened
11/28/2011	1:01:41 PM	Main Vac valve opened
11/28/2011	1:01:41 PM	Helium MFC set to  20.000000
11/28/2011	1:01:41 PM	H2 MFC set to  0.000000
11/28/2011	1:01:41 PM	BCl3 MFC set to  0.000000
11/28/2011	1:01:41 PM	PHl3 MFC set to  0.000000
11/28/2011	1:01:41 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:01:41 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:01:41 PM	Tube furnace set to 150
11/28/2011	1:02:11 PM	Helium valve closed
11/28/2011	1:02:11 PM	H2 valve closed
11/28/2011	1:02:11 PM	BCl3 valve closed
11/28/2011	1:02:11 PM	PH3 valve closed
11/28/2011	1:02:11 PM	SiCl4 pre valve closed
11/28/2011	1:02:11 PM	SiCl4 post valve closed
11/28/2011	1:02:11 PM	Bypass valve closed
11/28/2011	1:02:11 PM	Bubbler valve closed
11/28/2011	1:02:11 PM	Main Vac valve opened
11/28/2011	1:02:11 PM	Helium MFC set to  0.000000
11/28/2011	1:02:11 PM	H2 MFC set to  0.000000
11/28/2011	1:02:11 PM	BCl3 MFC set to  0.000000
11/28/2011	1:02:11 PM	PHl3 MFC set to  0.000000
11/28/2011	1:02:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:02:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:02:12 PM	Tube furnace set to 150
11/28/2011	1:02:42 PM	H2 valve closed
11/28/2011	1:02:42 PM	BCl3 valve closed
11/28/2011	1:02:42 PM	PH3 valve closed
11/28/2011	1:02:42 PM	SiCl4 pre valve closed
11/28/2011	1:02:42 PM	SiCl4 post valve closed
11/28/2011	1:02:42 PM	Bypass valve closed
11/28/2011	1:02:42 PM	Bubbler valve closed
11/28/2011	1:02:42 PM	Helium valve opened
11/28/2011	1:02:42 PM	Main Vac valve opened
11/28/2011	1:02:42 PM	Helium MFC set to  20.000000
11/28/2011	1:02:42 PM	H2 MFC set to  0.000000
11/28/2011	1:02:42 PM	BCl3 MFC set to  0.000000
11/28/2011	1:02:42 PM	PHl3 MFC set to  0.000000
11/28/2011	1:02:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:02:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:02:42 PM	Tube furnace set to 150
11/28/2011	1:03:12 PM	Helium valve closed
11/28/2011	1:03:12 PM	H2 valve closed
11/28/2011	1:03:12 PM	BCl3 valve closed
11/28/2011	1:03:12 PM	PH3 valve closed
11/28/2011	1:03:12 PM	SiCl4 pre valve closed
11/28/2011	1:03:12 PM	SiCl4 post valve closed
11/28/2011	1:03:12 PM	Bypass valve closed
11/28/2011	1:03:12 PM	Bubbler valve closed
11/28/2011	1:03:12 PM	Main Vac valve opened
11/28/2011	1:03:12 PM	Helium MFC set to  0.000000
11/28/2011	1:03:12 PM	H2 MFC set to  0.000000
11/28/2011	1:03:12 PM	BCl3 MFC set to  0.000000
11/28/2011	1:03:12 PM	PHl3 MFC set to  0.000000
11/28/2011	1:03:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:03:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:03:12 PM	Tube furnace set to 150
11/28/2011	1:03:42 PM	H2 valve closed
11/28/2011	1:03:42 PM	BCl3 valve closed
11/28/2011	1:03:42 PM	PH3 valve closed
11/28/2011	1:03:42 PM	SiCl4 pre valve closed
11/28/2011	1:03:42 PM	SiCl4 post valve closed
11/28/2011	1:03:42 PM	Bypass valve closed
11/28/2011	1:03:42 PM	Bubbler valve closed
11/28/2011	1:03:42 PM	Helium valve opened
11/28/2011	1:03:42 PM	Main Vac valve opened
11/28/2011	1:03:42 PM	Helium MFC set to  20.000000
11/28/2011	1:03:42 PM	H2 MFC set to  0.000000
11/28/2011	1:03:42 PM	BCl3 MFC set to  0.000000
11/28/2011	1:03:42 PM	PHl3 MFC set to  0.000000
11/28/2011	1:03:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:03:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:03:42 PM	Tube furnace set to 150
11/28/2011	1:04:12 PM	Helium valve closed
11/28/2011	1:04:12 PM	H2 valve closed
11/28/2011	1:04:12 PM	BCl3 valve closed
11/28/2011	1:04:12 PM	PH3 valve closed
11/28/2011	1:04:12 PM	SiCl4 pre valve closed
11/28/2011	1:04:12 PM	SiCl4 post valve closed
11/28/2011	1:04:12 PM	Bypass valve closed
11/28/2011	1:04:12 PM	Bubbler valve closed
11/28/2011	1:04:12 PM	Main Vac valve opened
11/28/2011	1:04:12 PM	Helium MFC set to  0.000000
11/28/2011	1:04:12 PM	H2 MFC set to  0.000000
11/28/2011	1:04:12 PM	BCl3 MFC set to  0.000000
11/28/2011	1:04:12 PM	PHl3 MFC set to  0.000000
11/28/2011	1:04:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:04:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:04:12 PM	Tube furnace set to 150
11/28/2011	1:04:42 PM	H2 valve closed
11/28/2011	1:04:42 PM	BCl3 valve closed
11/28/2011	1:04:42 PM	PH3 valve closed
11/28/2011	1:04:42 PM	SiCl4 pre valve closed
11/28/2011	1:04:42 PM	SiCl4 post valve closed
11/28/2011	1:04:42 PM	Bypass valve closed
11/28/2011	1:04:42 PM	Bubbler valve closed
11/28/2011	1:04:42 PM	Helium valve opened
11/28/2011	1:04:42 PM	Main Vac valve opened
11/28/2011	1:04:42 PM	Helium MFC set to  20.000000
11/28/2011	1:04:42 PM	H2 MFC set to  0.000000
11/28/2011	1:04:43 PM	BCl3 MFC set to  0.000000
11/28/2011	1:04:43 PM	PHl3 MFC set to  0.000000
11/28/2011	1:04:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:04:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:04:43 PM	Tube furnace set to 150
11/28/2011	1:05:13 PM	Helium valve closed
11/28/2011	1:05:13 PM	H2 valve closed
11/28/2011	1:05:13 PM	BCl3 valve closed
11/28/2011	1:05:13 PM	PH3 valve closed
11/28/2011	1:05:13 PM	SiCl4 pre valve closed
11/28/2011	1:05:13 PM	SiCl4 post valve closed
11/28/2011	1:05:13 PM	Bypass valve closed
11/28/2011	1:05:13 PM	Bubbler valve closed
11/28/2011	1:05:13 PM	Main Vac valve opened
11/28/2011	1:05:13 PM	Helium MFC set to  0.000000
11/28/2011	1:05:13 PM	H2 MFC set to  0.000000
11/28/2011	1:05:13 PM	BCl3 MFC set to  0.000000
11/28/2011	1:05:13 PM	PHl3 MFC set to  0.000000
11/28/2011	1:05:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:05:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:05:13 PM	Tube furnace set to 150
11/28/2011	1:05:43 PM	H2 valve closed
11/28/2011	1:05:43 PM	BCl3 valve closed
11/28/2011	1:05:43 PM	PH3 valve closed
11/28/2011	1:05:43 PM	SiCl4 pre valve closed
11/28/2011	1:05:43 PM	SiCl4 post valve closed
11/28/2011	1:05:43 PM	Bypass valve closed
11/28/2011	1:05:43 PM	Bubbler valve closed
11/28/2011	1:05:43 PM	Helium valve opened
11/28/2011	1:05:43 PM	Main Vac valve opened
11/28/2011	1:05:43 PM	Helium MFC set to  20.000000
11/28/2011	1:05:43 PM	H2 MFC set to  0.000000
11/28/2011	1:05:43 PM	BCl3 MFC set to  0.000000
11/28/2011	1:05:43 PM	PHl3 MFC set to  0.000000
11/28/2011	1:05:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:05:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:05:43 PM	Tube furnace set to 150
11/28/2011	1:06:13 PM	Helium valve closed
11/28/2011	1:06:13 PM	H2 valve closed
11/28/2011	1:06:13 PM	BCl3 valve closed
11/28/2011	1:06:13 PM	PH3 valve closed
11/28/2011	1:06:13 PM	SiCl4 pre valve closed
11/28/2011	1:06:13 PM	SiCl4 post valve closed
11/28/2011	1:06:13 PM	Bypass valve closed
11/28/2011	1:06:13 PM	Bubbler valve closed
11/28/2011	1:06:13 PM	Main Vac valve opened
11/28/2011	1:06:13 PM	Helium MFC set to  0.000000
11/28/2011	1:06:13 PM	H2 MFC set to  0.000000
11/28/2011	1:06:13 PM	BCl3 MFC set to  0.000000
11/28/2011	1:06:13 PM	PHl3 MFC set to  0.000000
11/28/2011	1:06:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:06:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:06:13 PM	Tube furnace set to 150
11/28/2011	1:06:43 PM	H2 valve closed
11/28/2011	1:06:43 PM	BCl3 valve closed
11/28/2011	1:06:43 PM	PH3 valve closed
11/28/2011	1:06:43 PM	SiCl4 pre valve closed
11/28/2011	1:06:43 PM	SiCl4 post valve closed
11/28/2011	1:06:43 PM	Bypass valve closed
11/28/2011	1:06:43 PM	Bubbler valve closed
11/28/2011	1:06:43 PM	Helium valve opened
11/28/2011	1:06:43 PM	Main Vac valve opened
11/28/2011	1:06:43 PM	Helium MFC set to  20.000000
11/28/2011	1:06:43 PM	H2 MFC set to  0.000000
11/28/2011	1:06:43 PM	BCl3 MFC set to  0.000000
11/28/2011	1:06:43 PM	PHl3 MFC set to  0.000000
11/28/2011	1:06:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:06:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:06:43 PM	Tube furnace set to 150
11/28/2011	1:07:13 PM	Helium valve closed
11/28/2011	1:07:14 PM	H2 valve closed
11/28/2011	1:07:14 PM	BCl3 valve closed
11/28/2011	1:07:14 PM	PH3 valve closed
11/28/2011	1:07:14 PM	SiCl4 pre valve closed
11/28/2011	1:07:14 PM	SiCl4 post valve closed
11/28/2011	1:07:14 PM	Bypass valve closed
11/28/2011	1:07:14 PM	Bubbler valve closed
11/28/2011	1:07:14 PM	Main Vac valve opened
11/28/2011	1:07:14 PM	Helium MFC set to  0.000000
11/28/2011	1:07:14 PM	H2 MFC set to  0.000000
11/28/2011	1:07:14 PM	BCl3 MFC set to  0.000000
11/28/2011	1:07:14 PM	PHl3 MFC set to  0.000000
11/28/2011	1:07:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:07:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:07:14 PM	Tube furnace set to 150
11/28/2011	1:07:44 PM	H2 valve closed
11/28/2011	1:07:44 PM	BCl3 valve closed
11/28/2011	1:07:44 PM	PH3 valve closed
11/28/2011	1:07:44 PM	SiCl4 pre valve closed
11/28/2011	1:07:44 PM	SiCl4 post valve closed
11/28/2011	1:07:44 PM	Bypass valve closed
11/28/2011	1:07:44 PM	Bubbler valve closed
11/28/2011	1:07:44 PM	Helium valve opened
11/28/2011	1:07:44 PM	Main Vac valve opened
11/28/2011	1:07:44 PM	Helium MFC set to  20.000000
11/28/2011	1:07:44 PM	H2 MFC set to  0.000000
11/28/2011	1:07:44 PM	BCl3 MFC set to  0.000000
11/28/2011	1:07:44 PM	PHl3 MFC set to  0.000000
11/28/2011	1:07:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:07:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:07:44 PM	Tube furnace set to 150
11/28/2011	1:08:14 PM	Helium valve closed
11/28/2011	1:08:14 PM	H2 valve closed
11/28/2011	1:08:14 PM	BCl3 valve closed
11/28/2011	1:08:14 PM	PH3 valve closed
11/28/2011	1:08:14 PM	SiCl4 pre valve closed
11/28/2011	1:08:14 PM	SiCl4 post valve closed
11/28/2011	1:08:14 PM	Bypass valve closed
11/28/2011	1:08:14 PM	Bubbler valve closed
11/28/2011	1:08:14 PM	Main Vac valve opened
11/28/2011	1:08:14 PM	Helium MFC set to  0.000000
11/28/2011	1:08:14 PM	H2 MFC set to  0.000000
11/28/2011	1:08:14 PM	BCl3 MFC set to  0.000000
11/28/2011	1:08:14 PM	PHl3 MFC set to  0.000000
11/28/2011	1:08:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:08:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:08:14 PM	Tube furnace set to 150
11/28/2011	1:08:15 PM	Run finished at 1:08 PM
11/28/2011	1:08:56 PM	Main Vac valve closed
11/28/2011	1:09:07 PM	Main Vac valve opened
11/28/2011	1:10:50 PM	Recipe started at 1:10 PM
11/28/2011	1:10:50 PM	Helium valve closed
11/28/2011	1:10:50 PM	H2 valve closed
11/28/2011	1:10:50 PM	BCl3 valve closed
11/28/2011	1:10:50 PM	PH3 valve closed
11/28/2011	1:10:50 PM	SiCl4 pre valve closed
11/28/2011	1:10:50 PM	SiCl4 post valve closed
11/28/2011	1:10:50 PM	Main Vac valve closed
11/28/2011	1:10:50 PM	Bypass valve closed
11/28/2011	1:10:50 PM	Bubbler valve closed
11/28/2011	1:10:50 PM	Helium MFC set to  0.000000
11/28/2011	1:10:50 PM	H2 MFC set to  0.000000
11/28/2011	1:10:50 PM	BCl3 MFC set to  0.000000
11/28/2011	1:10:50 PM	PHl3 MFC set to  0.000000
11/28/2011	1:10:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:10:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:10:51 PM	Tube furnace set to 0
11/28/2011	1:10:54 PM	Helium valve closed
11/28/2011	1:10:54 PM	BCl3 valve closed
11/28/2011	1:10:54 PM	PH3 valve closed
11/28/2011	1:10:54 PM	SiCl4 pre valve closed
11/28/2011	1:10:54 PM	SiCl4 post valve closed
11/28/2011	1:10:54 PM	Main Vac valve closed
11/28/2011	1:10:54 PM	Bypass valve closed
11/28/2011	1:10:54 PM	Bubbler valve closed
11/28/2011	1:10:54 PM	H2 valve opened
11/28/2011	1:10:54 PM	Helium MFC set to  0.000000
11/28/2011	1:10:54 PM	H2 MFC set to  500.000000
11/28/2011	1:10:54 PM	BCl3 MFC set to  0.000000
11/28/2011	1:10:54 PM	PHl3 MFC set to  0.000000
11/28/2011	1:10:54 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:10:54 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:10:54 PM	Tube furnace set to 0
11/28/2011	1:11:57 PM	Helium valve closed
11/28/2011	1:11:57 PM	BCl3 valve closed
11/28/2011	1:11:57 PM	PH3 valve closed
11/28/2011	1:11:57 PM	SiCl4 pre valve closed
11/28/2011	1:11:57 PM	SiCl4 post valve closed
11/28/2011	1:11:57 PM	Main Vac valve closed
11/28/2011	1:11:57 PM	Bypass valve closed
11/28/2011	1:11:57 PM	H2 valve opened
11/28/2011	1:11:57 PM	Bubbler valve opened
11/28/2011	1:11:57 PM	Helium MFC set to  0.000000
11/28/2011	1:11:57 PM	H2 MFC set to  500.000000
11/28/2011	1:11:57 PM	BCl3 MFC set to  0.000000
11/28/2011	1:11:57 PM	PHl3 MFC set to  0.000000
11/28/2011	1:11:57 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:11:57 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:11:57 PM	Tube furnace set to 0
11/28/2011	1:11:58 PM	Helium valve closed
11/28/2011	1:11:58 PM	BCl3 valve closed
11/28/2011	1:11:58 PM	PH3 valve closed
11/28/2011	1:11:58 PM	SiCl4 pre valve closed
11/28/2011	1:11:58 PM	SiCl4 post valve closed
11/28/2011	1:11:58 PM	Main Vac valve closed
11/28/2011	1:11:58 PM	Bypass valve closed
11/28/2011	1:11:58 PM	H2 valve opened
11/28/2011	1:11:58 PM	Bubbler valve opened
11/28/2011	1:11:58 PM	Helium MFC set to  0.000000
11/28/2011	1:11:58 PM	H2 MFC set to  500.000000
11/28/2011	1:11:58 PM	BCl3 MFC set to  0.000000
11/28/2011	1:11:58 PM	PHl3 MFC set to  0.000000
11/28/2011	1:11:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:11:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:11:58 PM	Tube furnace set to 950
11/28/2011	1:36:58 PM	Helium valve closed
11/28/2011	1:36:58 PM	PH3 valve closed
11/28/2011	1:36:58 PM	SiCl4 pre valve closed
11/28/2011	1:36:58 PM	SiCl4 post valve closed
11/28/2011	1:36:58 PM	Main Vac valve closed
11/28/2011	1:36:58 PM	Bypass valve closed
11/28/2011	1:36:58 PM	H2 valve opened
11/28/2011	1:36:58 PM	BCl3 valve opened
11/28/2011	1:36:58 PM	Bubbler valve opened
11/28/2011	1:36:58 PM	Helium MFC set to  0.000000
11/28/2011	1:36:58 PM	H2 MFC set to  500.000000
11/28/2011	1:36:58 PM	BCl3 MFC set to  20.000000
11/28/2011	1:36:58 PM	PHl3 MFC set to  0.000000
11/28/2011	1:36:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	1:36:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	1:36:58 PM	Tube furnace set to 950
11/28/2011	2:16:58 PM	Helium valve closed
11/28/2011	2:16:58 PM	BCl3 valve closed
11/28/2011	2:16:58 PM	PH3 valve closed
11/28/2011	2:16:58 PM	SiCl4 pre valve closed
11/28/2011	2:16:58 PM	SiCl4 post valve closed
11/28/2011	2:16:58 PM	Main Vac valve closed
11/28/2011	2:16:58 PM	Bypass valve closed
11/28/2011	2:16:58 PM	H2 valve opened
11/28/2011	2:16:58 PM	Bubbler valve opened
11/28/2011	2:16:58 PM	Helium MFC set to  0.000000
11/28/2011	2:16:58 PM	H2 MFC set to  500.000000
11/28/2011	2:16:58 PM	BCl3 MFC set to  0.000000
11/28/2011	2:16:58 PM	PHl3 MFC set to  0.000000
11/28/2011	2:16:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	2:16:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	2:16:58 PM	Tube furnace set to 750
11/28/2011	2:26:58 PM	H2 valve closed
11/28/2011	2:26:58 PM	BCl3 valve closed
11/28/2011	2:26:58 PM	PH3 valve closed
11/28/2011	2:26:58 PM	SiCl4 pre valve closed
11/28/2011	2:26:58 PM	SiCl4 post valve closed
11/28/2011	2:26:58 PM	Main Vac valve closed
11/28/2011	2:26:58 PM	Bypass valve closed
11/28/2011	2:26:58 PM	Helium valve opened
11/28/2011	2:26:58 PM	Bubbler valve opened
11/28/2011	2:26:58 PM	Helium MFC set to  500.000000
11/28/2011	2:26:58 PM	H2 MFC set to  0.000000
11/28/2011	2:26:58 PM	BCl3 MFC set to  0.000000
11/28/2011	2:26:58 PM	PHl3 MFC set to  0.000000
11/28/2011	2:26:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	2:26:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	2:26:59 PM	Tube furnace set to 0
11/28/2011	2:46:59 PM	Helium valve closed
11/28/2011	2:46:59 PM	H2 valve closed
11/28/2011	2:46:59 PM	BCl3 valve closed
11/28/2011	2:46:59 PM	PH3 valve closed
11/28/2011	2:46:59 PM	SiCl4 pre valve closed
11/28/2011	2:46:59 PM	SiCl4 post valve closed
11/28/2011	2:46:59 PM	Main Vac valve closed
11/28/2011	2:46:59 PM	Bypass valve closed
11/28/2011	2:46:59 PM	Bubbler valve closed
11/28/2011	2:46:59 PM	Helium MFC set to  0.000000
11/28/2011	2:46:59 PM	H2 MFC set to  0.000000
11/28/2011	2:46:59 PM	BCl3 MFC set to  0.000000
11/28/2011	2:46:59 PM	PHl3 MFC set to  0.000000
11/28/2011	2:46:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	2:46:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	2:46:59 PM	Tube furnace set to 0
11/28/2011	2:47:00 PM	Run finished at 2:47 PM
11/28/2011	3:15:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	3:15:45 PM	Recipe started at 3:15 PM
11/28/2011	3:15:45 PM	Helium valve closed
11/28/2011	3:15:45 PM	H2 valve closed
11/28/2011	3:15:45 PM	BCl3 valve closed
11/28/2011	3:15:45 PM	PH3 valve closed
11/28/2011	3:15:45 PM	SiCl4 pre valve closed
11/28/2011	3:15:45 PM	SiCl4 post valve closed
11/28/2011	3:15:45 PM	Main Vac valve closed
11/28/2011	3:15:45 PM	Bypass valve closed
11/28/2011	3:15:45 PM	Bubbler valve closed
11/28/2011	3:15:45 PM	Helium MFC set to  0.000000
11/28/2011	3:15:45 PM	H2 MFC set to  0.000000
11/28/2011	3:15:45 PM	BCl3 MFC set to  0.000000
11/28/2011	3:15:45 PM	PHl3 MFC set to  0.000000
11/28/2011	3:15:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:15:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:15:45 PM	Tube furnace set to 0
11/28/2011	3:15:48 PM	H2 valve closed
11/28/2011	3:15:48 PM	BCl3 valve closed
11/28/2011	3:15:48 PM	PH3 valve closed
11/28/2011	3:15:48 PM	SiCl4 pre valve closed
11/28/2011	3:15:48 PM	SiCl4 post valve closed
11/28/2011	3:15:48 PM	Main Vac valve closed
11/28/2011	3:15:48 PM	Bypass valve closed
11/28/2011	3:15:48 PM	Bubbler valve closed
11/28/2011	3:15:48 PM	Helium valve opened
11/28/2011	3:15:48 PM	Helium MFC set to  500.000000
11/28/2011	3:15:48 PM	H2 MFC set to  0.000000
11/28/2011	3:15:48 PM	BCl3 MFC set to  0.000000
11/28/2011	3:15:48 PM	PHl3 MFC set to  0.000000
11/28/2011	3:15:48 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:15:48 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:15:48 PM	Tube furnace set to 0
11/28/2011	3:15:50 PM	Helium valve closed
11/28/2011	3:15:50 PM	H2 valve closed
11/28/2011	3:15:50 PM	BCl3 valve closed
11/28/2011	3:15:50 PM	PH3 valve closed
11/28/2011	3:15:50 PM	SiCl4 pre valve closed
11/28/2011	3:15:50 PM	SiCl4 post valve closed
11/28/2011	3:15:50 PM	Main Vac valve closed
11/28/2011	3:15:50 PM	Bypass valve closed
11/28/2011	3:15:50 PM	Bubbler valve closed
11/28/2011	3:15:50 PM	Helium MFC set to  0.000000
11/28/2011	3:15:50 PM	H2 MFC set to  0.000000
11/28/2011	3:15:50 PM	BCl3 MFC set to  0.000000
11/28/2011	3:15:50 PM	PHl3 MFC set to  0.000000
11/28/2011	3:15:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:15:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:15:50 PM	Tube furnace set to 0
11/28/2011	3:15:51 PM	Run finished at 3:15 PM
11/28/2011	3:15:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	3:24:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	3:24:51 PM	Recipe started at 3:24 PM
11/28/2011	3:24:51 PM	Helium valve closed
11/28/2011	3:24:51 PM	H2 valve closed
11/28/2011	3:24:51 PM	BCl3 valve closed
11/28/2011	3:24:51 PM	PH3 valve closed
11/28/2011	3:24:51 PM	SiCl4 pre valve closed
11/28/2011	3:24:51 PM	SiCl4 post valve closed
11/28/2011	3:24:51 PM	Main Vac valve closed
11/28/2011	3:24:51 PM	Bubbler valve closed
11/28/2011	3:24:51 PM	Bypass valve opened
11/28/2011	3:24:51 PM	Helium MFC set to  0.000000
11/28/2011	3:24:51 PM	H2 MFC set to  0.000000
11/28/2011	3:24:51 PM	BCl3 MFC set to  0.000000
11/28/2011	3:24:51 PM	PHl3 MFC set to  0.000000
11/28/2011	3:24:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:24:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:24:51 PM	Tube furnace set to 0
11/28/2011	3:26:12 PM	Helium valve closed
11/28/2011	3:26:12 PM	H2 valve closed
11/28/2011	3:26:12 PM	BCl3 valve closed
11/28/2011	3:26:12 PM	PH3 valve closed
11/28/2011	3:26:12 PM	SiCl4 pre valve closed
11/28/2011	3:26:12 PM	SiCl4 post valve closed
11/28/2011	3:26:12 PM	Main Vac valve closed
11/28/2011	3:26:12 PM	Bubbler valve closed
11/28/2011	3:26:12 PM	Bypass valve opened
11/28/2011	3:26:12 PM	Helium MFC set to  0.000000
11/28/2011	3:26:12 PM	H2 MFC set to  0.000000
11/28/2011	3:26:12 PM	BCl3 MFC set to  0.000000
11/28/2011	3:26:12 PM	PHl3 MFC set to  0.000000
11/28/2011	3:26:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:26:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:26:12 PM	Tube furnace set to 0
11/28/2011	3:27:12 PM	Helium valve closed
11/28/2011	3:27:12 PM	H2 valve closed
11/28/2011	3:27:12 PM	BCl3 valve closed
11/28/2011	3:27:12 PM	PH3 valve closed
11/28/2011	3:27:12 PM	SiCl4 pre valve closed
11/28/2011	3:27:12 PM	SiCl4 post valve closed
11/28/2011	3:27:12 PM	Bypass valve closed
11/28/2011	3:27:12 PM	Bubbler valve closed
11/28/2011	3:27:12 PM	Main Vac valve opened
11/28/2011	3:27:12 PM	Helium MFC set to  0.000000
11/28/2011	3:27:12 PM	H2 MFC set to  0.000000
11/28/2011	3:27:12 PM	BCl3 MFC set to  0.000000
11/28/2011	3:27:12 PM	PHl3 MFC set to  0.000000
11/28/2011	3:27:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:27:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:27:13 PM	Tube furnace set to 0
11/28/2011	3:27:14 PM	Run finished at 3:27 PM
11/28/2011	3:27:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	3:39:05 PM	Recipe started at 3:38 PM
11/28/2011	3:39:05 PM	Helium valve closed
11/28/2011	3:39:05 PM	H2 valve closed
11/28/2011	3:39:05 PM	BCl3 valve closed
11/28/2011	3:39:05 PM	PH3 valve closed
11/28/2011	3:39:05 PM	SiCl4 pre valve closed
11/28/2011	3:39:05 PM	SiCl4 post valve closed
11/28/2011	3:39:05 PM	Bypass valve closed
11/28/2011	3:39:05 PM	Bubbler valve closed
11/28/2011	3:39:05 PM	Main Vac valve opened
11/28/2011	3:39:05 PM	Helium MFC set to  0.000000
11/28/2011	3:39:05 PM	H2 MFC set to  0.000000
11/28/2011	3:39:05 PM	BCl3 MFC set to  0.000000
11/28/2011	3:39:05 PM	PHl3 MFC set to  0.000000
11/28/2011	3:39:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:39:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:39:05 PM	Tube furnace set to 150
11/28/2011	3:39:35 PM	H2 valve closed
11/28/2011	3:39:35 PM	BCl3 valve closed
11/28/2011	3:39:35 PM	PH3 valve closed
11/28/2011	3:39:35 PM	SiCl4 pre valve closed
11/28/2011	3:39:35 PM	SiCl4 post valve closed
11/28/2011	3:39:35 PM	Bypass valve closed
11/28/2011	3:39:35 PM	Bubbler valve closed
11/28/2011	3:39:35 PM	Helium valve opened
11/28/2011	3:39:35 PM	Main Vac valve opened
11/28/2011	3:39:35 PM	Helium MFC set to  20.000000
11/28/2011	3:39:35 PM	H2 MFC set to  0.000000
11/28/2011	3:39:35 PM	BCl3 MFC set to  0.000000
11/28/2011	3:39:35 PM	PHl3 MFC set to  0.000000
11/28/2011	3:39:35 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:39:35 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:39:35 PM	Tube furnace set to 150
11/28/2011	3:40:05 PM	Helium valve closed
11/28/2011	3:40:05 PM	H2 valve closed
11/28/2011	3:40:05 PM	BCl3 valve closed
11/28/2011	3:40:05 PM	PH3 valve closed
11/28/2011	3:40:05 PM	SiCl4 pre valve closed
11/28/2011	3:40:05 PM	SiCl4 post valve closed
11/28/2011	3:40:05 PM	Bypass valve closed
11/28/2011	3:40:05 PM	Bubbler valve closed
11/28/2011	3:40:05 PM	Main Vac valve opened
11/28/2011	3:40:05 PM	Helium MFC set to  0.000000
11/28/2011	3:40:05 PM	H2 MFC set to  0.000000
11/28/2011	3:40:05 PM	BCl3 MFC set to  0.000000
11/28/2011	3:40:05 PM	PHl3 MFC set to  0.000000
11/28/2011	3:40:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:40:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:40:05 PM	Tube furnace set to 150
11/28/2011	3:40:35 PM	H2 valve closed
11/28/2011	3:40:35 PM	BCl3 valve closed
11/28/2011	3:40:35 PM	PH3 valve closed
11/28/2011	3:40:35 PM	SiCl4 pre valve closed
11/28/2011	3:40:35 PM	SiCl4 post valve closed
11/28/2011	3:40:35 PM	Bypass valve closed
11/28/2011	3:40:35 PM	Bubbler valve closed
11/28/2011	3:40:35 PM	Helium valve opened
11/28/2011	3:40:35 PM	Main Vac valve opened
11/28/2011	3:40:35 PM	Helium MFC set to  20.000000
11/28/2011	3:40:35 PM	H2 MFC set to  0.000000
11/28/2011	3:40:35 PM	BCl3 MFC set to  0.000000
11/28/2011	3:40:35 PM	PHl3 MFC set to  0.000000
11/28/2011	3:40:35 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:40:35 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:40:36 PM	Tube furnace set to 150
11/28/2011	3:41:06 PM	Helium valve closed
11/28/2011	3:41:06 PM	H2 valve closed
11/28/2011	3:41:06 PM	BCl3 valve closed
11/28/2011	3:41:06 PM	PH3 valve closed
11/28/2011	3:41:06 PM	SiCl4 pre valve closed
11/28/2011	3:41:06 PM	SiCl4 post valve closed
11/28/2011	3:41:06 PM	Bypass valve closed
11/28/2011	3:41:06 PM	Bubbler valve closed
11/28/2011	3:41:06 PM	Main Vac valve opened
11/28/2011	3:41:06 PM	Helium MFC set to  0.000000
11/28/2011	3:41:06 PM	H2 MFC set to  0.000000
11/28/2011	3:41:06 PM	BCl3 MFC set to  0.000000
11/28/2011	3:41:06 PM	PHl3 MFC set to  0.000000
11/28/2011	3:41:06 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:41:06 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:41:06 PM	Tube furnace set to 150
11/28/2011	3:41:36 PM	H2 valve closed
11/28/2011	3:41:36 PM	BCl3 valve closed
11/28/2011	3:41:36 PM	PH3 valve closed
11/28/2011	3:41:36 PM	SiCl4 pre valve closed
11/28/2011	3:41:36 PM	SiCl4 post valve closed
11/28/2011	3:41:36 PM	Bypass valve closed
11/28/2011	3:41:36 PM	Bubbler valve closed
11/28/2011	3:41:36 PM	Helium valve opened
11/28/2011	3:41:36 PM	Main Vac valve opened
11/28/2011	3:41:36 PM	Helium MFC set to  20.000000
11/28/2011	3:41:36 PM	H2 MFC set to  0.000000
11/28/2011	3:41:36 PM	BCl3 MFC set to  0.000000
11/28/2011	3:41:36 PM	PHl3 MFC set to  0.000000
11/28/2011	3:41:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:41:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:41:36 PM	Tube furnace set to 150
11/28/2011	3:42:06 PM	Helium valve closed
11/28/2011	3:42:06 PM	H2 valve closed
11/28/2011	3:42:06 PM	BCl3 valve closed
11/28/2011	3:42:06 PM	PH3 valve closed
11/28/2011	3:42:06 PM	SiCl4 pre valve closed
11/28/2011	3:42:06 PM	SiCl4 post valve closed
11/28/2011	3:42:06 PM	Bypass valve closed
11/28/2011	3:42:06 PM	Bubbler valve closed
11/28/2011	3:42:06 PM	Main Vac valve opened
11/28/2011	3:42:06 PM	Helium MFC set to  0.000000
11/28/2011	3:42:06 PM	H2 MFC set to  0.000000
11/28/2011	3:42:06 PM	BCl3 MFC set to  0.000000
11/28/2011	3:42:06 PM	PHl3 MFC set to  0.000000
11/28/2011	3:42:06 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:42:06 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:42:06 PM	Tube furnace set to 150
11/28/2011	3:42:36 PM	H2 valve closed
11/28/2011	3:42:36 PM	BCl3 valve closed
11/28/2011	3:42:36 PM	PH3 valve closed
11/28/2011	3:42:36 PM	SiCl4 pre valve closed
11/28/2011	3:42:36 PM	SiCl4 post valve closed
11/28/2011	3:42:36 PM	Bypass valve closed
11/28/2011	3:42:36 PM	Bubbler valve closed
11/28/2011	3:42:36 PM	Helium valve opened
11/28/2011	3:42:36 PM	Main Vac valve opened
11/28/2011	3:42:36 PM	Helium MFC set to  20.000000
11/28/2011	3:42:36 PM	H2 MFC set to  0.000000
11/28/2011	3:42:36 PM	BCl3 MFC set to  0.000000
11/28/2011	3:42:36 PM	PHl3 MFC set to  0.000000
11/28/2011	3:42:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:42:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:42:36 PM	Tube furnace set to 150
11/28/2011	3:43:06 PM	Helium valve closed
11/28/2011	3:43:06 PM	H2 valve closed
11/28/2011	3:43:06 PM	BCl3 valve closed
11/28/2011	3:43:06 PM	PH3 valve closed
11/28/2011	3:43:06 PM	SiCl4 pre valve closed
11/28/2011	3:43:06 PM	SiCl4 post valve closed
11/28/2011	3:43:06 PM	Bypass valve closed
11/28/2011	3:43:06 PM	Bubbler valve closed
11/28/2011	3:43:06 PM	Main Vac valve opened
11/28/2011	3:43:06 PM	Helium MFC set to  0.000000
11/28/2011	3:43:06 PM	H2 MFC set to  0.000000
11/28/2011	3:43:06 PM	BCl3 MFC set to  0.000000
11/28/2011	3:43:06 PM	PHl3 MFC set to  0.000000
11/28/2011	3:43:06 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:43:06 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:43:07 PM	Tube furnace set to 150
11/28/2011	3:43:37 PM	H2 valve closed
11/28/2011	3:43:37 PM	BCl3 valve closed
11/28/2011	3:43:37 PM	PH3 valve closed
11/28/2011	3:43:37 PM	SiCl4 pre valve closed
11/28/2011	3:43:37 PM	SiCl4 post valve closed
11/28/2011	3:43:37 PM	Bypass valve closed
11/28/2011	3:43:37 PM	Bubbler valve closed
11/28/2011	3:43:37 PM	Helium valve opened
11/28/2011	3:43:37 PM	Main Vac valve opened
11/28/2011	3:43:37 PM	Helium MFC set to  20.000000
11/28/2011	3:43:37 PM	H2 MFC set to  0.000000
11/28/2011	3:43:37 PM	BCl3 MFC set to  0.000000
11/28/2011	3:43:37 PM	PHl3 MFC set to  0.000000
11/28/2011	3:43:37 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:43:37 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:43:37 PM	Tube furnace set to 150
11/28/2011	3:44:07 PM	Helium valve closed
11/28/2011	3:44:07 PM	H2 valve closed
11/28/2011	3:44:07 PM	BCl3 valve closed
11/28/2011	3:44:07 PM	PH3 valve closed
11/28/2011	3:44:07 PM	SiCl4 pre valve closed
11/28/2011	3:44:07 PM	SiCl4 post valve closed
11/28/2011	3:44:07 PM	Bypass valve closed
11/28/2011	3:44:07 PM	Bubbler valve closed
11/28/2011	3:44:07 PM	Main Vac valve opened
11/28/2011	3:44:07 PM	Helium MFC set to  0.000000
11/28/2011	3:44:07 PM	H2 MFC set to  0.000000
11/28/2011	3:44:07 PM	BCl3 MFC set to  0.000000
11/28/2011	3:44:07 PM	PHl3 MFC set to  0.000000
11/28/2011	3:44:07 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:44:07 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:44:07 PM	Tube furnace set to 150
11/28/2011	3:44:37 PM	H2 valve closed
11/28/2011	3:44:37 PM	BCl3 valve closed
11/28/2011	3:44:37 PM	PH3 valve closed
11/28/2011	3:44:37 PM	SiCl4 pre valve closed
11/28/2011	3:44:37 PM	SiCl4 post valve closed
11/28/2011	3:44:37 PM	Bypass valve closed
11/28/2011	3:44:37 PM	Bubbler valve closed
11/28/2011	3:44:37 PM	Helium valve opened
11/28/2011	3:44:37 PM	Main Vac valve opened
11/28/2011	3:44:37 PM	Helium MFC set to  20.000000
11/28/2011	3:44:37 PM	H2 MFC set to  0.000000
11/28/2011	3:44:37 PM	BCl3 MFC set to  0.000000
11/28/2011	3:44:37 PM	PHl3 MFC set to  0.000000
11/28/2011	3:44:37 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:44:37 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:44:37 PM	Tube furnace set to 150
11/28/2011	3:45:07 PM	Helium valve closed
11/28/2011	3:45:07 PM	H2 valve closed
11/28/2011	3:45:07 PM	BCl3 valve closed
11/28/2011	3:45:07 PM	PH3 valve closed
11/28/2011	3:45:07 PM	SiCl4 pre valve closed
11/28/2011	3:45:07 PM	SiCl4 post valve closed
11/28/2011	3:45:07 PM	Bypass valve closed
11/28/2011	3:45:07 PM	Bubbler valve closed
11/28/2011	3:45:07 PM	Main Vac valve opened
11/28/2011	3:45:07 PM	Helium MFC set to  0.000000
11/28/2011	3:45:07 PM	H2 MFC set to  0.000000
11/28/2011	3:45:07 PM	BCl3 MFC set to  0.000000
11/28/2011	3:45:07 PM	PHl3 MFC set to  0.000000
11/28/2011	3:45:07 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:45:07 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:45:07 PM	Tube furnace set to 150
11/28/2011	3:45:38 PM	H2 valve closed
11/28/2011	3:45:38 PM	BCl3 valve closed
11/28/2011	3:45:38 PM	PH3 valve closed
11/28/2011	3:45:38 PM	SiCl4 pre valve closed
11/28/2011	3:45:38 PM	SiCl4 post valve closed
11/28/2011	3:45:38 PM	Bypass valve closed
11/28/2011	3:45:38 PM	Bubbler valve closed
11/28/2011	3:45:38 PM	Helium valve opened
11/28/2011	3:45:38 PM	Main Vac valve opened
11/28/2011	3:45:38 PM	Helium MFC set to  20.000000
11/28/2011	3:45:38 PM	H2 MFC set to  0.000000
11/28/2011	3:45:38 PM	BCl3 MFC set to  0.000000
11/28/2011	3:45:38 PM	PHl3 MFC set to  0.000000
11/28/2011	3:45:38 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:45:38 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:45:38 PM	Tube furnace set to 150
11/28/2011	3:46:08 PM	Helium valve closed
11/28/2011	3:46:08 PM	H2 valve closed
11/28/2011	3:46:08 PM	BCl3 valve closed
11/28/2011	3:46:08 PM	PH3 valve closed
11/28/2011	3:46:08 PM	SiCl4 pre valve closed
11/28/2011	3:46:08 PM	SiCl4 post valve closed
11/28/2011	3:46:08 PM	Bypass valve closed
11/28/2011	3:46:08 PM	Bubbler valve closed
11/28/2011	3:46:08 PM	Main Vac valve opened
11/28/2011	3:46:08 PM	Helium MFC set to  0.000000
11/28/2011	3:46:08 PM	H2 MFC set to  0.000000
11/28/2011	3:46:08 PM	BCl3 MFC set to  0.000000
11/28/2011	3:46:08 PM	PHl3 MFC set to  0.000000
11/28/2011	3:46:08 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:46:08 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:46:08 PM	Tube furnace set to 150
11/28/2011	3:46:38 PM	H2 valve closed
11/28/2011	3:46:38 PM	BCl3 valve closed
11/28/2011	3:46:38 PM	PH3 valve closed
11/28/2011	3:46:38 PM	SiCl4 pre valve closed
11/28/2011	3:46:38 PM	SiCl4 post valve closed
11/28/2011	3:46:38 PM	Bypass valve closed
11/28/2011	3:46:38 PM	Bubbler valve closed
11/28/2011	3:46:38 PM	Helium valve opened
11/28/2011	3:46:38 PM	Main Vac valve opened
11/28/2011	3:46:38 PM	Helium MFC set to  20.000000
11/28/2011	3:46:38 PM	H2 MFC set to  0.000000
11/28/2011	3:46:38 PM	BCl3 MFC set to  0.000000
11/28/2011	3:46:38 PM	PHl3 MFC set to  0.000000
11/28/2011	3:46:38 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:46:38 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:46:38 PM	Tube furnace set to 150
11/28/2011	3:47:08 PM	Helium valve closed
11/28/2011	3:47:08 PM	H2 valve closed
11/28/2011	3:47:08 PM	BCl3 valve closed
11/28/2011	3:47:08 PM	PH3 valve closed
11/28/2011	3:47:08 PM	SiCl4 pre valve closed
11/28/2011	3:47:08 PM	SiCl4 post valve closed
11/28/2011	3:47:08 PM	Bypass valve closed
11/28/2011	3:47:08 PM	Bubbler valve closed
11/28/2011	3:47:08 PM	Main Vac valve opened
11/28/2011	3:47:08 PM	Helium MFC set to  0.000000
11/28/2011	3:47:08 PM	H2 MFC set to  0.000000
11/28/2011	3:47:08 PM	BCl3 MFC set to  0.000000
11/28/2011	3:47:08 PM	PHl3 MFC set to  0.000000
11/28/2011	3:47:08 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:47:08 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:47:08 PM	Tube furnace set to 150
11/28/2011	3:47:38 PM	H2 valve closed
11/28/2011	3:47:38 PM	BCl3 valve closed
11/28/2011	3:47:38 PM	PH3 valve closed
11/28/2011	3:47:38 PM	SiCl4 pre valve closed
11/28/2011	3:47:38 PM	SiCl4 post valve closed
11/28/2011	3:47:38 PM	Bypass valve closed
11/28/2011	3:47:38 PM	Bubbler valve closed
11/28/2011	3:47:38 PM	Helium valve opened
11/28/2011	3:47:38 PM	Main Vac valve opened
11/28/2011	3:47:38 PM	Helium MFC set to  20.000000
11/28/2011	3:47:38 PM	H2 MFC set to  0.000000
11/28/2011	3:47:38 PM	BCl3 MFC set to  0.000000
11/28/2011	3:47:38 PM	PHl3 MFC set to  0.000000
11/28/2011	3:47:38 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:47:38 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:47:39 PM	Tube furnace set to 150
11/28/2011	3:48:09 PM	Helium valve closed
11/28/2011	3:48:09 PM	H2 valve closed
11/28/2011	3:48:09 PM	BCl3 valve closed
11/28/2011	3:48:09 PM	PH3 valve closed
11/28/2011	3:48:09 PM	SiCl4 pre valve closed
11/28/2011	3:48:09 PM	SiCl4 post valve closed
11/28/2011	3:48:09 PM	Bypass valve closed
11/28/2011	3:48:09 PM	Bubbler valve closed
11/28/2011	3:48:09 PM	Main Vac valve opened
11/28/2011	3:48:09 PM	Helium MFC set to  0.000000
11/28/2011	3:48:09 PM	H2 MFC set to  0.000000
11/28/2011	3:48:09 PM	BCl3 MFC set to  0.000000
11/28/2011	3:48:09 PM	PHl3 MFC set to  0.000000
11/28/2011	3:48:09 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:48:09 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:48:09 PM	Tube furnace set to 150
11/28/2011	3:48:39 PM	H2 valve closed
11/28/2011	3:48:39 PM	BCl3 valve closed
11/28/2011	3:48:39 PM	PH3 valve closed
11/28/2011	3:48:39 PM	SiCl4 pre valve closed
11/28/2011	3:48:39 PM	SiCl4 post valve closed
11/28/2011	3:48:39 PM	Bypass valve closed
11/28/2011	3:48:39 PM	Bubbler valve closed
11/28/2011	3:48:39 PM	Helium valve opened
11/28/2011	3:48:39 PM	Main Vac valve opened
11/28/2011	3:48:39 PM	Helium MFC set to  20.000000
11/28/2011	3:48:39 PM	H2 MFC set to  0.000000
11/28/2011	3:48:39 PM	BCl3 MFC set to  0.000000
11/28/2011	3:48:39 PM	PHl3 MFC set to  0.000000
11/28/2011	3:48:39 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:48:39 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:48:39 PM	Tube furnace set to 150
11/28/2011	3:49:09 PM	Helium valve closed
11/28/2011	3:49:09 PM	H2 valve closed
11/28/2011	3:49:09 PM	BCl3 valve closed
11/28/2011	3:49:09 PM	PH3 valve closed
11/28/2011	3:49:09 PM	SiCl4 pre valve closed
11/28/2011	3:49:09 PM	SiCl4 post valve closed
11/28/2011	3:49:09 PM	Bypass valve closed
11/28/2011	3:49:09 PM	Bubbler valve closed
11/28/2011	3:49:09 PM	Main Vac valve opened
11/28/2011	3:49:09 PM	Helium MFC set to  0.000000
11/28/2011	3:49:09 PM	H2 MFC set to  0.000000
11/28/2011	3:49:09 PM	BCl3 MFC set to  0.000000
11/28/2011	3:49:09 PM	PHl3 MFC set to  0.000000
11/28/2011	3:49:09 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:49:09 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:49:09 PM	Tube furnace set to 150
11/28/2011	3:49:10 PM	Run finished at 3:49 PM
11/28/2011	3:49:42 PM	Recipe started at 3:49 PM
11/28/2011	3:49:42 PM	Helium valve closed
11/28/2011	3:49:42 PM	H2 valve closed
11/28/2011	3:49:42 PM	BCl3 valve closed
11/28/2011	3:49:42 PM	PH3 valve closed
11/28/2011	3:49:42 PM	SiCl4 pre valve closed
11/28/2011	3:49:42 PM	SiCl4 post valve closed
11/28/2011	3:49:42 PM	Bypass valve closed
11/28/2011	3:49:42 PM	Bubbler valve closed
11/28/2011	3:49:42 PM	Main Vac valve opened
11/28/2011	3:49:42 PM	Helium MFC set to  0.000000
11/28/2011	3:49:42 PM	H2 MFC set to  0.000000
11/28/2011	3:49:42 PM	BCl3 MFC set to  0.000000
11/28/2011	3:49:42 PM	PHl3 MFC set to  0.000000
11/28/2011	3:49:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:49:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:49:43 PM	Tube furnace set to 150
11/28/2011	3:50:13 PM	H2 valve closed
11/28/2011	3:50:13 PM	BCl3 valve closed
11/28/2011	3:50:13 PM	PH3 valve closed
11/28/2011	3:50:13 PM	SiCl4 pre valve closed
11/28/2011	3:50:13 PM	SiCl4 post valve closed
11/28/2011	3:50:13 PM	Bypass valve closed
11/28/2011	3:50:13 PM	Bubbler valve closed
11/28/2011	3:50:13 PM	Helium valve opened
11/28/2011	3:50:13 PM	Main Vac valve opened
11/28/2011	3:50:13 PM	Helium MFC set to  20.000000
11/28/2011	3:50:13 PM	H2 MFC set to  0.000000
11/28/2011	3:50:13 PM	BCl3 MFC set to  0.000000
11/28/2011	3:50:13 PM	PHl3 MFC set to  0.000000
11/28/2011	3:50:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:50:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:50:13 PM	Tube furnace set to 150
11/28/2011	3:50:43 PM	Helium valve closed
11/28/2011	3:50:43 PM	H2 valve closed
11/28/2011	3:50:43 PM	BCl3 valve closed
11/28/2011	3:50:43 PM	PH3 valve closed
11/28/2011	3:50:43 PM	SiCl4 pre valve closed
11/28/2011	3:50:43 PM	SiCl4 post valve closed
11/28/2011	3:50:43 PM	Bypass valve closed
11/28/2011	3:50:43 PM	Bubbler valve closed
11/28/2011	3:50:43 PM	Main Vac valve opened
11/28/2011	3:50:43 PM	Helium MFC set to  0.000000
11/28/2011	3:50:43 PM	H2 MFC set to  0.000000
11/28/2011	3:50:43 PM	BCl3 MFC set to  0.000000
11/28/2011	3:50:43 PM	PHl3 MFC set to  0.000000
11/28/2011	3:50:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:50:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:50:43 PM	Tube furnace set to 150
11/28/2011	3:51:13 PM	H2 valve closed
11/28/2011	3:51:13 PM	BCl3 valve closed
11/28/2011	3:51:13 PM	PH3 valve closed
11/28/2011	3:51:13 PM	SiCl4 pre valve closed
11/28/2011	3:51:13 PM	SiCl4 post valve closed
11/28/2011	3:51:13 PM	Bypass valve closed
11/28/2011	3:51:13 PM	Bubbler valve closed
11/28/2011	3:51:13 PM	Helium valve opened
11/28/2011	3:51:13 PM	Main Vac valve opened
11/28/2011	3:51:13 PM	Helium MFC set to  20.000000
11/28/2011	3:51:13 PM	H2 MFC set to  0.000000
11/28/2011	3:51:13 PM	BCl3 MFC set to  0.000000
11/28/2011	3:51:13 PM	PHl3 MFC set to  0.000000
11/28/2011	3:51:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:51:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:51:13 PM	Tube furnace set to 150
11/28/2011	3:51:43 PM	Helium valve closed
11/28/2011	3:51:43 PM	H2 valve closed
11/28/2011	3:51:43 PM	BCl3 valve closed
11/28/2011	3:51:43 PM	PH3 valve closed
11/28/2011	3:51:43 PM	SiCl4 pre valve closed
11/28/2011	3:51:43 PM	SiCl4 post valve closed
11/28/2011	3:51:43 PM	Bypass valve closed
11/28/2011	3:51:43 PM	Bubbler valve closed
11/28/2011	3:51:43 PM	Main Vac valve opened
11/28/2011	3:51:43 PM	Helium MFC set to  0.000000
11/28/2011	3:51:43 PM	H2 MFC set to  0.000000
11/28/2011	3:51:43 PM	BCl3 MFC set to  0.000000
11/28/2011	3:51:43 PM	PHl3 MFC set to  0.000000
11/28/2011	3:51:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:51:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:51:43 PM	Tube furnace set to 150
11/28/2011	3:52:13 PM	H2 valve closed
11/28/2011	3:52:13 PM	BCl3 valve closed
11/28/2011	3:52:13 PM	PH3 valve closed
11/28/2011	3:52:13 PM	SiCl4 pre valve closed
11/28/2011	3:52:13 PM	SiCl4 post valve closed
11/28/2011	3:52:13 PM	Bypass valve closed
11/28/2011	3:52:13 PM	Bubbler valve closed
11/28/2011	3:52:13 PM	Helium valve opened
11/28/2011	3:52:13 PM	Main Vac valve opened
11/28/2011	3:52:13 PM	Helium MFC set to  20.000000
11/28/2011	3:52:13 PM	H2 MFC set to  0.000000
11/28/2011	3:52:13 PM	BCl3 MFC set to  0.000000
11/28/2011	3:52:13 PM	PHl3 MFC set to  0.000000
11/28/2011	3:52:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:52:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:52:14 PM	Tube furnace set to 150
11/28/2011	3:52:44 PM	Helium valve closed
11/28/2011	3:52:44 PM	H2 valve closed
11/28/2011	3:52:44 PM	BCl3 valve closed
11/28/2011	3:52:44 PM	PH3 valve closed
11/28/2011	3:52:44 PM	SiCl4 pre valve closed
11/28/2011	3:52:44 PM	SiCl4 post valve closed
11/28/2011	3:52:44 PM	Bypass valve closed
11/28/2011	3:52:44 PM	Bubbler valve closed
11/28/2011	3:52:44 PM	Main Vac valve opened
11/28/2011	3:52:44 PM	Helium MFC set to  0.000000
11/28/2011	3:52:44 PM	H2 MFC set to  0.000000
11/28/2011	3:52:44 PM	BCl3 MFC set to  0.000000
11/28/2011	3:52:44 PM	PHl3 MFC set to  0.000000
11/28/2011	3:52:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:52:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:52:44 PM	Tube furnace set to 150
11/28/2011	3:53:14 PM	H2 valve closed
11/28/2011	3:53:14 PM	BCl3 valve closed
11/28/2011	3:53:14 PM	PH3 valve closed
11/28/2011	3:53:14 PM	SiCl4 pre valve closed
11/28/2011	3:53:14 PM	SiCl4 post valve closed
11/28/2011	3:53:14 PM	Bypass valve closed
11/28/2011	3:53:14 PM	Bubbler valve closed
11/28/2011	3:53:14 PM	Helium valve opened
11/28/2011	3:53:14 PM	Main Vac valve opened
11/28/2011	3:53:14 PM	Helium MFC set to  20.000000
11/28/2011	3:53:14 PM	H2 MFC set to  0.000000
11/28/2011	3:53:14 PM	BCl3 MFC set to  0.000000
11/28/2011	3:53:14 PM	PHl3 MFC set to  0.000000
11/28/2011	3:53:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:53:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:53:14 PM	Tube furnace set to 150
11/28/2011	3:53:44 PM	Helium valve closed
11/28/2011	3:53:44 PM	H2 valve closed
11/28/2011	3:53:44 PM	BCl3 valve closed
11/28/2011	3:53:44 PM	PH3 valve closed
11/28/2011	3:53:44 PM	SiCl4 pre valve closed
11/28/2011	3:53:44 PM	SiCl4 post valve closed
11/28/2011	3:53:44 PM	Bypass valve closed
11/28/2011	3:53:44 PM	Bubbler valve closed
11/28/2011	3:53:44 PM	Main Vac valve opened
11/28/2011	3:53:44 PM	Helium MFC set to  0.000000
11/28/2011	3:53:44 PM	H2 MFC set to  0.000000
11/28/2011	3:53:44 PM	BCl3 MFC set to  0.000000
11/28/2011	3:53:44 PM	PHl3 MFC set to  0.000000
11/28/2011	3:53:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:53:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:53:44 PM	Tube furnace set to 150
11/28/2011	3:54:14 PM	H2 valve closed
11/28/2011	3:54:14 PM	BCl3 valve closed
11/28/2011	3:54:14 PM	PH3 valve closed
11/28/2011	3:54:14 PM	SiCl4 pre valve closed
11/28/2011	3:54:14 PM	SiCl4 post valve closed
11/28/2011	3:54:14 PM	Bypass valve closed
11/28/2011	3:54:14 PM	Bubbler valve closed
11/28/2011	3:54:14 PM	Helium valve opened
11/28/2011	3:54:14 PM	Main Vac valve opened
11/28/2011	3:54:14 PM	Helium MFC set to  20.000000
11/28/2011	3:54:14 PM	H2 MFC set to  0.000000
11/28/2011	3:54:14 PM	BCl3 MFC set to  0.000000
11/28/2011	3:54:14 PM	PHl3 MFC set to  0.000000
11/28/2011	3:54:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:54:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:54:14 PM	Tube furnace set to 150
11/28/2011	3:54:44 PM	Helium valve closed
11/28/2011	3:54:44 PM	H2 valve closed
11/28/2011	3:54:44 PM	BCl3 valve closed
11/28/2011	3:54:44 PM	PH3 valve closed
11/28/2011	3:54:44 PM	SiCl4 pre valve closed
11/28/2011	3:54:44 PM	SiCl4 post valve closed
11/28/2011	3:54:44 PM	Bypass valve closed
11/28/2011	3:54:44 PM	Bubbler valve closed
11/28/2011	3:54:44 PM	Main Vac valve opened
11/28/2011	3:54:44 PM	Helium MFC set to  0.000000
11/28/2011	3:54:44 PM	H2 MFC set to  0.000000
11/28/2011	3:54:44 PM	BCl3 MFC set to  0.000000
11/28/2011	3:54:44 PM	PHl3 MFC set to  0.000000
11/28/2011	3:54:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:54:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:54:45 PM	Tube furnace set to 150
11/28/2011	3:55:15 PM	H2 valve closed
11/28/2011	3:55:15 PM	BCl3 valve closed
11/28/2011	3:55:15 PM	PH3 valve closed
11/28/2011	3:55:15 PM	SiCl4 pre valve closed
11/28/2011	3:55:15 PM	SiCl4 post valve closed
11/28/2011	3:55:15 PM	Bypass valve closed
11/28/2011	3:55:15 PM	Bubbler valve closed
11/28/2011	3:55:15 PM	Helium valve opened
11/28/2011	3:55:15 PM	Main Vac valve opened
11/28/2011	3:55:15 PM	Helium MFC set to  20.000000
11/28/2011	3:55:15 PM	H2 MFC set to  0.000000
11/28/2011	3:55:15 PM	BCl3 MFC set to  0.000000
11/28/2011	3:55:15 PM	PHl3 MFC set to  0.000000
11/28/2011	3:55:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:55:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:55:15 PM	Tube furnace set to 150
11/28/2011	3:55:45 PM	Helium valve closed
11/28/2011	3:55:45 PM	H2 valve closed
11/28/2011	3:55:45 PM	BCl3 valve closed
11/28/2011	3:55:45 PM	PH3 valve closed
11/28/2011	3:55:45 PM	SiCl4 pre valve closed
11/28/2011	3:55:45 PM	SiCl4 post valve closed
11/28/2011	3:55:45 PM	Bypass valve closed
11/28/2011	3:55:45 PM	Bubbler valve closed
11/28/2011	3:55:45 PM	Main Vac valve opened
11/28/2011	3:55:45 PM	Helium MFC set to  0.000000
11/28/2011	3:55:45 PM	H2 MFC set to  0.000000
11/28/2011	3:55:45 PM	BCl3 MFC set to  0.000000
11/28/2011	3:55:45 PM	PHl3 MFC set to  0.000000
11/28/2011	3:55:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:55:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:55:45 PM	Tube furnace set to 150
11/28/2011	3:56:15 PM	H2 valve closed
11/28/2011	3:56:15 PM	BCl3 valve closed
11/28/2011	3:56:15 PM	PH3 valve closed
11/28/2011	3:56:15 PM	SiCl4 pre valve closed
11/28/2011	3:56:15 PM	SiCl4 post valve closed
11/28/2011	3:56:15 PM	Bypass valve closed
11/28/2011	3:56:15 PM	Bubbler valve closed
11/28/2011	3:56:15 PM	Helium valve opened
11/28/2011	3:56:15 PM	Main Vac valve opened
11/28/2011	3:56:15 PM	Helium MFC set to  20.000000
11/28/2011	3:56:15 PM	H2 MFC set to  0.000000
11/28/2011	3:56:15 PM	BCl3 MFC set to  0.000000
11/28/2011	3:56:15 PM	PHl3 MFC set to  0.000000
11/28/2011	3:56:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:56:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:56:15 PM	Tube furnace set to 150
11/28/2011	3:56:45 PM	Helium valve closed
11/28/2011	3:56:45 PM	H2 valve closed
11/28/2011	3:56:45 PM	BCl3 valve closed
11/28/2011	3:56:45 PM	PH3 valve closed
11/28/2011	3:56:45 PM	SiCl4 pre valve closed
11/28/2011	3:56:45 PM	SiCl4 post valve closed
11/28/2011	3:56:45 PM	Bypass valve closed
11/28/2011	3:56:45 PM	Bubbler valve closed
11/28/2011	3:56:45 PM	Main Vac valve opened
11/28/2011	3:56:45 PM	Helium MFC set to  0.000000
11/28/2011	3:56:45 PM	H2 MFC set to  0.000000
11/28/2011	3:56:45 PM	BCl3 MFC set to  0.000000
11/28/2011	3:56:45 PM	PHl3 MFC set to  0.000000
11/28/2011	3:56:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:56:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:56:45 PM	Tube furnace set to 150
11/28/2011	3:57:15 PM	H2 valve closed
11/28/2011	3:57:15 PM	BCl3 valve closed
11/28/2011	3:57:15 PM	PH3 valve closed
11/28/2011	3:57:15 PM	SiCl4 pre valve closed
11/28/2011	3:57:15 PM	SiCl4 post valve closed
11/28/2011	3:57:15 PM	Bypass valve closed
11/28/2011	3:57:16 PM	Bubbler valve closed
11/28/2011	3:57:16 PM	Helium valve opened
11/28/2011	3:57:16 PM	Main Vac valve opened
11/28/2011	3:57:16 PM	Helium MFC set to  20.000000
11/28/2011	3:57:16 PM	H2 MFC set to  0.000000
11/28/2011	3:57:16 PM	BCl3 MFC set to  0.000000
11/28/2011	3:57:16 PM	PHl3 MFC set to  0.000000
11/28/2011	3:57:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:57:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:57:16 PM	Tube furnace set to 150
11/28/2011	3:57:46 PM	Helium valve closed
11/28/2011	3:57:46 PM	H2 valve closed
11/28/2011	3:57:46 PM	BCl3 valve closed
11/28/2011	3:57:46 PM	PH3 valve closed
11/28/2011	3:57:46 PM	SiCl4 pre valve closed
11/28/2011	3:57:46 PM	SiCl4 post valve closed
11/28/2011	3:57:46 PM	Bypass valve closed
11/28/2011	3:57:46 PM	Bubbler valve closed
11/28/2011	3:57:46 PM	Main Vac valve opened
11/28/2011	3:57:46 PM	Helium MFC set to  0.000000
11/28/2011	3:57:46 PM	H2 MFC set to  0.000000
11/28/2011	3:57:46 PM	BCl3 MFC set to  0.000000
11/28/2011	3:57:46 PM	PHl3 MFC set to  0.000000
11/28/2011	3:57:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:57:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:57:46 PM	Tube furnace set to 150
11/28/2011	3:58:16 PM	H2 valve closed
11/28/2011	3:58:16 PM	BCl3 valve closed
11/28/2011	3:58:16 PM	PH3 valve closed
11/28/2011	3:58:16 PM	SiCl4 pre valve closed
11/28/2011	3:58:16 PM	SiCl4 post valve closed
11/28/2011	3:58:16 PM	Bypass valve closed
11/28/2011	3:58:16 PM	Bubbler valve closed
11/28/2011	3:58:16 PM	Helium valve opened
11/28/2011	3:58:16 PM	Main Vac valve opened
11/28/2011	3:58:16 PM	Helium MFC set to  20.000000
11/28/2011	3:58:16 PM	H2 MFC set to  0.000000
11/28/2011	3:58:16 PM	BCl3 MFC set to  0.000000
11/28/2011	3:58:16 PM	PHl3 MFC set to  0.000000
11/28/2011	3:58:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:58:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:58:16 PM	Tube furnace set to 150
11/28/2011	3:58:46 PM	Helium valve closed
11/28/2011	3:58:46 PM	H2 valve closed
11/28/2011	3:58:46 PM	BCl3 valve closed
11/28/2011	3:58:46 PM	PH3 valve closed
11/28/2011	3:58:46 PM	SiCl4 pre valve closed
11/28/2011	3:58:46 PM	SiCl4 post valve closed
11/28/2011	3:58:46 PM	Bypass valve closed
11/28/2011	3:58:46 PM	Bubbler valve closed
11/28/2011	3:58:46 PM	Main Vac valve opened
11/28/2011	3:58:46 PM	Helium MFC set to  0.000000
11/28/2011	3:58:46 PM	H2 MFC set to  0.000000
11/28/2011	3:58:46 PM	BCl3 MFC set to  0.000000
11/28/2011	3:58:46 PM	PHl3 MFC set to  0.000000
11/28/2011	3:58:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:58:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:58:46 PM	Tube furnace set to 150
11/28/2011	3:59:16 PM	H2 valve closed
11/28/2011	3:59:16 PM	BCl3 valve closed
11/28/2011	3:59:16 PM	PH3 valve closed
11/28/2011	3:59:16 PM	SiCl4 pre valve closed
11/28/2011	3:59:16 PM	SiCl4 post valve closed
11/28/2011	3:59:16 PM	Bypass valve closed
11/28/2011	3:59:16 PM	Bubbler valve closed
11/28/2011	3:59:16 PM	Helium valve opened
11/28/2011	3:59:16 PM	Main Vac valve opened
11/28/2011	3:59:16 PM	Helium MFC set to  20.000000
11/28/2011	3:59:16 PM	H2 MFC set to  0.000000
11/28/2011	3:59:16 PM	BCl3 MFC set to  0.000000
11/28/2011	3:59:16 PM	PHl3 MFC set to  0.000000
11/28/2011	3:59:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:59:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:59:16 PM	Tube furnace set to 150
11/28/2011	3:59:47 PM	Helium valve closed
11/28/2011	3:59:47 PM	H2 valve closed
11/28/2011	3:59:47 PM	BCl3 valve closed
11/28/2011	3:59:47 PM	PH3 valve closed
11/28/2011	3:59:47 PM	SiCl4 pre valve closed
11/28/2011	3:59:47 PM	SiCl4 post valve closed
11/28/2011	3:59:47 PM	Bypass valve closed
11/28/2011	3:59:47 PM	Bubbler valve closed
11/28/2011	3:59:47 PM	Main Vac valve opened
11/28/2011	3:59:47 PM	Helium MFC set to  0.000000
11/28/2011	3:59:47 PM	H2 MFC set to  0.000000
11/28/2011	3:59:47 PM	BCl3 MFC set to  0.000000
11/28/2011	3:59:47 PM	PHl3 MFC set to  0.000000
11/28/2011	3:59:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	3:59:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	3:59:47 PM	Tube furnace set to 150
11/28/2011	3:59:48 PM	Run finished at 3:59 PM
11/28/2011	4:00:18 PM	Recipe started at 4:00 PM
11/28/2011	4:00:18 PM	Helium valve closed
11/28/2011	4:00:18 PM	H2 valve closed
11/28/2011	4:00:18 PM	BCl3 valve closed
11/28/2011	4:00:18 PM	PH3 valve closed
11/28/2011	4:00:18 PM	SiCl4 pre valve closed
11/28/2011	4:00:18 PM	SiCl4 post valve closed
11/28/2011	4:00:18 PM	Bypass valve closed
11/28/2011	4:00:18 PM	Bubbler valve closed
11/28/2011	4:00:18 PM	Main Vac valve opened
11/28/2011	4:00:18 PM	Helium MFC set to  0.000000
11/28/2011	4:00:18 PM	H2 MFC set to  0.000000
11/28/2011	4:00:18 PM	BCl3 MFC set to  0.000000
11/28/2011	4:00:18 PM	PHl3 MFC set to  0.000000
11/28/2011	4:00:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:00:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:00:18 PM	Tube furnace set to 150
11/28/2011	4:00:48 PM	H2 valve closed
11/28/2011	4:00:48 PM	BCl3 valve closed
11/28/2011	4:00:48 PM	PH3 valve closed
11/28/2011	4:00:48 PM	SiCl4 pre valve closed
11/28/2011	4:00:48 PM	SiCl4 post valve closed
11/28/2011	4:00:48 PM	Bypass valve closed
11/28/2011	4:00:48 PM	Bubbler valve closed
11/28/2011	4:00:48 PM	Helium valve opened
11/28/2011	4:00:48 PM	Main Vac valve opened
11/28/2011	4:00:48 PM	Helium MFC set to  20.000000
11/28/2011	4:00:48 PM	H2 MFC set to  0.000000
11/28/2011	4:00:48 PM	BCl3 MFC set to  0.000000
11/28/2011	4:00:48 PM	PHl3 MFC set to  0.000000
11/28/2011	4:00:48 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:00:48 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:00:48 PM	Tube furnace set to 150
11/28/2011	4:01:18 PM	Helium valve closed
11/28/2011	4:01:18 PM	H2 valve closed
11/28/2011	4:01:18 PM	BCl3 valve closed
11/28/2011	4:01:18 PM	PH3 valve closed
11/28/2011	4:01:18 PM	SiCl4 pre valve closed
11/28/2011	4:01:18 PM	SiCl4 post valve closed
11/28/2011	4:01:18 PM	Bypass valve closed
11/28/2011	4:01:18 PM	Bubbler valve closed
11/28/2011	4:01:18 PM	Main Vac valve opened
11/28/2011	4:01:18 PM	Helium MFC set to  0.000000
11/28/2011	4:01:18 PM	H2 MFC set to  0.000000
11/28/2011	4:01:18 PM	BCl3 MFC set to  0.000000
11/28/2011	4:01:18 PM	PHl3 MFC set to  0.000000
11/28/2011	4:01:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:01:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:01:19 PM	Tube furnace set to 150
11/28/2011	4:01:49 PM	H2 valve closed
11/28/2011	4:01:49 PM	BCl3 valve closed
11/28/2011	4:01:49 PM	PH3 valve closed
11/28/2011	4:01:49 PM	SiCl4 pre valve closed
11/28/2011	4:01:49 PM	SiCl4 post valve closed
11/28/2011	4:01:49 PM	Bypass valve closed
11/28/2011	4:01:49 PM	Bubbler valve closed
11/28/2011	4:01:49 PM	Helium valve opened
11/28/2011	4:01:49 PM	Main Vac valve opened
11/28/2011	4:01:49 PM	Helium MFC set to  20.000000
11/28/2011	4:01:49 PM	H2 MFC set to  0.000000
11/28/2011	4:01:49 PM	BCl3 MFC set to  0.000000
11/28/2011	4:01:49 PM	PHl3 MFC set to  0.000000
11/28/2011	4:01:49 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:01:49 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:01:49 PM	Tube furnace set to 150
11/28/2011	4:02:19 PM	Helium valve closed
11/28/2011	4:02:19 PM	H2 valve closed
11/28/2011	4:02:19 PM	BCl3 valve closed
11/28/2011	4:02:19 PM	PH3 valve closed
11/28/2011	4:02:19 PM	SiCl4 pre valve closed
11/28/2011	4:02:19 PM	SiCl4 post valve closed
11/28/2011	4:02:19 PM	Bypass valve closed
11/28/2011	4:02:19 PM	Bubbler valve closed
11/28/2011	4:02:19 PM	Main Vac valve opened
11/28/2011	4:02:19 PM	Helium MFC set to  0.000000
11/28/2011	4:02:19 PM	H2 MFC set to  0.000000
11/28/2011	4:02:19 PM	BCl3 MFC set to  0.000000
11/28/2011	4:02:19 PM	PHl3 MFC set to  0.000000
11/28/2011	4:02:19 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:02:19 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:02:19 PM	Tube furnace set to 150
11/28/2011	4:02:49 PM	H2 valve closed
11/28/2011	4:02:49 PM	BCl3 valve closed
11/28/2011	4:02:49 PM	PH3 valve closed
11/28/2011	4:02:49 PM	SiCl4 pre valve closed
11/28/2011	4:02:49 PM	SiCl4 post valve closed
11/28/2011	4:02:49 PM	Bypass valve closed
11/28/2011	4:02:49 PM	Bubbler valve closed
11/28/2011	4:02:49 PM	Helium valve opened
11/28/2011	4:02:49 PM	Main Vac valve opened
11/28/2011	4:02:49 PM	Helium MFC set to  20.000000
11/28/2011	4:02:49 PM	H2 MFC set to  0.000000
11/28/2011	4:02:49 PM	BCl3 MFC set to  0.000000
11/28/2011	4:02:49 PM	PHl3 MFC set to  0.000000
11/28/2011	4:02:49 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:02:49 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:02:49 PM	Tube furnace set to 150
11/28/2011	4:03:19 PM	Helium valve closed
11/28/2011	4:03:19 PM	H2 valve closed
11/28/2011	4:03:19 PM	BCl3 valve closed
11/28/2011	4:03:19 PM	PH3 valve closed
11/28/2011	4:03:19 PM	SiCl4 pre valve closed
11/28/2011	4:03:19 PM	SiCl4 post valve closed
11/28/2011	4:03:19 PM	Bypass valve closed
11/28/2011	4:03:19 PM	Bubbler valve closed
11/28/2011	4:03:19 PM	Main Vac valve opened
11/28/2011	4:03:19 PM	Helium MFC set to  0.000000
11/28/2011	4:03:19 PM	H2 MFC set to  0.000000
11/28/2011	4:03:19 PM	BCl3 MFC set to  0.000000
11/28/2011	4:03:19 PM	PHl3 MFC set to  0.000000
11/28/2011	4:03:19 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:03:19 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:03:19 PM	Tube furnace set to 150
11/28/2011	4:03:49 PM	H2 valve closed
11/28/2011	4:03:49 PM	BCl3 valve closed
11/28/2011	4:03:49 PM	PH3 valve closed
11/28/2011	4:03:49 PM	SiCl4 pre valve closed
11/28/2011	4:03:49 PM	SiCl4 post valve closed
11/28/2011	4:03:49 PM	Bypass valve closed
11/28/2011	4:03:49 PM	Bubbler valve closed
11/28/2011	4:03:49 PM	Helium valve opened
11/28/2011	4:03:49 PM	Main Vac valve opened
11/28/2011	4:03:49 PM	Helium MFC set to  20.000000
11/28/2011	4:03:49 PM	H2 MFC set to  0.000000
11/28/2011	4:03:49 PM	BCl3 MFC set to  0.000000
11/28/2011	4:03:49 PM	PHl3 MFC set to  0.000000
11/28/2011	4:03:49 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:03:49 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:03:50 PM	Tube furnace set to 150
11/28/2011	4:04:20 PM	Helium valve closed
11/28/2011	4:04:20 PM	H2 valve closed
11/28/2011	4:04:20 PM	BCl3 valve closed
11/28/2011	4:04:20 PM	PH3 valve closed
11/28/2011	4:04:20 PM	SiCl4 pre valve closed
11/28/2011	4:04:20 PM	SiCl4 post valve closed
11/28/2011	4:04:20 PM	Bypass valve closed
11/28/2011	4:04:20 PM	Bubbler valve closed
11/28/2011	4:04:20 PM	Main Vac valve opened
11/28/2011	4:04:20 PM	Helium MFC set to  0.000000
11/28/2011	4:04:20 PM	H2 MFC set to  0.000000
11/28/2011	4:04:20 PM	BCl3 MFC set to  0.000000
11/28/2011	4:04:20 PM	PHl3 MFC set to  0.000000
11/28/2011	4:04:20 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:04:20 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:04:20 PM	Tube furnace set to 150
11/28/2011	4:04:50 PM	H2 valve closed
11/28/2011	4:04:50 PM	BCl3 valve closed
11/28/2011	4:04:50 PM	PH3 valve closed
11/28/2011	4:04:50 PM	SiCl4 pre valve closed
11/28/2011	4:04:50 PM	SiCl4 post valve closed
11/28/2011	4:04:50 PM	Bypass valve closed
11/28/2011	4:04:50 PM	Bubbler valve closed
11/28/2011	4:04:50 PM	Helium valve opened
11/28/2011	4:04:50 PM	Main Vac valve opened
11/28/2011	4:04:50 PM	Helium MFC set to  20.000000
11/28/2011	4:04:50 PM	H2 MFC set to  0.000000
11/28/2011	4:04:50 PM	BCl3 MFC set to  0.000000
11/28/2011	4:04:50 PM	PHl3 MFC set to  0.000000
11/28/2011	4:04:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:04:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:04:50 PM	Tube furnace set to 150
11/28/2011	4:05:20 PM	Helium valve closed
11/28/2011	4:05:20 PM	H2 valve closed
11/28/2011	4:05:20 PM	BCl3 valve closed
11/28/2011	4:05:20 PM	PH3 valve closed
11/28/2011	4:05:20 PM	SiCl4 pre valve closed
11/28/2011	4:05:20 PM	SiCl4 post valve closed
11/28/2011	4:05:20 PM	Bypass valve closed
11/28/2011	4:05:20 PM	Bubbler valve closed
11/28/2011	4:05:20 PM	Main Vac valve opened
11/28/2011	4:05:20 PM	Helium MFC set to  0.000000
11/28/2011	4:05:20 PM	H2 MFC set to  0.000000
11/28/2011	4:05:20 PM	BCl3 MFC set to  0.000000
11/28/2011	4:05:20 PM	PHl3 MFC set to  0.000000
11/28/2011	4:05:20 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:05:20 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:05:20 PM	Tube furnace set to 150
11/28/2011	4:05:50 PM	H2 valve closed
11/28/2011	4:05:50 PM	BCl3 valve closed
11/28/2011	4:05:50 PM	PH3 valve closed
11/28/2011	4:05:50 PM	SiCl4 pre valve closed
11/28/2011	4:05:50 PM	SiCl4 post valve closed
11/28/2011	4:05:50 PM	Bypass valve closed
11/28/2011	4:05:50 PM	Bubbler valve closed
11/28/2011	4:05:50 PM	Helium valve opened
11/28/2011	4:05:50 PM	Main Vac valve opened
11/28/2011	4:05:50 PM	Helium MFC set to  20.000000
11/28/2011	4:05:50 PM	H2 MFC set to  0.000000
11/28/2011	4:05:50 PM	BCl3 MFC set to  0.000000
11/28/2011	4:05:50 PM	PHl3 MFC set to  0.000000
11/28/2011	4:05:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:05:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:05:50 PM	Tube furnace set to 150
11/28/2011	4:06:20 PM	Helium valve closed
11/28/2011	4:06:20 PM	H2 valve closed
11/28/2011	4:06:20 PM	BCl3 valve closed
11/28/2011	4:06:20 PM	PH3 valve closed
11/28/2011	4:06:20 PM	SiCl4 pre valve closed
11/28/2011	4:06:20 PM	SiCl4 post valve closed
11/28/2011	4:06:20 PM	Bypass valve closed
11/28/2011	4:06:20 PM	Bubbler valve closed
11/28/2011	4:06:20 PM	Main Vac valve opened
11/28/2011	4:06:20 PM	Helium MFC set to  0.000000
11/28/2011	4:06:20 PM	H2 MFC set to  0.000000
11/28/2011	4:06:20 PM	BCl3 MFC set to  0.000000
11/28/2011	4:06:20 PM	PHl3 MFC set to  0.000000
11/28/2011	4:06:20 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:06:20 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:06:21 PM	Tube furnace set to 150
11/28/2011	4:06:51 PM	H2 valve closed
11/28/2011	4:06:51 PM	BCl3 valve closed
11/28/2011	4:06:51 PM	PH3 valve closed
11/28/2011	4:06:51 PM	SiCl4 pre valve closed
11/28/2011	4:06:51 PM	SiCl4 post valve closed
11/28/2011	4:06:51 PM	Bypass valve closed
11/28/2011	4:06:51 PM	Bubbler valve closed
11/28/2011	4:06:51 PM	Helium valve opened
11/28/2011	4:06:51 PM	Main Vac valve opened
11/28/2011	4:06:51 PM	Helium MFC set to  20.000000
11/28/2011	4:06:51 PM	H2 MFC set to  0.000000
11/28/2011	4:06:51 PM	BCl3 MFC set to  0.000000
11/28/2011	4:06:51 PM	PHl3 MFC set to  0.000000
11/28/2011	4:06:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:06:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:06:51 PM	Tube furnace set to 150
11/28/2011	4:07:21 PM	Helium valve closed
11/28/2011	4:07:21 PM	H2 valve closed
11/28/2011	4:07:21 PM	BCl3 valve closed
11/28/2011	4:07:21 PM	PH3 valve closed
11/28/2011	4:07:21 PM	SiCl4 pre valve closed
11/28/2011	4:07:21 PM	SiCl4 post valve closed
11/28/2011	4:07:21 PM	Bypass valve closed
11/28/2011	4:07:21 PM	Bubbler valve closed
11/28/2011	4:07:21 PM	Main Vac valve opened
11/28/2011	4:07:21 PM	Helium MFC set to  0.000000
11/28/2011	4:07:21 PM	H2 MFC set to  0.000000
11/28/2011	4:07:21 PM	BCl3 MFC set to  0.000000
11/28/2011	4:07:21 PM	PHl3 MFC set to  0.000000
11/28/2011	4:07:21 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:07:21 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:07:21 PM	Tube furnace set to 150
11/28/2011	4:07:51 PM	H2 valve closed
11/28/2011	4:07:51 PM	BCl3 valve closed
11/28/2011	4:07:51 PM	PH3 valve closed
11/28/2011	4:07:51 PM	SiCl4 pre valve closed
11/28/2011	4:07:51 PM	SiCl4 post valve closed
11/28/2011	4:07:51 PM	Bypass valve closed
11/28/2011	4:07:51 PM	Bubbler valve closed
11/28/2011	4:07:51 PM	Helium valve opened
11/28/2011	4:07:51 PM	Main Vac valve opened
11/28/2011	4:07:51 PM	Helium MFC set to  20.000000
11/28/2011	4:07:51 PM	H2 MFC set to  0.000000
11/28/2011	4:07:51 PM	BCl3 MFC set to  0.000000
11/28/2011	4:07:51 PM	PHl3 MFC set to  0.000000
11/28/2011	4:07:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:07:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:07:51 PM	Tube furnace set to 150
11/28/2011	4:08:21 PM	Helium valve closed
11/28/2011	4:08:21 PM	H2 valve closed
11/28/2011	4:08:21 PM	BCl3 valve closed
11/28/2011	4:08:21 PM	PH3 valve closed
11/28/2011	4:08:21 PM	SiCl4 pre valve closed
11/28/2011	4:08:21 PM	SiCl4 post valve closed
11/28/2011	4:08:21 PM	Bypass valve closed
11/28/2011	4:08:21 PM	Bubbler valve closed
11/28/2011	4:08:21 PM	Main Vac valve opened
11/28/2011	4:08:21 PM	Helium MFC set to  0.000000
11/28/2011	4:08:21 PM	H2 MFC set to  0.000000
11/28/2011	4:08:21 PM	BCl3 MFC set to  0.000000
11/28/2011	4:08:21 PM	PHl3 MFC set to  0.000000
11/28/2011	4:08:21 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:08:21 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:08:21 PM	Tube furnace set to 150
11/28/2011	4:08:51 PM	H2 valve closed
11/28/2011	4:08:51 PM	BCl3 valve closed
11/28/2011	4:08:51 PM	PH3 valve closed
11/28/2011	4:08:51 PM	SiCl4 pre valve closed
11/28/2011	4:08:51 PM	SiCl4 post valve closed
11/28/2011	4:08:51 PM	Bypass valve closed
11/28/2011	4:08:51 PM	Bubbler valve closed
11/28/2011	4:08:51 PM	Helium valve opened
11/28/2011	4:08:51 PM	Main Vac valve opened
11/28/2011	4:08:51 PM	Helium MFC set to  20.000000
11/28/2011	4:08:51 PM	H2 MFC set to  0.000000
11/28/2011	4:08:51 PM	BCl3 MFC set to  0.000000
11/28/2011	4:08:51 PM	PHl3 MFC set to  0.000000
11/28/2011	4:08:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:08:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:08:52 PM	Tube furnace set to 150
11/28/2011	4:09:22 PM	Helium valve closed
11/28/2011	4:09:22 PM	H2 valve closed
11/28/2011	4:09:22 PM	BCl3 valve closed
11/28/2011	4:09:22 PM	PH3 valve closed
11/28/2011	4:09:22 PM	SiCl4 pre valve closed
11/28/2011	4:09:22 PM	SiCl4 post valve closed
11/28/2011	4:09:22 PM	Bypass valve closed
11/28/2011	4:09:22 PM	Bubbler valve closed
11/28/2011	4:09:22 PM	Main Vac valve opened
11/28/2011	4:09:22 PM	Helium MFC set to  0.000000
11/28/2011	4:09:22 PM	H2 MFC set to  0.000000
11/28/2011	4:09:22 PM	BCl3 MFC set to  0.000000
11/28/2011	4:09:22 PM	PHl3 MFC set to  0.000000
11/28/2011	4:09:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:09:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:09:22 PM	Tube furnace set to 150
11/28/2011	4:09:52 PM	H2 valve closed
11/28/2011	4:09:52 PM	BCl3 valve closed
11/28/2011	4:09:52 PM	PH3 valve closed
11/28/2011	4:09:52 PM	SiCl4 pre valve closed
11/28/2011	4:09:52 PM	SiCl4 post valve closed
11/28/2011	4:09:52 PM	Bypass valve closed
11/28/2011	4:09:52 PM	Bubbler valve closed
11/28/2011	4:09:52 PM	Helium valve opened
11/28/2011	4:09:52 PM	Main Vac valve opened
11/28/2011	4:09:52 PM	Helium MFC set to  20.000000
11/28/2011	4:09:52 PM	H2 MFC set to  0.000000
11/28/2011	4:09:52 PM	BCl3 MFC set to  0.000000
11/28/2011	4:09:52 PM	PHl3 MFC set to  0.000000
11/28/2011	4:09:52 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:09:52 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:09:52 PM	Tube furnace set to 150
11/28/2011	4:10:22 PM	Helium valve closed
11/28/2011	4:10:22 PM	H2 valve closed
11/28/2011	4:10:22 PM	BCl3 valve closed
11/28/2011	4:10:22 PM	PH3 valve closed
11/28/2011	4:10:22 PM	SiCl4 pre valve closed
11/28/2011	4:10:22 PM	SiCl4 post valve closed
11/28/2011	4:10:22 PM	Bypass valve closed
11/28/2011	4:10:22 PM	Bubbler valve closed
11/28/2011	4:10:22 PM	Main Vac valve opened
11/28/2011	4:10:22 PM	Helium MFC set to  0.000000
11/28/2011	4:10:22 PM	H2 MFC set to  0.000000
11/28/2011	4:10:22 PM	BCl3 MFC set to  0.000000
11/28/2011	4:10:22 PM	PHl3 MFC set to  0.000000
11/28/2011	4:10:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:10:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:10:22 PM	Tube furnace set to 150
11/28/2011	4:10:23 PM	Run finished at 4:10 PM
11/28/2011	4:13:25 PM	Main Vac valve closed
11/28/2011	4:13:31 PM	Main Vac valve opened
11/28/2011	4:13:40 PM	Recipe started at 4:13 PM
11/28/2011	4:13:40 PM	Helium valve closed
11/28/2011	4:13:40 PM	H2 valve closed
11/28/2011	4:13:40 PM	BCl3 valve closed
11/28/2011	4:13:40 PM	PH3 valve closed
11/28/2011	4:13:40 PM	SiCl4 pre valve closed
11/28/2011	4:13:40 PM	SiCl4 post valve closed
11/28/2011	4:13:40 PM	Bypass valve closed
11/28/2011	4:13:40 PM	Bubbler valve closed
11/28/2011	4:13:40 PM	Main Vac valve opened
11/28/2011	4:13:40 PM	Helium MFC set to  0.000000
11/28/2011	4:13:40 PM	H2 MFC set to  0.000000
11/28/2011	4:13:40 PM	BCl3 MFC set to  0.000000
11/28/2011	4:13:40 PM	PHl3 MFC set to  0.000000
11/28/2011	4:13:40 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:13:40 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:13:40 PM	Tube furnace set to 150
11/28/2011	4:13:59 PM	H2 valve closed
11/28/2011	4:13:59 PM	BCl3 valve closed
11/28/2011	4:13:59 PM	PH3 valve closed
11/28/2011	4:13:59 PM	SiCl4 pre valve closed
11/28/2011	4:13:59 PM	SiCl4 post valve closed
11/28/2011	4:13:59 PM	Bypass valve closed
11/28/2011	4:13:59 PM	Bubbler valve closed
11/28/2011	4:13:59 PM	Helium valve opened
11/28/2011	4:13:59 PM	Main Vac valve opened
11/28/2011	4:13:59 PM	Helium MFC set to  20.000000
11/28/2011	4:13:59 PM	H2 MFC set to  0.000000
11/28/2011	4:13:59 PM	BCl3 MFC set to  0.000000
11/28/2011	4:13:59 PM	PHl3 MFC set to  0.000000
11/28/2011	4:13:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:13:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:13:59 PM	Tube furnace set to 150
11/28/2011	4:14:29 PM	Helium valve closed
11/28/2011	4:14:29 PM	H2 valve closed
11/28/2011	4:14:30 PM	BCl3 valve closed
11/28/2011	4:14:30 PM	PH3 valve closed
11/28/2011	4:14:30 PM	SiCl4 pre valve closed
11/28/2011	4:14:30 PM	SiCl4 post valve closed
11/28/2011	4:14:30 PM	Bypass valve closed
11/28/2011	4:14:30 PM	Bubbler valve closed
11/28/2011	4:14:30 PM	Main Vac valve opened
11/28/2011	4:14:30 PM	Helium MFC set to  0.000000
11/28/2011	4:14:30 PM	H2 MFC set to  0.000000
11/28/2011	4:14:30 PM	BCl3 MFC set to  0.000000
11/28/2011	4:14:30 PM	PHl3 MFC set to  0.000000
11/28/2011	4:14:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:14:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:14:30 PM	Tube furnace set to 150
11/28/2011	4:15:00 PM	H2 valve closed
11/28/2011	4:15:00 PM	BCl3 valve closed
11/28/2011	4:15:00 PM	PH3 valve closed
11/28/2011	4:15:00 PM	SiCl4 pre valve closed
11/28/2011	4:15:00 PM	SiCl4 post valve closed
11/28/2011	4:15:00 PM	Bypass valve closed
11/28/2011	4:15:00 PM	Bubbler valve closed
11/28/2011	4:15:00 PM	Helium valve opened
11/28/2011	4:15:00 PM	Main Vac valve opened
11/28/2011	4:15:00 PM	Helium MFC set to  20.000000
11/28/2011	4:15:00 PM	H2 MFC set to  0.000000
11/28/2011	4:15:00 PM	BCl3 MFC set to  0.000000
11/28/2011	4:15:00 PM	PHl3 MFC set to  0.000000
11/28/2011	4:15:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:15:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:15:00 PM	Tube furnace set to 150
11/28/2011	4:15:30 PM	Helium valve closed
11/28/2011	4:15:30 PM	H2 valve closed
11/28/2011	4:15:30 PM	BCl3 valve closed
11/28/2011	4:15:30 PM	PH3 valve closed
11/28/2011	4:15:30 PM	SiCl4 pre valve closed
11/28/2011	4:15:30 PM	SiCl4 post valve closed
11/28/2011	4:15:30 PM	Bypass valve closed
11/28/2011	4:15:30 PM	Bubbler valve closed
11/28/2011	4:15:30 PM	Main Vac valve opened
11/28/2011	4:15:30 PM	Helium MFC set to  0.000000
11/28/2011	4:15:30 PM	H2 MFC set to  0.000000
11/28/2011	4:15:30 PM	BCl3 MFC set to  0.000000
11/28/2011	4:15:30 PM	PHl3 MFC set to  0.000000
11/28/2011	4:15:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:15:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:15:30 PM	Tube furnace set to 150
11/28/2011	4:16:00 PM	H2 valve closed
11/28/2011	4:16:00 PM	BCl3 valve closed
11/28/2011	4:16:00 PM	PH3 valve closed
11/28/2011	4:16:00 PM	SiCl4 pre valve closed
11/28/2011	4:16:00 PM	SiCl4 post valve closed
11/28/2011	4:16:00 PM	Bypass valve closed
11/28/2011	4:16:00 PM	Bubbler valve closed
11/28/2011	4:16:00 PM	Helium valve opened
11/28/2011	4:16:00 PM	Main Vac valve opened
11/28/2011	4:16:00 PM	Helium MFC set to  20.000000
11/28/2011	4:16:00 PM	H2 MFC set to  0.000000
11/28/2011	4:16:00 PM	BCl3 MFC set to  0.000000
11/28/2011	4:16:00 PM	PHl3 MFC set to  0.000000
11/28/2011	4:16:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:16:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:16:00 PM	Tube furnace set to 150
11/28/2011	4:16:30 PM	Helium valve closed
11/28/2011	4:16:30 PM	H2 valve closed
11/28/2011	4:16:30 PM	BCl3 valve closed
11/28/2011	4:16:30 PM	PH3 valve closed
11/28/2011	4:16:30 PM	SiCl4 pre valve closed
11/28/2011	4:16:30 PM	SiCl4 post valve closed
11/28/2011	4:16:30 PM	Bypass valve closed
11/28/2011	4:16:30 PM	Bubbler valve closed
11/28/2011	4:16:30 PM	Main Vac valve opened
11/28/2011	4:16:30 PM	Helium MFC set to  0.000000
11/28/2011	4:16:30 PM	H2 MFC set to  0.000000
11/28/2011	4:16:30 PM	BCl3 MFC set to  0.000000
11/28/2011	4:16:30 PM	PHl3 MFC set to  0.000000
11/28/2011	4:16:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:16:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:16:30 PM	Tube furnace set to 150
11/28/2011	4:17:01 PM	H2 valve closed
11/28/2011	4:17:01 PM	BCl3 valve closed
11/28/2011	4:17:01 PM	PH3 valve closed
11/28/2011	4:17:01 PM	SiCl4 pre valve closed
11/28/2011	4:17:01 PM	SiCl4 post valve closed
11/28/2011	4:17:01 PM	Bypass valve closed
11/28/2011	4:17:01 PM	Bubbler valve closed
11/28/2011	4:17:01 PM	Helium valve opened
11/28/2011	4:17:01 PM	Main Vac valve opened
11/28/2011	4:17:01 PM	Helium MFC set to  20.000000
11/28/2011	4:17:01 PM	H2 MFC set to  0.000000
11/28/2011	4:17:01 PM	BCl3 MFC set to  0.000000
11/28/2011	4:17:01 PM	PHl3 MFC set to  0.000000
11/28/2011	4:17:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:17:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:17:01 PM	Tube furnace set to 150
11/28/2011	4:17:31 PM	Helium valve closed
11/28/2011	4:17:31 PM	H2 valve closed
11/28/2011	4:17:31 PM	BCl3 valve closed
11/28/2011	4:17:31 PM	PH3 valve closed
11/28/2011	4:17:31 PM	SiCl4 pre valve closed
11/28/2011	4:17:31 PM	SiCl4 post valve closed
11/28/2011	4:17:31 PM	Bypass valve closed
11/28/2011	4:17:31 PM	Bubbler valve closed
11/28/2011	4:17:31 PM	Main Vac valve opened
11/28/2011	4:17:31 PM	Helium MFC set to  0.000000
11/28/2011	4:17:31 PM	H2 MFC set to  0.000000
11/28/2011	4:17:31 PM	BCl3 MFC set to  0.000000
11/28/2011	4:17:31 PM	PHl3 MFC set to  0.000000
11/28/2011	4:17:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:17:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:17:31 PM	Tube furnace set to 150
11/28/2011	4:18:01 PM	H2 valve closed
11/28/2011	4:18:01 PM	BCl3 valve closed
11/28/2011	4:18:01 PM	PH3 valve closed
11/28/2011	4:18:01 PM	SiCl4 pre valve closed
11/28/2011	4:18:01 PM	SiCl4 post valve closed
11/28/2011	4:18:01 PM	Bypass valve closed
11/28/2011	4:18:01 PM	Bubbler valve closed
11/28/2011	4:18:01 PM	Helium valve opened
11/28/2011	4:18:01 PM	Main Vac valve opened
11/28/2011	4:18:01 PM	Helium MFC set to  20.000000
11/28/2011	4:18:01 PM	H2 MFC set to  0.000000
11/28/2011	4:18:01 PM	BCl3 MFC set to  0.000000
11/28/2011	4:18:01 PM	PHl3 MFC set to  0.000000
11/28/2011	4:18:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:18:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:18:01 PM	Tube furnace set to 150
11/28/2011	4:18:31 PM	Helium valve closed
11/28/2011	4:18:31 PM	H2 valve closed
11/28/2011	4:18:31 PM	BCl3 valve closed
11/28/2011	4:18:31 PM	PH3 valve closed
11/28/2011	4:18:31 PM	SiCl4 pre valve closed
11/28/2011	4:18:31 PM	SiCl4 post valve closed
11/28/2011	4:18:31 PM	Bypass valve closed
11/28/2011	4:18:31 PM	Bubbler valve closed
11/28/2011	4:18:31 PM	Main Vac valve opened
11/28/2011	4:18:31 PM	Helium MFC set to  0.000000
11/28/2011	4:18:31 PM	H2 MFC set to  0.000000
11/28/2011	4:18:31 PM	BCl3 MFC set to  0.000000
11/28/2011	4:18:31 PM	PHl3 MFC set to  0.000000
11/28/2011	4:18:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:18:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:18:31 PM	Tube furnace set to 150
11/28/2011	4:19:01 PM	H2 valve closed
11/28/2011	4:19:01 PM	BCl3 valve closed
11/28/2011	4:19:01 PM	PH3 valve closed
11/28/2011	4:19:01 PM	SiCl4 pre valve closed
11/28/2011	4:19:01 PM	SiCl4 post valve closed
11/28/2011	4:19:01 PM	Bypass valve closed
11/28/2011	4:19:01 PM	Bubbler valve closed
11/28/2011	4:19:01 PM	Helium valve opened
11/28/2011	4:19:01 PM	Main Vac valve opened
11/28/2011	4:19:01 PM	Helium MFC set to  20.000000
11/28/2011	4:19:01 PM	H2 MFC set to  0.000000
11/28/2011	4:19:01 PM	BCl3 MFC set to  0.000000
11/28/2011	4:19:01 PM	PHl3 MFC set to  0.000000
11/28/2011	4:19:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:19:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:19:02 PM	Tube furnace set to 150
11/28/2011	4:19:32 PM	Helium valve closed
11/28/2011	4:19:32 PM	H2 valve closed
11/28/2011	4:19:32 PM	BCl3 valve closed
11/28/2011	4:19:32 PM	PH3 valve closed
11/28/2011	4:19:32 PM	SiCl4 pre valve closed
11/28/2011	4:19:32 PM	SiCl4 post valve closed
11/28/2011	4:19:32 PM	Bypass valve closed
11/28/2011	4:19:32 PM	Bubbler valve closed
11/28/2011	4:19:32 PM	Main Vac valve opened
11/28/2011	4:19:32 PM	Helium MFC set to  0.000000
11/28/2011	4:19:32 PM	H2 MFC set to  0.000000
11/28/2011	4:19:32 PM	BCl3 MFC set to  0.000000
11/28/2011	4:19:32 PM	PHl3 MFC set to  0.000000
11/28/2011	4:19:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:19:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:19:32 PM	Tube furnace set to 150
11/28/2011	4:20:02 PM	H2 valve closed
11/28/2011	4:20:02 PM	BCl3 valve closed
11/28/2011	4:20:02 PM	PH3 valve closed
11/28/2011	4:20:02 PM	SiCl4 pre valve closed
11/28/2011	4:20:02 PM	SiCl4 post valve closed
11/28/2011	4:20:02 PM	Bypass valve closed
11/28/2011	4:20:02 PM	Bubbler valve closed
11/28/2011	4:20:02 PM	Helium valve opened
11/28/2011	4:20:02 PM	Main Vac valve opened
11/28/2011	4:20:02 PM	Helium MFC set to  20.000000
11/28/2011	4:20:02 PM	H2 MFC set to  0.000000
11/28/2011	4:20:02 PM	BCl3 MFC set to  0.000000
11/28/2011	4:20:02 PM	PHl3 MFC set to  0.000000
11/28/2011	4:20:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:20:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:20:02 PM	Tube furnace set to 150
11/28/2011	4:20:32 PM	Helium valve closed
11/28/2011	4:20:32 PM	H2 valve closed
11/28/2011	4:20:32 PM	BCl3 valve closed
11/28/2011	4:20:32 PM	PH3 valve closed
11/28/2011	4:20:32 PM	SiCl4 pre valve closed
11/28/2011	4:20:32 PM	SiCl4 post valve closed
11/28/2011	4:20:32 PM	Bypass valve closed
11/28/2011	4:20:32 PM	Bubbler valve closed
11/28/2011	4:20:32 PM	Main Vac valve opened
11/28/2011	4:20:32 PM	Helium MFC set to  0.000000
11/28/2011	4:20:32 PM	H2 MFC set to  0.000000
11/28/2011	4:20:32 PM	BCl3 MFC set to  0.000000
11/28/2011	4:20:32 PM	PHl3 MFC set to  0.000000
11/28/2011	4:20:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:20:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:20:32 PM	Tube furnace set to 150
11/28/2011	4:21:02 PM	H2 valve closed
11/28/2011	4:21:02 PM	BCl3 valve closed
11/28/2011	4:21:02 PM	PH3 valve closed
11/28/2011	4:21:02 PM	SiCl4 pre valve closed
11/28/2011	4:21:02 PM	SiCl4 post valve closed
11/28/2011	4:21:02 PM	Bypass valve closed
11/28/2011	4:21:02 PM	Bubbler valve closed
11/28/2011	4:21:02 PM	Helium valve opened
11/28/2011	4:21:02 PM	Main Vac valve opened
11/28/2011	4:21:02 PM	Helium MFC set to  20.000000
11/28/2011	4:21:02 PM	H2 MFC set to  0.000000
11/28/2011	4:21:02 PM	BCl3 MFC set to  0.000000
11/28/2011	4:21:02 PM	PHl3 MFC set to  0.000000
11/28/2011	4:21:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:21:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:21:02 PM	Tube furnace set to 150
11/28/2011	4:21:32 PM	Helium valve closed
11/28/2011	4:21:32 PM	H2 valve closed
11/28/2011	4:21:32 PM	BCl3 valve closed
11/28/2011	4:21:32 PM	PH3 valve closed
11/28/2011	4:21:32 PM	SiCl4 pre valve closed
11/28/2011	4:21:32 PM	SiCl4 post valve closed
11/28/2011	4:21:32 PM	Bypass valve closed
11/28/2011	4:21:32 PM	Bubbler valve closed
11/28/2011	4:21:32 PM	Main Vac valve opened
11/28/2011	4:21:32 PM	Helium MFC set to  0.000000
11/28/2011	4:21:32 PM	H2 MFC set to  0.000000
11/28/2011	4:21:32 PM	BCl3 MFC set to  0.000000
11/28/2011	4:21:32 PM	PHl3 MFC set to  0.000000
11/28/2011	4:21:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:21:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:21:33 PM	Tube furnace set to 150
11/28/2011	4:22:03 PM	H2 valve closed
11/28/2011	4:22:03 PM	BCl3 valve closed
11/28/2011	4:22:03 PM	PH3 valve closed
11/28/2011	4:22:03 PM	SiCl4 pre valve closed
11/28/2011	4:22:03 PM	SiCl4 post valve closed
11/28/2011	4:22:03 PM	Bypass valve closed
11/28/2011	4:22:03 PM	Bubbler valve closed
11/28/2011	4:22:03 PM	Helium valve opened
11/28/2011	4:22:03 PM	Main Vac valve opened
11/28/2011	4:22:03 PM	Helium MFC set to  20.000000
11/28/2011	4:22:03 PM	H2 MFC set to  0.000000
11/28/2011	4:22:03 PM	BCl3 MFC set to  0.000000
11/28/2011	4:22:03 PM	PHl3 MFC set to  0.000000
11/28/2011	4:22:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:22:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:22:03 PM	Tube furnace set to 150
11/28/2011	4:22:33 PM	Helium valve closed
11/28/2011	4:22:33 PM	H2 valve closed
11/28/2011	4:22:33 PM	BCl3 valve closed
11/28/2011	4:22:33 PM	PH3 valve closed
11/28/2011	4:22:33 PM	SiCl4 pre valve closed
11/28/2011	4:22:33 PM	SiCl4 post valve closed
11/28/2011	4:22:33 PM	Bypass valve closed
11/28/2011	4:22:33 PM	Bubbler valve closed
11/28/2011	4:22:33 PM	Main Vac valve opened
11/28/2011	4:22:33 PM	Helium MFC set to  0.000000
11/28/2011	4:22:33 PM	H2 MFC set to  0.000000
11/28/2011	4:22:33 PM	BCl3 MFC set to  0.000000
11/28/2011	4:22:33 PM	PHl3 MFC set to  0.000000
11/28/2011	4:22:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:22:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:22:33 PM	Tube furnace set to 150
11/28/2011	4:23:03 PM	H2 valve closed
11/28/2011	4:23:03 PM	BCl3 valve closed
11/28/2011	4:23:03 PM	PH3 valve closed
11/28/2011	4:23:03 PM	SiCl4 pre valve closed
11/28/2011	4:23:03 PM	SiCl4 post valve closed
11/28/2011	4:23:03 PM	Bypass valve closed
11/28/2011	4:23:03 PM	Bubbler valve closed
11/28/2011	4:23:03 PM	Helium valve opened
11/28/2011	4:23:03 PM	Main Vac valve opened
11/28/2011	4:23:03 PM	Helium MFC set to  20.000000
11/28/2011	4:23:03 PM	H2 MFC set to  0.000000
11/28/2011	4:23:03 PM	BCl3 MFC set to  0.000000
11/28/2011	4:23:03 PM	PHl3 MFC set to  0.000000
11/28/2011	4:23:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:23:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:23:03 PM	Tube furnace set to 150
11/28/2011	4:23:33 PM	Helium valve closed
11/28/2011	4:23:33 PM	H2 valve closed
11/28/2011	4:23:33 PM	BCl3 valve closed
11/28/2011	4:23:33 PM	PH3 valve closed
11/28/2011	4:23:33 PM	SiCl4 pre valve closed
11/28/2011	4:23:33 PM	SiCl4 post valve closed
11/28/2011	4:23:33 PM	Bypass valve closed
11/28/2011	4:23:33 PM	Bubbler valve closed
11/28/2011	4:23:33 PM	Main Vac valve opened
11/28/2011	4:23:33 PM	Helium MFC set to  0.000000
11/28/2011	4:23:33 PM	H2 MFC set to  0.000000
11/28/2011	4:23:33 PM	BCl3 MFC set to  0.000000
11/28/2011	4:23:33 PM	PHl3 MFC set to  0.000000
11/28/2011	4:23:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:23:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:23:33 PM	Tube furnace set to 150
11/28/2011	4:23:34 PM	Run finished at 4:23 PM
11/28/2011	4:24:39 PM	Main Vac valve closed
11/28/2011	4:24:58 PM	Main Vac valve opened
11/28/2011	4:29:09 PM	Recipe started at 4:29 PM
11/28/2011	4:29:09 PM	Helium valve closed
11/28/2011	4:29:09 PM	H2 valve closed
11/28/2011	4:29:09 PM	BCl3 valve closed
11/28/2011	4:29:09 PM	PH3 valve closed
11/28/2011	4:29:09 PM	SiCl4 pre valve closed
11/28/2011	4:29:09 PM	SiCl4 post valve closed
11/28/2011	4:29:09 PM	Main Vac valve closed
11/28/2011	4:29:09 PM	Bypass valve closed
11/28/2011	4:29:09 PM	Bubbler valve closed
11/28/2011	4:29:09 PM	Helium MFC set to  0.000000
11/28/2011	4:29:09 PM	H2 MFC set to  0.000000
11/28/2011	4:29:09 PM	BCl3 MFC set to  0.000000
11/28/2011	4:29:09 PM	PHl3 MFC set to  0.000000
11/28/2011	4:29:09 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:29:09 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:29:09 PM	Tube furnace set to 0
11/28/2011	4:29:12 PM	Helium valve closed
11/28/2011	4:29:12 PM	BCl3 valve closed
11/28/2011	4:29:12 PM	PH3 valve closed
11/28/2011	4:29:12 PM	SiCl4 pre valve closed
11/28/2011	4:29:12 PM	SiCl4 post valve closed
11/28/2011	4:29:12 PM	Main Vac valve closed
11/28/2011	4:29:12 PM	Bypass valve closed
11/28/2011	4:29:12 PM	Bubbler valve closed
11/28/2011	4:29:12 PM	H2 valve opened
11/28/2011	4:29:12 PM	Helium MFC set to  0.000000
11/28/2011	4:29:12 PM	H2 MFC set to  500.000000
11/28/2011	4:29:12 PM	BCl3 MFC set to  0.000000
11/28/2011	4:29:12 PM	PHl3 MFC set to  0.000000
11/28/2011	4:29:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:29:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:29:12 PM	Tube furnace set to 0
11/28/2011	4:30:16 PM	Helium valve closed
11/28/2011	4:30:16 PM	BCl3 valve closed
11/28/2011	4:30:16 PM	PH3 valve closed
11/28/2011	4:30:16 PM	SiCl4 pre valve closed
11/28/2011	4:30:16 PM	SiCl4 post valve closed
11/28/2011	4:30:16 PM	Main Vac valve closed
11/28/2011	4:30:16 PM	Bypass valve closed
11/28/2011	4:30:16 PM	H2 valve opened
11/28/2011	4:30:16 PM	Bubbler valve opened
11/28/2011	4:30:16 PM	Helium MFC set to  0.000000
11/28/2011	4:30:16 PM	H2 MFC set to  500.000000
11/28/2011	4:30:16 PM	BCl3 MFC set to  0.000000
11/28/2011	4:30:16 PM	PHl3 MFC set to  0.000000
11/28/2011	4:30:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:30:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:30:16 PM	Tube furnace set to 0
11/28/2011	4:30:17 PM	Helium valve closed
11/28/2011	4:30:17 PM	BCl3 valve closed
11/28/2011	4:30:17 PM	PH3 valve closed
11/28/2011	4:30:17 PM	SiCl4 pre valve closed
11/28/2011	4:30:17 PM	SiCl4 post valve closed
11/28/2011	4:30:17 PM	Main Vac valve closed
11/28/2011	4:30:17 PM	Bypass valve closed
11/28/2011	4:30:17 PM	H2 valve opened
11/28/2011	4:30:17 PM	Bubbler valve opened
11/28/2011	4:30:17 PM	Helium MFC set to  0.000000
11/28/2011	4:30:17 PM	H2 MFC set to  500.000000
11/28/2011	4:30:17 PM	BCl3 MFC set to  0.000000
11/28/2011	4:30:17 PM	PHl3 MFC set to  0.000000
11/28/2011	4:30:17 PM	SiCl4 MFC set to  0.000000
11/28/2011	4:30:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:30:17 PM	Tube furnace set to 1000
11/28/2011	4:55:17 PM	Helium valve closed
11/28/2011	4:55:17 PM	PH3 valve closed
11/28/2011	4:55:17 PM	Main Vac valve closed
11/28/2011	4:55:17 PM	Bypass valve closed
11/28/2011	4:55:17 PM	H2 valve opened
11/28/2011	4:55:17 PM	BCl3 valve opened
11/28/2011	4:55:17 PM	SiCl4 pre valve opened
11/28/2011	4:55:17 PM	SiCl4 post valve opened
11/28/2011	4:55:17 PM	Bubbler valve opened
11/28/2011	4:55:17 PM	Helium MFC set to  0.000000
11/28/2011	4:55:17 PM	H2 MFC set to  500.000000
11/28/2011	4:55:17 PM	BCl3 MFC set to  3.500000
11/28/2011	4:55:17 PM	PHl3 MFC set to  0.000000
11/28/2011	4:55:17 PM	SiCl4 MFC set to  25.000000
11/28/2011	4:55:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	4:55:17 PM	Tube furnace set to 1000
11/28/2011	5:17:17 PM	Helium valve closed
11/28/2011	5:17:17 PM	BCl3 valve closed
11/28/2011	5:17:18 PM	PH3 valve closed
11/28/2011	5:17:18 PM	SiCl4 pre valve closed
11/28/2011	5:17:18 PM	SiCl4 post valve closed
11/28/2011	5:17:18 PM	Main Vac valve closed
11/28/2011	5:17:18 PM	Bypass valve closed
11/28/2011	5:17:18 PM	H2 valve opened
11/28/2011	5:17:18 PM	Bubbler valve opened
11/28/2011	5:17:18 PM	Helium MFC set to  0.000000
11/28/2011	5:17:18 PM	H2 MFC set to  500.000000
11/28/2011	5:17:18 PM	BCl3 MFC set to  0.000000
11/28/2011	5:17:18 PM	PHl3 MFC set to  0.000000
11/28/2011	5:17:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	5:17:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	5:17:18 PM	Tube furnace set to 750
11/28/2011	5:27:18 PM	H2 valve closed
11/28/2011	5:27:18 PM	BCl3 valve closed
11/28/2011	5:27:18 PM	PH3 valve closed
11/28/2011	5:27:18 PM	SiCl4 pre valve closed
11/28/2011	5:27:18 PM	SiCl4 post valve closed
11/28/2011	5:27:18 PM	Main Vac valve closed
11/28/2011	5:27:18 PM	Bypass valve closed
11/28/2011	5:27:18 PM	Helium valve opened
11/28/2011	5:27:18 PM	Bubbler valve opened
11/28/2011	5:27:18 PM	Helium MFC set to  500.000000
11/28/2011	5:27:18 PM	H2 MFC set to  0.000000
11/28/2011	5:27:18 PM	BCl3 MFC set to  0.000000
11/28/2011	5:27:18 PM	PHl3 MFC set to  0.000000
11/28/2011	5:27:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	5:27:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	5:27:18 PM	Tube furnace set to 0
11/28/2011	5:47:18 PM	Helium valve closed
11/28/2011	5:47:18 PM	H2 valve closed
11/28/2011	5:47:18 PM	BCl3 valve closed
11/28/2011	5:47:18 PM	PH3 valve closed
11/28/2011	5:47:18 PM	SiCl4 pre valve closed
11/28/2011	5:47:18 PM	SiCl4 post valve closed
11/28/2011	5:47:18 PM	Main Vac valve closed
11/28/2011	5:47:18 PM	Bypass valve closed
11/28/2011	5:47:18 PM	Bubbler valve closed
11/28/2011	5:47:18 PM	Helium MFC set to  0.000000
11/28/2011	5:47:18 PM	H2 MFC set to  0.000000
11/28/2011	5:47:18 PM	BCl3 MFC set to  0.000000
11/28/2011	5:47:18 PM	PHl3 MFC set to  0.000000
11/28/2011	5:47:18 PM	SiCl4 MFC set to  0.000000
11/28/2011	5:47:18 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	5:47:18 PM	Tube furnace set to 0
11/28/2011	5:47:19 PM	Run finished at 5:47 PM
11/28/2011	6:30:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	6:30:38 PM	Recipe started at 6:30 PM
11/28/2011	6:30:39 PM	Helium valve closed
11/28/2011	6:30:39 PM	H2 valve closed
11/28/2011	6:30:39 PM	BCl3 valve closed
11/28/2011	6:30:39 PM	PH3 valve closed
11/28/2011	6:30:39 PM	SiCl4 pre valve closed
11/28/2011	6:30:39 PM	SiCl4 post valve closed
11/28/2011	6:30:39 PM	Main Vac valve closed
11/28/2011	6:30:39 PM	Bypass valve closed
11/28/2011	6:30:39 PM	Bubbler valve closed
11/28/2011	6:30:39 PM	Helium MFC set to  0.000000
11/28/2011	6:30:39 PM	H2 MFC set to  0.000000
11/28/2011	6:30:39 PM	BCl3 MFC set to  0.000000
11/28/2011	6:30:39 PM	PHl3 MFC set to  0.000000
11/28/2011	6:30:39 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:30:39 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:30:39 PM	Tube furnace set to 0
11/28/2011	6:30:42 PM	H2 valve closed
11/28/2011	6:30:42 PM	BCl3 valve closed
11/28/2011	6:30:42 PM	PH3 valve closed
11/28/2011	6:30:42 PM	SiCl4 pre valve closed
11/28/2011	6:30:42 PM	SiCl4 post valve closed
11/28/2011	6:30:42 PM	Main Vac valve closed
11/28/2011	6:30:42 PM	Bypass valve closed
11/28/2011	6:30:42 PM	Bubbler valve closed
11/28/2011	6:30:42 PM	Helium valve opened
11/28/2011	6:30:42 PM	Helium MFC set to  500.000000
11/28/2011	6:30:42 PM	H2 MFC set to  0.000000
11/28/2011	6:30:42 PM	BCl3 MFC set to  0.000000
11/28/2011	6:30:42 PM	PHl3 MFC set to  0.000000
11/28/2011	6:30:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:30:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:30:42 PM	Tube furnace set to 0
11/28/2011	6:30:43 PM	Helium valve closed
11/28/2011	6:30:43 PM	H2 valve closed
11/28/2011	6:30:43 PM	BCl3 valve closed
11/28/2011	6:30:43 PM	PH3 valve closed
11/28/2011	6:30:43 PM	SiCl4 pre valve closed
11/28/2011	6:30:43 PM	SiCl4 post valve closed
11/28/2011	6:30:43 PM	Main Vac valve closed
11/28/2011	6:30:43 PM	Bypass valve closed
11/28/2011	6:30:43 PM	Bubbler valve closed
11/28/2011	6:30:43 PM	Helium MFC set to  0.000000
11/28/2011	6:30:43 PM	H2 MFC set to  0.000000
11/28/2011	6:30:43 PM	BCl3 MFC set to  0.000000
11/28/2011	6:30:43 PM	PHl3 MFC set to  0.000000
11/28/2011	6:30:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:30:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:30:44 PM	Tube furnace set to 0
11/28/2011	6:30:45 PM	Run finished at 6:30 PM
11/28/2011	6:30:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	6:36:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	6:36:13 PM	Recipe started at 6:36 PM
11/28/2011	6:36:13 PM	Helium valve closed
11/28/2011	6:36:13 PM	H2 valve closed
11/28/2011	6:36:13 PM	BCl3 valve closed
11/28/2011	6:36:13 PM	PH3 valve closed
11/28/2011	6:36:13 PM	SiCl4 pre valve closed
11/28/2011	6:36:13 PM	SiCl4 post valve closed
11/28/2011	6:36:13 PM	Main Vac valve closed
11/28/2011	6:36:13 PM	Bubbler valve closed
11/28/2011	6:36:13 PM	Bypass valve opened
11/28/2011	6:36:13 PM	Helium MFC set to  0.000000
11/28/2011	6:36:13 PM	H2 MFC set to  0.000000
11/28/2011	6:36:13 PM	BCl3 MFC set to  0.000000
11/28/2011	6:36:13 PM	PHl3 MFC set to  0.000000
11/28/2011	6:36:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:36:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:36:13 PM	Tube furnace set to 0
11/28/2011	6:37:31 PM	Helium valve closed
11/28/2011	6:37:31 PM	H2 valve closed
11/28/2011	6:37:31 PM	BCl3 valve closed
11/28/2011	6:37:31 PM	PH3 valve closed
11/28/2011	6:37:31 PM	SiCl4 pre valve closed
11/28/2011	6:37:31 PM	SiCl4 post valve closed
11/28/2011	6:37:31 PM	Main Vac valve closed
11/28/2011	6:37:31 PM	Bubbler valve closed
11/28/2011	6:37:31 PM	Bypass valve opened
11/28/2011	6:37:31 PM	Helium MFC set to  0.000000
11/28/2011	6:37:31 PM	H2 MFC set to  0.000000
11/28/2011	6:37:31 PM	BCl3 MFC set to  0.000000
11/28/2011	6:37:31 PM	PHl3 MFC set to  0.000000
11/28/2011	6:37:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:37:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:37:31 PM	Tube furnace set to 0
11/28/2011	6:38:31 PM	Helium valve closed
11/28/2011	6:38:31 PM	H2 valve closed
11/28/2011	6:38:31 PM	BCl3 valve closed
11/28/2011	6:38:31 PM	PH3 valve closed
11/28/2011	6:38:31 PM	SiCl4 pre valve closed
11/28/2011	6:38:31 PM	SiCl4 post valve closed
11/28/2011	6:38:31 PM	Bypass valve closed
11/28/2011	6:38:31 PM	Bubbler valve closed
11/28/2011	6:38:31 PM	Main Vac valve opened
11/28/2011	6:38:31 PM	Helium MFC set to  0.000000
11/28/2011	6:38:31 PM	H2 MFC set to  0.000000
11/28/2011	6:38:31 PM	BCl3 MFC set to  0.000000
11/28/2011	6:38:31 PM	PHl3 MFC set to  0.000000
11/28/2011	6:38:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:38:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:38:31 PM	Tube furnace set to 0
11/28/2011	6:38:32 PM	Run finished at 6:38 PM
11/28/2011	6:38:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	6:42:57 PM	Tube furnace set to 150
11/28/2011	6:43:42 PM	Recipe started at 6:43 PM
11/28/2011	6:43:42 PM	Helium valve closed
11/28/2011	6:43:42 PM	H2 valve closed
11/28/2011	6:43:42 PM	BCl3 valve closed
11/28/2011	6:43:42 PM	PH3 valve closed
11/28/2011	6:43:42 PM	SiCl4 pre valve closed
11/28/2011	6:43:42 PM	SiCl4 post valve closed
11/28/2011	6:43:42 PM	Bypass valve closed
11/28/2011	6:43:42 PM	Bubbler valve closed
11/28/2011	6:43:42 PM	Main Vac valve opened
11/28/2011	6:43:42 PM	Helium MFC set to  0.000000
11/28/2011	6:43:42 PM	H2 MFC set to  0.000000
11/28/2011	6:43:42 PM	BCl3 MFC set to  0.000000
11/28/2011	6:43:42 PM	PHl3 MFC set to  0.000000
11/28/2011	6:43:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:43:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:43:42 PM	Tube furnace set to 150
11/28/2011	6:44:12 PM	H2 valve closed
11/28/2011	6:44:12 PM	BCl3 valve closed
11/28/2011	6:44:12 PM	PH3 valve closed
11/28/2011	6:44:12 PM	SiCl4 pre valve closed
11/28/2011	6:44:12 PM	SiCl4 post valve closed
11/28/2011	6:44:12 PM	Bypass valve closed
11/28/2011	6:44:12 PM	Bubbler valve closed
11/28/2011	6:44:12 PM	Helium valve opened
11/28/2011	6:44:12 PM	Main Vac valve opened
11/28/2011	6:44:12 PM	Helium MFC set to  20.000000
11/28/2011	6:44:12 PM	H2 MFC set to  0.000000
11/28/2011	6:44:12 PM	BCl3 MFC set to  0.000000
11/28/2011	6:44:12 PM	PHl3 MFC set to  0.000000
11/28/2011	6:44:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:44:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:44:12 PM	Tube furnace set to 150
11/28/2011	6:44:42 PM	Helium valve closed
11/28/2011	6:44:42 PM	H2 valve closed
11/28/2011	6:44:42 PM	BCl3 valve closed
11/28/2011	6:44:42 PM	PH3 valve closed
11/28/2011	6:44:42 PM	SiCl4 pre valve closed
11/28/2011	6:44:42 PM	SiCl4 post valve closed
11/28/2011	6:44:42 PM	Bypass valve closed
11/28/2011	6:44:42 PM	Bubbler valve closed
11/28/2011	6:44:42 PM	Main Vac valve opened
11/28/2011	6:44:42 PM	Helium MFC set to  0.000000
11/28/2011	6:44:42 PM	H2 MFC set to  0.000000
11/28/2011	6:44:42 PM	BCl3 MFC set to  0.000000
11/28/2011	6:44:42 PM	PHl3 MFC set to  0.000000
11/28/2011	6:44:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:44:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:44:43 PM	Tube furnace set to 150
11/28/2011	6:45:13 PM	H2 valve closed
11/28/2011	6:45:13 PM	BCl3 valve closed
11/28/2011	6:45:13 PM	PH3 valve closed
11/28/2011	6:45:13 PM	SiCl4 pre valve closed
11/28/2011	6:45:13 PM	SiCl4 post valve closed
11/28/2011	6:45:13 PM	Bypass valve closed
11/28/2011	6:45:13 PM	Bubbler valve closed
11/28/2011	6:45:13 PM	Helium valve opened
11/28/2011	6:45:13 PM	Main Vac valve opened
11/28/2011	6:45:13 PM	Helium MFC set to  20.000000
11/28/2011	6:45:13 PM	H2 MFC set to  0.000000
11/28/2011	6:45:13 PM	BCl3 MFC set to  0.000000
11/28/2011	6:45:13 PM	PHl3 MFC set to  0.000000
11/28/2011	6:45:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:45:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:45:13 PM	Tube furnace set to 150
11/28/2011	6:45:43 PM	Helium valve closed
11/28/2011	6:45:43 PM	H2 valve closed
11/28/2011	6:45:43 PM	BCl3 valve closed
11/28/2011	6:45:43 PM	PH3 valve closed
11/28/2011	6:45:43 PM	SiCl4 pre valve closed
11/28/2011	6:45:43 PM	SiCl4 post valve closed
11/28/2011	6:45:43 PM	Bypass valve closed
11/28/2011	6:45:43 PM	Bubbler valve closed
11/28/2011	6:45:43 PM	Main Vac valve opened
11/28/2011	6:45:43 PM	Helium MFC set to  0.000000
11/28/2011	6:45:43 PM	H2 MFC set to  0.000000
11/28/2011	6:45:43 PM	BCl3 MFC set to  0.000000
11/28/2011	6:45:43 PM	PHl3 MFC set to  0.000000
11/28/2011	6:45:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:45:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:45:43 PM	Tube furnace set to 150
11/28/2011	6:46:13 PM	H2 valve closed
11/28/2011	6:46:13 PM	BCl3 valve closed
11/28/2011	6:46:13 PM	PH3 valve closed
11/28/2011	6:46:13 PM	SiCl4 pre valve closed
11/28/2011	6:46:13 PM	SiCl4 post valve closed
11/28/2011	6:46:13 PM	Bypass valve closed
11/28/2011	6:46:13 PM	Bubbler valve closed
11/28/2011	6:46:13 PM	Helium valve opened
11/28/2011	6:46:13 PM	Main Vac valve opened
11/28/2011	6:46:13 PM	Helium MFC set to  20.000000
11/28/2011	6:46:13 PM	H2 MFC set to  0.000000
11/28/2011	6:46:13 PM	BCl3 MFC set to  0.000000
11/28/2011	6:46:13 PM	PHl3 MFC set to  0.000000
11/28/2011	6:46:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:46:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:46:13 PM	Tube furnace set to 150
11/28/2011	6:46:43 PM	Helium valve closed
11/28/2011	6:46:43 PM	H2 valve closed
11/28/2011	6:46:43 PM	BCl3 valve closed
11/28/2011	6:46:43 PM	PH3 valve closed
11/28/2011	6:46:43 PM	SiCl4 pre valve closed
11/28/2011	6:46:43 PM	SiCl4 post valve closed
11/28/2011	6:46:43 PM	Bypass valve closed
11/28/2011	6:46:43 PM	Bubbler valve closed
11/28/2011	6:46:43 PM	Main Vac valve opened
11/28/2011	6:46:43 PM	Helium MFC set to  0.000000
11/28/2011	6:46:43 PM	H2 MFC set to  0.000000
11/28/2011	6:46:43 PM	BCl3 MFC set to  0.000000
11/28/2011	6:46:43 PM	PHl3 MFC set to  0.000000
11/28/2011	6:46:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:46:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:46:43 PM	Tube furnace set to 150
11/28/2011	6:47:13 PM	H2 valve closed
11/28/2011	6:47:13 PM	BCl3 valve closed
11/28/2011	6:47:13 PM	PH3 valve closed
11/28/2011	6:47:13 PM	SiCl4 pre valve closed
11/28/2011	6:47:13 PM	SiCl4 post valve closed
11/28/2011	6:47:13 PM	Bypass valve closed
11/28/2011	6:47:13 PM	Bubbler valve closed
11/28/2011	6:47:13 PM	Helium valve opened
11/28/2011	6:47:13 PM	Main Vac valve opened
11/28/2011	6:47:13 PM	Helium MFC set to  20.000000
11/28/2011	6:47:13 PM	H2 MFC set to  0.000000
11/28/2011	6:47:13 PM	BCl3 MFC set to  0.000000
11/28/2011	6:47:13 PM	PHl3 MFC set to  0.000000
11/28/2011	6:47:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:47:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:47:14 PM	Tube furnace set to 150
11/28/2011	6:47:44 PM	Helium valve closed
11/28/2011	6:47:44 PM	H2 valve closed
11/28/2011	6:47:44 PM	BCl3 valve closed
11/28/2011	6:47:44 PM	PH3 valve closed
11/28/2011	6:47:44 PM	SiCl4 pre valve closed
11/28/2011	6:47:44 PM	SiCl4 post valve closed
11/28/2011	6:47:44 PM	Bypass valve closed
11/28/2011	6:47:44 PM	Bubbler valve closed
11/28/2011	6:47:44 PM	Main Vac valve opened
11/28/2011	6:47:44 PM	Helium MFC set to  0.000000
11/28/2011	6:47:44 PM	H2 MFC set to  0.000000
11/28/2011	6:47:44 PM	BCl3 MFC set to  0.000000
11/28/2011	6:47:44 PM	PHl3 MFC set to  0.000000
11/28/2011	6:47:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:47:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:47:44 PM	Tube furnace set to 150
11/28/2011	6:48:14 PM	H2 valve closed
11/28/2011	6:48:14 PM	BCl3 valve closed
11/28/2011	6:48:14 PM	PH3 valve closed
11/28/2011	6:48:14 PM	SiCl4 pre valve closed
11/28/2011	6:48:14 PM	SiCl4 post valve closed
11/28/2011	6:48:14 PM	Bypass valve closed
11/28/2011	6:48:14 PM	Bubbler valve closed
11/28/2011	6:48:14 PM	Helium valve opened
11/28/2011	6:48:14 PM	Main Vac valve opened
11/28/2011	6:48:14 PM	Helium MFC set to  20.000000
11/28/2011	6:48:14 PM	H2 MFC set to  0.000000
11/28/2011	6:48:14 PM	BCl3 MFC set to  0.000000
11/28/2011	6:48:14 PM	PHl3 MFC set to  0.000000
11/28/2011	6:48:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:48:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:48:14 PM	Tube furnace set to 150
11/28/2011	6:48:44 PM	Helium valve closed
11/28/2011	6:48:44 PM	H2 valve closed
11/28/2011	6:48:44 PM	BCl3 valve closed
11/28/2011	6:48:44 PM	PH3 valve closed
11/28/2011	6:48:44 PM	SiCl4 pre valve closed
11/28/2011	6:48:44 PM	SiCl4 post valve closed
11/28/2011	6:48:44 PM	Bypass valve closed
11/28/2011	6:48:44 PM	Bubbler valve closed
11/28/2011	6:48:44 PM	Main Vac valve opened
11/28/2011	6:48:44 PM	Helium MFC set to  0.000000
11/28/2011	6:48:44 PM	H2 MFC set to  0.000000
11/28/2011	6:48:44 PM	BCl3 MFC set to  0.000000
11/28/2011	6:48:44 PM	PHl3 MFC set to  0.000000
11/28/2011	6:48:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:48:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:48:44 PM	Tube furnace set to 150
11/28/2011	6:49:14 PM	H2 valve closed
11/28/2011	6:49:14 PM	BCl3 valve closed
11/28/2011	6:49:14 PM	PH3 valve closed
11/28/2011	6:49:14 PM	SiCl4 pre valve closed
11/28/2011	6:49:14 PM	SiCl4 post valve closed
11/28/2011	6:49:14 PM	Bypass valve closed
11/28/2011	6:49:14 PM	Bubbler valve closed
11/28/2011	6:49:14 PM	Helium valve opened
11/28/2011	6:49:14 PM	Main Vac valve opened
11/28/2011	6:49:14 PM	Helium MFC set to  20.000000
11/28/2011	6:49:14 PM	H2 MFC set to  0.000000
11/28/2011	6:49:14 PM	BCl3 MFC set to  0.000000
11/28/2011	6:49:14 PM	PHl3 MFC set to  0.000000
11/28/2011	6:49:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:49:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:49:14 PM	Tube furnace set to 150
11/28/2011	6:49:44 PM	Helium valve closed
11/28/2011	6:49:44 PM	H2 valve closed
11/28/2011	6:49:44 PM	BCl3 valve closed
11/28/2011	6:49:44 PM	PH3 valve closed
11/28/2011	6:49:44 PM	SiCl4 pre valve closed
11/28/2011	6:49:44 PM	SiCl4 post valve closed
11/28/2011	6:49:44 PM	Bypass valve closed
11/28/2011	6:49:44 PM	Bubbler valve closed
11/28/2011	6:49:44 PM	Main Vac valve opened
11/28/2011	6:49:44 PM	Helium MFC set to  0.000000
11/28/2011	6:49:44 PM	H2 MFC set to  0.000000
11/28/2011	6:49:44 PM	BCl3 MFC set to  0.000000
11/28/2011	6:49:44 PM	PHl3 MFC set to  0.000000
11/28/2011	6:49:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:49:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:49:45 PM	Tube furnace set to 150
11/28/2011	6:50:15 PM	H2 valve closed
11/28/2011	6:50:15 PM	BCl3 valve closed
11/28/2011	6:50:15 PM	PH3 valve closed
11/28/2011	6:50:15 PM	SiCl4 pre valve closed
11/28/2011	6:50:15 PM	SiCl4 post valve closed
11/28/2011	6:50:15 PM	Bypass valve closed
11/28/2011	6:50:15 PM	Bubbler valve closed
11/28/2011	6:50:15 PM	Helium valve opened
11/28/2011	6:50:15 PM	Main Vac valve opened
11/28/2011	6:50:15 PM	Helium MFC set to  20.000000
11/28/2011	6:50:15 PM	H2 MFC set to  0.000000
11/28/2011	6:50:15 PM	BCl3 MFC set to  0.000000
11/28/2011	6:50:15 PM	PHl3 MFC set to  0.000000
11/28/2011	6:50:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:50:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:50:15 PM	Tube furnace set to 150
11/28/2011	6:50:45 PM	Helium valve closed
11/28/2011	6:50:45 PM	H2 valve closed
11/28/2011	6:50:45 PM	BCl3 valve closed
11/28/2011	6:50:45 PM	PH3 valve closed
11/28/2011	6:50:45 PM	SiCl4 pre valve closed
11/28/2011	6:50:45 PM	SiCl4 post valve closed
11/28/2011	6:50:45 PM	Bypass valve closed
11/28/2011	6:50:45 PM	Bubbler valve closed
11/28/2011	6:50:45 PM	Main Vac valve opened
11/28/2011	6:50:45 PM	Helium MFC set to  0.000000
11/28/2011	6:50:45 PM	H2 MFC set to  0.000000
11/28/2011	6:50:45 PM	BCl3 MFC set to  0.000000
11/28/2011	6:50:45 PM	PHl3 MFC set to  0.000000
11/28/2011	6:50:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:50:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:50:45 PM	Tube furnace set to 150
11/28/2011	6:51:15 PM	H2 valve closed
11/28/2011	6:51:15 PM	BCl3 valve closed
11/28/2011	6:51:15 PM	PH3 valve closed
11/28/2011	6:51:15 PM	SiCl4 pre valve closed
11/28/2011	6:51:15 PM	SiCl4 post valve closed
11/28/2011	6:51:15 PM	Bypass valve closed
11/28/2011	6:51:15 PM	Bubbler valve closed
11/28/2011	6:51:15 PM	Helium valve opened
11/28/2011	6:51:15 PM	Main Vac valve opened
11/28/2011	6:51:15 PM	Helium MFC set to  20.000000
11/28/2011	6:51:15 PM	H2 MFC set to  0.000000
11/28/2011	6:51:15 PM	BCl3 MFC set to  0.000000
11/28/2011	6:51:15 PM	PHl3 MFC set to  0.000000
11/28/2011	6:51:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:51:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:51:15 PM	Tube furnace set to 150
11/28/2011	6:51:45 PM	Helium valve closed
11/28/2011	6:51:45 PM	H2 valve closed
11/28/2011	6:51:45 PM	BCl3 valve closed
11/28/2011	6:51:45 PM	PH3 valve closed
11/28/2011	6:51:45 PM	SiCl4 pre valve closed
11/28/2011	6:51:45 PM	SiCl4 post valve closed
11/28/2011	6:51:45 PM	Bypass valve closed
11/28/2011	6:51:45 PM	Bubbler valve closed
11/28/2011	6:51:45 PM	Main Vac valve opened
11/28/2011	6:51:45 PM	Helium MFC set to  0.000000
11/28/2011	6:51:45 PM	H2 MFC set to  0.000000
11/28/2011	6:51:45 PM	BCl3 MFC set to  0.000000
11/28/2011	6:51:45 PM	PHl3 MFC set to  0.000000
11/28/2011	6:51:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:51:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:51:45 PM	Tube furnace set to 150
11/28/2011	6:52:15 PM	H2 valve closed
11/28/2011	6:52:15 PM	BCl3 valve closed
11/28/2011	6:52:15 PM	PH3 valve closed
11/28/2011	6:52:15 PM	SiCl4 pre valve closed
11/28/2011	6:52:15 PM	SiCl4 post valve closed
11/28/2011	6:52:15 PM	Bypass valve closed
11/28/2011	6:52:15 PM	Bubbler valve closed
11/28/2011	6:52:15 PM	Helium valve opened
11/28/2011	6:52:15 PM	Main Vac valve opened
11/28/2011	6:52:15 PM	Helium MFC set to  20.000000
11/28/2011	6:52:15 PM	H2 MFC set to  0.000000
11/28/2011	6:52:15 PM	BCl3 MFC set to  0.000000
11/28/2011	6:52:15 PM	PHl3 MFC set to  0.000000
11/28/2011	6:52:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:52:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:52:16 PM	Tube furnace set to 150
11/28/2011	6:52:46 PM	Helium valve closed
11/28/2011	6:52:46 PM	H2 valve closed
11/28/2011	6:52:46 PM	BCl3 valve closed
11/28/2011	6:52:46 PM	PH3 valve closed
11/28/2011	6:52:46 PM	SiCl4 pre valve closed
11/28/2011	6:52:46 PM	SiCl4 post valve closed
11/28/2011	6:52:46 PM	Bypass valve closed
11/28/2011	6:52:46 PM	Bubbler valve closed
11/28/2011	6:52:46 PM	Main Vac valve opened
11/28/2011	6:52:46 PM	Helium MFC set to  0.000000
11/28/2011	6:52:46 PM	H2 MFC set to  0.000000
11/28/2011	6:52:46 PM	BCl3 MFC set to  0.000000
11/28/2011	6:52:46 PM	PHl3 MFC set to  0.000000
11/28/2011	6:52:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:52:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:52:46 PM	Tube furnace set to 150
11/28/2011	6:53:16 PM	H2 valve closed
11/28/2011	6:53:16 PM	BCl3 valve closed
11/28/2011	6:53:16 PM	PH3 valve closed
11/28/2011	6:53:16 PM	SiCl4 pre valve closed
11/28/2011	6:53:16 PM	SiCl4 post valve closed
11/28/2011	6:53:16 PM	Bypass valve closed
11/28/2011	6:53:16 PM	Bubbler valve closed
11/28/2011	6:53:16 PM	Helium valve opened
11/28/2011	6:53:16 PM	Main Vac valve opened
11/28/2011	6:53:16 PM	Helium MFC set to  20.000000
11/28/2011	6:53:16 PM	H2 MFC set to  0.000000
11/28/2011	6:53:16 PM	BCl3 MFC set to  0.000000
11/28/2011	6:53:16 PM	PHl3 MFC set to  0.000000
11/28/2011	6:53:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:53:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:53:16 PM	Tube furnace set to 150
11/28/2011	6:53:46 PM	Helium valve closed
11/28/2011	6:53:46 PM	H2 valve closed
11/28/2011	6:53:46 PM	BCl3 valve closed
11/28/2011	6:53:46 PM	PH3 valve closed
11/28/2011	6:53:46 PM	SiCl4 pre valve closed
11/28/2011	6:53:46 PM	SiCl4 post valve closed
11/28/2011	6:53:46 PM	Bypass valve closed
11/28/2011	6:53:46 PM	Bubbler valve closed
11/28/2011	6:53:46 PM	Main Vac valve opened
11/28/2011	6:53:46 PM	Helium MFC set to  0.000000
11/28/2011	6:53:46 PM	H2 MFC set to  0.000000
11/28/2011	6:53:46 PM	BCl3 MFC set to  0.000000
11/28/2011	6:53:46 PM	PHl3 MFC set to  0.000000
11/28/2011	6:53:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:53:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:53:46 PM	Tube furnace set to 150
11/28/2011	6:53:47 PM	Run finished at 6:53 PM
11/28/2011	6:55:29 PM	Recipe started at 6:55 PM
11/28/2011	6:55:29 PM	Helium valve closed
11/28/2011	6:55:29 PM	H2 valve closed
11/28/2011	6:55:29 PM	BCl3 valve closed
11/28/2011	6:55:29 PM	PH3 valve closed
11/28/2011	6:55:29 PM	SiCl4 pre valve closed
11/28/2011	6:55:29 PM	SiCl4 post valve closed
11/28/2011	6:55:29 PM	Bypass valve closed
11/28/2011	6:55:29 PM	Bubbler valve closed
11/28/2011	6:55:29 PM	Main Vac valve opened
11/28/2011	6:55:29 PM	Helium MFC set to  0.000000
11/28/2011	6:55:29 PM	H2 MFC set to  0.000000
11/28/2011	6:55:29 PM	BCl3 MFC set to  0.000000
11/28/2011	6:55:29 PM	PHl3 MFC set to  0.000000
11/28/2011	6:55:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:55:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:55:29 PM	Tube furnace set to 150
11/28/2011	6:55:59 PM	H2 valve closed
11/28/2011	6:55:59 PM	BCl3 valve closed
11/28/2011	6:55:59 PM	PH3 valve closed
11/28/2011	6:55:59 PM	SiCl4 pre valve closed
11/28/2011	6:55:59 PM	SiCl4 post valve closed
11/28/2011	6:55:59 PM	Bypass valve closed
11/28/2011	6:55:59 PM	Bubbler valve closed
11/28/2011	6:55:59 PM	Helium valve opened
11/28/2011	6:55:59 PM	Main Vac valve opened
11/28/2011	6:55:59 PM	Helium MFC set to  20.000000
11/28/2011	6:55:59 PM	H2 MFC set to  0.000000
11/28/2011	6:55:59 PM	BCl3 MFC set to  0.000000
11/28/2011	6:55:59 PM	PHl3 MFC set to  0.000000
11/28/2011	6:55:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:55:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:56:00 PM	Tube furnace set to 150
11/28/2011	6:56:30 PM	Helium valve closed
11/28/2011	6:56:30 PM	H2 valve closed
11/28/2011	6:56:30 PM	BCl3 valve closed
11/28/2011	6:56:30 PM	PH3 valve closed
11/28/2011	6:56:30 PM	SiCl4 pre valve closed
11/28/2011	6:56:30 PM	SiCl4 post valve closed
11/28/2011	6:56:30 PM	Bypass valve closed
11/28/2011	6:56:30 PM	Bubbler valve closed
11/28/2011	6:56:30 PM	Main Vac valve opened
11/28/2011	6:56:30 PM	Helium MFC set to  0.000000
11/28/2011	6:56:30 PM	H2 MFC set to  0.000000
11/28/2011	6:56:30 PM	BCl3 MFC set to  0.000000
11/28/2011	6:56:30 PM	PHl3 MFC set to  0.000000
11/28/2011	6:56:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:56:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:56:30 PM	Tube furnace set to 150
11/28/2011	6:57:00 PM	H2 valve closed
11/28/2011	6:57:00 PM	BCl3 valve closed
11/28/2011	6:57:00 PM	PH3 valve closed
11/28/2011	6:57:00 PM	SiCl4 pre valve closed
11/28/2011	6:57:00 PM	SiCl4 post valve closed
11/28/2011	6:57:00 PM	Bypass valve closed
11/28/2011	6:57:00 PM	Bubbler valve closed
11/28/2011	6:57:00 PM	Helium valve opened
11/28/2011	6:57:00 PM	Main Vac valve opened
11/28/2011	6:57:00 PM	Helium MFC set to  20.000000
11/28/2011	6:57:00 PM	H2 MFC set to  0.000000
11/28/2011	6:57:00 PM	BCl3 MFC set to  0.000000
11/28/2011	6:57:00 PM	PHl3 MFC set to  0.000000
11/28/2011	6:57:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:57:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:57:00 PM	Tube furnace set to 150
11/28/2011	6:57:30 PM	Helium valve closed
11/28/2011	6:57:30 PM	H2 valve closed
11/28/2011	6:57:30 PM	BCl3 valve closed
11/28/2011	6:57:30 PM	PH3 valve closed
11/28/2011	6:57:30 PM	SiCl4 pre valve closed
11/28/2011	6:57:30 PM	SiCl4 post valve closed
11/28/2011	6:57:30 PM	Bypass valve closed
11/28/2011	6:57:30 PM	Bubbler valve closed
11/28/2011	6:57:30 PM	Main Vac valve opened
11/28/2011	6:57:30 PM	Helium MFC set to  0.000000
11/28/2011	6:57:30 PM	H2 MFC set to  0.000000
11/28/2011	6:57:30 PM	BCl3 MFC set to  0.000000
11/28/2011	6:57:30 PM	PHl3 MFC set to  0.000000
11/28/2011	6:57:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:57:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:57:30 PM	Tube furnace set to 150
11/28/2011	6:58:00 PM	H2 valve closed
11/28/2011	6:58:00 PM	BCl3 valve closed
11/28/2011	6:58:00 PM	PH3 valve closed
11/28/2011	6:58:00 PM	SiCl4 pre valve closed
11/28/2011	6:58:00 PM	SiCl4 post valve closed
11/28/2011	6:58:00 PM	Bypass valve closed
11/28/2011	6:58:00 PM	Bubbler valve closed
11/28/2011	6:58:00 PM	Helium valve opened
11/28/2011	6:58:00 PM	Main Vac valve opened
11/28/2011	6:58:00 PM	Helium MFC set to  20.000000
11/28/2011	6:58:00 PM	H2 MFC set to  0.000000
11/28/2011	6:58:00 PM	BCl3 MFC set to  0.000000
11/28/2011	6:58:00 PM	PHl3 MFC set to  0.000000
11/28/2011	6:58:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:58:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:58:00 PM	Tube furnace set to 150
11/28/2011	6:58:30 PM	Helium valve closed
11/28/2011	6:58:30 PM	H2 valve closed
11/28/2011	6:58:30 PM	BCl3 valve closed
11/28/2011	6:58:30 PM	PH3 valve closed
11/28/2011	6:58:30 PM	SiCl4 pre valve closed
11/28/2011	6:58:30 PM	SiCl4 post valve closed
11/28/2011	6:58:30 PM	Bypass valve closed
11/28/2011	6:58:30 PM	Bubbler valve closed
11/28/2011	6:58:30 PM	Main Vac valve opened
11/28/2011	6:58:30 PM	Helium MFC set to  0.000000
11/28/2011	6:58:30 PM	H2 MFC set to  0.000000
11/28/2011	6:58:30 PM	BCl3 MFC set to  0.000000
11/28/2011	6:58:30 PM	PHl3 MFC set to  0.000000
11/28/2011	6:58:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:58:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:58:31 PM	Tube furnace set to 150
11/28/2011	6:59:01 PM	H2 valve closed
11/28/2011	6:59:01 PM	BCl3 valve closed
11/28/2011	6:59:01 PM	PH3 valve closed
11/28/2011	6:59:01 PM	SiCl4 pre valve closed
11/28/2011	6:59:01 PM	SiCl4 post valve closed
11/28/2011	6:59:01 PM	Bypass valve closed
11/28/2011	6:59:01 PM	Bubbler valve closed
11/28/2011	6:59:01 PM	Helium valve opened
11/28/2011	6:59:01 PM	Main Vac valve opened
11/28/2011	6:59:01 PM	Helium MFC set to  20.000000
11/28/2011	6:59:01 PM	H2 MFC set to  0.000000
11/28/2011	6:59:01 PM	BCl3 MFC set to  0.000000
11/28/2011	6:59:01 PM	PHl3 MFC set to  0.000000
11/28/2011	6:59:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:59:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:59:01 PM	Tube furnace set to 150
11/28/2011	6:59:31 PM	Helium valve closed
11/28/2011	6:59:31 PM	H2 valve closed
11/28/2011	6:59:31 PM	BCl3 valve closed
11/28/2011	6:59:31 PM	PH3 valve closed
11/28/2011	6:59:31 PM	SiCl4 pre valve closed
11/28/2011	6:59:31 PM	SiCl4 post valve closed
11/28/2011	6:59:31 PM	Bypass valve closed
11/28/2011	6:59:31 PM	Bubbler valve closed
11/28/2011	6:59:31 PM	Main Vac valve opened
11/28/2011	6:59:31 PM	Helium MFC set to  0.000000
11/28/2011	6:59:31 PM	H2 MFC set to  0.000000
11/28/2011	6:59:31 PM	BCl3 MFC set to  0.000000
11/28/2011	6:59:31 PM	PHl3 MFC set to  0.000000
11/28/2011	6:59:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	6:59:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	6:59:31 PM	Tube furnace set to 150
11/28/2011	7:00:01 PM	H2 valve closed
11/28/2011	7:00:01 PM	BCl3 valve closed
11/28/2011	7:00:01 PM	PH3 valve closed
11/28/2011	7:00:01 PM	SiCl4 pre valve closed
11/28/2011	7:00:01 PM	SiCl4 post valve closed
11/28/2011	7:00:01 PM	Bypass valve closed
11/28/2011	7:00:01 PM	Bubbler valve closed
11/28/2011	7:00:01 PM	Helium valve opened
11/28/2011	7:00:01 PM	Main Vac valve opened
11/28/2011	7:00:01 PM	Helium MFC set to  20.000000
11/28/2011	7:00:01 PM	H2 MFC set to  0.000000
11/28/2011	7:00:01 PM	BCl3 MFC set to  0.000000
11/28/2011	7:00:01 PM	PHl3 MFC set to  0.000000
11/28/2011	7:00:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:00:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:00:01 PM	Tube furnace set to 150
11/28/2011	7:00:31 PM	Helium valve closed
11/28/2011	7:00:31 PM	H2 valve closed
11/28/2011	7:00:31 PM	BCl3 valve closed
11/28/2011	7:00:31 PM	PH3 valve closed
11/28/2011	7:00:31 PM	SiCl4 pre valve closed
11/28/2011	7:00:31 PM	SiCl4 post valve closed
11/28/2011	7:00:31 PM	Bypass valve closed
11/28/2011	7:00:31 PM	Bubbler valve closed
11/28/2011	7:00:31 PM	Main Vac valve opened
11/28/2011	7:00:31 PM	Helium MFC set to  0.000000
11/28/2011	7:00:31 PM	H2 MFC set to  0.000000
11/28/2011	7:00:31 PM	BCl3 MFC set to  0.000000
11/28/2011	7:00:31 PM	PHl3 MFC set to  0.000000
11/28/2011	7:00:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:00:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:00:31 PM	Tube furnace set to 150
11/28/2011	7:01:01 PM	H2 valve closed
11/28/2011	7:01:01 PM	BCl3 valve closed
11/28/2011	7:01:01 PM	PH3 valve closed
11/28/2011	7:01:01 PM	SiCl4 pre valve closed
11/28/2011	7:01:01 PM	SiCl4 post valve closed
11/28/2011	7:01:01 PM	Bypass valve closed
11/28/2011	7:01:01 PM	Bubbler valve closed
11/28/2011	7:01:01 PM	Helium valve opened
11/28/2011	7:01:01 PM	Main Vac valve opened
11/28/2011	7:01:01 PM	Helium MFC set to  20.000000
11/28/2011	7:01:01 PM	H2 MFC set to  0.000000
11/28/2011	7:01:01 PM	BCl3 MFC set to  0.000000
11/28/2011	7:01:01 PM	PHl3 MFC set to  0.000000
11/28/2011	7:01:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:01:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:01:02 PM	Tube furnace set to 150
11/28/2011	7:01:32 PM	Helium valve closed
11/28/2011	7:01:32 PM	H2 valve closed
11/28/2011	7:01:32 PM	BCl3 valve closed
11/28/2011	7:01:32 PM	PH3 valve closed
11/28/2011	7:01:32 PM	SiCl4 pre valve closed
11/28/2011	7:01:32 PM	SiCl4 post valve closed
11/28/2011	7:01:32 PM	Bypass valve closed
11/28/2011	7:01:32 PM	Bubbler valve closed
11/28/2011	7:01:32 PM	Main Vac valve opened
11/28/2011	7:01:32 PM	Helium MFC set to  0.000000
11/28/2011	7:01:32 PM	H2 MFC set to  0.000000
11/28/2011	7:01:32 PM	BCl3 MFC set to  0.000000
11/28/2011	7:01:32 PM	PHl3 MFC set to  0.000000
11/28/2011	7:01:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:01:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:01:32 PM	Tube furnace set to 150
11/28/2011	7:02:02 PM	H2 valve closed
11/28/2011	7:02:02 PM	BCl3 valve closed
11/28/2011	7:02:02 PM	PH3 valve closed
11/28/2011	7:02:02 PM	SiCl4 pre valve closed
11/28/2011	7:02:02 PM	SiCl4 post valve closed
11/28/2011	7:02:02 PM	Bypass valve closed
11/28/2011	7:02:02 PM	Bubbler valve closed
11/28/2011	7:02:02 PM	Helium valve opened
11/28/2011	7:02:02 PM	Main Vac valve opened
11/28/2011	7:02:02 PM	Helium MFC set to  20.000000
11/28/2011	7:02:02 PM	H2 MFC set to  0.000000
11/28/2011	7:02:02 PM	BCl3 MFC set to  0.000000
11/28/2011	7:02:02 PM	PHl3 MFC set to  0.000000
11/28/2011	7:02:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:02:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:02:02 PM	Tube furnace set to 150
11/28/2011	7:02:32 PM	Helium valve closed
11/28/2011	7:02:32 PM	H2 valve closed
11/28/2011	7:02:32 PM	BCl3 valve closed
11/28/2011	7:02:32 PM	PH3 valve closed
11/28/2011	7:02:32 PM	SiCl4 pre valve closed
11/28/2011	7:02:32 PM	SiCl4 post valve closed
11/28/2011	7:02:32 PM	Bypass valve closed
11/28/2011	7:02:32 PM	Bubbler valve closed
11/28/2011	7:02:32 PM	Main Vac valve opened
11/28/2011	7:02:32 PM	Helium MFC set to  0.000000
11/28/2011	7:02:32 PM	H2 MFC set to  0.000000
11/28/2011	7:02:32 PM	BCl3 MFC set to  0.000000
11/28/2011	7:02:32 PM	PHl3 MFC set to  0.000000
11/28/2011	7:02:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:02:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:02:32 PM	Tube furnace set to 150
11/28/2011	7:03:02 PM	H2 valve closed
11/28/2011	7:03:02 PM	BCl3 valve closed
11/28/2011	7:03:02 PM	PH3 valve closed
11/28/2011	7:03:02 PM	SiCl4 pre valve closed
11/28/2011	7:03:02 PM	SiCl4 post valve closed
11/28/2011	7:03:02 PM	Bypass valve closed
11/28/2011	7:03:02 PM	Bubbler valve closed
11/28/2011	7:03:02 PM	Helium valve opened
11/28/2011	7:03:02 PM	Main Vac valve opened
11/28/2011	7:03:02 PM	Helium MFC set to  20.000000
11/28/2011	7:03:02 PM	H2 MFC set to  0.000000
11/28/2011	7:03:02 PM	BCl3 MFC set to  0.000000
11/28/2011	7:03:02 PM	PHl3 MFC set to  0.000000
11/28/2011	7:03:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:03:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:03:02 PM	Tube furnace set to 150
11/28/2011	7:03:32 PM	Helium valve closed
11/28/2011	7:03:32 PM	H2 valve closed
11/28/2011	7:03:32 PM	BCl3 valve closed
11/28/2011	7:03:32 PM	PH3 valve closed
11/28/2011	7:03:33 PM	SiCl4 pre valve closed
11/28/2011	7:03:33 PM	SiCl4 post valve closed
11/28/2011	7:03:33 PM	Bypass valve closed
11/28/2011	7:03:33 PM	Bubbler valve closed
11/28/2011	7:03:33 PM	Main Vac valve opened
11/28/2011	7:03:33 PM	Helium MFC set to  0.000000
11/28/2011	7:03:33 PM	H2 MFC set to  0.000000
11/28/2011	7:03:33 PM	BCl3 MFC set to  0.000000
11/28/2011	7:03:33 PM	PHl3 MFC set to  0.000000
11/28/2011	7:03:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:03:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:03:33 PM	Tube furnace set to 150
11/28/2011	7:04:03 PM	H2 valve closed
11/28/2011	7:04:03 PM	BCl3 valve closed
11/28/2011	7:04:03 PM	PH3 valve closed
11/28/2011	7:04:03 PM	SiCl4 pre valve closed
11/28/2011	7:04:03 PM	SiCl4 post valve closed
11/28/2011	7:04:03 PM	Bypass valve closed
11/28/2011	7:04:03 PM	Bubbler valve closed
11/28/2011	7:04:03 PM	Helium valve opened
11/28/2011	7:04:03 PM	Main Vac valve opened
11/28/2011	7:04:03 PM	Helium MFC set to  20.000000
11/28/2011	7:04:03 PM	H2 MFC set to  0.000000
11/28/2011	7:04:03 PM	BCl3 MFC set to  0.000000
11/28/2011	7:04:03 PM	PHl3 MFC set to  0.000000
11/28/2011	7:04:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:04:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:04:03 PM	Tube furnace set to 150
11/28/2011	7:04:33 PM	Helium valve closed
11/28/2011	7:04:33 PM	H2 valve closed
11/28/2011	7:04:33 PM	BCl3 valve closed
11/28/2011	7:04:33 PM	PH3 valve closed
11/28/2011	7:04:33 PM	SiCl4 pre valve closed
11/28/2011	7:04:33 PM	SiCl4 post valve closed
11/28/2011	7:04:33 PM	Bypass valve closed
11/28/2011	7:04:33 PM	Bubbler valve closed
11/28/2011	7:04:33 PM	Main Vac valve opened
11/28/2011	7:04:33 PM	Helium MFC set to  0.000000
11/28/2011	7:04:33 PM	H2 MFC set to  0.000000
11/28/2011	7:04:33 PM	BCl3 MFC set to  0.000000
11/28/2011	7:04:33 PM	PHl3 MFC set to  0.000000
11/28/2011	7:04:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:04:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:04:33 PM	Tube furnace set to 150
11/28/2011	7:05:03 PM	H2 valve closed
11/28/2011	7:05:03 PM	BCl3 valve closed
11/28/2011	7:05:03 PM	PH3 valve closed
11/28/2011	7:05:03 PM	SiCl4 pre valve closed
11/28/2011	7:05:03 PM	SiCl4 post valve closed
11/28/2011	7:05:03 PM	Bypass valve closed
11/28/2011	7:05:03 PM	Bubbler valve closed
11/28/2011	7:05:03 PM	Helium valve opened
11/28/2011	7:05:03 PM	Main Vac valve opened
11/28/2011	7:05:03 PM	Helium MFC set to  20.000000
11/28/2011	7:05:03 PM	H2 MFC set to  0.000000
11/28/2011	7:05:03 PM	BCl3 MFC set to  0.000000
11/28/2011	7:05:03 PM	PHl3 MFC set to  0.000000
11/28/2011	7:05:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:05:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:05:03 PM	Tube furnace set to 150
11/28/2011	7:05:33 PM	Helium valve closed
11/28/2011	7:05:33 PM	H2 valve closed
11/28/2011	7:05:33 PM	BCl3 valve closed
11/28/2011	7:05:33 PM	PH3 valve closed
11/28/2011	7:05:33 PM	SiCl4 pre valve closed
11/28/2011	7:05:33 PM	SiCl4 post valve closed
11/28/2011	7:05:33 PM	Bypass valve closed
11/28/2011	7:05:33 PM	Bubbler valve closed
11/28/2011	7:05:33 PM	Main Vac valve opened
11/28/2011	7:05:33 PM	Helium MFC set to  0.000000
11/28/2011	7:05:33 PM	H2 MFC set to  0.000000
11/28/2011	7:05:33 PM	BCl3 MFC set to  0.000000
11/28/2011	7:05:33 PM	PHl3 MFC set to  0.000000
11/28/2011	7:05:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:05:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:05:33 PM	Tube furnace set to 150
11/28/2011	7:05:34 PM	Run finished at 7:05 PM
11/28/2011	7:07:33 PM	Recipe started at 7:07 PM
11/28/2011	7:07:33 PM	Helium valve closed
11/28/2011	7:07:33 PM	H2 valve closed
11/28/2011	7:07:33 PM	BCl3 valve closed
11/28/2011	7:07:33 PM	PH3 valve closed
11/28/2011	7:07:33 PM	SiCl4 pre valve closed
11/28/2011	7:07:33 PM	SiCl4 post valve closed
11/28/2011	7:07:33 PM	Bypass valve closed
11/28/2011	7:07:33 PM	Bubbler valve closed
11/28/2011	7:07:33 PM	Main Vac valve opened
11/28/2011	7:07:33 PM	Helium MFC set to  0.000000
11/28/2011	7:07:33 PM	H2 MFC set to  0.000000
11/28/2011	7:07:33 PM	BCl3 MFC set to  0.000000
11/28/2011	7:07:33 PM	PHl3 MFC set to  0.000000
11/28/2011	7:07:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:07:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:07:33 PM	Tube furnace set to 150
11/28/2011	7:08:03 PM	H2 valve closed
11/28/2011	7:08:03 PM	BCl3 valve closed
11/28/2011	7:08:03 PM	PH3 valve closed
11/28/2011	7:08:03 PM	SiCl4 pre valve closed
11/28/2011	7:08:03 PM	SiCl4 post valve closed
11/28/2011	7:08:03 PM	Bypass valve closed
11/28/2011	7:08:03 PM	Bubbler valve closed
11/28/2011	7:08:03 PM	Helium valve opened
11/28/2011	7:08:03 PM	Main Vac valve opened
11/28/2011	7:08:03 PM	Helium MFC set to  20.000000
11/28/2011	7:08:03 PM	H2 MFC set to  0.000000
11/28/2011	7:08:03 PM	BCl3 MFC set to  0.000000
11/28/2011	7:08:03 PM	PHl3 MFC set to  0.000000
11/28/2011	7:08:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:08:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:08:03 PM	Tube furnace set to 150
11/28/2011	7:08:33 PM	Helium valve closed
11/28/2011	7:08:33 PM	H2 valve closed
11/28/2011	7:08:33 PM	BCl3 valve closed
11/28/2011	7:08:33 PM	PH3 valve closed
11/28/2011	7:08:33 PM	SiCl4 pre valve closed
11/28/2011	7:08:33 PM	SiCl4 post valve closed
11/28/2011	7:08:33 PM	Bypass valve closed
11/28/2011	7:08:33 PM	Bubbler valve closed
11/28/2011	7:08:33 PM	Main Vac valve opened
11/28/2011	7:08:33 PM	Helium MFC set to  0.000000
11/28/2011	7:08:33 PM	H2 MFC set to  0.000000
11/28/2011	7:08:33 PM	BCl3 MFC set to  0.000000
11/28/2011	7:08:33 PM	PHl3 MFC set to  0.000000
11/28/2011	7:08:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:08:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:08:34 PM	Tube furnace set to 150
11/28/2011	7:09:04 PM	H2 valve closed
11/28/2011	7:09:04 PM	BCl3 valve closed
11/28/2011	7:09:04 PM	PH3 valve closed
11/28/2011	7:09:04 PM	SiCl4 pre valve closed
11/28/2011	7:09:04 PM	SiCl4 post valve closed
11/28/2011	7:09:04 PM	Bypass valve closed
11/28/2011	7:09:04 PM	Bubbler valve closed
11/28/2011	7:09:04 PM	Helium valve opened
11/28/2011	7:09:04 PM	Main Vac valve opened
11/28/2011	7:09:04 PM	Helium MFC set to  20.000000
11/28/2011	7:09:04 PM	H2 MFC set to  0.000000
11/28/2011	7:09:04 PM	BCl3 MFC set to  0.000000
11/28/2011	7:09:04 PM	PHl3 MFC set to  0.000000
11/28/2011	7:09:04 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:09:04 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:09:04 PM	Tube furnace set to 150
11/28/2011	7:09:34 PM	Helium valve closed
11/28/2011	7:09:34 PM	H2 valve closed
11/28/2011	7:09:34 PM	BCl3 valve closed
11/28/2011	7:09:34 PM	PH3 valve closed
11/28/2011	7:09:34 PM	SiCl4 pre valve closed
11/28/2011	7:09:34 PM	SiCl4 post valve closed
11/28/2011	7:09:34 PM	Bypass valve closed
11/28/2011	7:09:34 PM	Bubbler valve closed
11/28/2011	7:09:34 PM	Main Vac valve opened
11/28/2011	7:09:34 PM	Helium MFC set to  0.000000
11/28/2011	7:09:34 PM	H2 MFC set to  0.000000
11/28/2011	7:09:34 PM	BCl3 MFC set to  0.000000
11/28/2011	7:09:34 PM	PHl3 MFC set to  0.000000
11/28/2011	7:09:34 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:09:34 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:09:34 PM	Tube furnace set to 150
11/28/2011	7:10:04 PM	H2 valve closed
11/28/2011	7:10:04 PM	BCl3 valve closed
11/28/2011	7:10:04 PM	PH3 valve closed
11/28/2011	7:10:04 PM	SiCl4 pre valve closed
11/28/2011	7:10:04 PM	SiCl4 post valve closed
11/28/2011	7:10:04 PM	Bypass valve closed
11/28/2011	7:10:04 PM	Bubbler valve closed
11/28/2011	7:10:04 PM	Helium valve opened
11/28/2011	7:10:04 PM	Main Vac valve opened
11/28/2011	7:10:04 PM	Helium MFC set to  20.000000
11/28/2011	7:10:04 PM	H2 MFC set to  0.000000
11/28/2011	7:10:04 PM	BCl3 MFC set to  0.000000
11/28/2011	7:10:04 PM	PHl3 MFC set to  0.000000
11/28/2011	7:10:04 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:10:04 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:10:04 PM	Tube furnace set to 150
11/28/2011	7:10:34 PM	Helium valve closed
11/28/2011	7:10:34 PM	H2 valve closed
11/28/2011	7:10:34 PM	BCl3 valve closed
11/28/2011	7:10:34 PM	PH3 valve closed
11/28/2011	7:10:34 PM	SiCl4 pre valve closed
11/28/2011	7:10:34 PM	SiCl4 post valve closed
11/28/2011	7:10:34 PM	Bypass valve closed
11/28/2011	7:10:34 PM	Bubbler valve closed
11/28/2011	7:10:34 PM	Main Vac valve opened
11/28/2011	7:10:34 PM	Helium MFC set to  0.000000
11/28/2011	7:10:34 PM	H2 MFC set to  0.000000
11/28/2011	7:10:34 PM	BCl3 MFC set to  0.000000
11/28/2011	7:10:34 PM	PHl3 MFC set to  0.000000
11/28/2011	7:10:34 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:10:34 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:10:34 PM	Tube furnace set to 150
11/28/2011	7:11:04 PM	H2 valve closed
11/28/2011	7:11:04 PM	BCl3 valve closed
11/28/2011	7:11:04 PM	PH3 valve closed
11/28/2011	7:11:04 PM	SiCl4 pre valve closed
11/28/2011	7:11:04 PM	SiCl4 post valve closed
11/28/2011	7:11:04 PM	Bypass valve closed
11/28/2011	7:11:04 PM	Bubbler valve closed
11/28/2011	7:11:04 PM	Helium valve opened
11/28/2011	7:11:04 PM	Main Vac valve opened
11/28/2011	7:11:04 PM	Helium MFC set to  20.000000
11/28/2011	7:11:04 PM	H2 MFC set to  0.000000
11/28/2011	7:11:04 PM	BCl3 MFC set to  0.000000
11/28/2011	7:11:04 PM	PHl3 MFC set to  0.000000
11/28/2011	7:11:04 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:11:04 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:11:05 PM	Tube furnace set to 150
11/28/2011	7:11:35 PM	Helium valve closed
11/28/2011	7:11:35 PM	H2 valve closed
11/28/2011	7:11:35 PM	BCl3 valve closed
11/28/2011	7:11:35 PM	PH3 valve closed
11/28/2011	7:11:35 PM	SiCl4 pre valve closed
11/28/2011	7:11:35 PM	SiCl4 post valve closed
11/28/2011	7:11:35 PM	Bypass valve closed
11/28/2011	7:11:35 PM	Bubbler valve closed
11/28/2011	7:11:35 PM	Main Vac valve opened
11/28/2011	7:11:35 PM	Helium MFC set to  0.000000
11/28/2011	7:11:35 PM	H2 MFC set to  0.000000
11/28/2011	7:11:35 PM	BCl3 MFC set to  0.000000
11/28/2011	7:11:35 PM	PHl3 MFC set to  0.000000
11/28/2011	7:11:35 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:11:35 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:11:35 PM	Tube furnace set to 150
11/28/2011	7:12:05 PM	H2 valve closed
11/28/2011	7:12:05 PM	BCl3 valve closed
11/28/2011	7:12:05 PM	PH3 valve closed
11/28/2011	7:12:05 PM	SiCl4 pre valve closed
11/28/2011	7:12:05 PM	SiCl4 post valve closed
11/28/2011	7:12:05 PM	Bypass valve closed
11/28/2011	7:12:05 PM	Bubbler valve closed
11/28/2011	7:12:05 PM	Helium valve opened
11/28/2011	7:12:05 PM	Main Vac valve opened
11/28/2011	7:12:05 PM	Helium MFC set to  20.000000
11/28/2011	7:12:05 PM	H2 MFC set to  0.000000
11/28/2011	7:12:05 PM	BCl3 MFC set to  0.000000
11/28/2011	7:12:05 PM	PHl3 MFC set to  0.000000
11/28/2011	7:12:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:12:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:12:05 PM	Tube furnace set to 150
11/28/2011	7:12:35 PM	Helium valve closed
11/28/2011	7:12:35 PM	H2 valve closed
11/28/2011	7:12:35 PM	BCl3 valve closed
11/28/2011	7:12:35 PM	PH3 valve closed
11/28/2011	7:12:35 PM	SiCl4 pre valve closed
11/28/2011	7:12:35 PM	SiCl4 post valve closed
11/28/2011	7:12:35 PM	Bypass valve closed
11/28/2011	7:12:35 PM	Bubbler valve closed
11/28/2011	7:12:35 PM	Main Vac valve opened
11/28/2011	7:12:35 PM	Helium MFC set to  0.000000
11/28/2011	7:12:35 PM	H2 MFC set to  0.000000
11/28/2011	7:12:35 PM	BCl3 MFC set to  0.000000
11/28/2011	7:12:35 PM	PHl3 MFC set to  0.000000
11/28/2011	7:12:35 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:12:35 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:12:35 PM	Tube furnace set to 150
11/28/2011	7:13:05 PM	H2 valve closed
11/28/2011	7:13:05 PM	BCl3 valve closed
11/28/2011	7:13:05 PM	PH3 valve closed
11/28/2011	7:13:05 PM	SiCl4 pre valve closed
11/28/2011	7:13:05 PM	SiCl4 post valve closed
11/28/2011	7:13:05 PM	Bypass valve closed
11/28/2011	7:13:05 PM	Bubbler valve closed
11/28/2011	7:13:05 PM	Helium valve opened
11/28/2011	7:13:05 PM	Main Vac valve opened
11/28/2011	7:13:05 PM	Helium MFC set to  20.000000
11/28/2011	7:13:05 PM	H2 MFC set to  0.000000
11/28/2011	7:13:05 PM	BCl3 MFC set to  0.000000
11/28/2011	7:13:05 PM	PHl3 MFC set to  0.000000
11/28/2011	7:13:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:13:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:13:05 PM	Tube furnace set to 150
11/28/2011	7:13:35 PM	Helium valve closed
11/28/2011	7:13:35 PM	H2 valve closed
11/28/2011	7:13:35 PM	BCl3 valve closed
11/28/2011	7:13:35 PM	PH3 valve closed
11/28/2011	7:13:35 PM	SiCl4 pre valve closed
11/28/2011	7:13:36 PM	SiCl4 post valve closed
11/28/2011	7:13:36 PM	Bypass valve closed
11/28/2011	7:13:36 PM	Bubbler valve closed
11/28/2011	7:13:36 PM	Main Vac valve opened
11/28/2011	7:13:36 PM	Helium MFC set to  0.000000
11/28/2011	7:13:36 PM	H2 MFC set to  0.000000
11/28/2011	7:13:36 PM	BCl3 MFC set to  0.000000
11/28/2011	7:13:36 PM	PHl3 MFC set to  0.000000
11/28/2011	7:13:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:13:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:13:36 PM	Tube furnace set to 150
11/28/2011	7:14:06 PM	H2 valve closed
11/28/2011	7:14:06 PM	BCl3 valve closed
11/28/2011	7:14:06 PM	PH3 valve closed
11/28/2011	7:14:06 PM	SiCl4 pre valve closed
11/28/2011	7:14:06 PM	SiCl4 post valve closed
11/28/2011	7:14:06 PM	Bypass valve closed
11/28/2011	7:14:06 PM	Bubbler valve closed
11/28/2011	7:14:06 PM	Helium valve opened
11/28/2011	7:14:06 PM	Main Vac valve opened
11/28/2011	7:14:06 PM	Helium MFC set to  20.000000
11/28/2011	7:14:06 PM	H2 MFC set to  0.000000
11/28/2011	7:14:06 PM	BCl3 MFC set to  0.000000
11/28/2011	7:14:06 PM	PHl3 MFC set to  0.000000
11/28/2011	7:14:06 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:14:06 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:14:06 PM	Tube furnace set to 150
11/28/2011	7:14:36 PM	Helium valve closed
11/28/2011	7:14:36 PM	H2 valve closed
11/28/2011	7:14:36 PM	BCl3 valve closed
11/28/2011	7:14:36 PM	PH3 valve closed
11/28/2011	7:14:36 PM	SiCl4 pre valve closed
11/28/2011	7:14:36 PM	SiCl4 post valve closed
11/28/2011	7:14:36 PM	Bypass valve closed
11/28/2011	7:14:36 PM	Bubbler valve closed
11/28/2011	7:14:36 PM	Main Vac valve opened
11/28/2011	7:14:36 PM	Helium MFC set to  0.000000
11/28/2011	7:14:36 PM	H2 MFC set to  0.000000
11/28/2011	7:14:36 PM	BCl3 MFC set to  0.000000
11/28/2011	7:14:36 PM	PHl3 MFC set to  0.000000
11/28/2011	7:14:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:14:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:14:36 PM	Tube furnace set to 150
11/28/2011	7:15:06 PM	H2 valve closed
11/28/2011	7:15:06 PM	BCl3 valve closed
11/28/2011	7:15:06 PM	PH3 valve closed
11/28/2011	7:15:06 PM	SiCl4 pre valve closed
11/28/2011	7:15:06 PM	SiCl4 post valve closed
11/28/2011	7:15:06 PM	Bypass valve closed
11/28/2011	7:15:06 PM	Bubbler valve closed
11/28/2011	7:15:06 PM	Helium valve opened
11/28/2011	7:15:06 PM	Main Vac valve opened
11/28/2011	7:15:06 PM	Helium MFC set to  20.000000
11/28/2011	7:15:06 PM	H2 MFC set to  0.000000
11/28/2011	7:15:06 PM	BCl3 MFC set to  0.000000
11/28/2011	7:15:06 PM	PHl3 MFC set to  0.000000
11/28/2011	7:15:06 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:15:06 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:15:06 PM	Tube furnace set to 150
11/28/2011	7:15:36 PM	Helium valve closed
11/28/2011	7:15:36 PM	H2 valve closed
11/28/2011	7:15:36 PM	BCl3 valve closed
11/28/2011	7:15:36 PM	PH3 valve closed
11/28/2011	7:15:36 PM	SiCl4 pre valve closed
11/28/2011	7:15:36 PM	SiCl4 post valve closed
11/28/2011	7:15:36 PM	Bypass valve closed
11/28/2011	7:15:36 PM	Bubbler valve closed
11/28/2011	7:15:36 PM	Main Vac valve opened
11/28/2011	7:15:36 PM	Helium MFC set to  0.000000
11/28/2011	7:15:36 PM	H2 MFC set to  0.000000
11/28/2011	7:15:36 PM	BCl3 MFC set to  0.000000
11/28/2011	7:15:36 PM	PHl3 MFC set to  0.000000
11/28/2011	7:15:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:15:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:15:36 PM	Tube furnace set to 150
11/28/2011	7:16:07 PM	H2 valve closed
11/28/2011	7:16:07 PM	BCl3 valve closed
11/28/2011	7:16:07 PM	PH3 valve closed
11/28/2011	7:16:07 PM	SiCl4 pre valve closed
11/28/2011	7:16:07 PM	SiCl4 post valve closed
11/28/2011	7:16:07 PM	Bypass valve closed
11/28/2011	7:16:07 PM	Bubbler valve closed
11/28/2011	7:16:07 PM	Helium valve opened
11/28/2011	7:16:07 PM	Main Vac valve opened
11/28/2011	7:16:07 PM	Helium MFC set to  20.000000
11/28/2011	7:16:07 PM	H2 MFC set to  0.000000
11/28/2011	7:16:07 PM	BCl3 MFC set to  0.000000
11/28/2011	7:16:07 PM	PHl3 MFC set to  0.000000
11/28/2011	7:16:07 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:16:07 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:16:07 PM	Tube furnace set to 150
11/28/2011	7:16:37 PM	Helium valve closed
11/28/2011	7:16:37 PM	H2 valve closed
11/28/2011	7:16:37 PM	BCl3 valve closed
11/28/2011	7:16:37 PM	PH3 valve closed
11/28/2011	7:16:37 PM	SiCl4 pre valve closed
11/28/2011	7:16:37 PM	SiCl4 post valve closed
11/28/2011	7:16:37 PM	Bypass valve closed
11/28/2011	7:16:37 PM	Bubbler valve closed
11/28/2011	7:16:37 PM	Main Vac valve opened
11/28/2011	7:16:37 PM	Helium MFC set to  0.000000
11/28/2011	7:16:37 PM	H2 MFC set to  0.000000
11/28/2011	7:16:37 PM	BCl3 MFC set to  0.000000
11/28/2011	7:16:37 PM	PHl3 MFC set to  0.000000
11/28/2011	7:16:37 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:16:37 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:16:37 PM	Tube furnace set to 150
11/28/2011	7:17:07 PM	H2 valve closed
11/28/2011	7:17:07 PM	BCl3 valve closed
11/28/2011	7:17:07 PM	PH3 valve closed
11/28/2011	7:17:07 PM	SiCl4 pre valve closed
11/28/2011	7:17:07 PM	SiCl4 post valve closed
11/28/2011	7:17:07 PM	Bypass valve closed
11/28/2011	7:17:07 PM	Bubbler valve closed
11/28/2011	7:17:07 PM	Helium valve opened
11/28/2011	7:17:07 PM	Main Vac valve opened
11/28/2011	7:17:07 PM	Helium MFC set to  20.000000
11/28/2011	7:17:07 PM	H2 MFC set to  0.000000
11/28/2011	7:17:07 PM	BCl3 MFC set to  0.000000
11/28/2011	7:17:07 PM	PHl3 MFC set to  0.000000
11/28/2011	7:17:07 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:17:07 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:17:07 PM	Tube furnace set to 150
11/28/2011	7:17:37 PM	Helium valve closed
11/28/2011	7:17:37 PM	H2 valve closed
11/28/2011	7:17:37 PM	BCl3 valve closed
11/28/2011	7:17:37 PM	PH3 valve closed
11/28/2011	7:17:37 PM	SiCl4 pre valve closed
11/28/2011	7:17:37 PM	SiCl4 post valve closed
11/28/2011	7:17:37 PM	Bypass valve closed
11/28/2011	7:17:37 PM	Bubbler valve closed
11/28/2011	7:17:37 PM	Main Vac valve opened
11/28/2011	7:17:37 PM	Helium MFC set to  0.000000
11/28/2011	7:17:37 PM	H2 MFC set to  0.000000
11/28/2011	7:17:37 PM	BCl3 MFC set to  0.000000
11/28/2011	7:17:37 PM	PHl3 MFC set to  0.000000
11/28/2011	7:17:37 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:17:37 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:17:37 PM	Tube furnace set to 150
11/28/2011	7:17:38 PM	Run finished at 7:17 PM
11/28/2011	7:19:59 PM	Recipe started at 7:19 PM
11/28/2011	7:19:59 PM	Helium valve closed
11/28/2011	7:19:59 PM	H2 valve closed
11/28/2011	7:19:59 PM	BCl3 valve closed
11/28/2011	7:19:59 PM	PH3 valve closed
11/28/2011	7:19:59 PM	SiCl4 pre valve closed
11/28/2011	7:19:59 PM	SiCl4 post valve closed
11/28/2011	7:19:59 PM	Bypass valve closed
11/28/2011	7:19:59 PM	Bubbler valve closed
11/28/2011	7:19:59 PM	Main Vac valve opened
11/28/2011	7:19:59 PM	Helium MFC set to  0.000000
11/28/2011	7:19:59 PM	H2 MFC set to  0.000000
11/28/2011	7:19:59 PM	BCl3 MFC set to  0.000000
11/28/2011	7:19:59 PM	PHl3 MFC set to  0.000000
11/28/2011	7:19:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:19:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:19:59 PM	Tube furnace set to 150
11/28/2011	7:20:29 PM	H2 valve closed
11/28/2011	7:20:29 PM	BCl3 valve closed
11/28/2011	7:20:29 PM	PH3 valve closed
11/28/2011	7:20:29 PM	SiCl4 pre valve closed
11/28/2011	7:20:29 PM	SiCl4 post valve closed
11/28/2011	7:20:29 PM	Bypass valve closed
11/28/2011	7:20:29 PM	Bubbler valve closed
11/28/2011	7:20:29 PM	Helium valve opened
11/28/2011	7:20:29 PM	Main Vac valve opened
11/28/2011	7:20:29 PM	Helium MFC set to  20.000000
11/28/2011	7:20:29 PM	H2 MFC set to  0.000000
11/28/2011	7:20:29 PM	BCl3 MFC set to  0.000000
11/28/2011	7:20:29 PM	PHl3 MFC set to  0.000000
11/28/2011	7:20:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:20:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:20:29 PM	Tube furnace set to 150
11/28/2011	7:20:59 PM	Helium valve closed
11/28/2011	7:20:59 PM	H2 valve closed
11/28/2011	7:20:59 PM	BCl3 valve closed
11/28/2011	7:20:59 PM	PH3 valve closed
11/28/2011	7:20:59 PM	SiCl4 pre valve closed
11/28/2011	7:20:59 PM	SiCl4 post valve closed
11/28/2011	7:20:59 PM	Bypass valve closed
11/28/2011	7:20:59 PM	Bubbler valve closed
11/28/2011	7:20:59 PM	Main Vac valve opened
11/28/2011	7:20:59 PM	Helium MFC set to  0.000000
11/28/2011	7:20:59 PM	H2 MFC set to  0.000000
11/28/2011	7:20:59 PM	BCl3 MFC set to  0.000000
11/28/2011	7:20:59 PM	PHl3 MFC set to  0.000000
11/28/2011	7:20:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:20:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:20:59 PM	Tube furnace set to 150
11/28/2011	7:21:29 PM	H2 valve closed
11/28/2011	7:21:29 PM	BCl3 valve closed
11/28/2011	7:21:29 PM	PH3 valve closed
11/28/2011	7:21:29 PM	SiCl4 pre valve closed
11/28/2011	7:21:29 PM	SiCl4 post valve closed
11/28/2011	7:21:29 PM	Bypass valve closed
11/28/2011	7:21:29 PM	Bubbler valve closed
11/28/2011	7:21:29 PM	Helium valve opened
11/28/2011	7:21:29 PM	Main Vac valve opened
11/28/2011	7:21:29 PM	Helium MFC set to  20.000000
11/28/2011	7:21:29 PM	H2 MFC set to  0.000000
11/28/2011	7:21:29 PM	BCl3 MFC set to  0.000000
11/28/2011	7:21:29 PM	PHl3 MFC set to  0.000000
11/28/2011	7:21:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:21:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:21:30 PM	Tube furnace set to 150
11/28/2011	7:22:00 PM	Helium valve closed
11/28/2011	7:22:00 PM	H2 valve closed
11/28/2011	7:22:00 PM	BCl3 valve closed
11/28/2011	7:22:00 PM	PH3 valve closed
11/28/2011	7:22:00 PM	SiCl4 pre valve closed
11/28/2011	7:22:00 PM	SiCl4 post valve closed
11/28/2011	7:22:00 PM	Bypass valve closed
11/28/2011	7:22:00 PM	Bubbler valve closed
11/28/2011	7:22:00 PM	Main Vac valve opened
11/28/2011	7:22:00 PM	Helium MFC set to  0.000000
11/28/2011	7:22:00 PM	H2 MFC set to  0.000000
11/28/2011	7:22:00 PM	BCl3 MFC set to  0.000000
11/28/2011	7:22:00 PM	PHl3 MFC set to  0.000000
11/28/2011	7:22:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:22:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:22:00 PM	Tube furnace set to 150
11/28/2011	7:22:30 PM	H2 valve closed
11/28/2011	7:22:30 PM	BCl3 valve closed
11/28/2011	7:22:30 PM	PH3 valve closed
11/28/2011	7:22:30 PM	SiCl4 pre valve closed
11/28/2011	7:22:30 PM	SiCl4 post valve closed
11/28/2011	7:22:30 PM	Bypass valve closed
11/28/2011	7:22:30 PM	Bubbler valve closed
11/28/2011	7:22:30 PM	Helium valve opened
11/28/2011	7:22:30 PM	Main Vac valve opened
11/28/2011	7:22:30 PM	Helium MFC set to  20.000000
11/28/2011	7:22:30 PM	H2 MFC set to  0.000000
11/28/2011	7:22:30 PM	BCl3 MFC set to  0.000000
11/28/2011	7:22:30 PM	PHl3 MFC set to  0.000000
11/28/2011	7:22:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:22:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:22:30 PM	Tube furnace set to 150
11/28/2011	7:23:00 PM	Helium valve closed
11/28/2011	7:23:00 PM	H2 valve closed
11/28/2011	7:23:00 PM	BCl3 valve closed
11/28/2011	7:23:00 PM	PH3 valve closed
11/28/2011	7:23:00 PM	SiCl4 pre valve closed
11/28/2011	7:23:00 PM	SiCl4 post valve closed
11/28/2011	7:23:00 PM	Bypass valve closed
11/28/2011	7:23:00 PM	Bubbler valve closed
11/28/2011	7:23:00 PM	Main Vac valve opened
11/28/2011	7:23:00 PM	Helium MFC set to  0.000000
11/28/2011	7:23:00 PM	H2 MFC set to  0.000000
11/28/2011	7:23:00 PM	BCl3 MFC set to  0.000000
11/28/2011	7:23:00 PM	PHl3 MFC set to  0.000000
11/28/2011	7:23:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:23:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:23:00 PM	Tube furnace set to 150
11/28/2011	7:23:30 PM	H2 valve closed
11/28/2011	7:23:30 PM	BCl3 valve closed
11/28/2011	7:23:30 PM	PH3 valve closed
11/28/2011	7:23:30 PM	SiCl4 pre valve closed
11/28/2011	7:23:30 PM	SiCl4 post valve closed
11/28/2011	7:23:30 PM	Bypass valve closed
11/28/2011	7:23:30 PM	Bubbler valve closed
11/28/2011	7:23:30 PM	Helium valve opened
11/28/2011	7:23:30 PM	Main Vac valve opened
11/28/2011	7:23:30 PM	Helium MFC set to  20.000000
11/28/2011	7:23:30 PM	H2 MFC set to  0.000000
11/28/2011	7:23:30 PM	BCl3 MFC set to  0.000000
11/28/2011	7:23:30 PM	PHl3 MFC set to  0.000000
11/28/2011	7:23:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:23:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:23:30 PM	Tube furnace set to 150
11/28/2011	7:24:00 PM	Helium valve closed
11/28/2011	7:24:00 PM	H2 valve closed
11/28/2011	7:24:00 PM	BCl3 valve closed
11/28/2011	7:24:00 PM	PH3 valve closed
11/28/2011	7:24:00 PM	SiCl4 pre valve closed
11/28/2011	7:24:00 PM	SiCl4 post valve closed
11/28/2011	7:24:00 PM	Bypass valve closed
11/28/2011	7:24:00 PM	Bubbler valve closed
11/28/2011	7:24:00 PM	Main Vac valve opened
11/28/2011	7:24:00 PM	Helium MFC set to  0.000000
11/28/2011	7:24:00 PM	H2 MFC set to  0.000000
11/28/2011	7:24:00 PM	BCl3 MFC set to  0.000000
11/28/2011	7:24:01 PM	PHl3 MFC set to  0.000000
11/28/2011	7:24:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:24:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:24:01 PM	Tube furnace set to 150
11/28/2011	7:24:31 PM	H2 valve closed
11/28/2011	7:24:31 PM	BCl3 valve closed
11/28/2011	7:24:31 PM	PH3 valve closed
11/28/2011	7:24:31 PM	SiCl4 pre valve closed
11/28/2011	7:24:31 PM	SiCl4 post valve closed
11/28/2011	7:24:31 PM	Bypass valve closed
11/28/2011	7:24:31 PM	Bubbler valve closed
11/28/2011	7:24:31 PM	Helium valve opened
11/28/2011	7:24:31 PM	Main Vac valve opened
11/28/2011	7:24:31 PM	Helium MFC set to  20.000000
11/28/2011	7:24:31 PM	H2 MFC set to  0.000000
11/28/2011	7:24:31 PM	BCl3 MFC set to  0.000000
11/28/2011	7:24:31 PM	PHl3 MFC set to  0.000000
11/28/2011	7:24:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:24:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:24:31 PM	Tube furnace set to 150
11/28/2011	7:25:01 PM	Helium valve closed
11/28/2011	7:25:01 PM	H2 valve closed
11/28/2011	7:25:01 PM	BCl3 valve closed
11/28/2011	7:25:01 PM	PH3 valve closed
11/28/2011	7:25:01 PM	SiCl4 pre valve closed
11/28/2011	7:25:01 PM	SiCl4 post valve closed
11/28/2011	7:25:01 PM	Bypass valve closed
11/28/2011	7:25:01 PM	Bubbler valve closed
11/28/2011	7:25:01 PM	Main Vac valve opened
11/28/2011	7:25:01 PM	Helium MFC set to  0.000000
11/28/2011	7:25:01 PM	H2 MFC set to  0.000000
11/28/2011	7:25:01 PM	BCl3 MFC set to  0.000000
11/28/2011	7:25:01 PM	PHl3 MFC set to  0.000000
11/28/2011	7:25:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:25:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:25:01 PM	Tube furnace set to 150
11/28/2011	7:25:31 PM	H2 valve closed
11/28/2011	7:25:31 PM	BCl3 valve closed
11/28/2011	7:25:31 PM	PH3 valve closed
11/28/2011	7:25:31 PM	SiCl4 pre valve closed
11/28/2011	7:25:31 PM	SiCl4 post valve closed
11/28/2011	7:25:31 PM	Bypass valve closed
11/28/2011	7:25:31 PM	Bubbler valve closed
11/28/2011	7:25:31 PM	Helium valve opened
11/28/2011	7:25:31 PM	Main Vac valve opened
11/28/2011	7:25:31 PM	Helium MFC set to  20.000000
11/28/2011	7:25:31 PM	H2 MFC set to  0.000000
11/28/2011	7:25:31 PM	BCl3 MFC set to  0.000000
11/28/2011	7:25:31 PM	PHl3 MFC set to  0.000000
11/28/2011	7:25:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:25:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:25:31 PM	Tube furnace set to 150
11/28/2011	7:26:01 PM	Helium valve closed
11/28/2011	7:26:01 PM	H2 valve closed
11/28/2011	7:26:01 PM	BCl3 valve closed
11/28/2011	7:26:01 PM	PH3 valve closed
11/28/2011	7:26:01 PM	SiCl4 pre valve closed
11/28/2011	7:26:01 PM	SiCl4 post valve closed
11/28/2011	7:26:01 PM	Bypass valve closed
11/28/2011	7:26:01 PM	Bubbler valve closed
11/28/2011	7:26:01 PM	Main Vac valve opened
11/28/2011	7:26:01 PM	Helium MFC set to  0.000000
11/28/2011	7:26:01 PM	H2 MFC set to  0.000000
11/28/2011	7:26:01 PM	BCl3 MFC set to  0.000000
11/28/2011	7:26:01 PM	PHl3 MFC set to  0.000000
11/28/2011	7:26:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:26:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:26:01 PM	Tube furnace set to 150
11/28/2011	7:26:31 PM	H2 valve closed
11/28/2011	7:26:31 PM	BCl3 valve closed
11/28/2011	7:26:31 PM	PH3 valve closed
11/28/2011	7:26:31 PM	SiCl4 pre valve closed
11/28/2011	7:26:31 PM	SiCl4 post valve closed
11/28/2011	7:26:31 PM	Bypass valve closed
11/28/2011	7:26:32 PM	Bubbler valve closed
11/28/2011	7:26:32 PM	Helium valve opened
11/28/2011	7:26:32 PM	Main Vac valve opened
11/28/2011	7:26:32 PM	Helium MFC set to  20.000000
11/28/2011	7:26:32 PM	H2 MFC set to  0.000000
11/28/2011	7:26:32 PM	BCl3 MFC set to  0.000000
11/28/2011	7:26:32 PM	PHl3 MFC set to  0.000000
11/28/2011	7:26:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:26:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:26:32 PM	Tube furnace set to 150
11/28/2011	7:27:02 PM	Helium valve closed
11/28/2011	7:27:02 PM	H2 valve closed
11/28/2011	7:27:02 PM	BCl3 valve closed
11/28/2011	7:27:02 PM	PH3 valve closed
11/28/2011	7:27:02 PM	SiCl4 pre valve closed
11/28/2011	7:27:02 PM	SiCl4 post valve closed
11/28/2011	7:27:02 PM	Bypass valve closed
11/28/2011	7:27:02 PM	Bubbler valve closed
11/28/2011	7:27:02 PM	Main Vac valve opened
11/28/2011	7:27:02 PM	Helium MFC set to  0.000000
11/28/2011	7:27:02 PM	H2 MFC set to  0.000000
11/28/2011	7:27:02 PM	BCl3 MFC set to  0.000000
11/28/2011	7:27:02 PM	PHl3 MFC set to  0.000000
11/28/2011	7:27:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:27:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:27:02 PM	Tube furnace set to 150
11/28/2011	7:27:32 PM	H2 valve closed
11/28/2011	7:27:32 PM	BCl3 valve closed
11/28/2011	7:27:32 PM	PH3 valve closed
11/28/2011	7:27:32 PM	SiCl4 pre valve closed
11/28/2011	7:27:32 PM	SiCl4 post valve closed
11/28/2011	7:27:32 PM	Bypass valve closed
11/28/2011	7:27:32 PM	Bubbler valve closed
11/28/2011	7:27:32 PM	Helium valve opened
11/28/2011	7:27:32 PM	Main Vac valve opened
11/28/2011	7:27:32 PM	Helium MFC set to  20.000000
11/28/2011	7:27:32 PM	H2 MFC set to  0.000000
11/28/2011	7:27:32 PM	BCl3 MFC set to  0.000000
11/28/2011	7:27:32 PM	PHl3 MFC set to  0.000000
11/28/2011	7:27:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:27:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:27:32 PM	Tube furnace set to 150
11/28/2011	7:28:02 PM	Helium valve closed
11/28/2011	7:28:02 PM	H2 valve closed
11/28/2011	7:28:02 PM	BCl3 valve closed
11/28/2011	7:28:02 PM	PH3 valve closed
11/28/2011	7:28:02 PM	SiCl4 pre valve closed
11/28/2011	7:28:02 PM	SiCl4 post valve closed
11/28/2011	7:28:02 PM	Bypass valve closed
11/28/2011	7:28:02 PM	Bubbler valve closed
11/28/2011	7:28:02 PM	Main Vac valve opened
11/28/2011	7:28:02 PM	Helium MFC set to  0.000000
11/28/2011	7:28:02 PM	H2 MFC set to  0.000000
11/28/2011	7:28:02 PM	BCl3 MFC set to  0.000000
11/28/2011	7:28:02 PM	PHl3 MFC set to  0.000000
11/28/2011	7:28:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:28:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:28:02 PM	Tube furnace set to 150
11/28/2011	7:28:32 PM	H2 valve closed
11/28/2011	7:28:32 PM	BCl3 valve closed
11/28/2011	7:28:32 PM	PH3 valve closed
11/28/2011	7:28:32 PM	SiCl4 pre valve closed
11/28/2011	7:28:32 PM	SiCl4 post valve closed
11/28/2011	7:28:32 PM	Bypass valve closed
11/28/2011	7:28:32 PM	Bubbler valve closed
11/28/2011	7:28:32 PM	Helium valve opened
11/28/2011	7:28:32 PM	Main Vac valve opened
11/28/2011	7:28:32 PM	Helium MFC set to  20.000000
11/28/2011	7:28:32 PM	H2 MFC set to  0.000000
11/28/2011	7:28:32 PM	BCl3 MFC set to  0.000000
11/28/2011	7:28:32 PM	PHl3 MFC set to  0.000000
11/28/2011	7:28:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:28:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:28:32 PM	Tube furnace set to 150
11/28/2011	7:29:03 PM	Helium valve closed
11/28/2011	7:29:03 PM	H2 valve closed
11/28/2011	7:29:03 PM	BCl3 valve closed
11/28/2011	7:29:03 PM	PH3 valve closed
11/28/2011	7:29:03 PM	SiCl4 pre valve closed
11/28/2011	7:29:03 PM	SiCl4 post valve closed
11/28/2011	7:29:03 PM	Bypass valve closed
11/28/2011	7:29:03 PM	Bubbler valve closed
11/28/2011	7:29:03 PM	Main Vac valve opened
11/28/2011	7:29:03 PM	Helium MFC set to  0.000000
11/28/2011	7:29:03 PM	H2 MFC set to  0.000000
11/28/2011	7:29:03 PM	BCl3 MFC set to  0.000000
11/28/2011	7:29:03 PM	PHl3 MFC set to  0.000000
11/28/2011	7:29:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:29:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:29:03 PM	Tube furnace set to 150
11/28/2011	7:29:33 PM	H2 valve closed
11/28/2011	7:29:33 PM	BCl3 valve closed
11/28/2011	7:29:33 PM	PH3 valve closed
11/28/2011	7:29:33 PM	SiCl4 pre valve closed
11/28/2011	7:29:33 PM	SiCl4 post valve closed
11/28/2011	7:29:33 PM	Bypass valve closed
11/28/2011	7:29:33 PM	Bubbler valve closed
11/28/2011	7:29:33 PM	Helium valve opened
11/28/2011	7:29:33 PM	Main Vac valve opened
11/28/2011	7:29:33 PM	Helium MFC set to  20.000000
11/28/2011	7:29:33 PM	H2 MFC set to  0.000000
11/28/2011	7:29:33 PM	BCl3 MFC set to  0.000000
11/28/2011	7:29:33 PM	PHl3 MFC set to  0.000000
11/28/2011	7:29:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:29:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:29:33 PM	Tube furnace set to 150
11/28/2011	7:30:03 PM	Helium valve closed
11/28/2011	7:30:03 PM	H2 valve closed
11/28/2011	7:30:03 PM	BCl3 valve closed
11/28/2011	7:30:03 PM	PH3 valve closed
11/28/2011	7:30:03 PM	SiCl4 pre valve closed
11/28/2011	7:30:03 PM	SiCl4 post valve closed
11/28/2011	7:30:03 PM	Bypass valve closed
11/28/2011	7:30:03 PM	Bubbler valve closed
11/28/2011	7:30:03 PM	Main Vac valve opened
11/28/2011	7:30:03 PM	Helium MFC set to  0.000000
11/28/2011	7:30:03 PM	H2 MFC set to  0.000000
11/28/2011	7:30:03 PM	BCl3 MFC set to  0.000000
11/28/2011	7:30:03 PM	PHl3 MFC set to  0.000000
11/28/2011	7:30:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:30:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:30:03 PM	Tube furnace set to 150
11/28/2011	7:30:04 PM	Run finished at 7:30 PM
11/28/2011	7:30:59 PM	Main Vac valve closed
11/28/2011	7:31:19 PM	Main Vac valve opened
11/28/2011	7:32:27 PM	Recipe started at 7:32 PM
11/28/2011	7:32:27 PM	Helium valve closed
11/28/2011	7:32:27 PM	H2 valve closed
11/28/2011	7:32:27 PM	BCl3 valve closed
11/28/2011	7:32:27 PM	PH3 valve closed
11/28/2011	7:32:27 PM	SiCl4 pre valve closed
11/28/2011	7:32:27 PM	SiCl4 post valve closed
11/28/2011	7:32:27 PM	Main Vac valve closed
11/28/2011	7:32:27 PM	Bypass valve closed
11/28/2011	7:32:27 PM	Bubbler valve closed
11/28/2011	7:32:27 PM	Helium MFC set to  0.000000
11/28/2011	7:32:27 PM	H2 MFC set to  0.000000
11/28/2011	7:32:27 PM	BCl3 MFC set to  0.000000
11/28/2011	7:32:27 PM	PHl3 MFC set to  0.000000
11/28/2011	7:32:27 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:32:27 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:32:27 PM	Tube furnace set to 0
11/28/2011	7:32:30 PM	Helium valve closed
11/28/2011	7:32:30 PM	BCl3 valve closed
11/28/2011	7:32:30 PM	PH3 valve closed
11/28/2011	7:32:30 PM	SiCl4 pre valve closed
11/28/2011	7:32:30 PM	SiCl4 post valve closed
11/28/2011	7:32:30 PM	Main Vac valve closed
11/28/2011	7:32:30 PM	Bypass valve closed
11/28/2011	7:32:30 PM	Bubbler valve closed
11/28/2011	7:32:30 PM	H2 valve opened
11/28/2011	7:32:30 PM	Helium MFC set to  0.000000
11/28/2011	7:32:30 PM	H2 MFC set to  500.000000
11/28/2011	7:32:30 PM	BCl3 MFC set to  0.000000
11/28/2011	7:32:30 PM	PHl3 MFC set to  0.000000
11/28/2011	7:32:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:32:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:32:30 PM	Tube furnace set to 0
11/28/2011	7:33:34 PM	Helium valve closed
11/28/2011	7:33:34 PM	BCl3 valve closed
11/28/2011	7:33:34 PM	PH3 valve closed
11/28/2011	7:33:34 PM	SiCl4 pre valve closed
11/28/2011	7:33:34 PM	SiCl4 post valve closed
11/28/2011	7:33:34 PM	Main Vac valve closed
11/28/2011	7:33:34 PM	Bypass valve closed
11/28/2011	7:33:34 PM	H2 valve opened
11/28/2011	7:33:34 PM	Bubbler valve opened
11/28/2011	7:33:34 PM	Helium MFC set to  0.000000
11/28/2011	7:33:34 PM	H2 MFC set to  500.000000
11/28/2011	7:33:34 PM	BCl3 MFC set to  0.000000
11/28/2011	7:33:34 PM	PHl3 MFC set to  0.000000
11/28/2011	7:33:34 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:33:34 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:33:34 PM	Tube furnace set to 0
11/28/2011	7:33:35 PM	Helium valve closed
11/28/2011	7:33:35 PM	BCl3 valve closed
11/28/2011	7:33:35 PM	PH3 valve closed
11/28/2011	7:33:35 PM	SiCl4 pre valve closed
11/28/2011	7:33:35 PM	SiCl4 post valve closed
11/28/2011	7:33:35 PM	Main Vac valve closed
11/28/2011	7:33:35 PM	Bypass valve closed
11/28/2011	7:33:36 PM	H2 valve opened
11/28/2011	7:33:36 PM	Bubbler valve opened
11/28/2011	7:33:36 PM	Helium MFC set to  0.000000
11/28/2011	7:33:36 PM	H2 MFC set to  500.000000
11/28/2011	7:33:36 PM	BCl3 MFC set to  0.000000
11/28/2011	7:33:36 PM	PHl3 MFC set to  0.000000
11/28/2011	7:33:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	7:33:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:33:36 PM	Tube furnace set to 1000
11/28/2011	7:58:36 PM	Helium valve closed
11/28/2011	7:58:36 PM	PH3 valve closed
11/28/2011	7:58:36 PM	Main Vac valve closed
11/28/2011	7:58:36 PM	Bypass valve closed
11/28/2011	7:58:36 PM	H2 valve opened
11/28/2011	7:58:36 PM	BCl3 valve opened
11/28/2011	7:58:36 PM	SiCl4 pre valve opened
11/28/2011	7:58:36 PM	SiCl4 post valve opened
11/28/2011	7:58:36 PM	Bubbler valve opened
11/28/2011	7:58:36 PM	Helium MFC set to  0.000000
11/28/2011	7:58:36 PM	H2 MFC set to  500.000000
11/28/2011	7:58:36 PM	BCl3 MFC set to  3.500000
11/28/2011	7:58:36 PM	PHl3 MFC set to  0.000000
11/28/2011	7:58:36 PM	SiCl4 MFC set to  25.000000
11/28/2011	7:58:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	7:58:36 PM	Tube furnace set to 1000
11/28/2011	8:20:36 PM	Helium valve closed
11/28/2011	8:20:36 PM	BCl3 valve closed
11/28/2011	8:20:36 PM	PH3 valve closed
11/28/2011	8:20:36 PM	SiCl4 pre valve closed
11/28/2011	8:20:36 PM	SiCl4 post valve closed
11/28/2011	8:20:36 PM	Main Vac valve closed
11/28/2011	8:20:36 PM	Bypass valve closed
11/28/2011	8:20:36 PM	H2 valve opened
11/28/2011	8:20:36 PM	Bubbler valve opened
11/28/2011	8:20:36 PM	Helium MFC set to  0.000000
11/28/2011	8:20:36 PM	H2 MFC set to  500.000000
11/28/2011	8:20:36 PM	BCl3 MFC set to  0.000000
11/28/2011	8:20:36 PM	PHl3 MFC set to  0.000000
11/28/2011	8:20:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:20:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:20:36 PM	Tube furnace set to 750
11/28/2011	8:30:36 PM	H2 valve closed
11/28/2011	8:30:36 PM	BCl3 valve closed
11/28/2011	8:30:36 PM	PH3 valve closed
11/28/2011	8:30:36 PM	SiCl4 pre valve closed
11/28/2011	8:30:36 PM	SiCl4 post valve closed
11/28/2011	8:30:36 PM	Main Vac valve closed
11/28/2011	8:30:36 PM	Bypass valve closed
11/28/2011	8:30:36 PM	Helium valve opened
11/28/2011	8:30:36 PM	Bubbler valve opened
11/28/2011	8:30:36 PM	Helium MFC set to  500.000000
11/28/2011	8:30:36 PM	H2 MFC set to  0.000000
11/28/2011	8:30:36 PM	BCl3 MFC set to  0.000000
11/28/2011	8:30:36 PM	PHl3 MFC set to  0.000000
11/28/2011	8:30:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:30:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:30:36 PM	Tube furnace set to 0
11/28/2011	8:34:50 PM	Helium valve closed
11/28/2011	8:34:50 PM	H2 valve closed
11/28/2011	8:34:50 PM	BCl3 valve closed
11/28/2011	8:34:50 PM	PH3 valve closed
11/28/2011	8:34:50 PM	SiCl4 pre valve closed
11/28/2011	8:34:50 PM	SiCl4 post valve closed
11/28/2011	8:34:50 PM	Main Vac valve closed
11/28/2011	8:34:50 PM	Bypass valve closed
11/28/2011	8:34:50 PM	Bubbler valve closed
11/28/2011	8:34:50 PM	Helium MFC set to  0.000000
11/28/2011	8:34:50 PM	H2 MFC set to  0.000000
11/28/2011	8:34:50 PM	BCl3 MFC set to  0.000000
11/28/2011	8:34:50 PM	PHl3 MFC set to  0.000000
11/28/2011	8:34:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:34:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:34:50 PM	Tube furnace set to 0
11/28/2011	8:34:51 PM	Run finished at 8:34 PM
11/28/2011	8:34:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	8:34:55 PM	Recipe started at 8:34 PM
11/28/2011	8:34:55 PM	Helium valve closed
11/28/2011	8:34:55 PM	H2 valve closed
11/28/2011	8:34:55 PM	BCl3 valve closed
11/28/2011	8:34:55 PM	PH3 valve closed
11/28/2011	8:34:55 PM	SiCl4 pre valve closed
11/28/2011	8:34:55 PM	SiCl4 post valve closed
11/28/2011	8:34:55 PM	Main Vac valve closed
11/28/2011	8:34:55 PM	Bypass valve closed
11/28/2011	8:34:55 PM	Bubbler valve closed
11/28/2011	8:34:55 PM	Helium MFC set to  0.000000
11/28/2011	8:34:55 PM	H2 MFC set to  0.000000
11/28/2011	8:34:55 PM	BCl3 MFC set to  0.000000
11/28/2011	8:34:55 PM	PHl3 MFC set to  0.000000
11/28/2011	8:34:55 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:34:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:34:56 PM	Tube furnace set to 0
11/28/2011	8:34:59 PM	H2 valve closed
11/28/2011	8:34:59 PM	BCl3 valve closed
11/28/2011	8:34:59 PM	PH3 valve closed
11/28/2011	8:34:59 PM	SiCl4 pre valve closed
11/28/2011	8:34:59 PM	SiCl4 post valve closed
11/28/2011	8:34:59 PM	Main Vac valve closed
11/28/2011	8:34:59 PM	Bypass valve closed
11/28/2011	8:34:59 PM	Bubbler valve closed
11/28/2011	8:34:59 PM	Helium valve opened
11/28/2011	8:34:59 PM	Helium MFC set to  500.000000
11/28/2011	8:34:59 PM	H2 MFC set to  0.000000
11/28/2011	8:34:59 PM	BCl3 MFC set to  0.000000
11/28/2011	8:34:59 PM	PHl3 MFC set to  0.000000
11/28/2011	8:34:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:34:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:34:59 PM	Tube furnace set to 0
11/28/2011	8:34:59 PM	Helium valve closed
11/28/2011	8:34:59 PM	H2 valve closed
11/28/2011	8:34:59 PM	BCl3 valve closed
11/28/2011	8:34:59 PM	PH3 valve closed
11/28/2011	8:34:59 PM	SiCl4 pre valve closed
11/28/2011	8:34:59 PM	SiCl4 post valve closed
11/28/2011	8:34:59 PM	Main Vac valve closed
11/28/2011	8:34:59 PM	Bypass valve closed
11/28/2011	8:34:59 PM	Bubbler valve closed
11/28/2011	8:34:59 PM	Helium MFC set to  0.000000
11/28/2011	8:34:59 PM	H2 MFC set to  0.000000
11/28/2011	8:34:59 PM	BCl3 MFC set to  0.000000
11/28/2011	8:34:59 PM	PHl3 MFC set to  0.000000
11/28/2011	8:34:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:34:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:34:59 PM	Tube furnace set to 0
11/28/2011	8:35:00 PM	Run finished at 8:35 PM
11/28/2011	8:35:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	8:40:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	8:40:55 PM	Recipe started at 8:40 PM
11/28/2011	8:40:55 PM	Helium valve closed
11/28/2011	8:40:55 PM	H2 valve closed
11/28/2011	8:40:55 PM	BCl3 valve closed
11/28/2011	8:40:55 PM	PH3 valve closed
11/28/2011	8:40:55 PM	SiCl4 pre valve closed
11/28/2011	8:40:55 PM	SiCl4 post valve closed
11/28/2011	8:40:55 PM	Main Vac valve closed
11/28/2011	8:40:55 PM	Bubbler valve closed
11/28/2011	8:40:55 PM	Bypass valve opened
11/28/2011	8:40:55 PM	Helium MFC set to  0.000000
11/28/2011	8:40:55 PM	H2 MFC set to  0.000000
11/28/2011	8:40:55 PM	BCl3 MFC set to  0.000000
11/28/2011	8:40:55 PM	PHl3 MFC set to  0.000000
11/28/2011	8:40:55 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:40:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:40:56 PM	Tube furnace set to 0
11/28/2011	8:42:23 PM	Helium valve closed
11/28/2011	8:42:23 PM	H2 valve closed
11/28/2011	8:42:23 PM	BCl3 valve closed
11/28/2011	8:42:23 PM	PH3 valve closed
11/28/2011	8:42:23 PM	SiCl4 pre valve closed
11/28/2011	8:42:23 PM	SiCl4 post valve closed
11/28/2011	8:42:23 PM	Main Vac valve closed
11/28/2011	8:42:23 PM	Bubbler valve closed
11/28/2011	8:42:23 PM	Bypass valve opened
11/28/2011	8:42:23 PM	Helium MFC set to  0.000000
11/28/2011	8:42:23 PM	H2 MFC set to  0.000000
11/28/2011	8:42:23 PM	BCl3 MFC set to  0.000000
11/28/2011	8:42:23 PM	PHl3 MFC set to  0.000000
11/28/2011	8:42:23 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:42:23 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:42:23 PM	Tube furnace set to 0
11/28/2011	8:43:23 PM	Helium valve closed
11/28/2011	8:43:23 PM	H2 valve closed
11/28/2011	8:43:23 PM	BCl3 valve closed
11/28/2011	8:43:23 PM	PH3 valve closed
11/28/2011	8:43:23 PM	SiCl4 pre valve closed
11/28/2011	8:43:23 PM	SiCl4 post valve closed
11/28/2011	8:43:23 PM	Bypass valve closed
11/28/2011	8:43:23 PM	Bubbler valve closed
11/28/2011	8:43:23 PM	Main Vac valve opened
11/28/2011	8:43:23 PM	Helium MFC set to  0.000000
11/28/2011	8:43:23 PM	H2 MFC set to  0.000000
11/28/2011	8:43:23 PM	BCl3 MFC set to  0.000000
11/28/2011	8:43:23 PM	PHl3 MFC set to  0.000000
11/28/2011	8:43:23 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:43:23 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:43:23 PM	Tube furnace set to 0
11/28/2011	8:43:24 PM	Run finished at 8:43 PM
11/28/2011	8:43:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	8:55:49 PM	Recipe started at 8:55 PM
11/28/2011	8:55:49 PM	Helium valve closed
11/28/2011	8:55:49 PM	H2 valve closed
11/28/2011	8:55:49 PM	BCl3 valve closed
11/28/2011	8:55:49 PM	PH3 valve closed
11/28/2011	8:55:49 PM	SiCl4 pre valve closed
11/28/2011	8:55:49 PM	SiCl4 post valve closed
11/28/2011	8:55:49 PM	Bypass valve closed
11/28/2011	8:55:49 PM	Bubbler valve closed
11/28/2011	8:55:49 PM	Main Vac valve opened
11/28/2011	8:55:49 PM	Helium MFC set to  0.000000
11/28/2011	8:55:49 PM	H2 MFC set to  0.000000
11/28/2011	8:55:49 PM	BCl3 MFC set to  0.000000
11/28/2011	8:55:49 PM	PHl3 MFC set to  0.000000
11/28/2011	8:55:49 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:55:49 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:55:49 PM	Tube furnace set to 150
11/28/2011	8:56:19 PM	H2 valve closed
11/28/2011	8:56:19 PM	BCl3 valve closed
11/28/2011	8:56:19 PM	PH3 valve closed
11/28/2011	8:56:19 PM	SiCl4 pre valve closed
11/28/2011	8:56:19 PM	SiCl4 post valve closed
11/28/2011	8:56:19 PM	Bypass valve closed
11/28/2011	8:56:19 PM	Bubbler valve closed
11/28/2011	8:56:19 PM	Helium valve opened
11/28/2011	8:56:19 PM	Main Vac valve opened
11/28/2011	8:56:19 PM	Helium MFC set to  20.000000
11/28/2011	8:56:19 PM	H2 MFC set to  0.000000
11/28/2011	8:56:19 PM	BCl3 MFC set to  0.000000
11/28/2011	8:56:19 PM	PHl3 MFC set to  0.000000
11/28/2011	8:56:19 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:56:19 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:56:20 PM	Tube furnace set to 150
11/28/2011	8:56:50 PM	Helium valve closed
11/28/2011	8:56:50 PM	H2 valve closed
11/28/2011	8:56:50 PM	BCl3 valve closed
11/28/2011	8:56:50 PM	PH3 valve closed
11/28/2011	8:56:50 PM	SiCl4 pre valve closed
11/28/2011	8:56:50 PM	SiCl4 post valve closed
11/28/2011	8:56:50 PM	Bypass valve closed
11/28/2011	8:56:50 PM	Bubbler valve closed
11/28/2011	8:56:50 PM	Main Vac valve opened
11/28/2011	8:56:50 PM	Helium MFC set to  0.000000
11/28/2011	8:56:50 PM	H2 MFC set to  0.000000
11/28/2011	8:56:50 PM	BCl3 MFC set to  0.000000
11/28/2011	8:56:50 PM	PHl3 MFC set to  0.000000
11/28/2011	8:56:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:56:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:56:50 PM	Tube furnace set to 150
11/28/2011	8:57:20 PM	H2 valve closed
11/28/2011	8:57:20 PM	BCl3 valve closed
11/28/2011	8:57:20 PM	PH3 valve closed
11/28/2011	8:57:20 PM	SiCl4 pre valve closed
11/28/2011	8:57:20 PM	SiCl4 post valve closed
11/28/2011	8:57:20 PM	Bypass valve closed
11/28/2011	8:57:20 PM	Bubbler valve closed
11/28/2011	8:57:20 PM	Helium valve opened
11/28/2011	8:57:20 PM	Main Vac valve opened
11/28/2011	8:57:20 PM	Helium MFC set to  20.000000
11/28/2011	8:57:20 PM	H2 MFC set to  0.000000
11/28/2011	8:57:20 PM	BCl3 MFC set to  0.000000
11/28/2011	8:57:20 PM	PHl3 MFC set to  0.000000
11/28/2011	8:57:20 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:57:20 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:57:20 PM	Tube furnace set to 150
11/28/2011	8:57:50 PM	Helium valve closed
11/28/2011	8:57:50 PM	H2 valve closed
11/28/2011	8:57:50 PM	BCl3 valve closed
11/28/2011	8:57:50 PM	PH3 valve closed
11/28/2011	8:57:50 PM	SiCl4 pre valve closed
11/28/2011	8:57:50 PM	SiCl4 post valve closed
11/28/2011	8:57:50 PM	Bypass valve closed
11/28/2011	8:57:50 PM	Bubbler valve closed
11/28/2011	8:57:50 PM	Main Vac valve opened
11/28/2011	8:57:50 PM	Helium MFC set to  0.000000
11/28/2011	8:57:50 PM	H2 MFC set to  0.000000
11/28/2011	8:57:50 PM	BCl3 MFC set to  0.000000
11/28/2011	8:57:50 PM	PHl3 MFC set to  0.000000
11/28/2011	8:57:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:57:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:57:50 PM	Tube furnace set to 150
11/28/2011	8:58:20 PM	H2 valve closed
11/28/2011	8:58:20 PM	BCl3 valve closed
11/28/2011	8:58:20 PM	PH3 valve closed
11/28/2011	8:58:20 PM	SiCl4 pre valve closed
11/28/2011	8:58:20 PM	SiCl4 post valve closed
11/28/2011	8:58:20 PM	Bypass valve closed
11/28/2011	8:58:20 PM	Bubbler valve closed
11/28/2011	8:58:20 PM	Helium valve opened
11/28/2011	8:58:20 PM	Main Vac valve opened
11/28/2011	8:58:20 PM	Helium MFC set to  20.000000
11/28/2011	8:58:20 PM	H2 MFC set to  0.000000
11/28/2011	8:58:20 PM	BCl3 MFC set to  0.000000
11/28/2011	8:58:20 PM	PHl3 MFC set to  0.000000
11/28/2011	8:58:20 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:58:20 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:58:20 PM	Tube furnace set to 150
11/28/2011	8:58:50 PM	Helium valve closed
11/28/2011	8:58:50 PM	H2 valve closed
11/28/2011	8:58:50 PM	BCl3 valve closed
11/28/2011	8:58:50 PM	PH3 valve closed
11/28/2011	8:58:50 PM	SiCl4 pre valve closed
11/28/2011	8:58:50 PM	SiCl4 post valve closed
11/28/2011	8:58:50 PM	Bypass valve closed
11/28/2011	8:58:50 PM	Bubbler valve closed
11/28/2011	8:58:50 PM	Main Vac valve opened
11/28/2011	8:58:50 PM	Helium MFC set to  0.000000
11/28/2011	8:58:50 PM	H2 MFC set to  0.000000
11/28/2011	8:58:50 PM	BCl3 MFC set to  0.000000
11/28/2011	8:58:50 PM	PHl3 MFC set to  0.000000
11/28/2011	8:58:50 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:58:50 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:58:51 PM	Tube furnace set to 150
11/28/2011	8:59:21 PM	H2 valve closed
11/28/2011	8:59:21 PM	BCl3 valve closed
11/28/2011	8:59:21 PM	PH3 valve closed
11/28/2011	8:59:21 PM	SiCl4 pre valve closed
11/28/2011	8:59:21 PM	SiCl4 post valve closed
11/28/2011	8:59:21 PM	Bypass valve closed
11/28/2011	8:59:21 PM	Bubbler valve closed
11/28/2011	8:59:21 PM	Helium valve opened
11/28/2011	8:59:21 PM	Main Vac valve opened
11/28/2011	8:59:21 PM	Helium MFC set to  20.000000
11/28/2011	8:59:21 PM	H2 MFC set to  0.000000
11/28/2011	8:59:21 PM	BCl3 MFC set to  0.000000
11/28/2011	8:59:21 PM	PHl3 MFC set to  0.000000
11/28/2011	8:59:21 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:59:21 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:59:21 PM	Tube furnace set to 150
11/28/2011	8:59:51 PM	Helium valve closed
11/28/2011	8:59:51 PM	H2 valve closed
11/28/2011	8:59:51 PM	BCl3 valve closed
11/28/2011	8:59:51 PM	PH3 valve closed
11/28/2011	8:59:51 PM	SiCl4 pre valve closed
11/28/2011	8:59:51 PM	SiCl4 post valve closed
11/28/2011	8:59:51 PM	Bypass valve closed
11/28/2011	8:59:51 PM	Bubbler valve closed
11/28/2011	8:59:51 PM	Main Vac valve opened
11/28/2011	8:59:51 PM	Helium MFC set to  0.000000
11/28/2011	8:59:51 PM	H2 MFC set to  0.000000
11/28/2011	8:59:51 PM	BCl3 MFC set to  0.000000
11/28/2011	8:59:51 PM	PHl3 MFC set to  0.000000
11/28/2011	8:59:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	8:59:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	8:59:51 PM	Tube furnace set to 150
11/28/2011	9:00:21 PM	H2 valve closed
11/28/2011	9:00:21 PM	BCl3 valve closed
11/28/2011	9:00:21 PM	PH3 valve closed
11/28/2011	9:00:21 PM	SiCl4 pre valve closed
11/28/2011	9:00:21 PM	SiCl4 post valve closed
11/28/2011	9:00:21 PM	Bypass valve closed
11/28/2011	9:00:21 PM	Bubbler valve closed
11/28/2011	9:00:21 PM	Helium valve opened
11/28/2011	9:00:21 PM	Main Vac valve opened
11/28/2011	9:00:21 PM	Helium MFC set to  20.000000
11/28/2011	9:00:21 PM	H2 MFC set to  0.000000
11/28/2011	9:00:21 PM	BCl3 MFC set to  0.000000
11/28/2011	9:00:21 PM	PHl3 MFC set to  0.000000
11/28/2011	9:00:21 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:00:21 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:00:21 PM	Tube furnace set to 150
11/28/2011	9:00:51 PM	Helium valve closed
11/28/2011	9:00:51 PM	H2 valve closed
11/28/2011	9:00:51 PM	BCl3 valve closed
11/28/2011	9:00:51 PM	PH3 valve closed
11/28/2011	9:00:51 PM	SiCl4 pre valve closed
11/28/2011	9:00:51 PM	SiCl4 post valve closed
11/28/2011	9:00:51 PM	Bypass valve closed
11/28/2011	9:00:51 PM	Bubbler valve closed
11/28/2011	9:00:51 PM	Main Vac valve opened
11/28/2011	9:00:51 PM	Helium MFC set to  0.000000
11/28/2011	9:00:51 PM	H2 MFC set to  0.000000
11/28/2011	9:00:51 PM	BCl3 MFC set to  0.000000
11/28/2011	9:00:51 PM	PHl3 MFC set to  0.000000
11/28/2011	9:00:51 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:00:51 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:00:51 PM	Tube furnace set to 150
11/28/2011	9:01:21 PM	H2 valve closed
11/28/2011	9:01:21 PM	BCl3 valve closed
11/28/2011	9:01:21 PM	PH3 valve closed
11/28/2011	9:01:21 PM	SiCl4 pre valve closed
11/28/2011	9:01:21 PM	SiCl4 post valve closed
11/28/2011	9:01:21 PM	Bypass valve closed
11/28/2011	9:01:21 PM	Bubbler valve closed
11/28/2011	9:01:21 PM	Helium valve opened
11/28/2011	9:01:21 PM	Main Vac valve opened
11/28/2011	9:01:21 PM	Helium MFC set to  20.000000
11/28/2011	9:01:21 PM	H2 MFC set to  0.000000
11/28/2011	9:01:21 PM	BCl3 MFC set to  0.000000
11/28/2011	9:01:21 PM	PHl3 MFC set to  0.000000
11/28/2011	9:01:21 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:01:21 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:01:22 PM	Tube furnace set to 150
11/28/2011	9:01:52 PM	Helium valve closed
11/28/2011	9:01:52 PM	H2 valve closed
11/28/2011	9:01:52 PM	BCl3 valve closed
11/28/2011	9:01:52 PM	PH3 valve closed
11/28/2011	9:01:52 PM	SiCl4 pre valve closed
11/28/2011	9:01:52 PM	SiCl4 post valve closed
11/28/2011	9:01:52 PM	Bypass valve closed
11/28/2011	9:01:52 PM	Bubbler valve closed
11/28/2011	9:01:52 PM	Main Vac valve opened
11/28/2011	9:01:52 PM	Helium MFC set to  0.000000
11/28/2011	9:01:52 PM	H2 MFC set to  0.000000
11/28/2011	9:01:52 PM	BCl3 MFC set to  0.000000
11/28/2011	9:01:52 PM	PHl3 MFC set to  0.000000
11/28/2011	9:01:52 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:01:52 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:01:52 PM	Tube furnace set to 150
11/28/2011	9:02:22 PM	H2 valve closed
11/28/2011	9:02:22 PM	BCl3 valve closed
11/28/2011	9:02:22 PM	PH3 valve closed
11/28/2011	9:02:22 PM	SiCl4 pre valve closed
11/28/2011	9:02:22 PM	SiCl4 post valve closed
11/28/2011	9:02:22 PM	Bypass valve closed
11/28/2011	9:02:22 PM	Bubbler valve closed
11/28/2011	9:02:22 PM	Helium valve opened
11/28/2011	9:02:22 PM	Main Vac valve opened
11/28/2011	9:02:22 PM	Helium MFC set to  20.000000
11/28/2011	9:02:22 PM	H2 MFC set to  0.000000
11/28/2011	9:02:22 PM	BCl3 MFC set to  0.000000
11/28/2011	9:02:22 PM	PHl3 MFC set to  0.000000
11/28/2011	9:02:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:02:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:02:22 PM	Tube furnace set to 150
11/28/2011	9:02:52 PM	Helium valve closed
11/28/2011	9:02:52 PM	H2 valve closed
11/28/2011	9:02:52 PM	BCl3 valve closed
11/28/2011	9:02:52 PM	PH3 valve closed
11/28/2011	9:02:52 PM	SiCl4 pre valve closed
11/28/2011	9:02:52 PM	SiCl4 post valve closed
11/28/2011	9:02:52 PM	Bypass valve closed
11/28/2011	9:02:52 PM	Bubbler valve closed
11/28/2011	9:02:52 PM	Main Vac valve opened
11/28/2011	9:02:52 PM	Helium MFC set to  0.000000
11/28/2011	9:02:52 PM	H2 MFC set to  0.000000
11/28/2011	9:02:52 PM	BCl3 MFC set to  0.000000
11/28/2011	9:02:52 PM	PHl3 MFC set to  0.000000
11/28/2011	9:02:52 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:02:52 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:02:52 PM	Tube furnace set to 150
11/28/2011	9:03:22 PM	H2 valve closed
11/28/2011	9:03:22 PM	BCl3 valve closed
11/28/2011	9:03:22 PM	PH3 valve closed
11/28/2011	9:03:22 PM	SiCl4 pre valve closed
11/28/2011	9:03:22 PM	SiCl4 post valve closed
11/28/2011	9:03:22 PM	Bypass valve closed
11/28/2011	9:03:22 PM	Bubbler valve closed
11/28/2011	9:03:22 PM	Helium valve opened
11/28/2011	9:03:22 PM	Main Vac valve opened
11/28/2011	9:03:22 PM	Helium MFC set to  20.000000
11/28/2011	9:03:22 PM	H2 MFC set to  0.000000
11/28/2011	9:03:22 PM	BCl3 MFC set to  0.000000
11/28/2011	9:03:22 PM	PHl3 MFC set to  0.000000
11/28/2011	9:03:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:03:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:03:22 PM	Tube furnace set to 150
11/28/2011	9:03:52 PM	Helium valve closed
11/28/2011	9:03:52 PM	H2 valve closed
11/28/2011	9:03:52 PM	BCl3 valve closed
11/28/2011	9:03:52 PM	PH3 valve closed
11/28/2011	9:03:52 PM	SiCl4 pre valve closed
11/28/2011	9:03:52 PM	SiCl4 post valve closed
11/28/2011	9:03:52 PM	Bypass valve closed
11/28/2011	9:03:52 PM	Bubbler valve closed
11/28/2011	9:03:52 PM	Main Vac valve opened
11/28/2011	9:03:52 PM	Helium MFC set to  0.000000
11/28/2011	9:03:52 PM	H2 MFC set to  0.000000
11/28/2011	9:03:52 PM	BCl3 MFC set to  0.000000
11/28/2011	9:03:52 PM	PHl3 MFC set to  0.000000
11/28/2011	9:03:52 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:03:52 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:03:53 PM	Tube furnace set to 150
11/28/2011	9:04:23 PM	H2 valve closed
11/28/2011	9:04:23 PM	BCl3 valve closed
11/28/2011	9:04:23 PM	PH3 valve closed
11/28/2011	9:04:23 PM	SiCl4 pre valve closed
11/28/2011	9:04:23 PM	SiCl4 post valve closed
11/28/2011	9:04:23 PM	Bypass valve closed
11/28/2011	9:04:23 PM	Bubbler valve closed
11/28/2011	9:04:23 PM	Helium valve opened
11/28/2011	9:04:23 PM	Main Vac valve opened
11/28/2011	9:04:23 PM	Helium MFC set to  20.000000
11/28/2011	9:04:23 PM	H2 MFC set to  0.000000
11/28/2011	9:04:23 PM	BCl3 MFC set to  0.000000
11/28/2011	9:04:23 PM	PHl3 MFC set to  0.000000
11/28/2011	9:04:23 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:04:23 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:04:23 PM	Tube furnace set to 150
11/28/2011	9:04:53 PM	Helium valve closed
11/28/2011	9:04:53 PM	H2 valve closed
11/28/2011	9:04:53 PM	BCl3 valve closed
11/28/2011	9:04:53 PM	PH3 valve closed
11/28/2011	9:04:53 PM	SiCl4 pre valve closed
11/28/2011	9:04:53 PM	SiCl4 post valve closed
11/28/2011	9:04:53 PM	Bypass valve closed
11/28/2011	9:04:53 PM	Bubbler valve closed
11/28/2011	9:04:53 PM	Main Vac valve opened
11/28/2011	9:04:53 PM	Helium MFC set to  0.000000
11/28/2011	9:04:53 PM	H2 MFC set to  0.000000
11/28/2011	9:04:53 PM	BCl3 MFC set to  0.000000
11/28/2011	9:04:53 PM	PHl3 MFC set to  0.000000
11/28/2011	9:04:53 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:04:53 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:04:53 PM	Tube furnace set to 150
11/28/2011	9:05:23 PM	H2 valve closed
11/28/2011	9:05:23 PM	BCl3 valve closed
11/28/2011	9:05:23 PM	PH3 valve closed
11/28/2011	9:05:23 PM	SiCl4 pre valve closed
11/28/2011	9:05:23 PM	SiCl4 post valve closed
11/28/2011	9:05:23 PM	Bypass valve closed
11/28/2011	9:05:23 PM	Bubbler valve closed
11/28/2011	9:05:23 PM	Helium valve opened
11/28/2011	9:05:23 PM	Main Vac valve opened
11/28/2011	9:05:23 PM	Helium MFC set to  20.000000
11/28/2011	9:05:23 PM	H2 MFC set to  0.000000
11/28/2011	9:05:23 PM	BCl3 MFC set to  0.000000
11/28/2011	9:05:23 PM	PHl3 MFC set to  0.000000
11/28/2011	9:05:23 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:05:23 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:05:23 PM	Tube furnace set to 150
11/28/2011	9:05:53 PM	Helium valve closed
11/28/2011	9:05:53 PM	H2 valve closed
11/28/2011	9:05:53 PM	BCl3 valve closed
11/28/2011	9:05:53 PM	PH3 valve closed
11/28/2011	9:05:53 PM	SiCl4 pre valve closed
11/28/2011	9:05:53 PM	SiCl4 post valve closed
11/28/2011	9:05:53 PM	Bypass valve closed
11/28/2011	9:05:53 PM	Bubbler valve closed
11/28/2011	9:05:53 PM	Main Vac valve opened
11/28/2011	9:05:53 PM	Helium MFC set to  0.000000
11/28/2011	9:05:53 PM	H2 MFC set to  0.000000
11/28/2011	9:05:53 PM	BCl3 MFC set to  0.000000
11/28/2011	9:05:53 PM	PHl3 MFC set to  0.000000
11/28/2011	9:05:53 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:05:53 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:05:53 PM	Tube furnace set to 150
11/28/2011	9:05:54 PM	Run finished at 9:05 PM
11/28/2011	9:06:21 PM	Recipe started at 9:06 PM
11/28/2011	9:06:21 PM	Helium valve closed
11/28/2011	9:06:21 PM	H2 valve closed
11/28/2011	9:06:21 PM	BCl3 valve closed
11/28/2011	9:06:21 PM	PH3 valve closed
11/28/2011	9:06:21 PM	SiCl4 pre valve closed
11/28/2011	9:06:21 PM	SiCl4 post valve closed
11/28/2011	9:06:21 PM	Bypass valve closed
11/28/2011	9:06:21 PM	Bubbler valve closed
11/28/2011	9:06:21 PM	Main Vac valve opened
11/28/2011	9:06:21 PM	Helium MFC set to  0.000000
11/28/2011	9:06:21 PM	H2 MFC set to  0.000000
11/28/2011	9:06:21 PM	BCl3 MFC set to  0.000000
11/28/2011	9:06:21 PM	PHl3 MFC set to  0.000000
11/28/2011	9:06:21 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:06:21 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:06:21 PM	Tube furnace set to 150
11/28/2011	9:06:26 PM	H2 valve closed
11/28/2011	9:06:26 PM	BCl3 valve closed
11/28/2011	9:06:26 PM	PH3 valve closed
11/28/2011	9:06:26 PM	SiCl4 pre valve closed
11/28/2011	9:06:26 PM	SiCl4 post valve closed
11/28/2011	9:06:26 PM	Bypass valve closed
11/28/2011	9:06:26 PM	Bubbler valve closed
11/28/2011	9:06:26 PM	Helium valve opened
11/28/2011	9:06:26 PM	Main Vac valve opened
11/28/2011	9:06:26 PM	Helium MFC set to  20.000000
11/28/2011	9:06:26 PM	H2 MFC set to  0.000000
11/28/2011	9:06:26 PM	BCl3 MFC set to  0.000000
11/28/2011	9:06:26 PM	PHl3 MFC set to  0.000000
11/28/2011	9:06:26 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:06:26 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:06:26 PM	Tube furnace set to 150
11/28/2011	9:06:56 PM	Helium valve closed
11/28/2011	9:06:56 PM	H2 valve closed
11/28/2011	9:06:56 PM	BCl3 valve closed
11/28/2011	9:06:56 PM	PH3 valve closed
11/28/2011	9:06:56 PM	SiCl4 pre valve closed
11/28/2011	9:06:56 PM	SiCl4 post valve closed
11/28/2011	9:06:56 PM	Bypass valve closed
11/28/2011	9:06:56 PM	Bubbler valve closed
11/28/2011	9:06:56 PM	Main Vac valve opened
11/28/2011	9:06:56 PM	Helium MFC set to  0.000000
11/28/2011	9:06:56 PM	H2 MFC set to  0.000000
11/28/2011	9:06:56 PM	BCl3 MFC set to  0.000000
11/28/2011	9:06:56 PM	PHl3 MFC set to  0.000000
11/28/2011	9:06:56 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:06:56 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:06:56 PM	Tube furnace set to 150
11/28/2011	9:07:26 PM	H2 valve closed
11/28/2011	9:07:26 PM	BCl3 valve closed
11/28/2011	9:07:26 PM	PH3 valve closed
11/28/2011	9:07:26 PM	SiCl4 pre valve closed
11/28/2011	9:07:26 PM	SiCl4 post valve closed
11/28/2011	9:07:26 PM	Bypass valve closed
11/28/2011	9:07:26 PM	Bubbler valve closed
11/28/2011	9:07:26 PM	Helium valve opened
11/28/2011	9:07:26 PM	Main Vac valve opened
11/28/2011	9:07:26 PM	Helium MFC set to  20.000000
11/28/2011	9:07:26 PM	H2 MFC set to  0.000000
11/28/2011	9:07:26 PM	BCl3 MFC set to  0.000000
11/28/2011	9:07:26 PM	PHl3 MFC set to  0.000000
11/28/2011	9:07:26 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:07:26 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:07:26 PM	Tube furnace set to 150
11/28/2011	9:07:56 PM	Helium valve closed
11/28/2011	9:07:56 PM	H2 valve closed
11/28/2011	9:07:56 PM	BCl3 valve closed
11/28/2011	9:07:56 PM	PH3 valve closed
11/28/2011	9:07:56 PM	SiCl4 pre valve closed
11/28/2011	9:07:56 PM	SiCl4 post valve closed
11/28/2011	9:07:56 PM	Bypass valve closed
11/28/2011	9:07:56 PM	Bubbler valve closed
11/28/2011	9:07:56 PM	Main Vac valve opened
11/28/2011	9:07:56 PM	Helium MFC set to  0.000000
11/28/2011	9:07:56 PM	H2 MFC set to  0.000000
11/28/2011	9:07:56 PM	BCl3 MFC set to  0.000000
11/28/2011	9:07:56 PM	PHl3 MFC set to  0.000000
11/28/2011	9:07:56 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:07:56 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:07:57 PM	Tube furnace set to 150
11/28/2011	9:08:27 PM	H2 valve closed
11/28/2011	9:08:27 PM	BCl3 valve closed
11/28/2011	9:08:27 PM	PH3 valve closed
11/28/2011	9:08:27 PM	SiCl4 pre valve closed
11/28/2011	9:08:27 PM	SiCl4 post valve closed
11/28/2011	9:08:27 PM	Bypass valve closed
11/28/2011	9:08:27 PM	Bubbler valve closed
11/28/2011	9:08:27 PM	Helium valve opened
11/28/2011	9:08:27 PM	Main Vac valve opened
11/28/2011	9:08:27 PM	Helium MFC set to  20.000000
11/28/2011	9:08:27 PM	H2 MFC set to  0.000000
11/28/2011	9:08:27 PM	BCl3 MFC set to  0.000000
11/28/2011	9:08:27 PM	PHl3 MFC set to  0.000000
11/28/2011	9:08:27 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:08:27 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:08:27 PM	Tube furnace set to 150
11/28/2011	9:08:57 PM	Helium valve closed
11/28/2011	9:08:57 PM	H2 valve closed
11/28/2011	9:08:57 PM	BCl3 valve closed
11/28/2011	9:08:57 PM	PH3 valve closed
11/28/2011	9:08:57 PM	SiCl4 pre valve closed
11/28/2011	9:08:57 PM	SiCl4 post valve closed
11/28/2011	9:08:57 PM	Bypass valve closed
11/28/2011	9:08:57 PM	Bubbler valve closed
11/28/2011	9:08:57 PM	Main Vac valve opened
11/28/2011	9:08:57 PM	Helium MFC set to  0.000000
11/28/2011	9:08:57 PM	H2 MFC set to  0.000000
11/28/2011	9:08:57 PM	BCl3 MFC set to  0.000000
11/28/2011	9:08:57 PM	PHl3 MFC set to  0.000000
11/28/2011	9:08:57 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:08:57 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:08:57 PM	Tube furnace set to 150
11/28/2011	9:09:27 PM	H2 valve closed
11/28/2011	9:09:27 PM	BCl3 valve closed
11/28/2011	9:09:27 PM	PH3 valve closed
11/28/2011	9:09:27 PM	SiCl4 pre valve closed
11/28/2011	9:09:27 PM	SiCl4 post valve closed
11/28/2011	9:09:27 PM	Bypass valve closed
11/28/2011	9:09:27 PM	Bubbler valve closed
11/28/2011	9:09:27 PM	Helium valve opened
11/28/2011	9:09:27 PM	Main Vac valve opened
11/28/2011	9:09:27 PM	Helium MFC set to  20.000000
11/28/2011	9:09:27 PM	H2 MFC set to  0.000000
11/28/2011	9:09:27 PM	BCl3 MFC set to  0.000000
11/28/2011	9:09:27 PM	PHl3 MFC set to  0.000000
11/28/2011	9:09:27 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:09:27 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:09:27 PM	Tube furnace set to 150
11/28/2011	9:09:57 PM	Helium valve closed
11/28/2011	9:09:57 PM	H2 valve closed
11/28/2011	9:09:57 PM	BCl3 valve closed
11/28/2011	9:09:57 PM	PH3 valve closed
11/28/2011	9:09:57 PM	SiCl4 pre valve closed
11/28/2011	9:09:57 PM	SiCl4 post valve closed
11/28/2011	9:09:57 PM	Bypass valve closed
11/28/2011	9:09:57 PM	Bubbler valve closed
11/28/2011	9:09:57 PM	Main Vac valve opened
11/28/2011	9:09:57 PM	Helium MFC set to  0.000000
11/28/2011	9:09:57 PM	H2 MFC set to  0.000000
11/28/2011	9:09:57 PM	BCl3 MFC set to  0.000000
11/28/2011	9:09:57 PM	PHl3 MFC set to  0.000000
11/28/2011	9:09:57 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:09:57 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:09:57 PM	Tube furnace set to 150
11/28/2011	9:10:27 PM	H2 valve closed
11/28/2011	9:10:27 PM	BCl3 valve closed
11/28/2011	9:10:27 PM	PH3 valve closed
11/28/2011	9:10:27 PM	SiCl4 pre valve closed
11/28/2011	9:10:27 PM	SiCl4 post valve closed
11/28/2011	9:10:27 PM	Bypass valve closed
11/28/2011	9:10:27 PM	Bubbler valve closed
11/28/2011	9:10:27 PM	Helium valve opened
11/28/2011	9:10:27 PM	Main Vac valve opened
11/28/2011	9:10:27 PM	Helium MFC set to  20.000000
11/28/2011	9:10:27 PM	H2 MFC set to  0.000000
11/28/2011	9:10:27 PM	BCl3 MFC set to  0.000000
11/28/2011	9:10:27 PM	PHl3 MFC set to  0.000000
11/28/2011	9:10:27 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:10:27 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:10:28 PM	Tube furnace set to 150
11/28/2011	9:10:58 PM	Helium valve closed
11/28/2011	9:10:58 PM	H2 valve closed
11/28/2011	9:10:58 PM	BCl3 valve closed
11/28/2011	9:10:58 PM	PH3 valve closed
11/28/2011	9:10:58 PM	SiCl4 pre valve closed
11/28/2011	9:10:58 PM	SiCl4 post valve closed
11/28/2011	9:10:58 PM	Bypass valve closed
11/28/2011	9:10:58 PM	Bubbler valve closed
11/28/2011	9:10:58 PM	Main Vac valve opened
11/28/2011	9:10:58 PM	Helium MFC set to  0.000000
11/28/2011	9:10:58 PM	H2 MFC set to  0.000000
11/28/2011	9:10:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:10:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:10:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:10:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:10:58 PM	Tube furnace set to 150
11/28/2011	9:11:28 PM	H2 valve closed
11/28/2011	9:11:28 PM	BCl3 valve closed
11/28/2011	9:11:28 PM	PH3 valve closed
11/28/2011	9:11:28 PM	SiCl4 pre valve closed
11/28/2011	9:11:28 PM	SiCl4 post valve closed
11/28/2011	9:11:28 PM	Bypass valve closed
11/28/2011	9:11:28 PM	Bubbler valve closed
11/28/2011	9:11:28 PM	Helium valve opened
11/28/2011	9:11:28 PM	Main Vac valve opened
11/28/2011	9:11:28 PM	Helium MFC set to  20.000000
11/28/2011	9:11:28 PM	H2 MFC set to  0.000000
11/28/2011	9:11:28 PM	BCl3 MFC set to  0.000000
11/28/2011	9:11:28 PM	PHl3 MFC set to  0.000000
11/28/2011	9:11:28 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:11:28 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:11:28 PM	Tube furnace set to 150
11/28/2011	9:11:58 PM	Helium valve closed
11/28/2011	9:11:58 PM	H2 valve closed
11/28/2011	9:11:58 PM	BCl3 valve closed
11/28/2011	9:11:58 PM	PH3 valve closed
11/28/2011	9:11:58 PM	SiCl4 pre valve closed
11/28/2011	9:11:58 PM	SiCl4 post valve closed
11/28/2011	9:11:58 PM	Bypass valve closed
11/28/2011	9:11:58 PM	Bubbler valve closed
11/28/2011	9:11:58 PM	Main Vac valve opened
11/28/2011	9:11:58 PM	Helium MFC set to  0.000000
11/28/2011	9:11:58 PM	H2 MFC set to  0.000000
11/28/2011	9:11:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:11:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:11:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:11:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:11:58 PM	Tube furnace set to 150
11/28/2011	9:12:28 PM	H2 valve closed
11/28/2011	9:12:28 PM	BCl3 valve closed
11/28/2011	9:12:28 PM	PH3 valve closed
11/28/2011	9:12:28 PM	SiCl4 pre valve closed
11/28/2011	9:12:28 PM	SiCl4 post valve closed
11/28/2011	9:12:28 PM	Bypass valve closed
11/28/2011	9:12:28 PM	Bubbler valve closed
11/28/2011	9:12:28 PM	Helium valve opened
11/28/2011	9:12:28 PM	Main Vac valve opened
11/28/2011	9:12:28 PM	Helium MFC set to  20.000000
11/28/2011	9:12:28 PM	H2 MFC set to  0.000000
11/28/2011	9:12:28 PM	BCl3 MFC set to  0.000000
11/28/2011	9:12:28 PM	PHl3 MFC set to  0.000000
11/28/2011	9:12:28 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:12:28 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:12:28 PM	Tube furnace set to 150
11/28/2011	9:12:58 PM	Helium valve closed
11/28/2011	9:12:58 PM	H2 valve closed
11/28/2011	9:12:58 PM	BCl3 valve closed
11/28/2011	9:12:58 PM	PH3 valve closed
11/28/2011	9:12:58 PM	SiCl4 pre valve closed
11/28/2011	9:12:58 PM	SiCl4 post valve closed
11/28/2011	9:12:58 PM	Bypass valve closed
11/28/2011	9:12:58 PM	Bubbler valve closed
11/28/2011	9:12:58 PM	Main Vac valve opened
11/28/2011	9:12:58 PM	Helium MFC set to  0.000000
11/28/2011	9:12:58 PM	H2 MFC set to  0.000000
11/28/2011	9:12:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:12:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:12:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:12:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:12:59 PM	Tube furnace set to 150
11/28/2011	9:13:29 PM	H2 valve closed
11/28/2011	9:13:29 PM	BCl3 valve closed
11/28/2011	9:13:29 PM	PH3 valve closed
11/28/2011	9:13:29 PM	SiCl4 pre valve closed
11/28/2011	9:13:29 PM	SiCl4 post valve closed
11/28/2011	9:13:29 PM	Bypass valve closed
11/28/2011	9:13:29 PM	Bubbler valve closed
11/28/2011	9:13:29 PM	Helium valve opened
11/28/2011	9:13:29 PM	Main Vac valve opened
11/28/2011	9:13:29 PM	Helium MFC set to  20.000000
11/28/2011	9:13:29 PM	H2 MFC set to  0.000000
11/28/2011	9:13:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:13:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:13:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:13:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:13:29 PM	Tube furnace set to 150
11/28/2011	9:13:59 PM	Helium valve closed
11/28/2011	9:13:59 PM	H2 valve closed
11/28/2011	9:13:59 PM	BCl3 valve closed
11/28/2011	9:13:59 PM	PH3 valve closed
11/28/2011	9:13:59 PM	SiCl4 pre valve closed
11/28/2011	9:13:59 PM	SiCl4 post valve closed
11/28/2011	9:13:59 PM	Bypass valve closed
11/28/2011	9:13:59 PM	Bubbler valve closed
11/28/2011	9:13:59 PM	Main Vac valve opened
11/28/2011	9:13:59 PM	Helium MFC set to  0.000000
11/28/2011	9:13:59 PM	H2 MFC set to  0.000000
11/28/2011	9:13:59 PM	BCl3 MFC set to  0.000000
11/28/2011	9:13:59 PM	PHl3 MFC set to  0.000000
11/28/2011	9:13:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:13:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:13:59 PM	Tube furnace set to 150
11/28/2011	9:14:29 PM	H2 valve closed
11/28/2011	9:14:29 PM	BCl3 valve closed
11/28/2011	9:14:29 PM	PH3 valve closed
11/28/2011	9:14:29 PM	SiCl4 pre valve closed
11/28/2011	9:14:29 PM	SiCl4 post valve closed
11/28/2011	9:14:29 PM	Bypass valve closed
11/28/2011	9:14:29 PM	Bubbler valve closed
11/28/2011	9:14:29 PM	Helium valve opened
11/28/2011	9:14:29 PM	Main Vac valve opened
11/28/2011	9:14:29 PM	Helium MFC set to  20.000000
11/28/2011	9:14:29 PM	H2 MFC set to  0.000000
11/28/2011	9:14:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:14:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:14:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:14:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:14:29 PM	Tube furnace set to 150
11/28/2011	9:14:59 PM	Helium valve closed
11/28/2011	9:14:59 PM	H2 valve closed
11/28/2011	9:14:59 PM	BCl3 valve closed
11/28/2011	9:14:59 PM	PH3 valve closed
11/28/2011	9:14:59 PM	SiCl4 pre valve closed
11/28/2011	9:14:59 PM	SiCl4 post valve closed
11/28/2011	9:14:59 PM	Bypass valve closed
11/28/2011	9:14:59 PM	Bubbler valve closed
11/28/2011	9:14:59 PM	Main Vac valve opened
11/28/2011	9:14:59 PM	Helium MFC set to  0.000000
11/28/2011	9:14:59 PM	H2 MFC set to  0.000000
11/28/2011	9:14:59 PM	BCl3 MFC set to  0.000000
11/28/2011	9:14:59 PM	PHl3 MFC set to  0.000000
11/28/2011	9:14:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:14:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:14:59 PM	Tube furnace set to 150
11/28/2011	9:15:29 PM	H2 valve closed
11/28/2011	9:15:29 PM	BCl3 valve closed
11/28/2011	9:15:29 PM	PH3 valve closed
11/28/2011	9:15:29 PM	SiCl4 pre valve closed
11/28/2011	9:15:29 PM	SiCl4 post valve closed
11/28/2011	9:15:29 PM	Bypass valve closed
11/28/2011	9:15:29 PM	Bubbler valve closed
11/28/2011	9:15:29 PM	Helium valve opened
11/28/2011	9:15:29 PM	Main Vac valve opened
11/28/2011	9:15:29 PM	Helium MFC set to  20.000000
11/28/2011	9:15:29 PM	H2 MFC set to  0.000000
11/28/2011	9:15:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:15:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:15:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:15:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:15:30 PM	Tube furnace set to 150
11/28/2011	9:16:00 PM	Helium valve closed
11/28/2011	9:16:00 PM	H2 valve closed
11/28/2011	9:16:00 PM	BCl3 valve closed
11/28/2011	9:16:00 PM	PH3 valve closed
11/28/2011	9:16:00 PM	SiCl4 pre valve closed
11/28/2011	9:16:00 PM	SiCl4 post valve closed
11/28/2011	9:16:00 PM	Bypass valve closed
11/28/2011	9:16:00 PM	Bubbler valve closed
11/28/2011	9:16:00 PM	Main Vac valve opened
11/28/2011	9:16:00 PM	Helium MFC set to  0.000000
11/28/2011	9:16:00 PM	H2 MFC set to  0.000000
11/28/2011	9:16:00 PM	BCl3 MFC set to  0.000000
11/28/2011	9:16:00 PM	PHl3 MFC set to  0.000000
11/28/2011	9:16:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:16:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:16:00 PM	Tube furnace set to 150
11/28/2011	9:16:01 PM	Run finished at 9:16 PM
11/28/2011	9:16:55 PM	Recipe started at 9:16 PM
11/28/2011	9:16:55 PM	Helium valve closed
11/28/2011	9:16:55 PM	H2 valve closed
11/28/2011	9:16:55 PM	BCl3 valve closed
11/28/2011	9:16:55 PM	PH3 valve closed
11/28/2011	9:16:55 PM	SiCl4 pre valve closed
11/28/2011	9:16:55 PM	SiCl4 post valve closed
11/28/2011	9:16:55 PM	Bypass valve closed
11/28/2011	9:16:55 PM	Bubbler valve closed
11/28/2011	9:16:55 PM	Main Vac valve opened
11/28/2011	9:16:55 PM	Helium MFC set to  0.000000
11/28/2011	9:16:55 PM	H2 MFC set to  0.000000
11/28/2011	9:16:55 PM	BCl3 MFC set to  0.000000
11/28/2011	9:16:55 PM	PHl3 MFC set to  0.000000
11/28/2011	9:16:55 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:16:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:16:55 PM	Tube furnace set to 150
11/28/2011	9:17:25 PM	H2 valve closed
11/28/2011	9:17:25 PM	BCl3 valve closed
11/28/2011	9:17:25 PM	PH3 valve closed
11/28/2011	9:17:25 PM	SiCl4 pre valve closed
11/28/2011	9:17:25 PM	SiCl4 post valve closed
11/28/2011	9:17:25 PM	Bypass valve closed
11/28/2011	9:17:25 PM	Bubbler valve closed
11/28/2011	9:17:25 PM	Helium valve opened
11/28/2011	9:17:25 PM	Main Vac valve opened
11/28/2011	9:17:25 PM	Helium MFC set to  20.000000
11/28/2011	9:17:25 PM	H2 MFC set to  0.000000
11/28/2011	9:17:25 PM	BCl3 MFC set to  0.000000
11/28/2011	9:17:25 PM	PHl3 MFC set to  0.000000
11/28/2011	9:17:25 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:17:25 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:17:25 PM	Tube furnace set to 150
11/28/2011	9:17:55 PM	Helium valve closed
11/28/2011	9:17:55 PM	H2 valve closed
11/28/2011	9:17:55 PM	BCl3 valve closed
11/28/2011	9:17:55 PM	PH3 valve closed
11/28/2011	9:17:55 PM	SiCl4 pre valve closed
11/28/2011	9:17:55 PM	SiCl4 post valve closed
11/28/2011	9:17:55 PM	Bypass valve closed
11/28/2011	9:17:55 PM	Bubbler valve closed
11/28/2011	9:17:55 PM	Main Vac valve opened
11/28/2011	9:17:55 PM	Helium MFC set to  0.000000
11/28/2011	9:17:55 PM	H2 MFC set to  0.000000
11/28/2011	9:17:55 PM	BCl3 MFC set to  0.000000
11/28/2011	9:17:55 PM	PHl3 MFC set to  0.000000
11/28/2011	9:17:55 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:17:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:17:56 PM	Tube furnace set to 150
11/28/2011	9:18:26 PM	H2 valve closed
11/28/2011	9:18:26 PM	BCl3 valve closed
11/28/2011	9:18:26 PM	PH3 valve closed
11/28/2011	9:18:26 PM	SiCl4 pre valve closed
11/28/2011	9:18:26 PM	SiCl4 post valve closed
11/28/2011	9:18:26 PM	Bypass valve closed
11/28/2011	9:18:26 PM	Bubbler valve closed
11/28/2011	9:18:26 PM	Helium valve opened
11/28/2011	9:18:26 PM	Main Vac valve opened
11/28/2011	9:18:26 PM	Helium MFC set to  20.000000
11/28/2011	9:18:26 PM	H2 MFC set to  0.000000
11/28/2011	9:18:26 PM	BCl3 MFC set to  0.000000
11/28/2011	9:18:26 PM	PHl3 MFC set to  0.000000
11/28/2011	9:18:26 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:18:26 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:18:26 PM	Tube furnace set to 150
11/28/2011	9:18:56 PM	Helium valve closed
11/28/2011	9:18:56 PM	H2 valve closed
11/28/2011	9:18:56 PM	BCl3 valve closed
11/28/2011	9:18:56 PM	PH3 valve closed
11/28/2011	9:18:56 PM	SiCl4 pre valve closed
11/28/2011	9:18:56 PM	SiCl4 post valve closed
11/28/2011	9:18:56 PM	Bypass valve closed
11/28/2011	9:18:56 PM	Bubbler valve closed
11/28/2011	9:18:56 PM	Main Vac valve opened
11/28/2011	9:18:56 PM	Helium MFC set to  0.000000
11/28/2011	9:18:56 PM	H2 MFC set to  0.000000
11/28/2011	9:18:56 PM	BCl3 MFC set to  0.000000
11/28/2011	9:18:56 PM	PHl3 MFC set to  0.000000
11/28/2011	9:18:56 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:18:56 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:18:56 PM	Tube furnace set to 150
11/28/2011	9:19:26 PM	H2 valve closed
11/28/2011	9:19:26 PM	BCl3 valve closed
11/28/2011	9:19:26 PM	PH3 valve closed
11/28/2011	9:19:26 PM	SiCl4 pre valve closed
11/28/2011	9:19:26 PM	SiCl4 post valve closed
11/28/2011	9:19:26 PM	Bypass valve closed
11/28/2011	9:19:26 PM	Bubbler valve closed
11/28/2011	9:19:26 PM	Helium valve opened
11/28/2011	9:19:26 PM	Main Vac valve opened
11/28/2011	9:19:26 PM	Helium MFC set to  20.000000
11/28/2011	9:19:26 PM	H2 MFC set to  0.000000
11/28/2011	9:19:26 PM	BCl3 MFC set to  0.000000
11/28/2011	9:19:26 PM	PHl3 MFC set to  0.000000
11/28/2011	9:19:26 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:19:26 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:19:26 PM	Tube furnace set to 150
11/28/2011	9:19:56 PM	Helium valve closed
11/28/2011	9:19:56 PM	H2 valve closed
11/28/2011	9:19:56 PM	BCl3 valve closed
11/28/2011	9:19:56 PM	PH3 valve closed
11/28/2011	9:19:56 PM	SiCl4 pre valve closed
11/28/2011	9:19:56 PM	SiCl4 post valve closed
11/28/2011	9:19:56 PM	Bypass valve closed
11/28/2011	9:19:56 PM	Bubbler valve closed
11/28/2011	9:19:56 PM	Main Vac valve opened
11/28/2011	9:19:56 PM	Helium MFC set to  0.000000
11/28/2011	9:19:56 PM	H2 MFC set to  0.000000
11/28/2011	9:19:56 PM	BCl3 MFC set to  0.000000
11/28/2011	9:19:56 PM	PHl3 MFC set to  0.000000
11/28/2011	9:19:56 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:19:56 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:19:56 PM	Tube furnace set to 150
11/28/2011	9:20:26 PM	H2 valve closed
11/28/2011	9:20:26 PM	BCl3 valve closed
11/28/2011	9:20:26 PM	PH3 valve closed
11/28/2011	9:20:26 PM	SiCl4 pre valve closed
11/28/2011	9:20:26 PM	SiCl4 post valve closed
11/28/2011	9:20:26 PM	Bypass valve closed
11/28/2011	9:20:26 PM	Bubbler valve closed
11/28/2011	9:20:26 PM	Helium valve opened
11/28/2011	9:20:26 PM	Main Vac valve opened
11/28/2011	9:20:26 PM	Helium MFC set to  20.000000
11/28/2011	9:20:26 PM	H2 MFC set to  0.000000
11/28/2011	9:20:26 PM	BCl3 MFC set to  0.000000
11/28/2011	9:20:26 PM	PHl3 MFC set to  0.000000
11/28/2011	9:20:26 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:20:26 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:20:27 PM	Tube furnace set to 150
11/28/2011	9:20:57 PM	Helium valve closed
11/28/2011	9:20:57 PM	H2 valve closed
11/28/2011	9:20:57 PM	BCl3 valve closed
11/28/2011	9:20:57 PM	PH3 valve closed
11/28/2011	9:20:57 PM	SiCl4 pre valve closed
11/28/2011	9:20:57 PM	SiCl4 post valve closed
11/28/2011	9:20:57 PM	Bypass valve closed
11/28/2011	9:20:57 PM	Bubbler valve closed
11/28/2011	9:20:57 PM	Main Vac valve opened
11/28/2011	9:20:57 PM	Helium MFC set to  0.000000
11/28/2011	9:20:57 PM	H2 MFC set to  0.000000
11/28/2011	9:20:57 PM	BCl3 MFC set to  0.000000
11/28/2011	9:20:57 PM	PHl3 MFC set to  0.000000
11/28/2011	9:20:57 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:20:57 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:20:57 PM	Tube furnace set to 150
11/28/2011	9:21:27 PM	H2 valve closed
11/28/2011	9:21:27 PM	BCl3 valve closed
11/28/2011	9:21:27 PM	PH3 valve closed
11/28/2011	9:21:27 PM	SiCl4 pre valve closed
11/28/2011	9:21:27 PM	SiCl4 post valve closed
11/28/2011	9:21:27 PM	Bypass valve closed
11/28/2011	9:21:27 PM	Bubbler valve closed
11/28/2011	9:21:27 PM	Helium valve opened
11/28/2011	9:21:27 PM	Main Vac valve opened
11/28/2011	9:21:27 PM	Helium MFC set to  20.000000
11/28/2011	9:21:27 PM	H2 MFC set to  0.000000
11/28/2011	9:21:27 PM	BCl3 MFC set to  0.000000
11/28/2011	9:21:27 PM	PHl3 MFC set to  0.000000
11/28/2011	9:21:27 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:21:27 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:21:27 PM	Tube furnace set to 150
11/28/2011	9:21:57 PM	Helium valve closed
11/28/2011	9:21:57 PM	H2 valve closed
11/28/2011	9:21:57 PM	BCl3 valve closed
11/28/2011	9:21:57 PM	PH3 valve closed
11/28/2011	9:21:57 PM	SiCl4 pre valve closed
11/28/2011	9:21:57 PM	SiCl4 post valve closed
11/28/2011	9:21:57 PM	Bypass valve closed
11/28/2011	9:21:57 PM	Bubbler valve closed
11/28/2011	9:21:57 PM	Main Vac valve opened
11/28/2011	9:21:57 PM	Helium MFC set to  0.000000
11/28/2011	9:21:57 PM	H2 MFC set to  0.000000
11/28/2011	9:21:57 PM	BCl3 MFC set to  0.000000
11/28/2011	9:21:57 PM	PHl3 MFC set to  0.000000
11/28/2011	9:21:57 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:21:57 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:21:57 PM	Tube furnace set to 150
11/28/2011	9:22:27 PM	H2 valve closed
11/28/2011	9:22:27 PM	BCl3 valve closed
11/28/2011	9:22:27 PM	PH3 valve closed
11/28/2011	9:22:27 PM	SiCl4 pre valve closed
11/28/2011	9:22:27 PM	SiCl4 post valve closed
11/28/2011	9:22:27 PM	Bypass valve closed
11/28/2011	9:22:27 PM	Bubbler valve closed
11/28/2011	9:22:27 PM	Helium valve opened
11/28/2011	9:22:27 PM	Main Vac valve opened
11/28/2011	9:22:27 PM	Helium MFC set to  20.000000
11/28/2011	9:22:27 PM	H2 MFC set to  0.000000
11/28/2011	9:22:27 PM	BCl3 MFC set to  0.000000
11/28/2011	9:22:27 PM	PHl3 MFC set to  0.000000
11/28/2011	9:22:27 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:22:27 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:22:27 PM	Tube furnace set to 150
11/28/2011	9:22:57 PM	Helium valve closed
11/28/2011	9:22:57 PM	H2 valve closed
11/28/2011	9:22:57 PM	BCl3 valve closed
11/28/2011	9:22:57 PM	PH3 valve closed
11/28/2011	9:22:57 PM	SiCl4 pre valve closed
11/28/2011	9:22:57 PM	SiCl4 post valve closed
11/28/2011	9:22:57 PM	Bypass valve closed
11/28/2011	9:22:57 PM	Bubbler valve closed
11/28/2011	9:22:57 PM	Main Vac valve opened
11/28/2011	9:22:57 PM	Helium MFC set to  0.000000
11/28/2011	9:22:58 PM	H2 MFC set to  0.000000
11/28/2011	9:22:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:22:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:22:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:22:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:22:58 PM	Tube furnace set to 150
11/28/2011	9:23:28 PM	H2 valve closed
11/28/2011	9:23:28 PM	BCl3 valve closed
11/28/2011	9:23:28 PM	PH3 valve closed
11/28/2011	9:23:28 PM	SiCl4 pre valve closed
11/28/2011	9:23:28 PM	SiCl4 post valve closed
11/28/2011	9:23:28 PM	Bypass valve closed
11/28/2011	9:23:28 PM	Bubbler valve closed
11/28/2011	9:23:28 PM	Helium valve opened
11/28/2011	9:23:28 PM	Main Vac valve opened
11/28/2011	9:23:28 PM	Helium MFC set to  20.000000
11/28/2011	9:23:28 PM	H2 MFC set to  0.000000
11/28/2011	9:23:28 PM	BCl3 MFC set to  0.000000
11/28/2011	9:23:28 PM	PHl3 MFC set to  0.000000
11/28/2011	9:23:28 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:23:28 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:23:28 PM	Tube furnace set to 150
11/28/2011	9:23:58 PM	Helium valve closed
11/28/2011	9:23:58 PM	H2 valve closed
11/28/2011	9:23:58 PM	BCl3 valve closed
11/28/2011	9:23:58 PM	PH3 valve closed
11/28/2011	9:23:58 PM	SiCl4 pre valve closed
11/28/2011	9:23:58 PM	SiCl4 post valve closed
11/28/2011	9:23:58 PM	Bypass valve closed
11/28/2011	9:23:58 PM	Bubbler valve closed
11/28/2011	9:23:58 PM	Main Vac valve opened
11/28/2011	9:23:58 PM	Helium MFC set to  0.000000
11/28/2011	9:23:58 PM	H2 MFC set to  0.000000
11/28/2011	9:23:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:23:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:23:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:23:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:23:58 PM	Tube furnace set to 150
11/28/2011	9:24:28 PM	H2 valve closed
11/28/2011	9:24:28 PM	BCl3 valve closed
11/28/2011	9:24:28 PM	PH3 valve closed
11/28/2011	9:24:28 PM	SiCl4 pre valve closed
11/28/2011	9:24:28 PM	SiCl4 post valve closed
11/28/2011	9:24:28 PM	Bypass valve closed
11/28/2011	9:24:28 PM	Bubbler valve closed
11/28/2011	9:24:28 PM	Helium valve opened
11/28/2011	9:24:28 PM	Main Vac valve opened
11/28/2011	9:24:28 PM	Helium MFC set to  20.000000
11/28/2011	9:24:28 PM	H2 MFC set to  0.000000
11/28/2011	9:24:28 PM	BCl3 MFC set to  0.000000
11/28/2011	9:24:28 PM	PHl3 MFC set to  0.000000
11/28/2011	9:24:28 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:24:28 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:24:28 PM	Tube furnace set to 150
11/28/2011	9:24:58 PM	Helium valve closed
11/28/2011	9:24:58 PM	H2 valve closed
11/28/2011	9:24:58 PM	BCl3 valve closed
11/28/2011	9:24:58 PM	PH3 valve closed
11/28/2011	9:24:58 PM	SiCl4 pre valve closed
11/28/2011	9:24:58 PM	SiCl4 post valve closed
11/28/2011	9:24:58 PM	Bypass valve closed
11/28/2011	9:24:58 PM	Bubbler valve closed
11/28/2011	9:24:58 PM	Main Vac valve opened
11/28/2011	9:24:58 PM	Helium MFC set to  0.000000
11/28/2011	9:24:58 PM	H2 MFC set to  0.000000
11/28/2011	9:24:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:24:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:24:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:24:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:24:58 PM	Tube furnace set to 150
11/28/2011	9:25:29 PM	H2 valve closed
11/28/2011	9:25:29 PM	BCl3 valve closed
11/28/2011	9:25:29 PM	PH3 valve closed
11/28/2011	9:25:29 PM	SiCl4 pre valve closed
11/28/2011	9:25:29 PM	SiCl4 post valve closed
11/28/2011	9:25:29 PM	Bypass valve closed
11/28/2011	9:25:29 PM	Bubbler valve closed
11/28/2011	9:25:29 PM	Helium valve opened
11/28/2011	9:25:29 PM	Main Vac valve opened
11/28/2011	9:25:29 PM	Helium MFC set to  20.000000
11/28/2011	9:25:29 PM	H2 MFC set to  0.000000
11/28/2011	9:25:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:25:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:25:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:25:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:25:29 PM	Tube furnace set to 150
11/28/2011	9:25:59 PM	Helium valve closed
11/28/2011	9:25:59 PM	H2 valve closed
11/28/2011	9:25:59 PM	BCl3 valve closed
11/28/2011	9:25:59 PM	PH3 valve closed
11/28/2011	9:25:59 PM	SiCl4 pre valve closed
11/28/2011	9:25:59 PM	SiCl4 post valve closed
11/28/2011	9:25:59 PM	Bypass valve closed
11/28/2011	9:25:59 PM	Bubbler valve closed
11/28/2011	9:25:59 PM	Main Vac valve opened
11/28/2011	9:25:59 PM	Helium MFC set to  0.000000
11/28/2011	9:25:59 PM	H2 MFC set to  0.000000
11/28/2011	9:25:59 PM	BCl3 MFC set to  0.000000
11/28/2011	9:25:59 PM	PHl3 MFC set to  0.000000
11/28/2011	9:25:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:25:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:25:59 PM	Tube furnace set to 150
11/28/2011	9:26:29 PM	H2 valve closed
11/28/2011	9:26:29 PM	BCl3 valve closed
11/28/2011	9:26:29 PM	PH3 valve closed
11/28/2011	9:26:29 PM	SiCl4 pre valve closed
11/28/2011	9:26:29 PM	SiCl4 post valve closed
11/28/2011	9:26:29 PM	Bypass valve closed
11/28/2011	9:26:29 PM	Bubbler valve closed
11/28/2011	9:26:29 PM	Helium valve opened
11/28/2011	9:26:29 PM	Main Vac valve opened
11/28/2011	9:26:29 PM	Helium MFC set to  20.000000
11/28/2011	9:26:29 PM	H2 MFC set to  0.000000
11/28/2011	9:26:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:26:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:26:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:26:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:26:29 PM	Tube furnace set to 150
11/28/2011	9:26:59 PM	Helium valve closed
11/28/2011	9:26:59 PM	H2 valve closed
11/28/2011	9:26:59 PM	BCl3 valve closed
11/28/2011	9:26:59 PM	PH3 valve closed
11/28/2011	9:26:59 PM	SiCl4 pre valve closed
11/28/2011	9:26:59 PM	SiCl4 post valve closed
11/28/2011	9:26:59 PM	Bypass valve closed
11/28/2011	9:26:59 PM	Bubbler valve closed
11/28/2011	9:26:59 PM	Main Vac valve opened
11/28/2011	9:26:59 PM	Helium MFC set to  0.000000
11/28/2011	9:26:59 PM	H2 MFC set to  0.000000
11/28/2011	9:26:59 PM	BCl3 MFC set to  0.000000
11/28/2011	9:26:59 PM	PHl3 MFC set to  0.000000
11/28/2011	9:26:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:26:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:26:59 PM	Tube furnace set to 150
11/28/2011	9:27:00 PM	Run finished at 9:27 PM
11/28/2011	9:27:36 PM	Main Vac valve closed
11/28/2011	9:27:48 PM	Main Vac valve opened
11/28/2011	9:27:58 PM	Recipe started at 9:27 PM
11/28/2011	9:27:58 PM	Helium valve closed
11/28/2011	9:27:58 PM	H2 valve closed
11/28/2011	9:27:58 PM	BCl3 valve closed
11/28/2011	9:27:58 PM	PH3 valve closed
11/28/2011	9:27:58 PM	SiCl4 pre valve closed
11/28/2011	9:27:58 PM	SiCl4 post valve closed
11/28/2011	9:27:58 PM	Bypass valve closed
11/28/2011	9:27:58 PM	Bubbler valve closed
11/28/2011	9:27:58 PM	Main Vac valve opened
11/28/2011	9:27:58 PM	Helium MFC set to  0.000000
11/28/2011	9:27:58 PM	H2 MFC set to  0.000000
11/28/2011	9:27:58 PM	BCl3 MFC set to  0.000000
11/28/2011	9:27:58 PM	PHl3 MFC set to  0.000000
11/28/2011	9:27:58 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:27:58 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:27:59 PM	Tube furnace set to 150
11/28/2011	9:28:29 PM	H2 valve closed
11/28/2011	9:28:29 PM	BCl3 valve closed
11/28/2011	9:28:29 PM	PH3 valve closed
11/28/2011	9:28:29 PM	SiCl4 pre valve closed
11/28/2011	9:28:29 PM	SiCl4 post valve closed
11/28/2011	9:28:29 PM	Bypass valve closed
11/28/2011	9:28:29 PM	Bubbler valve closed
11/28/2011	9:28:29 PM	Helium valve opened
11/28/2011	9:28:29 PM	Main Vac valve opened
11/28/2011	9:28:29 PM	Helium MFC set to  20.000000
11/28/2011	9:28:29 PM	H2 MFC set to  0.000000
11/28/2011	9:28:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:28:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:28:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:28:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:28:29 PM	Tube furnace set to 150
11/28/2011	9:28:59 PM	Helium valve closed
11/28/2011	9:28:59 PM	H2 valve closed
11/28/2011	9:28:59 PM	BCl3 valve closed
11/28/2011	9:28:59 PM	PH3 valve closed
11/28/2011	9:28:59 PM	SiCl4 pre valve closed
11/28/2011	9:28:59 PM	SiCl4 post valve closed
11/28/2011	9:28:59 PM	Bypass valve closed
11/28/2011	9:28:59 PM	Bubbler valve closed
11/28/2011	9:28:59 PM	Main Vac valve opened
11/28/2011	9:28:59 PM	Helium MFC set to  0.000000
11/28/2011	9:28:59 PM	H2 MFC set to  0.000000
11/28/2011	9:28:59 PM	BCl3 MFC set to  0.000000
11/28/2011	9:28:59 PM	PHl3 MFC set to  0.000000
11/28/2011	9:28:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:28:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:28:59 PM	Tube furnace set to 150
11/28/2011	9:29:29 PM	H2 valve closed
11/28/2011	9:29:29 PM	BCl3 valve closed
11/28/2011	9:29:29 PM	PH3 valve closed
11/28/2011	9:29:29 PM	SiCl4 pre valve closed
11/28/2011	9:29:29 PM	SiCl4 post valve closed
11/28/2011	9:29:29 PM	Bypass valve closed
11/28/2011	9:29:29 PM	Bubbler valve closed
11/28/2011	9:29:29 PM	Helium valve opened
11/28/2011	9:29:29 PM	Main Vac valve opened
11/28/2011	9:29:29 PM	Helium MFC set to  20.000000
11/28/2011	9:29:29 PM	H2 MFC set to  0.000000
11/28/2011	9:29:29 PM	BCl3 MFC set to  0.000000
11/28/2011	9:29:29 PM	PHl3 MFC set to  0.000000
11/28/2011	9:29:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:29:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:29:29 PM	Tube furnace set to 150
11/28/2011	9:29:59 PM	Helium valve closed
11/28/2011	9:29:59 PM	H2 valve closed
11/28/2011	9:29:59 PM	BCl3 valve closed
11/28/2011	9:29:59 PM	PH3 valve closed
11/28/2011	9:29:59 PM	SiCl4 pre valve closed
11/28/2011	9:29:59 PM	SiCl4 post valve closed
11/28/2011	9:29:59 PM	Bypass valve closed
11/28/2011	9:29:59 PM	Bubbler valve closed
11/28/2011	9:29:59 PM	Main Vac valve opened
11/28/2011	9:29:59 PM	Helium MFC set to  0.000000
11/28/2011	9:29:59 PM	H2 MFC set to  0.000000
11/28/2011	9:29:59 PM	BCl3 MFC set to  0.000000
11/28/2011	9:29:59 PM	PHl3 MFC set to  0.000000
11/28/2011	9:29:59 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:29:59 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:29:59 PM	Tube furnace set to 150
11/28/2011	9:30:29 PM	H2 valve closed
11/28/2011	9:30:29 PM	BCl3 valve closed
11/28/2011	9:30:29 PM	PH3 valve closed
11/28/2011	9:30:29 PM	SiCl4 pre valve closed
11/28/2011	9:30:29 PM	SiCl4 post valve closed
11/28/2011	9:30:29 PM	Bypass valve closed
11/28/2011	9:30:30 PM	Bubbler valve closed
11/28/2011	9:30:30 PM	Helium valve opened
11/28/2011	9:30:30 PM	Main Vac valve opened
11/28/2011	9:30:30 PM	Helium MFC set to  20.000000
11/28/2011	9:30:30 PM	H2 MFC set to  0.000000
11/28/2011	9:30:30 PM	BCl3 MFC set to  0.000000
11/28/2011	9:30:30 PM	PHl3 MFC set to  0.000000
11/28/2011	9:30:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:30:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:30:30 PM	Tube furnace set to 150
11/28/2011	9:31:00 PM	Helium valve closed
11/28/2011	9:31:00 PM	H2 valve closed
11/28/2011	9:31:00 PM	BCl3 valve closed
11/28/2011	9:31:00 PM	PH3 valve closed
11/28/2011	9:31:00 PM	SiCl4 pre valve closed
11/28/2011	9:31:00 PM	SiCl4 post valve closed
11/28/2011	9:31:00 PM	Bypass valve closed
11/28/2011	9:31:00 PM	Bubbler valve closed
11/28/2011	9:31:00 PM	Main Vac valve opened
11/28/2011	9:31:00 PM	Helium MFC set to  0.000000
11/28/2011	9:31:00 PM	H2 MFC set to  0.000000
11/28/2011	9:31:00 PM	BCl3 MFC set to  0.000000
11/28/2011	9:31:00 PM	PHl3 MFC set to  0.000000
11/28/2011	9:31:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:31:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:31:00 PM	Tube furnace set to 150
11/28/2011	9:31:30 PM	H2 valve closed
11/28/2011	9:31:30 PM	BCl3 valve closed
11/28/2011	9:31:30 PM	PH3 valve closed
11/28/2011	9:31:30 PM	SiCl4 pre valve closed
11/28/2011	9:31:30 PM	SiCl4 post valve closed
11/28/2011	9:31:30 PM	Bypass valve closed
11/28/2011	9:31:30 PM	Bubbler valve closed
11/28/2011	9:31:30 PM	Helium valve opened
11/28/2011	9:31:30 PM	Main Vac valve opened
11/28/2011	9:31:30 PM	Helium MFC set to  20.000000
11/28/2011	9:31:30 PM	H2 MFC set to  0.000000
11/28/2011	9:31:30 PM	BCl3 MFC set to  0.000000
11/28/2011	9:31:30 PM	PHl3 MFC set to  0.000000
11/28/2011	9:31:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:31:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:31:30 PM	Tube furnace set to 150
11/28/2011	9:32:00 PM	Helium valve closed
11/28/2011	9:32:00 PM	H2 valve closed
11/28/2011	9:32:00 PM	BCl3 valve closed
11/28/2011	9:32:00 PM	PH3 valve closed
11/28/2011	9:32:00 PM	SiCl4 pre valve closed
11/28/2011	9:32:00 PM	SiCl4 post valve closed
11/28/2011	9:32:00 PM	Bypass valve closed
11/28/2011	9:32:00 PM	Bubbler valve closed
11/28/2011	9:32:00 PM	Main Vac valve opened
11/28/2011	9:32:00 PM	Helium MFC set to  0.000000
11/28/2011	9:32:00 PM	H2 MFC set to  0.000000
11/28/2011	9:32:00 PM	BCl3 MFC set to  0.000000
11/28/2011	9:32:00 PM	PHl3 MFC set to  0.000000
11/28/2011	9:32:00 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:32:00 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:32:00 PM	Tube furnace set to 150
11/28/2011	9:32:30 PM	H2 valve closed
11/28/2011	9:32:30 PM	BCl3 valve closed
11/28/2011	9:32:30 PM	PH3 valve closed
11/28/2011	9:32:30 PM	SiCl4 pre valve closed
11/28/2011	9:32:30 PM	SiCl4 post valve closed
11/28/2011	9:32:30 PM	Bypass valve closed
11/28/2011	9:32:30 PM	Bubbler valve closed
11/28/2011	9:32:30 PM	Helium valve opened
11/28/2011	9:32:30 PM	Main Vac valve opened
11/28/2011	9:32:30 PM	Helium MFC set to  20.000000
11/28/2011	9:32:30 PM	H2 MFC set to  0.000000
11/28/2011	9:32:30 PM	BCl3 MFC set to  0.000000
11/28/2011	9:32:30 PM	PHl3 MFC set to  0.000000
11/28/2011	9:32:30 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:32:30 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:32:30 PM	Tube furnace set to 150
11/28/2011	9:33:01 PM	Helium valve closed
11/28/2011	9:33:01 PM	H2 valve closed
11/28/2011	9:33:01 PM	BCl3 valve closed
11/28/2011	9:33:01 PM	PH3 valve closed
11/28/2011	9:33:01 PM	SiCl4 pre valve closed
11/28/2011	9:33:01 PM	SiCl4 post valve closed
11/28/2011	9:33:01 PM	Bypass valve closed
11/28/2011	9:33:01 PM	Bubbler valve closed
11/28/2011	9:33:01 PM	Main Vac valve opened
11/28/2011	9:33:01 PM	Helium MFC set to  0.000000
11/28/2011	9:33:01 PM	H2 MFC set to  0.000000
11/28/2011	9:33:01 PM	BCl3 MFC set to  0.000000
11/28/2011	9:33:01 PM	PHl3 MFC set to  0.000000
11/28/2011	9:33:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:33:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:33:01 PM	Tube furnace set to 150
11/28/2011	9:33:31 PM	H2 valve closed
11/28/2011	9:33:31 PM	BCl3 valve closed
11/28/2011	9:33:31 PM	PH3 valve closed
11/28/2011	9:33:31 PM	SiCl4 pre valve closed
11/28/2011	9:33:31 PM	SiCl4 post valve closed
11/28/2011	9:33:31 PM	Bypass valve closed
11/28/2011	9:33:31 PM	Bubbler valve closed
11/28/2011	9:33:31 PM	Helium valve opened
11/28/2011	9:33:31 PM	Main Vac valve opened
11/28/2011	9:33:31 PM	Helium MFC set to  20.000000
11/28/2011	9:33:31 PM	H2 MFC set to  0.000000
11/28/2011	9:33:31 PM	BCl3 MFC set to  0.000000
11/28/2011	9:33:31 PM	PHl3 MFC set to  0.000000
11/28/2011	9:33:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:33:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:33:31 PM	Tube furnace set to 150
11/28/2011	9:34:01 PM	Helium valve closed
11/28/2011	9:34:01 PM	H2 valve closed
11/28/2011	9:34:01 PM	BCl3 valve closed
11/28/2011	9:34:01 PM	PH3 valve closed
11/28/2011	9:34:01 PM	SiCl4 pre valve closed
11/28/2011	9:34:01 PM	SiCl4 post valve closed
11/28/2011	9:34:01 PM	Bypass valve closed
11/28/2011	9:34:01 PM	Bubbler valve closed
11/28/2011	9:34:01 PM	Main Vac valve opened
11/28/2011	9:34:01 PM	Helium MFC set to  0.000000
11/28/2011	9:34:01 PM	H2 MFC set to  0.000000
11/28/2011	9:34:01 PM	BCl3 MFC set to  0.000000
11/28/2011	9:34:01 PM	PHl3 MFC set to  0.000000
11/28/2011	9:34:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:34:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:34:01 PM	Tube furnace set to 150
11/28/2011	9:34:31 PM	H2 valve closed
11/28/2011	9:34:31 PM	BCl3 valve closed
11/28/2011	9:34:31 PM	PH3 valve closed
11/28/2011	9:34:31 PM	SiCl4 pre valve closed
11/28/2011	9:34:31 PM	SiCl4 post valve closed
11/28/2011	9:34:31 PM	Bypass valve closed
11/28/2011	9:34:31 PM	Bubbler valve closed
11/28/2011	9:34:31 PM	Helium valve opened
11/28/2011	9:34:31 PM	Main Vac valve opened
11/28/2011	9:34:31 PM	Helium MFC set to  20.000000
11/28/2011	9:34:31 PM	H2 MFC set to  0.000000
11/28/2011	9:34:31 PM	BCl3 MFC set to  0.000000
11/28/2011	9:34:31 PM	PHl3 MFC set to  0.000000
11/28/2011	9:34:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:34:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:34:31 PM	Tube furnace set to 150
11/28/2011	9:35:01 PM	Helium valve closed
11/28/2011	9:35:01 PM	H2 valve closed
11/28/2011	9:35:01 PM	BCl3 valve closed
11/28/2011	9:35:01 PM	PH3 valve closed
11/28/2011	9:35:01 PM	SiCl4 pre valve closed
11/28/2011	9:35:01 PM	SiCl4 post valve closed
11/28/2011	9:35:01 PM	Bypass valve closed
11/28/2011	9:35:01 PM	Bubbler valve closed
11/28/2011	9:35:01 PM	Main Vac valve opened
11/28/2011	9:35:01 PM	Helium MFC set to  0.000000
11/28/2011	9:35:01 PM	H2 MFC set to  0.000000
11/28/2011	9:35:01 PM	BCl3 MFC set to  0.000000
11/28/2011	9:35:01 PM	PHl3 MFC set to  0.000000
11/28/2011	9:35:01 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:35:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:35:02 PM	Tube furnace set to 150
11/28/2011	9:35:32 PM	H2 valve closed
11/28/2011	9:35:32 PM	BCl3 valve closed
11/28/2011	9:35:32 PM	PH3 valve closed
11/28/2011	9:35:32 PM	SiCl4 pre valve closed
11/28/2011	9:35:32 PM	SiCl4 post valve closed
11/28/2011	9:35:32 PM	Bypass valve closed
11/28/2011	9:35:32 PM	Bubbler valve closed
11/28/2011	9:35:32 PM	Helium valve opened
11/28/2011	9:35:32 PM	Main Vac valve opened
11/28/2011	9:35:32 PM	Helium MFC set to  20.000000
11/28/2011	9:35:32 PM	H2 MFC set to  0.000000
11/28/2011	9:35:32 PM	BCl3 MFC set to  0.000000
11/28/2011	9:35:32 PM	PHl3 MFC set to  0.000000
11/28/2011	9:35:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:35:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:35:32 PM	Tube furnace set to 150
11/28/2011	9:36:02 PM	Helium valve closed
11/28/2011	9:36:02 PM	H2 valve closed
11/28/2011	9:36:02 PM	BCl3 valve closed
11/28/2011	9:36:02 PM	PH3 valve closed
11/28/2011	9:36:02 PM	SiCl4 pre valve closed
11/28/2011	9:36:02 PM	SiCl4 post valve closed
11/28/2011	9:36:02 PM	Bypass valve closed
11/28/2011	9:36:02 PM	Bubbler valve closed
11/28/2011	9:36:02 PM	Main Vac valve opened
11/28/2011	9:36:02 PM	Helium MFC set to  0.000000
11/28/2011	9:36:02 PM	H2 MFC set to  0.000000
11/28/2011	9:36:02 PM	BCl3 MFC set to  0.000000
11/28/2011	9:36:02 PM	PHl3 MFC set to  0.000000
11/28/2011	9:36:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:36:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:36:02 PM	Tube furnace set to 150
11/28/2011	9:36:32 PM	H2 valve closed
11/28/2011	9:36:32 PM	BCl3 valve closed
11/28/2011	9:36:32 PM	PH3 valve closed
11/28/2011	9:36:32 PM	SiCl4 pre valve closed
11/28/2011	9:36:32 PM	SiCl4 post valve closed
11/28/2011	9:36:32 PM	Bypass valve closed
11/28/2011	9:36:32 PM	Bubbler valve closed
11/28/2011	9:36:32 PM	Helium valve opened
11/28/2011	9:36:32 PM	Main Vac valve opened
11/28/2011	9:36:32 PM	Helium MFC set to  20.000000
11/28/2011	9:36:32 PM	H2 MFC set to  0.000000
11/28/2011	9:36:32 PM	BCl3 MFC set to  0.000000
11/28/2011	9:36:32 PM	PHl3 MFC set to  0.000000
11/28/2011	9:36:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:36:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:36:32 PM	Tube furnace set to 150
11/28/2011	9:37:02 PM	Helium valve closed
11/28/2011	9:37:02 PM	H2 valve closed
11/28/2011	9:37:02 PM	BCl3 valve closed
11/28/2011	9:37:02 PM	PH3 valve closed
11/28/2011	9:37:02 PM	SiCl4 pre valve closed
11/28/2011	9:37:02 PM	SiCl4 post valve closed
11/28/2011	9:37:02 PM	Bypass valve closed
11/28/2011	9:37:02 PM	Bubbler valve closed
11/28/2011	9:37:02 PM	Main Vac valve opened
11/28/2011	9:37:02 PM	Helium MFC set to  0.000000
11/28/2011	9:37:02 PM	H2 MFC set to  0.000000
11/28/2011	9:37:02 PM	BCl3 MFC set to  0.000000
11/28/2011	9:37:02 PM	PHl3 MFC set to  0.000000
11/28/2011	9:37:02 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:37:02 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:37:02 PM	Tube furnace set to 150
11/28/2011	9:37:32 PM	H2 valve closed
11/28/2011	9:37:32 PM	BCl3 valve closed
11/28/2011	9:37:32 PM	PH3 valve closed
11/28/2011	9:37:32 PM	SiCl4 pre valve closed
11/28/2011	9:37:32 PM	SiCl4 post valve closed
11/28/2011	9:37:32 PM	Bypass valve closed
11/28/2011	9:37:32 PM	Bubbler valve closed
11/28/2011	9:37:32 PM	Helium valve opened
11/28/2011	9:37:32 PM	Main Vac valve opened
11/28/2011	9:37:32 PM	Helium MFC set to  20.000000
11/28/2011	9:37:32 PM	H2 MFC set to  0.000000
11/28/2011	9:37:32 PM	BCl3 MFC set to  0.000000
11/28/2011	9:37:32 PM	PHl3 MFC set to  0.000000
11/28/2011	9:37:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:37:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:37:33 PM	Tube furnace set to 150
11/28/2011	9:38:03 PM	Helium valve closed
11/28/2011	9:38:03 PM	H2 valve closed
11/28/2011	9:38:03 PM	BCl3 valve closed
11/28/2011	9:38:03 PM	PH3 valve closed
11/28/2011	9:38:03 PM	SiCl4 pre valve closed
11/28/2011	9:38:03 PM	SiCl4 post valve closed
11/28/2011	9:38:03 PM	Bypass valve closed
11/28/2011	9:38:03 PM	Bubbler valve closed
11/28/2011	9:38:03 PM	Main Vac valve opened
11/28/2011	9:38:03 PM	Helium MFC set to  0.000000
11/28/2011	9:38:03 PM	H2 MFC set to  0.000000
11/28/2011	9:38:03 PM	BCl3 MFC set to  0.000000
11/28/2011	9:38:03 PM	PHl3 MFC set to  0.000000
11/28/2011	9:38:03 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:38:03 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:38:03 PM	Tube furnace set to 150
11/28/2011	9:38:04 PM	Run finished at 9:38 PM
11/28/2011	9:38:50 PM	Main Vac valve closed
11/28/2011	9:39:05 PM	Main Vac valve opened
11/28/2011	9:42:08 PM	Recipe started at 9:42 PM
11/28/2011	9:42:08 PM	Helium valve closed
11/28/2011	9:42:08 PM	H2 valve closed
11/28/2011	9:42:08 PM	BCl3 valve closed
11/28/2011	9:42:08 PM	PH3 valve closed
11/28/2011	9:42:08 PM	SiCl4 pre valve closed
11/28/2011	9:42:08 PM	SiCl4 post valve closed
11/28/2011	9:42:08 PM	Main Vac valve closed
11/28/2011	9:42:08 PM	Bypass valve closed
11/28/2011	9:42:08 PM	Bubbler valve closed
11/28/2011	9:42:08 PM	Helium MFC set to  0.000000
11/28/2011	9:42:08 PM	H2 MFC set to  0.000000
11/28/2011	9:42:08 PM	BCl3 MFC set to  0.000000
11/28/2011	9:42:08 PM	PHl3 MFC set to  0.000000
11/28/2011	9:42:08 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:42:08 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:42:08 PM	Tube furnace set to 0
11/28/2011	9:42:11 PM	Helium valve closed
11/28/2011	9:42:11 PM	BCl3 valve closed
11/28/2011	9:42:11 PM	PH3 valve closed
11/28/2011	9:42:11 PM	SiCl4 pre valve closed
11/28/2011	9:42:11 PM	SiCl4 post valve closed
11/28/2011	9:42:11 PM	Main Vac valve closed
11/28/2011	9:42:11 PM	Bypass valve closed
11/28/2011	9:42:11 PM	Bubbler valve closed
11/28/2011	9:42:11 PM	H2 valve opened
11/28/2011	9:42:11 PM	Helium MFC set to  0.000000
11/28/2011	9:42:11 PM	H2 MFC set to  500.000000
11/28/2011	9:42:11 PM	BCl3 MFC set to  0.000000
11/28/2011	9:42:11 PM	PHl3 MFC set to  0.000000
11/28/2011	9:42:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:42:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:42:11 PM	Tube furnace set to 0
11/28/2011	9:42:36 PM	Run aborted at 9:42 PM
11/28/2011	9:42:36 PM	Helium valve closed
11/28/2011	9:42:36 PM	H2 valve closed
11/28/2011	9:42:36 PM	BCl3 valve closed
11/28/2011	9:42:36 PM	PH3 valve closed
11/28/2011	9:42:36 PM	SiCl4 pre valve closed
11/28/2011	9:42:36 PM	SiCl4 post valve closed
11/28/2011	9:42:36 PM	Bypass valve closed
11/28/2011	9:42:36 PM	Main Vac valve closed
11/28/2011	9:42:36 PM	Bubbler valve closed
11/28/2011	9:42:36 PM	Helium MFC set to  0.000000
11/28/2011	9:42:36 PM	H2 MFC set to  0.000000
11/28/2011	9:42:36 PM	BCl3 MFC set to  0.000000
11/28/2011	9:42:36 PM	PHl3 MFC set to  0.000000
11/28/2011	9:42:36 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:42:36 PM	Tube furnace set to 0
11/28/2011	9:43:05 PM	Recipe started at 9:43 PM
11/28/2011	9:43:05 PM	Helium valve closed
11/28/2011	9:43:05 PM	H2 valve closed
11/28/2011	9:43:05 PM	BCl3 valve closed
11/28/2011	9:43:05 PM	PH3 valve closed
11/28/2011	9:43:05 PM	SiCl4 pre valve closed
11/28/2011	9:43:05 PM	SiCl4 post valve closed
11/28/2011	9:43:05 PM	Main Vac valve closed
11/28/2011	9:43:05 PM	Bypass valve closed
11/28/2011	9:43:05 PM	Bubbler valve closed
11/28/2011	9:43:05 PM	Helium MFC set to  0.000000
11/28/2011	9:43:05 PM	H2 MFC set to  0.000000
11/28/2011	9:43:05 PM	BCl3 MFC set to  0.000000
11/28/2011	9:43:05 PM	PHl3 MFC set to  0.000000
11/28/2011	9:43:05 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:43:05 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:43:05 PM	Tube furnace set to 0
11/28/2011	9:43:08 PM	Helium valve closed
11/28/2011	9:43:08 PM	BCl3 valve closed
11/28/2011	9:43:08 PM	PH3 valve closed
11/28/2011	9:43:08 PM	SiCl4 pre valve closed
11/28/2011	9:43:08 PM	SiCl4 post valve closed
11/28/2011	9:43:08 PM	Main Vac valve closed
11/28/2011	9:43:08 PM	Bypass valve closed
11/28/2011	9:43:08 PM	Bubbler valve closed
11/28/2011	9:43:08 PM	H2 valve opened
11/28/2011	9:43:08 PM	Helium MFC set to  0.000000
11/28/2011	9:43:08 PM	H2 MFC set to  500.000000
11/28/2011	9:43:08 PM	BCl3 MFC set to  0.000000
11/28/2011	9:43:08 PM	PHl3 MFC set to  0.000000
11/28/2011	9:43:08 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:43:08 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:43:08 PM	Tube furnace set to 0
11/28/2011	9:43:46 PM	Helium valve closed
11/28/2011	9:43:46 PM	BCl3 valve closed
11/28/2011	9:43:46 PM	PH3 valve closed
11/28/2011	9:43:46 PM	SiCl4 pre valve closed
11/28/2011	9:43:46 PM	SiCl4 post valve closed
11/28/2011	9:43:46 PM	Main Vac valve closed
11/28/2011	9:43:46 PM	Bypass valve closed
11/28/2011	9:43:46 PM	H2 valve opened
11/28/2011	9:43:46 PM	Bubbler valve opened
11/28/2011	9:43:46 PM	Helium MFC set to  0.000000
11/28/2011	9:43:46 PM	H2 MFC set to  500.000000
11/28/2011	9:43:46 PM	BCl3 MFC set to  0.000000
11/28/2011	9:43:46 PM	PHl3 MFC set to  0.000000
11/28/2011	9:43:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:43:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:43:46 PM	Tube furnace set to 0
11/28/2011	9:43:47 PM	Helium valve closed
11/28/2011	9:43:47 PM	BCl3 valve closed
11/28/2011	9:43:47 PM	PH3 valve closed
11/28/2011	9:43:47 PM	SiCl4 pre valve closed
11/28/2011	9:43:47 PM	SiCl4 post valve closed
11/28/2011	9:43:47 PM	Main Vac valve closed
11/28/2011	9:43:47 PM	Bypass valve closed
11/28/2011	9:43:47 PM	H2 valve opened
11/28/2011	9:43:47 PM	Bubbler valve opened
11/28/2011	9:43:47 PM	Helium MFC set to  0.000000
11/28/2011	9:43:47 PM	H2 MFC set to  500.000000
11/28/2011	9:43:47 PM	BCl3 MFC set to  0.000000
11/28/2011	9:43:47 PM	PHl3 MFC set to  0.000000
11/28/2011	9:43:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	9:43:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	9:43:47 PM	Tube furnace set to 1000
11/28/2011	10:08:47 PM	Helium valve closed
11/28/2011	10:08:47 PM	PH3 valve closed
11/28/2011	10:08:47 PM	Main Vac valve closed
11/28/2011	10:08:47 PM	Bypass valve closed
11/28/2011	10:08:47 PM	H2 valve opened
11/28/2011	10:08:47 PM	BCl3 valve opened
11/28/2011	10:08:47 PM	SiCl4 pre valve opened
11/28/2011	10:08:47 PM	SiCl4 post valve opened
11/28/2011	10:08:47 PM	Bubbler valve opened
11/28/2011	10:08:47 PM	Helium MFC set to  0.000000
11/28/2011	10:08:47 PM	H2 MFC set to  500.000000
11/28/2011	10:08:47 PM	BCl3 MFC set to  3.000000
11/28/2011	10:08:47 PM	PHl3 MFC set to  0.000000
11/28/2011	10:08:47 PM	SiCl4 MFC set to  25.000000
11/28/2011	10:08:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:08:47 PM	Tube furnace set to 1000
11/28/2011	10:38:47 PM	Helium valve closed
11/28/2011	10:38:47 PM	BCl3 valve closed
11/28/2011	10:38:47 PM	PH3 valve closed
11/28/2011	10:38:47 PM	SiCl4 pre valve closed
11/28/2011	10:38:47 PM	SiCl4 post valve closed
11/28/2011	10:38:47 PM	Main Vac valve closed
11/28/2011	10:38:47 PM	Bypass valve closed
11/28/2011	10:38:47 PM	H2 valve opened
11/28/2011	10:38:47 PM	Bubbler valve opened
11/28/2011	10:38:47 PM	Helium MFC set to  0.000000
11/28/2011	10:38:47 PM	H2 MFC set to  500.000000
11/28/2011	10:38:47 PM	BCl3 MFC set to  0.000000
11/28/2011	10:38:47 PM	PHl3 MFC set to  0.000000
11/28/2011	10:38:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	10:38:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:38:47 PM	Tube furnace set to 750
11/28/2011	10:48:47 PM	H2 valve closed
11/28/2011	10:48:47 PM	BCl3 valve closed
11/28/2011	10:48:47 PM	PH3 valve closed
11/28/2011	10:48:47 PM	SiCl4 pre valve closed
11/28/2011	10:48:47 PM	SiCl4 post valve closed
11/28/2011	10:48:47 PM	Main Vac valve closed
11/28/2011	10:48:47 PM	Bypass valve closed
11/28/2011	10:48:47 PM	Helium valve opened
11/28/2011	10:48:47 PM	Bubbler valve opened
11/28/2011	10:48:47 PM	Helium MFC set to  500.000000
11/28/2011	10:48:47 PM	H2 MFC set to  0.000000
11/28/2011	10:48:47 PM	BCl3 MFC set to  0.000000
11/28/2011	10:48:47 PM	PHl3 MFC set to  0.000000
11/28/2011	10:48:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	10:48:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:48:47 PM	Tube furnace set to 0
11/28/2011	10:55:22 PM	Helium valve closed
11/28/2011	10:55:22 PM	H2 valve closed
11/28/2011	10:55:22 PM	BCl3 valve closed
11/28/2011	10:55:22 PM	PH3 valve closed
11/28/2011	10:55:22 PM	SiCl4 pre valve closed
11/28/2011	10:55:22 PM	SiCl4 post valve closed
11/28/2011	10:55:22 PM	Main Vac valve closed
11/28/2011	10:55:22 PM	Bypass valve closed
11/28/2011	10:55:22 PM	Bubbler valve closed
11/28/2011	10:55:22 PM	Helium MFC set to  0.000000
11/28/2011	10:55:22 PM	H2 MFC set to  0.000000
11/28/2011	10:55:22 PM	BCl3 MFC set to  0.000000
11/28/2011	10:55:22 PM	PHl3 MFC set to  0.000000
11/28/2011	10:55:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	10:55:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:55:23 PM	Tube furnace set to 0
11/28/2011	10:55:24 PM	Run finished at 10:55 PM
11/28/2011	10:55:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	10:55:28 PM	Recipe started at 10:55 PM
11/28/2011	10:55:28 PM	Helium valve closed
11/28/2011	10:55:28 PM	H2 valve closed
11/28/2011	10:55:28 PM	BCl3 valve closed
11/28/2011	10:55:28 PM	PH3 valve closed
11/28/2011	10:55:28 PM	SiCl4 pre valve closed
11/28/2011	10:55:28 PM	SiCl4 post valve closed
11/28/2011	10:55:28 PM	Main Vac valve closed
11/28/2011	10:55:28 PM	Bypass valve closed
11/28/2011	10:55:28 PM	Bubbler valve closed
11/28/2011	10:55:28 PM	Helium MFC set to  0.000000
11/28/2011	10:55:28 PM	H2 MFC set to  0.000000
11/28/2011	10:55:28 PM	BCl3 MFC set to  0.000000
11/28/2011	10:55:28 PM	PHl3 MFC set to  0.000000
11/28/2011	10:55:28 PM	SiCl4 MFC set to  0.000000
11/28/2011	10:55:28 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:55:28 PM	Tube furnace set to 0
11/28/2011	10:55:31 PM	H2 valve closed
11/28/2011	10:55:31 PM	BCl3 valve closed
11/28/2011	10:55:31 PM	PH3 valve closed
11/28/2011	10:55:31 PM	SiCl4 pre valve closed
11/28/2011	10:55:31 PM	SiCl4 post valve closed
11/28/2011	10:55:31 PM	Main Vac valve closed
11/28/2011	10:55:31 PM	Bypass valve closed
11/28/2011	10:55:31 PM	Bubbler valve closed
11/28/2011	10:55:31 PM	Helium valve opened
11/28/2011	10:55:31 PM	Helium MFC set to  500.000000
11/28/2011	10:55:31 PM	H2 MFC set to  0.000000
11/28/2011	10:55:31 PM	BCl3 MFC set to  0.000000
11/28/2011	10:55:31 PM	PHl3 MFC set to  0.000000
11/28/2011	10:55:31 PM	SiCl4 MFC set to  0.000000
11/28/2011	10:55:31 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:55:32 PM	Tube furnace set to 0
11/28/2011	10:55:32 PM	Helium valve closed
11/28/2011	10:55:32 PM	H2 valve closed
11/28/2011	10:55:32 PM	BCl3 valve closed
11/28/2011	10:55:32 PM	PH3 valve closed
11/28/2011	10:55:32 PM	SiCl4 pre valve closed
11/28/2011	10:55:32 PM	SiCl4 post valve closed
11/28/2011	10:55:32 PM	Main Vac valve closed
11/28/2011	10:55:32 PM	Bypass valve closed
11/28/2011	10:55:32 PM	Bubbler valve closed
11/28/2011	10:55:32 PM	Helium MFC set to  0.000000
11/28/2011	10:55:32 PM	H2 MFC set to  0.000000
11/28/2011	10:55:32 PM	BCl3 MFC set to  0.000000
11/28/2011	10:55:32 PM	PHl3 MFC set to  0.000000
11/28/2011	10:55:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	10:55:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	10:55:32 PM	Tube furnace set to 0
11/28/2011	10:55:33 PM	Run finished at 10:55 PM
11/28/2011	10:55:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2011	11:02:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	11:02:22 PM	Recipe started at 11:02 PM
11/28/2011	11:02:22 PM	Helium valve closed
11/28/2011	11:02:22 PM	H2 valve closed
11/28/2011	11:02:22 PM	BCl3 valve closed
11/28/2011	11:02:22 PM	PH3 valve closed
11/28/2011	11:02:22 PM	SiCl4 pre valve closed
11/28/2011	11:02:22 PM	SiCl4 post valve closed
11/28/2011	11:02:22 PM	Main Vac valve closed
11/28/2011	11:02:22 PM	Bubbler valve closed
11/28/2011	11:02:22 PM	Bypass valve opened
11/28/2011	11:02:22 PM	Helium MFC set to  0.000000
11/28/2011	11:02:22 PM	H2 MFC set to  0.000000
11/28/2011	11:02:22 PM	BCl3 MFC set to  0.000000
11/28/2011	11:02:22 PM	PHl3 MFC set to  0.000000
11/28/2011	11:02:22 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:02:22 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:02:22 PM	Tube furnace set to 0
11/28/2011	11:03:52 PM	Helium valve closed
11/28/2011	11:03:52 PM	H2 valve closed
11/28/2011	11:03:52 PM	BCl3 valve closed
11/28/2011	11:03:52 PM	PH3 valve closed
11/28/2011	11:03:52 PM	SiCl4 pre valve closed
11/28/2011	11:03:52 PM	SiCl4 post valve closed
11/28/2011	11:03:52 PM	Main Vac valve closed
11/28/2011	11:03:52 PM	Bubbler valve closed
11/28/2011	11:03:52 PM	Bypass valve opened
11/28/2011	11:03:52 PM	Helium MFC set to  0.000000
11/28/2011	11:03:52 PM	H2 MFC set to  0.000000
11/28/2011	11:03:52 PM	BCl3 MFC set to  0.000000
11/28/2011	11:03:52 PM	PHl3 MFC set to  0.000000
11/28/2011	11:03:52 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:03:52 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:03:53 PM	Tube furnace set to 0
11/28/2011	11:04:53 PM	Helium valve closed
11/28/2011	11:04:53 PM	H2 valve closed
11/28/2011	11:04:53 PM	BCl3 valve closed
11/28/2011	11:04:53 PM	PH3 valve closed
11/28/2011	11:04:53 PM	SiCl4 pre valve closed
11/28/2011	11:04:53 PM	SiCl4 post valve closed
11/28/2011	11:04:53 PM	Bypass valve closed
11/28/2011	11:04:53 PM	Bubbler valve closed
11/28/2011	11:04:53 PM	Main Vac valve opened
11/28/2011	11:04:53 PM	Helium MFC set to  0.000000
11/28/2011	11:04:53 PM	H2 MFC set to  0.000000
11/28/2011	11:04:53 PM	BCl3 MFC set to  0.000000
11/28/2011	11:04:53 PM	PHl3 MFC set to  0.000000
11/28/2011	11:04:53 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:04:53 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:04:53 PM	Tube furnace set to 0
11/28/2011	11:04:54 PM	Run finished at 11:04 PM
11/28/2011	11:04:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2011	11:11:12 PM	Recipe started at 11:11 PM
11/28/2011	11:11:12 PM	Helium valve closed
11/28/2011	11:11:12 PM	H2 valve closed
11/28/2011	11:11:12 PM	BCl3 valve closed
11/28/2011	11:11:12 PM	PH3 valve closed
11/28/2011	11:11:12 PM	SiCl4 pre valve closed
11/28/2011	11:11:12 PM	SiCl4 post valve closed
11/28/2011	11:11:12 PM	Bypass valve closed
11/28/2011	11:11:12 PM	Bubbler valve closed
11/28/2011	11:11:12 PM	Main Vac valve opened
11/28/2011	11:11:12 PM	Helium MFC set to  0.000000
11/28/2011	11:11:12 PM	H2 MFC set to  0.000000
11/28/2011	11:11:12 PM	BCl3 MFC set to  0.000000
11/28/2011	11:11:12 PM	PHl3 MFC set to  0.000000
11/28/2011	11:11:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:11:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:11:12 PM	Tube furnace set to 150
11/28/2011	11:11:42 PM	H2 valve closed
11/28/2011	11:11:42 PM	BCl3 valve closed
11/28/2011	11:11:42 PM	PH3 valve closed
11/28/2011	11:11:42 PM	SiCl4 pre valve closed
11/28/2011	11:11:42 PM	SiCl4 post valve closed
11/28/2011	11:11:42 PM	Bypass valve closed
11/28/2011	11:11:42 PM	Bubbler valve closed
11/28/2011	11:11:42 PM	Helium valve opened
11/28/2011	11:11:42 PM	Main Vac valve opened
11/28/2011	11:11:42 PM	Helium MFC set to  20.000000
11/28/2011	11:11:42 PM	H2 MFC set to  0.000000
11/28/2011	11:11:42 PM	BCl3 MFC set to  0.000000
11/28/2011	11:11:42 PM	PHl3 MFC set to  0.000000
11/28/2011	11:11:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:11:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:11:42 PM	Tube furnace set to 150
11/28/2011	11:12:12 PM	Helium valve closed
11/28/2011	11:12:12 PM	H2 valve closed
11/28/2011	11:12:12 PM	BCl3 valve closed
11/28/2011	11:12:12 PM	PH3 valve closed
11/28/2011	11:12:12 PM	SiCl4 pre valve closed
11/28/2011	11:12:12 PM	SiCl4 post valve closed
11/28/2011	11:12:12 PM	Bypass valve closed
11/28/2011	11:12:12 PM	Bubbler valve closed
11/28/2011	11:12:12 PM	Main Vac valve opened
11/28/2011	11:12:12 PM	Helium MFC set to  0.000000
11/28/2011	11:12:12 PM	H2 MFC set to  0.000000
11/28/2011	11:12:12 PM	BCl3 MFC set to  0.000000
11/28/2011	11:12:12 PM	PHl3 MFC set to  0.000000
11/28/2011	11:12:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:12:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:12:12 PM	Tube furnace set to 150
11/28/2011	11:12:42 PM	H2 valve closed
11/28/2011	11:12:42 PM	BCl3 valve closed
11/28/2011	11:12:42 PM	PH3 valve closed
11/28/2011	11:12:42 PM	SiCl4 pre valve closed
11/28/2011	11:12:42 PM	SiCl4 post valve closed
11/28/2011	11:12:42 PM	Bypass valve closed
11/28/2011	11:12:42 PM	Bubbler valve closed
11/28/2011	11:12:42 PM	Helium valve opened
11/28/2011	11:12:42 PM	Main Vac valve opened
11/28/2011	11:12:42 PM	Helium MFC set to  20.000000
11/28/2011	11:12:42 PM	H2 MFC set to  0.000000
11/28/2011	11:12:42 PM	BCl3 MFC set to  0.000000
11/28/2011	11:12:42 PM	PHl3 MFC set to  0.000000
11/28/2011	11:12:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:12:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:12:42 PM	Tube furnace set to 150
11/28/2011	11:13:12 PM	Helium valve closed
11/28/2011	11:13:12 PM	H2 valve closed
11/28/2011	11:13:12 PM	BCl3 valve closed
11/28/2011	11:13:12 PM	PH3 valve closed
11/28/2011	11:13:12 PM	SiCl4 pre valve closed
11/28/2011	11:13:12 PM	SiCl4 post valve closed
11/28/2011	11:13:12 PM	Bypass valve closed
11/28/2011	11:13:12 PM	Bubbler valve closed
11/28/2011	11:13:12 PM	Main Vac valve opened
11/28/2011	11:13:12 PM	Helium MFC set to  0.000000
11/28/2011	11:13:12 PM	H2 MFC set to  0.000000
11/28/2011	11:13:12 PM	BCl3 MFC set to  0.000000
11/28/2011	11:13:12 PM	PHl3 MFC set to  0.000000
11/28/2011	11:13:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:13:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:13:13 PM	Tube furnace set to 150
11/28/2011	11:13:43 PM	H2 valve closed
11/28/2011	11:13:43 PM	BCl3 valve closed
11/28/2011	11:13:43 PM	PH3 valve closed
11/28/2011	11:13:43 PM	SiCl4 pre valve closed
11/28/2011	11:13:43 PM	SiCl4 post valve closed
11/28/2011	11:13:43 PM	Bypass valve closed
11/28/2011	11:13:43 PM	Bubbler valve closed
11/28/2011	11:13:43 PM	Helium valve opened
11/28/2011	11:13:43 PM	Main Vac valve opened
11/28/2011	11:13:43 PM	Helium MFC set to  20.000000
11/28/2011	11:13:43 PM	H2 MFC set to  0.000000
11/28/2011	11:13:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:13:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:13:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:13:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:13:43 PM	Tube furnace set to 150
11/28/2011	11:14:13 PM	Helium valve closed
11/28/2011	11:14:13 PM	H2 valve closed
11/28/2011	11:14:13 PM	BCl3 valve closed
11/28/2011	11:14:13 PM	PH3 valve closed
11/28/2011	11:14:13 PM	SiCl4 pre valve closed
11/28/2011	11:14:13 PM	SiCl4 post valve closed
11/28/2011	11:14:13 PM	Bypass valve closed
11/28/2011	11:14:13 PM	Bubbler valve closed
11/28/2011	11:14:13 PM	Main Vac valve opened
11/28/2011	11:14:13 PM	Helium MFC set to  0.000000
11/28/2011	11:14:13 PM	H2 MFC set to  0.000000
11/28/2011	11:14:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:14:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:14:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:14:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:14:13 PM	Tube furnace set to 150
11/28/2011	11:14:43 PM	H2 valve closed
11/28/2011	11:14:43 PM	BCl3 valve closed
11/28/2011	11:14:43 PM	PH3 valve closed
11/28/2011	11:14:43 PM	SiCl4 pre valve closed
11/28/2011	11:14:43 PM	SiCl4 post valve closed
11/28/2011	11:14:43 PM	Bypass valve closed
11/28/2011	11:14:43 PM	Bubbler valve closed
11/28/2011	11:14:43 PM	Helium valve opened
11/28/2011	11:14:43 PM	Main Vac valve opened
11/28/2011	11:14:43 PM	Helium MFC set to  20.000000
11/28/2011	11:14:43 PM	H2 MFC set to  0.000000
11/28/2011	11:14:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:14:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:14:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:14:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:14:43 PM	Tube furnace set to 150
11/28/2011	11:15:13 PM	Helium valve closed
11/28/2011	11:15:13 PM	H2 valve closed
11/28/2011	11:15:13 PM	BCl3 valve closed
11/28/2011	11:15:13 PM	PH3 valve closed
11/28/2011	11:15:13 PM	SiCl4 pre valve closed
11/28/2011	11:15:13 PM	SiCl4 post valve closed
11/28/2011	11:15:13 PM	Bypass valve closed
11/28/2011	11:15:13 PM	Bubbler valve closed
11/28/2011	11:15:13 PM	Main Vac valve opened
11/28/2011	11:15:13 PM	Helium MFC set to  0.000000
11/28/2011	11:15:13 PM	H2 MFC set to  0.000000
11/28/2011	11:15:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:15:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:15:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:15:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:15:13 PM	Tube furnace set to 150
11/28/2011	11:15:43 PM	H2 valve closed
11/28/2011	11:15:43 PM	BCl3 valve closed
11/28/2011	11:15:43 PM	PH3 valve closed
11/28/2011	11:15:43 PM	SiCl4 pre valve closed
11/28/2011	11:15:43 PM	SiCl4 post valve closed
11/28/2011	11:15:43 PM	Bypass valve closed
11/28/2011	11:15:43 PM	Bubbler valve closed
11/28/2011	11:15:43 PM	Helium valve opened
11/28/2011	11:15:43 PM	Main Vac valve opened
11/28/2011	11:15:43 PM	Helium MFC set to  20.000000
11/28/2011	11:15:43 PM	H2 MFC set to  0.000000
11/28/2011	11:15:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:15:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:15:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:15:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:15:44 PM	Tube furnace set to 150
11/28/2011	11:16:14 PM	Helium valve closed
11/28/2011	11:16:14 PM	H2 valve closed
11/28/2011	11:16:14 PM	BCl3 valve closed
11/28/2011	11:16:14 PM	PH3 valve closed
11/28/2011	11:16:14 PM	SiCl4 pre valve closed
11/28/2011	11:16:14 PM	SiCl4 post valve closed
11/28/2011	11:16:14 PM	Bypass valve closed
11/28/2011	11:16:14 PM	Bubbler valve closed
11/28/2011	11:16:14 PM	Main Vac valve opened
11/28/2011	11:16:14 PM	Helium MFC set to  0.000000
11/28/2011	11:16:14 PM	H2 MFC set to  0.000000
11/28/2011	11:16:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:16:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:16:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:16:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:16:14 PM	Tube furnace set to 150
11/28/2011	11:16:44 PM	H2 valve closed
11/28/2011	11:16:44 PM	BCl3 valve closed
11/28/2011	11:16:44 PM	PH3 valve closed
11/28/2011	11:16:44 PM	SiCl4 pre valve closed
11/28/2011	11:16:44 PM	SiCl4 post valve closed
11/28/2011	11:16:44 PM	Bypass valve closed
11/28/2011	11:16:44 PM	Bubbler valve closed
11/28/2011	11:16:44 PM	Helium valve opened
11/28/2011	11:16:44 PM	Main Vac valve opened
11/28/2011	11:16:44 PM	Helium MFC set to  20.000000
11/28/2011	11:16:44 PM	H2 MFC set to  0.000000
11/28/2011	11:16:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:16:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:16:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:16:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:16:44 PM	Tube furnace set to 150
11/28/2011	11:17:14 PM	Helium valve closed
11/28/2011	11:17:14 PM	H2 valve closed
11/28/2011	11:17:14 PM	BCl3 valve closed
11/28/2011	11:17:14 PM	PH3 valve closed
11/28/2011	11:17:14 PM	SiCl4 pre valve closed
11/28/2011	11:17:14 PM	SiCl4 post valve closed
11/28/2011	11:17:14 PM	Bypass valve closed
11/28/2011	11:17:14 PM	Bubbler valve closed
11/28/2011	11:17:14 PM	Main Vac valve opened
11/28/2011	11:17:14 PM	Helium MFC set to  0.000000
11/28/2011	11:17:14 PM	H2 MFC set to  0.000000
11/28/2011	11:17:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:17:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:17:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:17:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:17:14 PM	Tube furnace set to 150
11/28/2011	11:17:44 PM	H2 valve closed
11/28/2011	11:17:44 PM	BCl3 valve closed
11/28/2011	11:17:44 PM	PH3 valve closed
11/28/2011	11:17:44 PM	SiCl4 pre valve closed
11/28/2011	11:17:44 PM	SiCl4 post valve closed
11/28/2011	11:17:44 PM	Bypass valve closed
11/28/2011	11:17:44 PM	Bubbler valve closed
11/28/2011	11:17:44 PM	Helium valve opened
11/28/2011	11:17:44 PM	Main Vac valve opened
11/28/2011	11:17:44 PM	Helium MFC set to  20.000000
11/28/2011	11:17:44 PM	H2 MFC set to  0.000000
11/28/2011	11:17:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:17:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:17:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:17:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:17:44 PM	Tube furnace set to 150
11/28/2011	11:18:14 PM	Helium valve closed
11/28/2011	11:18:14 PM	H2 valve closed
11/28/2011	11:18:14 PM	BCl3 valve closed
11/28/2011	11:18:14 PM	PH3 valve closed
11/28/2011	11:18:14 PM	SiCl4 pre valve closed
11/28/2011	11:18:14 PM	SiCl4 post valve closed
11/28/2011	11:18:14 PM	Bypass valve closed
11/28/2011	11:18:14 PM	Bubbler valve closed
11/28/2011	11:18:14 PM	Main Vac valve opened
11/28/2011	11:18:14 PM	Helium MFC set to  0.000000
11/28/2011	11:18:14 PM	H2 MFC set to  0.000000
11/28/2011	11:18:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:18:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:18:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:18:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:18:15 PM	Tube furnace set to 150
11/28/2011	11:18:45 PM	H2 valve closed
11/28/2011	11:18:45 PM	BCl3 valve closed
11/28/2011	11:18:45 PM	PH3 valve closed
11/28/2011	11:18:45 PM	SiCl4 pre valve closed
11/28/2011	11:18:45 PM	SiCl4 post valve closed
11/28/2011	11:18:45 PM	Bypass valve closed
11/28/2011	11:18:45 PM	Bubbler valve closed
11/28/2011	11:18:45 PM	Helium valve opened
11/28/2011	11:18:45 PM	Main Vac valve opened
11/28/2011	11:18:45 PM	Helium MFC set to  20.000000
11/28/2011	11:18:45 PM	H2 MFC set to  0.000000
11/28/2011	11:18:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:18:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:18:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:18:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:18:45 PM	Tube furnace set to 150
11/28/2011	11:19:15 PM	Helium valve closed
11/28/2011	11:19:15 PM	H2 valve closed
11/28/2011	11:19:15 PM	BCl3 valve closed
11/28/2011	11:19:15 PM	PH3 valve closed
11/28/2011	11:19:15 PM	SiCl4 pre valve closed
11/28/2011	11:19:15 PM	SiCl4 post valve closed
11/28/2011	11:19:15 PM	Bypass valve closed
11/28/2011	11:19:15 PM	Bubbler valve closed
11/28/2011	11:19:15 PM	Main Vac valve opened
11/28/2011	11:19:15 PM	Helium MFC set to  0.000000
11/28/2011	11:19:15 PM	H2 MFC set to  0.000000
11/28/2011	11:19:15 PM	BCl3 MFC set to  0.000000
11/28/2011	11:19:15 PM	PHl3 MFC set to  0.000000
11/28/2011	11:19:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:19:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:19:15 PM	Tube furnace set to 150
11/28/2011	11:19:45 PM	H2 valve closed
11/28/2011	11:19:45 PM	BCl3 valve closed
11/28/2011	11:19:45 PM	PH3 valve closed
11/28/2011	11:19:45 PM	SiCl4 pre valve closed
11/28/2011	11:19:45 PM	SiCl4 post valve closed
11/28/2011	11:19:45 PM	Bypass valve closed
11/28/2011	11:19:45 PM	Bubbler valve closed
11/28/2011	11:19:45 PM	Helium valve opened
11/28/2011	11:19:45 PM	Main Vac valve opened
11/28/2011	11:19:45 PM	Helium MFC set to  20.000000
11/28/2011	11:19:45 PM	H2 MFC set to  0.000000
11/28/2011	11:19:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:19:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:19:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:19:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:19:45 PM	Tube furnace set to 150
11/28/2011	11:20:15 PM	Helium valve closed
11/28/2011	11:20:15 PM	H2 valve closed
11/28/2011	11:20:15 PM	BCl3 valve closed
11/28/2011	11:20:15 PM	PH3 valve closed
11/28/2011	11:20:15 PM	SiCl4 pre valve closed
11/28/2011	11:20:15 PM	SiCl4 post valve closed
11/28/2011	11:20:15 PM	Bypass valve closed
11/28/2011	11:20:15 PM	Bubbler valve closed
11/28/2011	11:20:15 PM	Main Vac valve opened
11/28/2011	11:20:15 PM	Helium MFC set to  0.000000
11/28/2011	11:20:15 PM	H2 MFC set to  0.000000
11/28/2011	11:20:15 PM	BCl3 MFC set to  0.000000
11/28/2011	11:20:15 PM	PHl3 MFC set to  0.000000
11/28/2011	11:20:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:20:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:20:15 PM	Tube furnace set to 150
11/28/2011	11:20:45 PM	H2 valve closed
11/28/2011	11:20:45 PM	BCl3 valve closed
11/28/2011	11:20:45 PM	PH3 valve closed
11/28/2011	11:20:45 PM	SiCl4 pre valve closed
11/28/2011	11:20:45 PM	SiCl4 post valve closed
11/28/2011	11:20:45 PM	Bypass valve closed
11/28/2011	11:20:45 PM	Bubbler valve closed
11/28/2011	11:20:45 PM	Helium valve opened
11/28/2011	11:20:45 PM	Main Vac valve opened
11/28/2011	11:20:45 PM	Helium MFC set to  20.000000
11/28/2011	11:20:45 PM	H2 MFC set to  0.000000
11/28/2011	11:20:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:20:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:20:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:20:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:20:46 PM	Tube furnace set to 150
11/28/2011	11:21:16 PM	Helium valve closed
11/28/2011	11:21:16 PM	H2 valve closed
11/28/2011	11:21:16 PM	BCl3 valve closed
11/28/2011	11:21:16 PM	PH3 valve closed
11/28/2011	11:21:16 PM	SiCl4 pre valve closed
11/28/2011	11:21:16 PM	SiCl4 post valve closed
11/28/2011	11:21:16 PM	Bypass valve closed
11/28/2011	11:21:16 PM	Bubbler valve closed
11/28/2011	11:21:16 PM	Main Vac valve opened
11/28/2011	11:21:16 PM	Helium MFC set to  0.000000
11/28/2011	11:21:16 PM	H2 MFC set to  0.000000
11/28/2011	11:21:16 PM	BCl3 MFC set to  0.000000
11/28/2011	11:21:16 PM	PHl3 MFC set to  0.000000
11/28/2011	11:21:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:21:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:21:16 PM	Tube furnace set to 150
11/28/2011	11:21:17 PM	Run finished at 11:21 PM
11/28/2011	11:21:41 PM	Recipe started at 11:21 PM
11/28/2011	11:21:41 PM	Helium valve closed
11/28/2011	11:21:41 PM	H2 valve closed
11/28/2011	11:21:41 PM	BCl3 valve closed
11/28/2011	11:21:41 PM	PH3 valve closed
11/28/2011	11:21:41 PM	SiCl4 pre valve closed
11/28/2011	11:21:41 PM	SiCl4 post valve closed
11/28/2011	11:21:41 PM	Bypass valve closed
11/28/2011	11:21:41 PM	Bubbler valve closed
11/28/2011	11:21:41 PM	Main Vac valve opened
11/28/2011	11:21:41 PM	Helium MFC set to  0.000000
11/28/2011	11:21:41 PM	H2 MFC set to  0.000000
11/28/2011	11:21:41 PM	BCl3 MFC set to  0.000000
11/28/2011	11:21:41 PM	PHl3 MFC set to  0.000000
11/28/2011	11:21:41 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:21:41 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:21:41 PM	Tube furnace set to 150
11/28/2011	11:21:43 PM	H2 valve closed
11/28/2011	11:21:43 PM	BCl3 valve closed
11/28/2011	11:21:43 PM	PH3 valve closed
11/28/2011	11:21:43 PM	SiCl4 pre valve closed
11/28/2011	11:21:43 PM	SiCl4 post valve closed
11/28/2011	11:21:43 PM	Bypass valve closed
11/28/2011	11:21:43 PM	Bubbler valve closed
11/28/2011	11:21:43 PM	Helium valve opened
11/28/2011	11:21:43 PM	Main Vac valve opened
11/28/2011	11:21:43 PM	Helium MFC set to  20.000000
11/28/2011	11:21:43 PM	H2 MFC set to  0.000000
11/28/2011	11:21:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:21:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:21:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:21:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:21:43 PM	Tube furnace set to 150
11/28/2011	11:22:13 PM	Helium valve closed
11/28/2011	11:22:13 PM	H2 valve closed
11/28/2011	11:22:13 PM	BCl3 valve closed
11/28/2011	11:22:13 PM	PH3 valve closed
11/28/2011	11:22:13 PM	SiCl4 pre valve closed
11/28/2011	11:22:13 PM	SiCl4 post valve closed
11/28/2011	11:22:13 PM	Bypass valve closed
11/28/2011	11:22:13 PM	Bubbler valve closed
11/28/2011	11:22:13 PM	Main Vac valve opened
11/28/2011	11:22:13 PM	Helium MFC set to  0.000000
11/28/2011	11:22:13 PM	H2 MFC set to  0.000000
11/28/2011	11:22:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:22:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:22:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:22:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:22:13 PM	Tube furnace set to 150
11/28/2011	11:22:43 PM	H2 valve closed
11/28/2011	11:22:43 PM	BCl3 valve closed
11/28/2011	11:22:43 PM	PH3 valve closed
11/28/2011	11:22:43 PM	SiCl4 pre valve closed
11/28/2011	11:22:43 PM	SiCl4 post valve closed
11/28/2011	11:22:43 PM	Bypass valve closed
11/28/2011	11:22:43 PM	Bubbler valve closed
11/28/2011	11:22:43 PM	Helium valve opened
11/28/2011	11:22:43 PM	Main Vac valve opened
11/28/2011	11:22:43 PM	Helium MFC set to  20.000000
11/28/2011	11:22:43 PM	H2 MFC set to  0.000000
11/28/2011	11:22:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:22:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:22:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:22:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:22:43 PM	Tube furnace set to 150
11/28/2011	11:23:13 PM	Helium valve closed
11/28/2011	11:23:13 PM	H2 valve closed
11/28/2011	11:23:13 PM	BCl3 valve closed
11/28/2011	11:23:13 PM	PH3 valve closed
11/28/2011	11:23:13 PM	SiCl4 pre valve closed
11/28/2011	11:23:13 PM	SiCl4 post valve closed
11/28/2011	11:23:13 PM	Bypass valve closed
11/28/2011	11:23:13 PM	Bubbler valve closed
11/28/2011	11:23:13 PM	Main Vac valve opened
11/28/2011	11:23:13 PM	Helium MFC set to  0.000000
11/28/2011	11:23:13 PM	H2 MFC set to  0.000000
11/28/2011	11:23:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:23:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:23:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:23:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:23:14 PM	Tube furnace set to 150
11/28/2011	11:23:44 PM	H2 valve closed
11/28/2011	11:23:44 PM	BCl3 valve closed
11/28/2011	11:23:44 PM	PH3 valve closed
11/28/2011	11:23:44 PM	SiCl4 pre valve closed
11/28/2011	11:23:44 PM	SiCl4 post valve closed
11/28/2011	11:23:44 PM	Bypass valve closed
11/28/2011	11:23:44 PM	Bubbler valve closed
11/28/2011	11:23:44 PM	Helium valve opened
11/28/2011	11:23:44 PM	Main Vac valve opened
11/28/2011	11:23:44 PM	Helium MFC set to  20.000000
11/28/2011	11:23:44 PM	H2 MFC set to  0.000000
11/28/2011	11:23:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:23:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:23:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:23:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:23:44 PM	Tube furnace set to 150
11/28/2011	11:24:14 PM	Helium valve closed
11/28/2011	11:24:14 PM	H2 valve closed
11/28/2011	11:24:14 PM	BCl3 valve closed
11/28/2011	11:24:14 PM	PH3 valve closed
11/28/2011	11:24:14 PM	SiCl4 pre valve closed
11/28/2011	11:24:14 PM	SiCl4 post valve closed
11/28/2011	11:24:14 PM	Bypass valve closed
11/28/2011	11:24:14 PM	Bubbler valve closed
11/28/2011	11:24:14 PM	Main Vac valve opened
11/28/2011	11:24:14 PM	Helium MFC set to  0.000000
11/28/2011	11:24:14 PM	H2 MFC set to  0.000000
11/28/2011	11:24:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:24:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:24:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:24:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:24:14 PM	Tube furnace set to 150
11/28/2011	11:24:44 PM	H2 valve closed
11/28/2011	11:24:44 PM	BCl3 valve closed
11/28/2011	11:24:44 PM	PH3 valve closed
11/28/2011	11:24:44 PM	SiCl4 pre valve closed
11/28/2011	11:24:44 PM	SiCl4 post valve closed
11/28/2011	11:24:44 PM	Bypass valve closed
11/28/2011	11:24:44 PM	Bubbler valve closed
11/28/2011	11:24:44 PM	Helium valve opened
11/28/2011	11:24:44 PM	Main Vac valve opened
11/28/2011	11:24:44 PM	Helium MFC set to  20.000000
11/28/2011	11:24:44 PM	H2 MFC set to  0.000000
11/28/2011	11:24:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:24:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:24:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:24:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:24:44 PM	Tube furnace set to 150
11/28/2011	11:25:14 PM	Helium valve closed
11/28/2011	11:25:14 PM	H2 valve closed
11/28/2011	11:25:14 PM	BCl3 valve closed
11/28/2011	11:25:14 PM	PH3 valve closed
11/28/2011	11:25:14 PM	SiCl4 pre valve closed
11/28/2011	11:25:14 PM	SiCl4 post valve closed
11/28/2011	11:25:14 PM	Bypass valve closed
11/28/2011	11:25:14 PM	Bubbler valve closed
11/28/2011	11:25:14 PM	Main Vac valve opened
11/28/2011	11:25:14 PM	Helium MFC set to  0.000000
11/28/2011	11:25:14 PM	H2 MFC set to  0.000000
11/28/2011	11:25:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:25:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:25:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:25:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:25:14 PM	Tube furnace set to 150
11/28/2011	11:25:44 PM	H2 valve closed
11/28/2011	11:25:44 PM	BCl3 valve closed
11/28/2011	11:25:44 PM	PH3 valve closed
11/28/2011	11:25:44 PM	SiCl4 pre valve closed
11/28/2011	11:25:44 PM	SiCl4 post valve closed
11/28/2011	11:25:44 PM	Bypass valve closed
11/28/2011	11:25:44 PM	Bubbler valve closed
11/28/2011	11:25:44 PM	Helium valve opened
11/28/2011	11:25:44 PM	Main Vac valve opened
11/28/2011	11:25:44 PM	Helium MFC set to  20.000000
11/28/2011	11:25:44 PM	H2 MFC set to  0.000000
11/28/2011	11:25:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:25:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:25:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:25:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:25:45 PM	Tube furnace set to 150
11/28/2011	11:26:15 PM	Helium valve closed
11/28/2011	11:26:15 PM	H2 valve closed
11/28/2011	11:26:15 PM	BCl3 valve closed
11/28/2011	11:26:15 PM	PH3 valve closed
11/28/2011	11:26:15 PM	SiCl4 pre valve closed
11/28/2011	11:26:15 PM	SiCl4 post valve closed
11/28/2011	11:26:15 PM	Bypass valve closed
11/28/2011	11:26:15 PM	Bubbler valve closed
11/28/2011	11:26:15 PM	Main Vac valve opened
11/28/2011	11:26:15 PM	Helium MFC set to  0.000000
11/28/2011	11:26:15 PM	H2 MFC set to  0.000000
11/28/2011	11:26:15 PM	BCl3 MFC set to  0.000000
11/28/2011	11:26:15 PM	PHl3 MFC set to  0.000000
11/28/2011	11:26:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:26:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:26:15 PM	Tube furnace set to 150
11/28/2011	11:26:45 PM	H2 valve closed
11/28/2011	11:26:45 PM	BCl3 valve closed
11/28/2011	11:26:45 PM	PH3 valve closed
11/28/2011	11:26:45 PM	SiCl4 pre valve closed
11/28/2011	11:26:45 PM	SiCl4 post valve closed
11/28/2011	11:26:45 PM	Bypass valve closed
11/28/2011	11:26:45 PM	Bubbler valve closed
11/28/2011	11:26:45 PM	Helium valve opened
11/28/2011	11:26:45 PM	Main Vac valve opened
11/28/2011	11:26:45 PM	Helium MFC set to  20.000000
11/28/2011	11:26:45 PM	H2 MFC set to  0.000000
11/28/2011	11:26:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:26:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:26:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:26:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:26:45 PM	Tube furnace set to 150
11/28/2011	11:27:15 PM	Helium valve closed
11/28/2011	11:27:15 PM	H2 valve closed
11/28/2011	11:27:15 PM	BCl3 valve closed
11/28/2011	11:27:15 PM	PH3 valve closed
11/28/2011	11:27:15 PM	SiCl4 pre valve closed
11/28/2011	11:27:15 PM	SiCl4 post valve closed
11/28/2011	11:27:15 PM	Bypass valve closed
11/28/2011	11:27:15 PM	Bubbler valve closed
11/28/2011	11:27:15 PM	Main Vac valve opened
11/28/2011	11:27:15 PM	Helium MFC set to  0.000000
11/28/2011	11:27:15 PM	H2 MFC set to  0.000000
11/28/2011	11:27:15 PM	BCl3 MFC set to  0.000000
11/28/2011	11:27:15 PM	PHl3 MFC set to  0.000000
11/28/2011	11:27:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:27:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:27:15 PM	Tube furnace set to 150
11/28/2011	11:27:45 PM	H2 valve closed
11/28/2011	11:27:45 PM	BCl3 valve closed
11/28/2011	11:27:45 PM	PH3 valve closed
11/28/2011	11:27:45 PM	SiCl4 pre valve closed
11/28/2011	11:27:45 PM	SiCl4 post valve closed
11/28/2011	11:27:45 PM	Bypass valve closed
11/28/2011	11:27:45 PM	Bubbler valve closed
11/28/2011	11:27:45 PM	Helium valve opened
11/28/2011	11:27:45 PM	Main Vac valve opened
11/28/2011	11:27:45 PM	Helium MFC set to  20.000000
11/28/2011	11:27:45 PM	H2 MFC set to  0.000000
11/28/2011	11:27:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:27:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:27:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:27:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:27:45 PM	Tube furnace set to 150
11/28/2011	11:28:15 PM	Helium valve closed
11/28/2011	11:28:16 PM	H2 valve closed
11/28/2011	11:28:16 PM	BCl3 valve closed
11/28/2011	11:28:16 PM	PH3 valve closed
11/28/2011	11:28:16 PM	SiCl4 pre valve closed
11/28/2011	11:28:16 PM	SiCl4 post valve closed
11/28/2011	11:28:16 PM	Bypass valve closed
11/28/2011	11:28:16 PM	Bubbler valve closed
11/28/2011	11:28:16 PM	Main Vac valve opened
11/28/2011	11:28:16 PM	Helium MFC set to  0.000000
11/28/2011	11:28:16 PM	H2 MFC set to  0.000000
11/28/2011	11:28:16 PM	BCl3 MFC set to  0.000000
11/28/2011	11:28:16 PM	PHl3 MFC set to  0.000000
11/28/2011	11:28:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:28:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:28:16 PM	Tube furnace set to 150
11/28/2011	11:28:46 PM	H2 valve closed
11/28/2011	11:28:46 PM	BCl3 valve closed
11/28/2011	11:28:46 PM	PH3 valve closed
11/28/2011	11:28:46 PM	SiCl4 pre valve closed
11/28/2011	11:28:46 PM	SiCl4 post valve closed
11/28/2011	11:28:46 PM	Bypass valve closed
11/28/2011	11:28:46 PM	Bubbler valve closed
11/28/2011	11:28:46 PM	Helium valve opened
11/28/2011	11:28:46 PM	Main Vac valve opened
11/28/2011	11:28:46 PM	Helium MFC set to  20.000000
11/28/2011	11:28:46 PM	H2 MFC set to  0.000000
11/28/2011	11:28:46 PM	BCl3 MFC set to  0.000000
11/28/2011	11:28:46 PM	PHl3 MFC set to  0.000000
11/28/2011	11:28:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:28:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:28:46 PM	Tube furnace set to 150
11/28/2011	11:29:16 PM	Helium valve closed
11/28/2011	11:29:16 PM	H2 valve closed
11/28/2011	11:29:16 PM	BCl3 valve closed
11/28/2011	11:29:16 PM	PH3 valve closed
11/28/2011	11:29:16 PM	SiCl4 pre valve closed
11/28/2011	11:29:16 PM	SiCl4 post valve closed
11/28/2011	11:29:16 PM	Bypass valve closed
11/28/2011	11:29:16 PM	Bubbler valve closed
11/28/2011	11:29:16 PM	Main Vac valve opened
11/28/2011	11:29:16 PM	Helium MFC set to  0.000000
11/28/2011	11:29:16 PM	H2 MFC set to  0.000000
11/28/2011	11:29:16 PM	BCl3 MFC set to  0.000000
11/28/2011	11:29:16 PM	PHl3 MFC set to  0.000000
11/28/2011	11:29:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:29:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:29:16 PM	Tube furnace set to 150
11/28/2011	11:29:46 PM	H2 valve closed
11/28/2011	11:29:46 PM	BCl3 valve closed
11/28/2011	11:29:46 PM	PH3 valve closed
11/28/2011	11:29:46 PM	SiCl4 pre valve closed
11/28/2011	11:29:46 PM	SiCl4 post valve closed
11/28/2011	11:29:46 PM	Bypass valve closed
11/28/2011	11:29:46 PM	Bubbler valve closed
11/28/2011	11:29:46 PM	Helium valve opened
11/28/2011	11:29:46 PM	Main Vac valve opened
11/28/2011	11:29:46 PM	Helium MFC set to  20.000000
11/28/2011	11:29:46 PM	H2 MFC set to  0.000000
11/28/2011	11:29:46 PM	BCl3 MFC set to  0.000000
11/28/2011	11:29:46 PM	PHl3 MFC set to  0.000000
11/28/2011	11:29:46 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:29:46 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:29:46 PM	Tube furnace set to 150
11/28/2011	11:30:16 PM	Helium valve closed
11/28/2011	11:30:16 PM	H2 valve closed
11/28/2011	11:30:16 PM	BCl3 valve closed
11/28/2011	11:30:16 PM	PH3 valve closed
11/28/2011	11:30:16 PM	SiCl4 pre valve closed
11/28/2011	11:30:16 PM	SiCl4 post valve closed
11/28/2011	11:30:16 PM	Bypass valve closed
11/28/2011	11:30:16 PM	Bubbler valve closed
11/28/2011	11:30:16 PM	Main Vac valve opened
11/28/2011	11:30:16 PM	Helium MFC set to  0.000000
11/28/2011	11:30:16 PM	H2 MFC set to  0.000000
11/28/2011	11:30:16 PM	BCl3 MFC set to  0.000000
11/28/2011	11:30:16 PM	PHl3 MFC set to  0.000000
11/28/2011	11:30:16 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:30:16 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:30:17 PM	Tube furnace set to 150
11/28/2011	11:30:47 PM	H2 valve closed
11/28/2011	11:30:47 PM	BCl3 valve closed
11/28/2011	11:30:47 PM	PH3 valve closed
11/28/2011	11:30:47 PM	SiCl4 pre valve closed
11/28/2011	11:30:47 PM	SiCl4 post valve closed
11/28/2011	11:30:47 PM	Bypass valve closed
11/28/2011	11:30:47 PM	Bubbler valve closed
11/28/2011	11:30:47 PM	Helium valve opened
11/28/2011	11:30:47 PM	Main Vac valve opened
11/28/2011	11:30:47 PM	Helium MFC set to  20.000000
11/28/2011	11:30:47 PM	H2 MFC set to  0.000000
11/28/2011	11:30:47 PM	BCl3 MFC set to  0.000000
11/28/2011	11:30:47 PM	PHl3 MFC set to  0.000000
11/28/2011	11:30:47 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:30:47 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:30:47 PM	Tube furnace set to 150
11/28/2011	11:31:17 PM	Helium valve closed
11/28/2011	11:31:17 PM	H2 valve closed
11/28/2011	11:31:17 PM	BCl3 valve closed
11/28/2011	11:31:17 PM	PH3 valve closed
11/28/2011	11:31:17 PM	SiCl4 pre valve closed
11/28/2011	11:31:17 PM	SiCl4 post valve closed
11/28/2011	11:31:17 PM	Bypass valve closed
11/28/2011	11:31:17 PM	Bubbler valve closed
11/28/2011	11:31:17 PM	Main Vac valve opened
11/28/2011	11:31:17 PM	Helium MFC set to  0.000000
11/28/2011	11:31:17 PM	H2 MFC set to  0.000000
11/28/2011	11:31:17 PM	BCl3 MFC set to  0.000000
11/28/2011	11:31:17 PM	PHl3 MFC set to  0.000000
11/28/2011	11:31:17 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:31:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:31:17 PM	Tube furnace set to 150
11/28/2011	11:31:18 PM	Run finished at 11:31 PM
11/28/2011	11:34:11 PM	Recipe started at 11:34 PM
11/28/2011	11:34:11 PM	Helium valve closed
11/28/2011	11:34:11 PM	H2 valve closed
11/28/2011	11:34:11 PM	BCl3 valve closed
11/28/2011	11:34:11 PM	PH3 valve closed
11/28/2011	11:34:11 PM	SiCl4 pre valve closed
11/28/2011	11:34:11 PM	SiCl4 post valve closed
11/28/2011	11:34:11 PM	Bypass valve closed
11/28/2011	11:34:11 PM	Bubbler valve closed
11/28/2011	11:34:11 PM	Main Vac valve opened
11/28/2011	11:34:11 PM	Helium MFC set to  0.000000
11/28/2011	11:34:11 PM	H2 MFC set to  0.000000
11/28/2011	11:34:11 PM	BCl3 MFC set to  0.000000
11/28/2011	11:34:11 PM	PHl3 MFC set to  0.000000
11/28/2011	11:34:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:34:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:34:11 PM	Tube furnace set to 150
11/28/2011	11:34:41 PM	H2 valve closed
11/28/2011	11:34:41 PM	BCl3 valve closed
11/28/2011	11:34:41 PM	PH3 valve closed
11/28/2011	11:34:41 PM	SiCl4 pre valve closed
11/28/2011	11:34:41 PM	SiCl4 post valve closed
11/28/2011	11:34:41 PM	Bypass valve closed
11/28/2011	11:34:41 PM	Bubbler valve closed
11/28/2011	11:34:41 PM	Helium valve opened
11/28/2011	11:34:41 PM	Main Vac valve opened
11/28/2011	11:34:41 PM	Helium MFC set to  20.000000
11/28/2011	11:34:41 PM	H2 MFC set to  0.000000
11/28/2011	11:34:41 PM	BCl3 MFC set to  0.000000
11/28/2011	11:34:41 PM	PHl3 MFC set to  0.000000
11/28/2011	11:34:41 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:34:41 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:34:41 PM	Tube furnace set to 150
11/28/2011	11:35:11 PM	Helium valve closed
11/28/2011	11:35:11 PM	H2 valve closed
11/28/2011	11:35:11 PM	BCl3 valve closed
11/28/2011	11:35:11 PM	PH3 valve closed
11/28/2011	11:35:11 PM	SiCl4 pre valve closed
11/28/2011	11:35:11 PM	SiCl4 post valve closed
11/28/2011	11:35:11 PM	Bypass valve closed
11/28/2011	11:35:11 PM	Bubbler valve closed
11/28/2011	11:35:11 PM	Main Vac valve opened
11/28/2011	11:35:11 PM	Helium MFC set to  0.000000
11/28/2011	11:35:11 PM	H2 MFC set to  0.000000
11/28/2011	11:35:11 PM	BCl3 MFC set to  0.000000
11/28/2011	11:35:11 PM	PHl3 MFC set to  0.000000
11/28/2011	11:35:11 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:35:11 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:35:11 PM	Tube furnace set to 150
11/28/2011	11:35:42 PM	H2 valve closed
11/28/2011	11:35:42 PM	BCl3 valve closed
11/28/2011	11:35:42 PM	PH3 valve closed
11/28/2011	11:35:42 PM	SiCl4 pre valve closed
11/28/2011	11:35:42 PM	SiCl4 post valve closed
11/28/2011	11:35:42 PM	Bypass valve closed
11/28/2011	11:35:42 PM	Bubbler valve closed
11/28/2011	11:35:42 PM	Helium valve opened
11/28/2011	11:35:42 PM	Main Vac valve opened
11/28/2011	11:35:42 PM	Helium MFC set to  20.000000
11/28/2011	11:35:42 PM	H2 MFC set to  0.000000
11/28/2011	11:35:42 PM	BCl3 MFC set to  0.000000
11/28/2011	11:35:42 PM	PHl3 MFC set to  0.000000
11/28/2011	11:35:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:35:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:35:42 PM	Tube furnace set to 150
11/28/2011	11:36:12 PM	Helium valve closed
11/28/2011	11:36:12 PM	H2 valve closed
11/28/2011	11:36:12 PM	BCl3 valve closed
11/28/2011	11:36:12 PM	PH3 valve closed
11/28/2011	11:36:12 PM	SiCl4 pre valve closed
11/28/2011	11:36:12 PM	SiCl4 post valve closed
11/28/2011	11:36:12 PM	Bypass valve closed
11/28/2011	11:36:12 PM	Bubbler valve closed
11/28/2011	11:36:12 PM	Main Vac valve opened
11/28/2011	11:36:12 PM	Helium MFC set to  0.000000
11/28/2011	11:36:12 PM	H2 MFC set to  0.000000
11/28/2011	11:36:12 PM	BCl3 MFC set to  0.000000
11/28/2011	11:36:12 PM	PHl3 MFC set to  0.000000
11/28/2011	11:36:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:36:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:36:12 PM	Tube furnace set to 150
11/28/2011	11:36:42 PM	H2 valve closed
11/28/2011	11:36:42 PM	BCl3 valve closed
11/28/2011	11:36:42 PM	PH3 valve closed
11/28/2011	11:36:42 PM	SiCl4 pre valve closed
11/28/2011	11:36:42 PM	SiCl4 post valve closed
11/28/2011	11:36:42 PM	Bypass valve closed
11/28/2011	11:36:42 PM	Bubbler valve closed
11/28/2011	11:36:42 PM	Helium valve opened
11/28/2011	11:36:42 PM	Main Vac valve opened
11/28/2011	11:36:42 PM	Helium MFC set to  20.000000
11/28/2011	11:36:42 PM	H2 MFC set to  0.000000
11/28/2011	11:36:42 PM	BCl3 MFC set to  0.000000
11/28/2011	11:36:42 PM	PHl3 MFC set to  0.000000
11/28/2011	11:36:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:36:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:36:42 PM	Tube furnace set to 150
11/28/2011	11:37:12 PM	Helium valve closed
11/28/2011	11:37:12 PM	H2 valve closed
11/28/2011	11:37:12 PM	BCl3 valve closed
11/28/2011	11:37:12 PM	PH3 valve closed
11/28/2011	11:37:12 PM	SiCl4 pre valve closed
11/28/2011	11:37:12 PM	SiCl4 post valve closed
11/28/2011	11:37:12 PM	Bypass valve closed
11/28/2011	11:37:12 PM	Bubbler valve closed
11/28/2011	11:37:12 PM	Main Vac valve opened
11/28/2011	11:37:12 PM	Helium MFC set to  0.000000
11/28/2011	11:37:12 PM	H2 MFC set to  0.000000
11/28/2011	11:37:12 PM	BCl3 MFC set to  0.000000
11/28/2011	11:37:12 PM	PHl3 MFC set to  0.000000
11/28/2011	11:37:12 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:37:12 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:37:12 PM	Tube furnace set to 150
11/28/2011	11:37:42 PM	H2 valve closed
11/28/2011	11:37:42 PM	BCl3 valve closed
11/28/2011	11:37:42 PM	PH3 valve closed
11/28/2011	11:37:42 PM	SiCl4 pre valve closed
11/28/2011	11:37:42 PM	SiCl4 post valve closed
11/28/2011	11:37:42 PM	Bypass valve closed
11/28/2011	11:37:42 PM	Bubbler valve closed
11/28/2011	11:37:42 PM	Helium valve opened
11/28/2011	11:37:42 PM	Main Vac valve opened
11/28/2011	11:37:42 PM	Helium MFC set to  20.000000
11/28/2011	11:37:42 PM	H2 MFC set to  0.000000
11/28/2011	11:37:42 PM	BCl3 MFC set to  0.000000
11/28/2011	11:37:42 PM	PHl3 MFC set to  0.000000
11/28/2011	11:37:42 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:37:42 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:37:43 PM	Tube furnace set to 150
11/28/2011	11:38:13 PM	Helium valve closed
11/28/2011	11:38:13 PM	H2 valve closed
11/28/2011	11:38:13 PM	BCl3 valve closed
11/28/2011	11:38:13 PM	PH3 valve closed
11/28/2011	11:38:13 PM	SiCl4 pre valve closed
11/28/2011	11:38:13 PM	SiCl4 post valve closed
11/28/2011	11:38:13 PM	Bypass valve closed
11/28/2011	11:38:13 PM	Bubbler valve closed
11/28/2011	11:38:13 PM	Main Vac valve opened
11/28/2011	11:38:13 PM	Helium MFC set to  0.000000
11/28/2011	11:38:13 PM	H2 MFC set to  0.000000
11/28/2011	11:38:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:38:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:38:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:38:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:38:13 PM	Tube furnace set to 150
11/28/2011	11:38:43 PM	H2 valve closed
11/28/2011	11:38:43 PM	BCl3 valve closed
11/28/2011	11:38:43 PM	PH3 valve closed
11/28/2011	11:38:43 PM	SiCl4 pre valve closed
11/28/2011	11:38:43 PM	SiCl4 post valve closed
11/28/2011	11:38:43 PM	Bypass valve closed
11/28/2011	11:38:43 PM	Bubbler valve closed
11/28/2011	11:38:43 PM	Helium valve opened
11/28/2011	11:38:43 PM	Main Vac valve opened
11/28/2011	11:38:43 PM	Helium MFC set to  20.000000
11/28/2011	11:38:43 PM	H2 MFC set to  0.000000
11/28/2011	11:38:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:38:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:38:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:38:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:38:43 PM	Tube furnace set to 150
11/28/2011	11:39:13 PM	Helium valve closed
11/28/2011	11:39:13 PM	H2 valve closed
11/28/2011	11:39:13 PM	BCl3 valve closed
11/28/2011	11:39:13 PM	PH3 valve closed
11/28/2011	11:39:13 PM	SiCl4 pre valve closed
11/28/2011	11:39:13 PM	SiCl4 post valve closed
11/28/2011	11:39:13 PM	Bypass valve closed
11/28/2011	11:39:13 PM	Bubbler valve closed
11/28/2011	11:39:13 PM	Main Vac valve opened
11/28/2011	11:39:13 PM	Helium MFC set to  0.000000
11/28/2011	11:39:13 PM	H2 MFC set to  0.000000
11/28/2011	11:39:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:39:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:39:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:39:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:39:13 PM	Tube furnace set to 150
11/28/2011	11:39:43 PM	H2 valve closed
11/28/2011	11:39:43 PM	BCl3 valve closed
11/28/2011	11:39:43 PM	PH3 valve closed
11/28/2011	11:39:43 PM	SiCl4 pre valve closed
11/28/2011	11:39:43 PM	SiCl4 post valve closed
11/28/2011	11:39:43 PM	Bypass valve closed
11/28/2011	11:39:43 PM	Bubbler valve closed
11/28/2011	11:39:43 PM	Helium valve opened
11/28/2011	11:39:43 PM	Main Vac valve opened
11/28/2011	11:39:43 PM	Helium MFC set to  20.000000
11/28/2011	11:39:43 PM	H2 MFC set to  0.000000
11/28/2011	11:39:43 PM	BCl3 MFC set to  0.000000
11/28/2011	11:39:43 PM	PHl3 MFC set to  0.000000
11/28/2011	11:39:43 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:39:43 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:39:43 PM	Tube furnace set to 150
11/28/2011	11:40:13 PM	Helium valve closed
11/28/2011	11:40:13 PM	H2 valve closed
11/28/2011	11:40:13 PM	BCl3 valve closed
11/28/2011	11:40:13 PM	PH3 valve closed
11/28/2011	11:40:13 PM	SiCl4 pre valve closed
11/28/2011	11:40:13 PM	SiCl4 post valve closed
11/28/2011	11:40:13 PM	Bypass valve closed
11/28/2011	11:40:13 PM	Bubbler valve closed
11/28/2011	11:40:13 PM	Main Vac valve opened
11/28/2011	11:40:13 PM	Helium MFC set to  0.000000
11/28/2011	11:40:13 PM	H2 MFC set to  0.000000
11/28/2011	11:40:13 PM	BCl3 MFC set to  0.000000
11/28/2011	11:40:13 PM	PHl3 MFC set to  0.000000
11/28/2011	11:40:13 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:40:13 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:40:14 PM	Tube furnace set to 150
11/28/2011	11:40:44 PM	H2 valve closed
11/28/2011	11:40:44 PM	BCl3 valve closed
11/28/2011	11:40:44 PM	PH3 valve closed
11/28/2011	11:40:44 PM	SiCl4 pre valve closed
11/28/2011	11:40:44 PM	SiCl4 post valve closed
11/28/2011	11:40:44 PM	Bypass valve closed
11/28/2011	11:40:44 PM	Bubbler valve closed
11/28/2011	11:40:44 PM	Helium valve opened
11/28/2011	11:40:44 PM	Main Vac valve opened
11/28/2011	11:40:44 PM	Helium MFC set to  20.000000
11/28/2011	11:40:44 PM	H2 MFC set to  0.000000
11/28/2011	11:40:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:40:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:40:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:40:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:40:44 PM	Tube furnace set to 150
11/28/2011	11:41:14 PM	Helium valve closed
11/28/2011	11:41:14 PM	H2 valve closed
11/28/2011	11:41:14 PM	BCl3 valve closed
11/28/2011	11:41:14 PM	PH3 valve closed
11/28/2011	11:41:14 PM	SiCl4 pre valve closed
11/28/2011	11:41:14 PM	SiCl4 post valve closed
11/28/2011	11:41:14 PM	Bypass valve closed
11/28/2011	11:41:14 PM	Bubbler valve closed
11/28/2011	11:41:14 PM	Main Vac valve opened
11/28/2011	11:41:14 PM	Helium MFC set to  0.000000
11/28/2011	11:41:14 PM	H2 MFC set to  0.000000
11/28/2011	11:41:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:41:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:41:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:41:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:41:14 PM	Tube furnace set to 150
11/28/2011	11:41:44 PM	H2 valve closed
11/28/2011	11:41:44 PM	BCl3 valve closed
11/28/2011	11:41:44 PM	PH3 valve closed
11/28/2011	11:41:44 PM	SiCl4 pre valve closed
11/28/2011	11:41:44 PM	SiCl4 post valve closed
11/28/2011	11:41:44 PM	Bypass valve closed
11/28/2011	11:41:44 PM	Bubbler valve closed
11/28/2011	11:41:44 PM	Helium valve opened
11/28/2011	11:41:44 PM	Main Vac valve opened
11/28/2011	11:41:44 PM	Helium MFC set to  20.000000
11/28/2011	11:41:44 PM	H2 MFC set to  0.000000
11/28/2011	11:41:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:41:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:41:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:41:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:41:44 PM	Tube furnace set to 150
11/28/2011	11:42:14 PM	Helium valve closed
11/28/2011	11:42:14 PM	H2 valve closed
11/28/2011	11:42:14 PM	BCl3 valve closed
11/28/2011	11:42:14 PM	PH3 valve closed
11/28/2011	11:42:14 PM	SiCl4 pre valve closed
11/28/2011	11:42:14 PM	SiCl4 post valve closed
11/28/2011	11:42:14 PM	Bypass valve closed
11/28/2011	11:42:14 PM	Bubbler valve closed
11/28/2011	11:42:14 PM	Main Vac valve opened
11/28/2011	11:42:14 PM	Helium MFC set to  0.000000
11/28/2011	11:42:14 PM	H2 MFC set to  0.000000
11/28/2011	11:42:14 PM	BCl3 MFC set to  0.000000
11/28/2011	11:42:14 PM	PHl3 MFC set to  0.000000
11/28/2011	11:42:14 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:42:14 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:42:14 PM	Tube furnace set to 150
11/28/2011	11:42:44 PM	H2 valve closed
11/28/2011	11:42:44 PM	BCl3 valve closed
11/28/2011	11:42:44 PM	PH3 valve closed
11/28/2011	11:42:44 PM	SiCl4 pre valve closed
11/28/2011	11:42:44 PM	SiCl4 post valve closed
11/28/2011	11:42:44 PM	Bypass valve closed
11/28/2011	11:42:44 PM	Bubbler valve closed
11/28/2011	11:42:44 PM	Helium valve opened
11/28/2011	11:42:44 PM	Main Vac valve opened
11/28/2011	11:42:44 PM	Helium MFC set to  20.000000
11/28/2011	11:42:44 PM	H2 MFC set to  0.000000
11/28/2011	11:42:44 PM	BCl3 MFC set to  0.000000
11/28/2011	11:42:44 PM	PHl3 MFC set to  0.000000
11/28/2011	11:42:44 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:42:44 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:42:45 PM	Tube furnace set to 150
11/28/2011	11:43:15 PM	Helium valve closed
11/28/2011	11:43:15 PM	H2 valve closed
11/28/2011	11:43:15 PM	BCl3 valve closed
11/28/2011	11:43:15 PM	PH3 valve closed
11/28/2011	11:43:15 PM	SiCl4 pre valve closed
11/28/2011	11:43:15 PM	SiCl4 post valve closed
11/28/2011	11:43:15 PM	Bypass valve closed
11/28/2011	11:43:15 PM	Bubbler valve closed
11/28/2011	11:43:15 PM	Main Vac valve opened
11/28/2011	11:43:15 PM	Helium MFC set to  0.000000
11/28/2011	11:43:15 PM	H2 MFC set to  0.000000
11/28/2011	11:43:15 PM	BCl3 MFC set to  0.000000
11/28/2011	11:43:15 PM	PHl3 MFC set to  0.000000
11/28/2011	11:43:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:43:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:43:15 PM	Tube furnace set to 150
11/28/2011	11:43:45 PM	H2 valve closed
11/28/2011	11:43:45 PM	BCl3 valve closed
11/28/2011	11:43:45 PM	PH3 valve closed
11/28/2011	11:43:45 PM	SiCl4 pre valve closed
11/28/2011	11:43:45 PM	SiCl4 post valve closed
11/28/2011	11:43:45 PM	Bypass valve closed
11/28/2011	11:43:45 PM	Bubbler valve closed
11/28/2011	11:43:45 PM	Helium valve opened
11/28/2011	11:43:45 PM	Main Vac valve opened
11/28/2011	11:43:45 PM	Helium MFC set to  20.000000
11/28/2011	11:43:45 PM	H2 MFC set to  0.000000
11/28/2011	11:43:45 PM	BCl3 MFC set to  0.000000
11/28/2011	11:43:45 PM	PHl3 MFC set to  0.000000
11/28/2011	11:43:45 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:43:45 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:43:45 PM	Tube furnace set to 150
11/28/2011	11:44:15 PM	Helium valve closed
11/28/2011	11:44:15 PM	H2 valve closed
11/28/2011	11:44:15 PM	BCl3 valve closed
11/28/2011	11:44:15 PM	PH3 valve closed
11/28/2011	11:44:15 PM	SiCl4 pre valve closed
11/28/2011	11:44:15 PM	SiCl4 post valve closed
11/28/2011	11:44:15 PM	Bypass valve closed
11/28/2011	11:44:15 PM	Bubbler valve closed
11/28/2011	11:44:15 PM	Main Vac valve opened
11/28/2011	11:44:15 PM	Helium MFC set to  0.000000
11/28/2011	11:44:15 PM	H2 MFC set to  0.000000
11/28/2011	11:44:15 PM	BCl3 MFC set to  0.000000
11/28/2011	11:44:15 PM	PHl3 MFC set to  0.000000
11/28/2011	11:44:15 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:44:15 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:44:15 PM	Tube furnace set to 150
11/28/2011	11:44:16 PM	Run finished at 11:44 PM
11/28/2011	11:53:01 PM	Main Vac valve closed
11/28/2011	11:53:13 PM	Main Vac valve opened
11/28/2011	11:54:26 PM	Recipe started at 11:54 PM
11/28/2011	11:54:26 PM	Helium valve closed
11/28/2011	11:54:26 PM	H2 valve closed
11/28/2011	11:54:26 PM	BCl3 valve closed
11/28/2011	11:54:26 PM	PH3 valve closed
11/28/2011	11:54:26 PM	SiCl4 pre valve closed
11/28/2011	11:54:26 PM	SiCl4 post valve closed
11/28/2011	11:54:26 PM	Main Vac valve closed
11/28/2011	11:54:26 PM	Bypass valve closed
11/28/2011	11:54:26 PM	Bubbler valve closed
11/28/2011	11:54:26 PM	Helium MFC set to  0.000000
11/28/2011	11:54:26 PM	H2 MFC set to  0.000000
11/28/2011	11:54:26 PM	BCl3 MFC set to  0.000000
11/28/2011	11:54:26 PM	PHl3 MFC set to  0.000000
11/28/2011	11:54:26 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:54:26 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:54:26 PM	Tube furnace set to 0
11/28/2011	11:54:29 PM	Helium valve closed
11/28/2011	11:54:29 PM	BCl3 valve closed
11/28/2011	11:54:29 PM	PH3 valve closed
11/28/2011	11:54:29 PM	SiCl4 pre valve closed
11/28/2011	11:54:29 PM	SiCl4 post valve closed
11/28/2011	11:54:29 PM	Main Vac valve closed
11/28/2011	11:54:29 PM	Bypass valve closed
11/28/2011	11:54:29 PM	Bubbler valve closed
11/28/2011	11:54:29 PM	H2 valve opened
11/28/2011	11:54:29 PM	Helium MFC set to  0.000000
11/28/2011	11:54:29 PM	H2 MFC set to  500.000000
11/28/2011	11:54:29 PM	BCl3 MFC set to  0.000000
11/28/2011	11:54:29 PM	PHl3 MFC set to  0.000000
11/28/2011	11:54:29 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:54:29 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:54:30 PM	Tube furnace set to 0
11/28/2011	11:55:32 PM	Helium valve closed
11/28/2011	11:55:32 PM	BCl3 valve closed
11/28/2011	11:55:32 PM	PH3 valve closed
11/28/2011	11:55:32 PM	SiCl4 pre valve closed
11/28/2011	11:55:32 PM	SiCl4 post valve closed
11/28/2011	11:55:32 PM	Main Vac valve closed
11/28/2011	11:55:32 PM	Bypass valve closed
11/28/2011	11:55:32 PM	H2 valve opened
11/28/2011	11:55:32 PM	Bubbler valve opened
11/28/2011	11:55:32 PM	Helium MFC set to  0.000000
11/28/2011	11:55:32 PM	H2 MFC set to  500.000000
11/28/2011	11:55:32 PM	BCl3 MFC set to  0.000000
11/28/2011	11:55:32 PM	PHl3 MFC set to  0.000000
11/28/2011	11:55:32 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:55:32 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:55:32 PM	Tube furnace set to 0
11/28/2011	11:55:33 PM	Helium valve closed
11/28/2011	11:55:33 PM	BCl3 valve closed
11/28/2011	11:55:33 PM	PH3 valve closed
11/28/2011	11:55:33 PM	SiCl4 pre valve closed
11/28/2011	11:55:33 PM	SiCl4 post valve closed
11/28/2011	11:55:33 PM	Main Vac valve closed
11/28/2011	11:55:33 PM	Bypass valve closed
11/28/2011	11:55:33 PM	H2 valve opened
11/28/2011	11:55:33 PM	Bubbler valve opened
11/28/2011	11:55:33 PM	Helium MFC set to  0.000000
11/28/2011	11:55:33 PM	H2 MFC set to  500.000000
11/28/2011	11:55:33 PM	BCl3 MFC set to  0.000000
11/28/2011	11:55:33 PM	PHl3 MFC set to  0.000000
11/28/2011	11:55:33 PM	SiCl4 MFC set to  0.000000
11/28/2011	11:55:33 PM	Bypass solenoid MFC set to  0.000000
11/28/2011	11:55:33 PM	Tube furnace set to 1000
